Table of Contents
Related Manuals for Oerlikon TURBOVAC series
Summary of Contents for Oerlikon TURBOVAC series
- Page 1 TURBOVAC Turbomolecular pumps with grease-lubricated bearings TURBOVAC 35 LS, 35 LS2 TURBOVAC 50 TURBOVAC 151, 151 C TURBOVAC 361, 361 C TURBOVAC 600 C TURBOVAC 1000 C and pumps modified by Oerlikon Leybold Vacuum Operating Instructions GA05118_1502...
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Page 2: Table Of Contents
Operation Media Compatibility / Purge Gases Start-up Bakeout Operation Switching Off Venting Maintenance Maintenance Intervals Oerlikon Leybold Vacuum Service Cleaning Removing the pump from the system Troubleshooting Waste Disposal EC Manufacturer’s Declaration GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum... -
Page 3: Important Safety Information
Indicates procedures that must be strictly observed to prevent damage to, or destruction of the product. The Oerlikon Leybold Vacuum TURBOVAC have been designed for safe and efficient operation when used properly and in accordance with these Operating Instructions. It is the responsibility of the user to carefully read and strictly observe all safety precautions described in this section and throughout the Operating Instructions. - Page 4 Contaminated parts can be detrimental to health and environment. Before beginning with any work , first find out whether any parts are contamina- ted. Adhere to the relevant regulations and take the necessary precauti- ons when handling contaminated parts. GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum...
- Page 5 The pump must only be opened by such persons who have been authori- sed by Oerlikon Oerlikon Leybold Vacuum Vacuum to do so. The rotor is precision balanced; any change whatsoever, such as loose- ning or bending any rotor component, will make re-balancing necessary.
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Page 6: Description
The electronic frequency converter and the connector cables required for operation are not included as standard equipment with the pump. —————————— PE = Polyethylene FPM = Fluoroelastomer, resistant to temperatures of up to 150°C (300 °F) GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum... -
Page 7: Technical Data
Max. power consumption / at ultimate pressure W 45 / 15 Max. ambient temperature at operation °C High-vacuum port Interstage vacuum port Forevacuum port Electrical connection TURBOVAC 35 LS and 35 LS2 GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum... - Page 8 Max. power consumption / at ultimate pressure W 45 / 15 Max. ambient temperature at operation °C Max. bakeout temperature at CF flange °C High-vacuum port Forevacuum port Electrical connection TURBOVAC 50 GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum...
- Page 9 Max. ambient temperature at operation °C Max. bakeout temperature at CF flange °C High-vacuum port Electrical connection Vent port Connection Purge gas for water port cooling Forevacuum port TURBOVAC 151 C; TURBOVAC 361 C similar GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum...
- Page 10 Max. bakeout temperature at CF flange °C 1) As of 1995 in some cases 16 mm KF 2) 11 mm with 40 mm type KF forevacuum port 10 mm with 63 mm type ISO-K forevacuum port GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum...
- Page 11 Description TURBOVAC 600 C TURBOVAC 1000 C A High-vacuum port B Forevacuum port C Vent port D Purge gas port E Connection for water cooling F Electrical connection Fig. 2 GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum...
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Page 12: Ordering Information
TURBOVAC 35 LS, 35 LS2, 50 854 08 1) With forevacuum flange DN 40 KF 2) With forevacuum flange DN 63 ISO-K 3) Venting flange, turned by 180° 4) Clean room packaging GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum... -
Page 13: Operating Environment And Cooling
< 10 mbar and ambient temperature < High-vacuum pressure > 10 mbar 45 °C Ambient temperature 45 - 55 °C °C °F mbar Torr 8·10 8·10 8·10 5·10 4·10 5·10 4·10 GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum... -
Page 14: Transport And Storing
PE bag which also contains a desic- TURBOVAC cant. The maximum effective life of the desiccant is one year. Do not open the packaging until immediately prior to installation. GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum... -
Page 15: Installation
Provide suitable shielding measures if these values are exceeded. The standard version is resistant to radiation at levels up to 10 ——————————————- 1 mT (milliTesla) = 10 G (Gauss) 1 Gy (Gray) = 100 rad GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum... -
Page 16: Connecting The Pump To The Vacuum Chamber
When installing CF flanges, use only the bolts specified (tightening torque is 15 Nm for DN 40 CF, 30 Nm for DN 63 CF and larger). You will find the order numbers for the (clamping) bolts in the Oerlikon Oerlikon Leybold Vacuum Catalog. - Page 17 TURBO- . If the 1000 C are flanged via a vibration damper secure it in TURBOVAC addition at the base flange. GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum...
- Page 18 Operate the pump only with this splinter guard in place as foreign objects passing through the intake port and into the pump can cause serious damage to the rotor. Damage caused by foreign objects in the rotor section is excluded from the guarantee. GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum...
