Related Manuals for Oerlikon TURBOVAC SL 80
Summary of Contents for Oerlikon TURBOVAC SL 80
- Page 1 TURBOVAC SL 80 Wide-Range Turbomolecular Pump with Integrated or External Frequency Converter Incorporation Declaration & Operating Instructions 130000760_002_A1 Part Nos. 800002V3001 800002V3004...
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Page 2: Table Of Contents
Forevacuum connection Connect the cooling Connect purge gas or a venting valve Electrical connection 3.8.1 Connecting pump and frequency converter 3.8.2 Connecting the power supply 3.8.3 Mounting the frequency converter 3.8.4 Relay status 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum... - Page 3 Shutting down Venting Bakeout Removing the pump from the system Maintenance Cleaning Oerlikon Leybold Vacuum Service Troubleshooting Waste disposal EC Incorporation Declaration EC Declaration of Conformity Index Original installation and operating instructions. 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum...
- Page 4 Operating Instructions and follow the information so as to ensure optimum and safe working right from the start. The Oerlikon Leybold Vacuum TURBOVAC SL 80 has been designed for safe and efficient operation when used properly and in accordance with these Operating Instructions.
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Page 5: Important Safety Information
To avoid the destruction of the equipment and to prevent injuries of the operating staff the leading European manufacturers of vacuum pumps strictly recommend to follow the installation instructions as given in this manual. 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum... -
Page 6: Electrical Hazards
When applying external voltages above 42 V to the connection termi- nals, observe the applicable VDE safety regulations! Make the electrical connections only after pump and accessories (e.g. air cooler) have been installed mechanically. 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum... -
Page 7: Thermal Hazards
Contaminated parts can be detrimental to health and environment. Before beginning with any work, first find out whether any parts are contaminated. Adhere to the relevant regulations and take the neces- sary precautions when handling contaminated parts. 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum... -
Page 8: Danger Of Ignition
Contact Oerlikon Leybold Vacuum first before planning to operate the pump without air cooling. Also water cooled pumps need cooling air for the frequency converter. -
Page 9: Description
Fig. 1.1 Examples of SL 80 Description The TURBOVAC SL 80 is a wide range turbomolecular pump designed to evacuate vacuum chambers down to pressure levels in the high vacuum range. It is suitable for pumping air and clean gases. The TURBO.DRIVE 400 frequency converter and a forevacuum pump are required for its operation. -
Page 10: Design
———————————— PE = Polyethylene FPM = Fluororubber, resistant to temperatures up to 150°C (302 °F) 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum... -
Page 11: Technical Data
+ 15 - + 45 °C during operation storage – 15 - + 70°C Max. rel. air humidity approx. 95% (non-condensing) 1) More details in Applied technical standard IEC 721-3-3 3K3/ 3Z1/ 3B1/ 3C1/ 3S2/ 3M1 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum... - Page 12 Temp. of the cooling surface 5 - 55 °C For Part Nos. 800073V0004 /07 5 - 50 °C ≤ 20 W Power consumption Type of protection IP 20 Weight, approx. 0.5 kg 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum...
- Page 13 Gas connection G1/4-in. Recommended for this: Adapter with filter including O-ring and gasket 800110V0012 Dimensions 60 x 65 x 45 mm 61 x 65 x 45 mm 61 x 65 x 45 mm 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum...
- Page 14 63 ISO-K 63 CF 113,5 Purge gas connection Purge gas connection (pump with flange DN 63 ISO-K drawn) Ø d Fig. 1.3 Dimensional drawings for SL 80 pumps (combination examples); dimensions in mm 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum...
- Page 15 Description Ø d 40 KF 63 ISO-K 63 CF 113,5 Ø d Fig. 1.4 Dimensional drawings for SL 80 pumps (combination examples); dimensions in mm 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum...
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Page 16: Ordering Data
2 sealing rings approx. 10x4x1 4 screws M4x20, DIN 912 4 screws M4x30, DIN 912 (for mounting the frequency converter under the pump) Air cooler 800136V0001 (is powered by the pump) 4 screws M4x10, DIN 912 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum... - Page 17 200 12 732 200 12 733 10 m 200 12 734 20 m 200 12 735 Mains cable for power supply, 2 m long with EURO plug 800102V0001 with US plug 5-15P 800102V1001 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum...
- Page 18 Oerlikon Leybold Vacuum → Documentation → Download Software GSD file for Profibus DP Can be downloaded from www.oerlikon.com in the menu Oerlikon Leybold Vacuum → Documentation → Download Software 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum...
