Oerlikon DRYVAC Series Operating Instructions Manual

Oerlikon DRYVAC Series Operating Instructions Manual

Dry compressing vacuum pumps
Table of Contents

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DRYVAC
DV 450, DV 650, DV 1200
Dry Compressing Vacuum Pumps
Operating Instructions 300314330_002_A7
Part Numbers
112045V15 /19 /20 /29 /30
112065V05 /15 /19 /20 /25 /30 /35 /36
112120V17

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Summary of Contents for Oerlikon DRYVAC Series

  • Page 1 DRYVAC DV 450, DV 650, DV 1200 Dry Compressing Vacuum Pumps Operating Instructions 300314330_002_A7 Part Numbers 112045V15 /19 /20 /29 /30 112065V05 /15 /19 /20 /25 /30 /35 /36 112120V17...
  • Page 2: Table Of Contents

    Electrical Connection DRYVAC DV 450/650 and 450/650-r 3.6.2 Electrical Connection DRYVAC DV 450/650 3.6.3 Electrical Connection DRYVAC DV 450/650-r 3.6.4 Electrical Connection DRYVAC DV 1200 Leak Search after Installation Mounting Accessories 3.8.1 Roots Pump Adapter 3.8.2 Non-return Valve 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 3 Replacing the Filter Cartridge in the Purge Gas Pressure Reducer 80 Troubleshooting Pump Malfunctions Fault and Alarms Displayed at the Frequency Converter Wearing Parts Waste Disposal EC Declaration of Conformity Certificates Original installation and operating instructions. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 4 Operating Instructions and follow the information so as to ensure optimum and safe working right from the start. The Oerlikon Leybold Vacuum DRYVAC has been designed for safe and effi- cient operation when used properly and in accordance with these Operating Instructions.
  • Page 5: Important Safety Information

    Connect and disconnect the mains plug only in deenergized condition Hot Surface Do not touch. Allow this area to cool before servicing Burn hazard Hot Surface inside. Do not touch, wear protective equipment. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 6 Connect the pump so that it not will restart automatically after a mains power failure, once the power returns. Overhead load Transport the pump only at the four crane eyes or secured with a forklift. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 7: Mechanical Hazards

    The lifting eye of the screw pump must never be used to lift any pump combinations (Roots pump + backing pump). 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 8 Before doing installation work on the pump system make sure that no vacuum is present in the pump and that all media connections have been depressurised. Before disassembling any cooling water lines, leave the pump to cool down, shut off the feed line. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 9: Electrical Hazards

    Provide strain relief for the connecting lines so that the plugs and the line connectors are not subjected to excessively high mechanical stresses. Lay electric feed lines so that there is no risk of tripping over these. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 10: Thermal Hazards

    The high pressure thus produced may cause damage to the cooling water channels and seals. Moreover, hot water or steam may escape. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 11: Hazards Caused By Materials And Substances

    Firmly seal off the pump. When shipping the decontaminated pump for servicing please also indicate the type of hazard. For this see Section 5.1 Service at Oerlikon Leybold Vacuum. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 12 Safety Information Oerlikon Leybold Vacuum is not in a position to perform servicing (repairs) and waste disposal of radioactively contaminated pumps. Both needs to be ensured from the side of the user. When disposing of the pump, used lubricants and used oil filters observe the applicable environment regulations.
  • Page 13: Ignition Risk

    Take note of the warning information on the casing surface. If this warning information was removed, covered or obstructed, then pro- vide corresponding additional warning information. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 14: Danger Of Pump Damage

    In the case of wet processes we recommend the installation of liquid separators, upstream and downstream of the pump so as to avoid the influx of liquid into the pump. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 15 Maximum cooling water pressure: 7 bar. When exceeded, there is the risk of leaks. Pressures given in bar or mbar are absolute values. If exceptionally a gauge pressure is meant, a “g” is added (bar(g)). 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 16: Description

