Oerlikon TURBOVAC SL 80 Vacuum Pump Manuals

Manuals and User Guides for Oerlikon TURBOVAC SL 80 Vacuum Pump. We have 1 Oerlikon TURBOVAC SL 80 Vacuum Pump manual available for free PDF download: Operating Instructions Manual

Oerlikon TURBOVAC SL 80 Operating Instructions Manual

Oerlikon TURBOVAC SL 80 Operating Instructions Manual (74 pages)

Wide-Range Turbomolecular Pump with Integrated or External Frequency Converter

Brand: Oerlikon | Category: Water Pump | Size: 3 MB

Table of Contents

Table of Contents
2
Important Safety Information
5
Mechanical Hazards
5
Electrical Hazards
6
Thermal Hazards
7
Hazards Caused by Materials and Substances
7
Danger of Ignition
8
Dangers in Connection with Safety-Related Measures and Precautions
8
Risk of Damaging the Pump
8
1 Description

9
- Design
  10
- Standard Equipment
  10
- Technical Data
  11
- Ordering Data
  16
- Accessories
  16
2 Transport and Storing

21
3 Installation

22
- Conforming Utilization
  22
- Non-Conforming Utilization
  22
- Operating Environment
  24
- Fitting Accessories
  25
- Attach the Pump to the Vacuum Chamber
  28
- Forevacuum Connection
  34
- Connect the Cooling
  35
- Connect Purge Gas or a Venting Valve
  39
- Electrical Connection
  40
- Connecting Pump and Frequency Converter
  40
- Connecting the Power Supply
  42
- Mounting the Frequency Converter
  43
- Relay Status
  46
4 Operation

47
- Media Compatibility / Purge Gas
  47
- Start-Up
  47
- Interfaces
  48
- RS 232 C Interface (SERVICE X5)
  49
- RS 485 Interface
  50
- Profibus DP
  51
- Ethernet/Ip Interface
  51
- Parameter List
  52
- Warning Codes for Parameter 227
  56
- Switching on
  57
- Shutting down
  58
- Venting
  59
- Bakeout
  60
- Removing the Pump from the System
  61
5 Maintenance

62
- Cleaning
  62
- Oerlikon Leybold Vacuum Service
  63
6 Troubleshooting

64
7 Waste Disposal

68
- EC Incorporation Declaration
  70
- EC Declaration of Conformity
  71
- Index
  73

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