- Page 19 Gas side connection: G1/4-in. adapter with filter 800110V0012 800110V0012 Including O-ring and gasket Venting valve 24 V DC 800120V0011 Power failure venting valve 24 V DC 800120V0021 Spare filter E 200 18 517 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum...
- Page 20 Centering ring with O-ring for DN 16 KF Al/CR 183 26 Al/FPM 182 06 Clamping ring (Al) DN 16 KF 183 41 Clamping Collar DN 40 KF for Ultra Sealing Rings 882 78 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum...
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Page 21: Transport And Storing
Remove the equipment from the transportation box and keep the packaging. Make sure that the product has not been damaged during transportation. If Keep the packaging this unit is damaged contact your carrier and inform Oerlikon Leybold Vacuum if necessary. For storage of the product, use the packaging pro- vided. -
Page 22: Installation
Both pump and frequency converter are intended for being operated within closed rooms. The use of any accessories which have not been specified by Oerlikon Leybold Vacuum is only allowed after approval by Oerlikon Leybold Vacuum. 3.1.1 Non-conforming utilization... - Page 23 I Conversions, manipulations and maintenance work by personnel not authorised by Oerlikon Leybold Vacuum. WARNING Any non-conforming utilisation of pump, frequency converter and acces- sories can result in severe injury and cause damage to components. 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum...
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Page 24: Operating Environment
Please consult us. The frequency converter must not be operated in explosive gas atmo- spheres. —————————————— 1 mT (milliTesla) = 10 G (Gauß) 1 Gy (Gray) = 100 rad 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum... -
Page 25: Fitting Accessories
I As the purge gas and venting valve use either valves with a M8 screw-in thread or screw in the M8 – DN16KF adapter and connect the valve to it. See also Section 3.7. 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum... - Page 26 Installation Frequency converter 4 screws Sliding nuts Mounting panel 4 cylinder head screws with washers Water cooling Protection cap Fig. 3.1 Mounting water cooling and frequency converter underneath the pump 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum...
- Page 27 Air cooler 4 cylinder head screws with washers Stop plate (mounting aid) Air cooler socket Frequency converter Bracket Sliding nuts Protection cap Fig. 3.2 Mounting air cooling and frequency converter beside the pump 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum...
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Page 28: Attach The Pump To The Vacuum Chamber
4 boreholes in the pump’s bottom. Use exclusively flange connecting components and fittings which have been manufactured in accordance with DIN 28403, DIN 28404, ISO 1609 (KF- and ISO-K flange connections) or ISO 3669 (CF flange connections). 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum... - Page 29 If several turbomolecular pumps are installed to the vacuum chamber of the Vibration influence same system, there is the risk of interference (vibration interference between the pumps). If such a risk exists please contact Oerlikon Leybold Vacuum Application Support. The standard mounting arrangement for the pump is adequate to ensure Earthquake protection earthquake protection.
- Page 30 A standard clamping collar is not capable of exerting the necessary press-on force and should the rotor suddenly seize, the pump may twist. Mount the turbomolecular pump according to Fig. 3.5 and tighten the three bolts of the clamping collar step-by-step. 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum...
- Page 31 During operation the pump can get so hot that there is the risk of suffer- CAUTION ing burns (up to approximately 80 °C). Protect the hot parts against being touched. 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum...
- Page 32 M8x35 – ISO 4014 for alum. flanges M8x40 – ISO 4014 Pump housing with Bolt quality 8.8 or ISO-K flange stainless steel bolts A2(A4)-70 Fastening torque Fig. 3.6 Mounting the DN 63 ISO-K flange 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum...
- Page 33 M8x30 – DIN 835 L1 = 46 mm Pump housing with Bolt quality 8.8 or CF flange stainless steel bolts A2(A4)-70 Fastening torque Fig. 3.7 Mounting the DN 63 CF high vacuum flange 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum...
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Page 34: Forevacuum Connection
Ensure that the pump is sufficiently isolated against vibrations generated by the forevacuum pump. No forces from the piping system may be allowed to affect the turbomolecu- lar pump. Support the piping correspondingly or decouple through flexible joints. 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum... -
Page 35: Connect The Cooling
Nos. see Section 1.5. The pump must be operated with the air cooling unless you have an NOTICE agreement from Oerlikon Leybold Vacuum for different operation. Air cooling When installing air cooled pumps within a system ensure that sufficient quan- tities of fresh air are freely available. - Page 36 10,5 12,0 13,5 15,0 16,5 Forevacuum pressure in mbar VV-Druck in mbar Fig. 3.9 Cooling requirements of the SL 80 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum...
- Page 37 Example: °C Max. ambient temperature 25 °C Min. coolant inlet temperature 17 °C ⇒ Max. relative humidity Minimum coolant inlet temperature Fig. 3.11 Dewpoint diagram 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum...
- Page 38 When switching the cooling water supply on and off by means of an electric- ally actuated valve, connect the valve so that it will be switched on and off together with the pump. 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum...
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Page 39: Connect Purge Gas Or A Venting Valve
We recommend a purge gas flow of 0.4 mbar·l/s (24 sccm) with Nitrogen. The pressure in the pump must not exceed 1400 mbar (0.4 bar over- WARNING pressure). Observe Safety Informations 0.1.2 to 0.1.5. 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum... -
Page 40: Electrical Connection
(15 way Sub-D plug X3). Connect the Sub-D-plugs with the hexagon threaded bolts UNC 4/40x6 at the pump connector. Make sure that the frequency converter is adequately cooled; for this see Section 3.8.3 and also Fig. 3.18. 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum... - Page 41 Frequency converter TURBO.DRIVE 400 (Cooler optional) Mains Power supply DC cable, with shielding, max. 20 m 24 V DC cable, max. 5 m Fig. 3.15 Examples for connection 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum...
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Page 42: Connecting The Power Supply
Pin 3 The frequency converter is equipped with an internal 8 AT (slow blow) fuse. It can only be replaced by Oerlikon Leybold Vacuum staff. Connect the power supply to the mains. 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum... -
Page 43: Mounting The Frequency Converter
The frequency converter may be affixed with the aid of the enclosed M4 slid- ing nuts. The bottom side of the frequency converter must be cooled suffi- ciently. If the frequency converter is mounted without the optional heat sink ensure sufficient cooling by other means. 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum... - Page 44 No error, no warning flashes: Warning is present, pump can be operated possibly with some restrictions Fault is present, pump stopped or can not be operated Fig. 3.19 TURBO.DRIVE 400, front and rear side 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum...
- Page 45 Fig. 3.20 Pin assignment of the REMOTE (X1) connector 0 V = STOP 24 V 24 V = START TURBO.DRIVE 400 GA 06.215 EYBOLD AG 00.00.S.001 24 V 21.11.94 9er Buchsenbelegung WERK KÖLN Fa. ESCH TURBO.DRIVE 400 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum...
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Page 46: Relay Status
Error has just occurred Start passive active Error is present; pump is at standstill Start passive active flashes Error is present; pump is decelerating Start passive active flashes Error has just occurred 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum... -
Page 47: Operation
Operation Operation Media compatibility / purge gas The TURBOVAC SL 80 is suitable for pumping air and clean gases. If reactive gases in low concentrations must be pumped operate the pump with purge gas. We would be glad to consult with you as regards the media which can safely be handled with this unit. -
Page 48: Interfaces
Adjust second function: P29 Set motor current thresh.: P27 Lowering the normal operation Normal operating mode is attained Reduce frequency threshold threshold faster, processes can be started faster through P25 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum... -
Page 49: Rs 232 C Interface (Service X5)
Note: If on the controlling side an RS 232 interface in accordance with the PC standard with a 9-pin Sub-D male connector is present, then a straight through cable as shown in Fig. 4.2 may be used. Refer also to Operating Instructions GA 05.281 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum... -
Page 50: Rs 485 Interface
(yellow power LED off) and then on again so as to enable the new address setting. Bus addresses over 15 can only be set via Parameter 37. Refer also to Operating Instructions GA 05.281 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum... -
Page 51: Profibus Dp
Refer also to Operating Instructions GA 05.281 4.3.4 Ethernet/IP interface See additional Operating Instructions 17200908. The Operating Instruction will be delivered on a CD with Part No. 800073V0007 or can be downloaded from our website. 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum... -
Page 52: Parameter List
8 = No mains power failure or no generator operation (P303 Bit 4 =1 = generator operation) Field 1 specifies the function for the error relay: 0 = Energised when an error is present 1 = Deenergised when an error is present 2 = Fieldbus controlled 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum... - Page 53 Intermediate circuit 0,1 A Actual average intermediate circuit current current of the converter. Standby frequency 1200 Standby operation frequency setpoint Enable standby 0 = normal speed (P24); 1 = standby speed (P150) 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum...
- Page 54 Frequency at which the venting valve shall be switched off in the event of a mains power failure. Power failure venting can be enabled through P240. Generator operation 0 = inactive 1 = active 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum...
- Page 55 Serial number of the converter. converter [xxxxxxxxxxx] One ASCII char per index. (Index 0...10 usable) Act. Profibus addr. 65535 Active Profibus address Current error number 65535 Currently pending error. See Section 5 Troubleshooting. 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum...
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Page 56: Warning Codes For Parameter 227
P4 > Umax or P4 < DC power supply voltage Umin below 24V Mains voltage failure Fan voltage has failed 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum... -
Page 57: Switching On
Section 1.5 Accessories). I by a start command via the interface; see Section 4.3. I For the power supply units offered or recommended by Oerlikon Leybold Vacuum: If the contacts 7 and 8 at the REMOTE (X1) connector are closed the pump starts automatically when the DC voltage is switched on (provided parameter 12 is set to 0). -
Page 58: Shutting Down
I via contacts 7 and 8 of the socket REMOTE (X1), if parameter 12 = 0. I apply a stop command via the interface, if parameter 12 = 1 or 2. I for the power supply units offered or recommended by Oerlikon Leybold Vacuum switch off the DC voltage. -
Page 59: Venting
The slower the pump is vented, the longer the service life of the bearings will be. The pump must not be vented to pressures above atmospheric pressure. 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum... -
Page 60: Bakeout
– at a sorption trap, for example – ensure that the com- ponents attached direct are not heated to more than 100 °C (212 °F). The forevacuum pump must be in operation so as to eliminate the vapors liberated at the sorption trap. 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum... -
Page 61: Removing The Pump From The System
Pack the pump so that it cannot be damaged during shipping and storage. Pay particular attention to protection for the flanges and the electrical plug. Observe the instructions in Section 5.2 if you forward the pump to Oerlikon Leybold Vacuum. -
Page 62: Maintenance
We recommend an exchange of the rotor unit after 80,000 operating hours at the latest. Such maintenance work can only be done by the Oerlikon Leybold Vacuum Service. If required contact the Oerlikon Leybold Vacuum service center nea- rest to your location. You can find the address on our internet page www.oerlikon.com. -
Page 63: Oerlikon Leybold Vacuum Service
A copy of the form has been reproduced at the end of these Operating Form Instructions: “Declaration of Contamination for Compressors, Vacuum Pumps and Components”. Another suitable form is available from www.oerlikon.com → Oerlikon Leybold Vacuum → Documentation → Download Documents. Attach the form to the equipment or enclose it with the equipment. -
Page 64: Troubleshooting
I In case of error code 8 by switching the mains power off. The error codes can only be read if a serial interface is present. The following table has been provided as a guide when determining the causes of errors. 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum... - Page 65 Check connection between pump fied or no pump is rectly to frequency conver- and frequency converter connected Frequency converter soft- Contact Oerlikon Leybold Vacuum ware not current, Service Hardware defective Contact Oerlikon Leybold Vacuum Service 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum...
- Page 66 Contact Oerlikon Leybold nominal current Vacuum Service Faulty connector Motor temperature Motor temperature sen- Sensor defective, short Contact Oerlikon Leybold sensor error sor defective circuit or broken cable Vacuum Service Overspeed error 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum...
- Page 67 Running pump can not Pump has been started via the Disconnect the DC supply or connect serial be stopped via X1 serial interface, the interface con- interface and stop via bus trols the pump 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum...
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Page 68: Waste Disposal
Separate clean components according to their materials, and dispose of these accordingly. We offer this service. Further details are available on request. When sending us any equipment, observe the regulations given in Section “5.2 Oerlikon Leybold Vacuum service”. 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum... - Page 69 You can contact our technical documentation officer – Mr. Herbert Etges – best through the following e-mail address documentation.vacuum@oerlikon.com . Oerlikon Leybold Vacuum GmbH Bonner Straße 498 D-50968 Köln Tel.: +49-(0)221-347 1234 Fax: +49-(0)221-347 1245 documentation.vacuum@oerlikon.com 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum...
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Page 70: Ec Incorporation Declaration
130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum... -
Page 71: Ec Declaration Of Conformity
130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum... - Page 72 I / we hereby declare that the information supplied on this form is accurate and sufficient to judge any contamination level. Name of authorized person (block letters) : Date signature of authorized person firm stamp 17200001_002_A1 © Oerlikon Leybold Vacuum 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum...
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Page 73: Index
Radiation 23, 24, 60 Relay 12, 45, 46, 48, 52, 53 Generator 52, 54-56, 58, 66 Resonance damper 29, 40 Rotor 5, 7, 8, 10, 23, 28-31, 48, 52, 54, 57-60, 62, 65, 67 130000760_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum... - Page 74 Sales and Service Germany Europe Asia Oerlikon Spain P.R. China Japan Belgium Leybold Vacuum GmbH Oerlikon Oerlikon Oerlikon Oerlikon Bonner Strasse 498 Leybold Vacuum Spain, S.A. Leybold Vacuum (Tianjin) Leybold Vacuum Leybold Vacuum Nederland B.V. D-50968 Cologne C/ Huelva 7 International Trade Co.