    (-r models). All DRYVAC pumps have been prepared for direct fitting of a RUVAC Roots pump. The pumps are water cooled. They are lubricated either with synthetic oil or PFPE. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 17 Inlet Pump stages: 2 screw pumps, pumping parallel Purge gas pressure setting and condensate vessel Cooling water pressure relief valve Purge gas module Exhaust Fig. 1.2 DRYVAC DV 1200 without side covers 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 18 LVO 410 with relay option board DV 1200 112120V17 on board (2x) double 24 V valve installed Housing, castors LVO 210 with Profibus adjustable feet LVO 210: synthetic oil, LVO 410: PFPE 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 19 Description DRYVAC DV 450 DRYVAC DV 450 Torr 0,001 0,01 Saugvermögen Pumping speed Leistungsaufnahme Power consumption 0,001 0,01 1000 mbar Einlassdruck Inlet pressure Fig. 1.3 Pumping speed curve 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 20 Einlassdruck Inlet pressure DRYVAC DV 650 C DRYVAC DV 650 C Torr 0,001 0,01 Saugvermögen Pumping speed Power consumption Leistungsaufnahme 0,001 0,01 1000 mbar Inlet pressure Einlassdruck Fig. 1.4 Pumping speed curves 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 21: Supplied Equipment

    ■ Intake screen with O-ring ■ 3x plugs for purge gas valve (only with installed purge gas module) ■ plug for purge gas pressure switch (only with installed purge gas module) ■ 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 22 Purge gas or gas ballast valves and cooling water unit are not shown. Fig. 1.6 Dimensional drawing, dimensions in mm For CAD installation drawings in the STEP format, please contact Oerlikon Leybold Vacuum. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 23 Description 1213 DRYVAC DV 650-r with cooling water unit (option) and with purge gas und gas ballast module Fig. 1.7 Dimensional drawing, dimensions in mm 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 24 Description 1339 DRYVAC DV 1200 Castors Adjustment range for the feet Fig. 1.8 Dimensional drawing, dimensions in mm 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 25: Technical Data

    460 V this duration may be shorter. 2) Mains power grids: TN Systems, TT systems (earthing at the star point); for other types of mains power grid please consult us. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 26 ± 5 % Permissible supply pressure “Purge gas“ 4.0 to 10.0 bar(g)** ± 5 % Purge gas flow shaft seal / rotor 22 to 107 slm see Section 3.5 ± 10 % 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 27 1 hour can cause damage to the pump due to a lack of lubrication. **bar(g): bar (gauge) is the overpressure, i.e. atmospheric pressure = 0 bar(g) Inlet pressure (mbar) Fig. 1.9 Permissible gas inlet temperature as function of the inlet pressure 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 28: Ordering Information

    155213V Relay option board 112 005A01 Ethernet card 112 005A02 Profibus card 155212V Harting plug for DV 1200 112005A20 GSD file and manual for the Profibus interface see Oerlikon Leybold Vacuum homepage 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 29: Transport And Storage

    The pump must only be transported using a fork lifter or a crane. At the installation site, use all four adjustable feet for aligning thereby securing the unit from rolling away and thus taking away the load from the castors. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 30 In case a DC power source is not available, the DC bus of a second inverter connected to a variable AC power supply could be used to supply the variable DC voltage. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 31 Transport and Storage Resistor 10 ohm Inverter Voltage : 360V (for 200V class) 720V (for 400V class) Time 3 min. or more 40 min. or more Abb. 2.2 Capacitor forming 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 32: Installation

    Check whether there is any desiccant present in the intake area. If required remove it. Fitting accessories When planning to fit the accessory parts Roots pump adapter or non-return valve, please note the information given in Section 3.8 first. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 33: Conforming Use

    The DRYVAC is a dry compressing vacuum pump for use in the process and solar industry. Accessories which have not been specified by Oerlikon Leybold Vacuum may only be used after approval by Oerlikon Leybold Vacuum. See Section 4.1 on media compatibility.
  • Page 34 Conversions, manipulations and maintenance work by persons not autho- ■ rised by Oerlikon Leybold Vacuum. The non-conforming use of pump and accessories may result in severe WARNING injury or damage to the components. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 35: Connecting The Intake And Exhaust Lines

    The intake lines must be clean. Ensure that no items like welding beads, bolts, nuts, washers, pieces of NOTICE wire, for example, enter into the inlet. Observe Safety Information 0.8.3. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 36: Exhaust Lines

    The exhaust line should have the same or larger diameter than the exhaust flange and 2.0 mm min. thickness. The exhaust line must be able to withstand 1.3 bar and 150 °C. Observe Safety Information 0.1.6 to 0.1.8.. WARNING 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 37: Connecting Cooling Water

    Ensure an adequate cooling water flow in accordance with the technical data. With the pump warm from operation do not suddenly supply very cold NOTICE cooling water; there is the risk of a crash due to shock cooling. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 38 (with nitrogen, for example). Block or label the area of the cooling water and exhaust lines to prevent trip- ping. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 39 Pressure relief valve 8 bar(g) DRYVAC with cooling water unit Cooling water connectors Cooling water IN DRYVAC without cooling water unit (e.g. Part No. 112065V10) Cooling water OUT Fig. 3.4 Cooling water connection 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 40: Water Quality

    If there is the danger of frost, you may use a water glycol mixture of up to 30 %. When using DS water/deionised water (softened or fully desalinated water) check whether cooling system, water and materials used are suitable. For this please con- sult us. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 41: Connecting Purge Gas (Optional)

    The manifold block with valves, gauge and condensate separator is identical for the versions. Connect nitrogen or air as purge gas. If in doubt, please contact Oerlikon Leybold Vacuum. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 42 The pressure reducer is set to 3.5 bar at nominal flow (valves open) on deliv- ery. This is also the maximum pressure which can be set up. The inlet purge therefore amounts to at least 80 SLM per individual pump. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 43: Gas Ballast Valve

    Electropneumatically operated. Here the gas (compressed air or nitrogen) ■ from the valve block is used to actuate the electropneumatic gas ballast valve. The valve needs a pressure of 3.0 bar. The actual ballast gas will generally be ambient air. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 44 SRV Safety relief valve 8 bar(g) 2) Opening of these valves will impair the ultimate pressure; see Technical Data. Check valve Fig. 3.8 Purge gas and switches schematic 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 45: Electrical Connection

    Fig. 3.13. When using more than one frequency converter, do not loop the ground ■ wire. For compliance with IEC 61010-1 it is mandatory to connect the additional ■ protective earth conductor. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 46: Electrical Connection Dryvac Dv 450/650 And 450/650-R

    DC power supply input For connecting a DC power supply. Ground Terminal For 200 V class: Ground with 100 Ω or less For 400 V class: Ground with 10 Ω or less (2 terminals) 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 47 Fig. 3.9 Main and control circuit wiring DRYVAC DV 450/650 (-r) < 1 > Connected using sequence input signal (S1 to S6) from NPN transistor. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum Default: sink mode (0V com). < 2 > Use only the +24V internal power supply in sinking mode.
  • Page 48 Exhaust pressure switch* Temperature limiter* Fault reset* Digital Input* Baseblock DIP switch S3 SOURCE Switch to source (Control via external source) + 24 VDC Fig. 3.11 Option: Wiring with external power supply 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 49: Electrical Connection Dryvac Dv 450/650

    PE terminals with a PE cable. Do not interrupt this cable. Connect the mains cable as shown in Fig. 3.12. Use the M32 cable fitting for that purpose. The terminals are designed for 10 mm max. cable diameter. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 50 The exhaust pressure switch (setpoint 1.25 bar = 0.25 bar(g)) is connected to S2 and SC. The pump’s temperature sensor is connected to T1 and TC. The temperature limiter is connected to S3 and SC. Remount the cover on the frequency converter. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 51: Electrical Connection Dryvac Dv 450/650-R

    Bridge SC and S6 to enable the frequency converter drive. Bridge SC and S1 to start the DRYVAC. The run-up time to nominal speed (120 Hz) amounts to 200 seconds. Open SC and S1 to stop the DRYVAC. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 52 Connect the pump’s temperature sensor (Pt 1000) to T1 and TC. The pump connection terminals are in the motor terminal box. 30 m connection cable is delivered for the Pt 1000. Connect the temperature limiter in the motor terminal box to S3 and SC. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 53 Temperatur- Temperature begrenzer limiter U1 V1 W1 Motor- Motor terminal klemmenkasten Klemmleiste Leistungskreis Main circuit terminal block Fig. 3.16 Main and control circuit wiring for the DRYVAC DV 450/650-r 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 54: Electrical Connection Dryvac Dv 1200

    Nur zur Information FOR INFORMATION ONLY Copper strap, for example Ground bolt Washer Lock washer Nut M 6 Fig. 3.18 Establishing the potential equalisation at the pump casing Nur zur Information FOR INFORMATION ONLY 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 55 For this reason the DRYVAC DV 1200 must be connect- ed so that it is completely shut down when one of the screw pumps fails. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 56: Leak Search After Installation

    Fig. 3.20 Profibus connection Leak Search after Installation Observe Safety Information 0.4. DANGER On delivery, the pump is leak tight to 10 mbar·l/s (integral, leak-checked). Leak-check all relevant connections after having installed the pump. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 57: Mounting Accessories

    Exception: The WH 2500 can be lifted at its 4 eye-bolts together with the DRYVAC if no other accessories are fitted. Fig. 3.22 Non-return valve 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 58: Non-Return Valve

    25 +/- 2.5 Nm. Operation Proper operation of the non-return valve is only ensured in connection with clean processes. Operation of the valve needs to be checked regularly depending on the type of application. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 59: Operation

    The manual information is valid except from the following: GSD file The GSD file and the manual can be downloaded from www.oerlikon.com in the menu Oerlikon Leybold Vacuum → Documentation → Download Software. The GSD file for the versions in this manual is different from the GSD file for the DRYVAC-i versions.
  • Page 60 * 4. All node addresses must be unique. Node addresses 0, 1, and 2 are typically reserved for control, maintenance, and diagnostic equipment. The ERR light will illuminate when 0 or greater than 125 is entered. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 61 * 5. The unit is 0.01 A for drives set up to 11 kW in Heavy Duty or Normal Duty and 0.1 A for drives set up for 15 kW and above. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 62 Byte 1 2, 3 Reserved Byte 1 Normal operation (frequency setpoint reached) Byte 1 Drive ready (ready to start, no fault) Byte 1 Alarm Byte 1 Fault Byte 0 8 to F Reserved 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 63 20/21 the status data. By activating, respectively deacti- vating the seventh bit in the last byte of the control data, the temperature value in the status data is updated. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 64 1 Normal operation, 0 Reserved, 0 Reserved, 0 Pump at a standstill, 1 Pump is running. MEMOBUS/Modbus Message Area MEMOBUS/Modbus Message Area is not active. Handshaking Register Handshaking Register is not active. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 65: Start-Up

    Please also note the recommendations relating to running up of the pumps provided at the beginning of Section 4.2. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 66: Led Operator And Keys

    FOUT LED Light Off: Anything else then the output frequency is displayed on the data screen * The pump is not intended for LOCAL mode. Default is REMOTE Fig. 4.2 Keys and functions 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 67: Frequency Converter Outputs

    Multifunction opto-coupler during Error (general message) 48 V DC max. 50 mA max. AM-AC Analog output Analog monitor output 0 to +10 V DC (2 mA) 10 V when the pump is running 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 68 1: During alarm detection 1: During speed agree 1: Drive ready 1: During fault detection 1: Drive ready 1: During alarm detection 1: During alarm detection 1: During fault detection 1: During fault detection 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 69: Relay Option Board

    K3 Output, Normally Open (NO) contact K3 Output, Normally Closed (NC) contact K3 Output, Common K1 control signal K2 control signal K3 control signal Common for K1,K2 and K3 Fig. 4.3 Relay option board: Connections 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 70: Option: Changing The Speed Of The Pump

    Hz, allowed input range 0 Hz to 120 Hz). Closing of the switch between the digital input S5 and SC will enable the second frequency. The input signal at S5 can be controlled through a timer relay or through the PLC. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 71: Warning And Shut-Off Thresholds

    — 75 °C frequency converter Motor side (temperature limiter) Temperature pump 50 °C 60 °C frequency converter 100 FT Gear side (Pt 1000) Frequency converter 105 °C 110 °C frequency converter temperature 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 72: Gas Ballast Operation

    Type of gas and purge gas quantity must be selected so that even under CAUTION the most unfavourable circumstances no explosive mixture can occur within the gas chamber during decompression process. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 73: Shut-Off And Venting

    Disconnect the pump inlet and fit a metal ISO / NW blanking plate. ■ Disconnect the purge gas supply and seal. ■ The pump can now be removed to a workshop for decontamination and ■ repair. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 74: Removing From Service

    Unscrew the drain plug. Tools and bucket must be clean so as not to further contaminate the lubricant. Screw the drain plug with the sealing ring back in, wipe off any dripped oil from the casing. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 75: Maintenance

    A copy of the form has been reproduced at the end of these Operating Form Instructions: “Declaration of Contamination for Compressors, Vacuum Pumps and Components”. Another suitable form is available from www.oerlikon.com  Oerlikon Leybold Vacuum  Documentation  Download Documents. Attach the form to each pump.
  • Page 76: Exchanging The Lubricant

    Clean the oil-fill port and reinstall the plug using a gasket which is in perfect condition. Wipe off any oil residues from the casing. Manually tighten the oil-fill plugs (tightening torque of approximately 10 -15 Nm). 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 77 Oil level with the pump standstill Oil level glass Oil drain plug Purge gas or gas ballast valves and cooling water Oil drain plug unit are not shown. Oil level glass Fig. 5.1 Oil change 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 78: Cleaning The Filter Insert In The Cooling Water Pressure Reducer

    Clean the filter insert with plain cold water. Screw the cartridge back in, tightening torque 20 Nm. Open the water supply and discharge again, check leak tightness and pres- sure setting. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 79: Option: Setting Up The Cooling Water Pressure Reducer

    For pressure relief, open and close the cooling water drain. Turn the adjustment knob in the clockwise direction until the desired admis- sion pressure is attained at the pump. Finally screw the interlock tight again. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 80: Checking And Cleaning The Gas Ballast Filter

    For replacing, unscrew the metal protection basket with cup from the pres- sure reducer. Unscrew the mounting component and detach the used filter cartridge. Fit the parts using a new filter cartridge again. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 81: Troubleshooting

    Bearing damage. Repair pump. loud. Thick particle deposits. Clean pump, respectively perform maintenance. Defective silencer. Repair silencer. High gas throughput with the discharge line open, Install discharge line or silencer. without silencer. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 82 Motor stator defective. OLV Service. Motor rotor defective. OLV Service. Vacuum pump system has a gas leak. Detect leak and seal it. Impeller play is too great. OLV Service. Bearing defective. OLV Service. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 83: Fault And Alarms Displayed At The Frequency Converter

    To remove an alarm or reset a fault, trace the cause, remove it and reset the frequency converter by pushing the Reset key on the operator or cycling the power supply. This lists up the most important alarms and faults only. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 84 50% of the frequency converters rated short circuits or broken insulation. Replace any output current. broken parts. Cable or motor insulation is broken. Reduce the carrier frequency. