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TURBOVAC SL 80
Oerlikon TURBOVAC SL 80 Manuals
Manuals and User Guides for Oerlikon TURBOVAC SL 80. We have
1
Oerlikon TURBOVAC SL 80 manual available for free PDF download: Operating Instructions Manual
Oerlikon TURBOVAC SL 80 Operating Instructions Manual (74 pages)
Wide-Range Turbomolecular Pump with Integrated or External Frequency Converter
Brand:
Oerlikon
| Category:
Water Pump
| Size: 3.77 MB
Table of Contents
Table of Contents
2
Important Safety Information
5
Mechanical Hazards
5
Electrical Hazards
6
Thermal Hazards
7
Hazards Caused by Materials and Substances
7
Danger of Ignition
8
Dangers in Connection with Safety-Related Measures and Precautions
8
Risk of Damaging the Pump
8
1 Description
9
Design
10
Standard Equipment
10
Technical Data
11
Ordering Data
16
Accessories
16
2 Transport and Storing
21
3 Installation
22
Conforming Utilization
22
Non-Conforming Utilization
22
Operating Environment
24
Fitting Accessories
25
Attach the Pump to the Vacuum Chamber
28
Forevacuum Connection
34
Connect the Cooling
35
Connect Purge Gas or a Venting Valve
39
Electrical Connection
40
Connecting Pump and Frequency Converter
40
Connecting the Power Supply
42
Mounting the Frequency Converter
43
Relay Status
46
4 Operation
47
Media Compatibility / Purge Gas
47
Start-Up
47
Interfaces
48
RS 232 C Interface (SERVICE X5)
49
RS 485 Interface
50
Profibus DP
51
Ethernet/Ip Interface
51
Parameter List
52
Warning Codes for Parameter 227
56
Switching on
57
Shutting down
58
Venting
59
Bakeout
60
Removing the Pump from the System
61
5 Maintenance
62
Cleaning
62
Oerlikon Leybold Vacuum Service
63
6 Troubleshooting
64
7 Waste Disposal
68
EC Incorporation Declaration
70
EC Declaration of Conformity
71
Index
73
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