- Page 19 The pump can become so hot during operation (> 70°C, 158 °F) as to represent a burn hazard. Shield the hot components against contact. The pump running noise is below 70 dB(A); no noise-insulating measures are required. GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum...
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Page 20: Forevacuum Connection
Make the electrical connection for the ventilation unit in such a way that it will be started and stopped together with the pump itself. Observe the information given in the operating instructions for the air ventilati- on unit (GA 05.199). GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum... - Page 21 Colorless, clear, free of oils and greases Sediments < 250 mg/l Particle size < 150 µm pH value 7 to 8.5 max. 20 ° German hardness scale Overall hardness (total alkaline earths) (= 3.57 mmol/l) GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum...
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Page 22: Connecting The Purge Gas And Airing Device
When pumping reactive media, connect a purge gas and airing valve. Please contact Oerlikon Leybold Vacuum for assistance in making the decisi- on as to which media can be pumped with or without purge gas. In processes which require purge gas the pump will have to be aired, when it is switched off, through the purge gas valve. -
Page 23: Connecting The Turbotronik
/04 /05 /06 /07) or the standard cables for the TURBOVAC 50. For the TUR- BOVAC 35 LS and 35 LS2 exclusively the modified frequency converter SO- NT 12 (Ref. No. 200 99 042) and the corresponding cable (Ref. No. 200 61 626) must be used. GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum... -
Page 24: Operation
In individual cases and after consultation also dry, filtered, oil-free air or filte- red ambient air may be used (filter mesh < 1µm). Filters Change the filters after some time, at least annually. GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum... -
Page 25: Start-Up
Then switch on the cooling and the (at the TURBOVAC TURBOTRONIK Kindly refer to the operating instructions for details. TURBOTRONIK Avoid impact and vibration while the pump is running. Vibrations GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum... -
Page 26: Bakeout
If the pump previously handled corrosive gases, it will be necessary to purge the pump with dry nitrogen for one hour prior to shut-down. When the system is not in operation, ensure that neither ambient air nor cleaning agents can enter the TURBOVAC GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum... -
Page 27: Venting
When venting the pump through its foreline connection, neither oil nor par- Foreline connection ticles may be entrained in the gas flow from the forevacuum side into the pump. GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum... - Page 28 The slower the pump is vented, the longer the service life of the bearings will be. The pump must not be vented to pressures above atmospheric pressure. GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum...
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Page 29: Maintenance
Moreover we recommend to have the rotor assy. exchanged , depending on the thermal stress on the rotor, after 45,000 to 100,000 operating hours. This can only be done by Oerlikon Leybold Vacuum Service. For this ask for a quotation. -
Page 30: Cleaning
The pump will have to be disassembled if there is more extensive contamina- tion. The Oerlikon Leybold Vacuum Customer Service Department will have to be consulted here in all cases. -
Page 31: Troubleshooting
Protect in particular the flan- ges, the coolant connection nipples and the cable grommets. If you return a pump to Oerlikon Leybold Vacuum, be absolutely sure to observe the instructions given in Section 5.2. - Page 32 Install a roughing line or pre-pump for a shorter period streams back during forepump operation. of time or install a sorption trap. Sorption trap is saturated. Regenerate or replace the sorption trap. GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum...
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Page 33: Waste Disposal
Separate clean components according to their materials, and dispose of these accordingly. We offer this service. Further details are available on request. When sending us any equipment, observe the regulations given in Section “5.2 Oerlikon Leybold Vacuum service”. GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum... -
Page 34: Ec Manufacturer's Declaration
Appendix IIb to the 98/37/EG Machinery Guidelines We - Oerlikon Leybold Vacuum GmbH - herewith declare that operation of the incomplete machine defined below, is not permissible until it has been determined that the machine into which this incomplete machine is to be installed, meets the regulations of the EC Directive on Machinery. - Page 35 I / we hereby declare that the information supplied on this form is accurate and sufficient to judge any contamination level. Name of authorised person (block letters): ____________________________ Date _____________ Signatur of authorised person ___________________________ firm stamp 17200001_002_00 © Oerlikon Leybold Vacuum GA05118_1502 - 12/2006 - © Oerlikon Leybold Vacuum...
- Page 36 Sales and Service Germany Europe Asia P.R. China Japan Oerlikon Netherlands Belgium Leybold Vacuum GmbH Oerlikon Oerlikon Oerlikon Oerlikon Bonner Strasse 498 Leybold Vacuum (Tianjin) Leybold Vacuum Leybold Vacuum Nederland B.V. Leybold Vacuum Nederland B.V. D-50968 Cologne International Trade Co., Ltd.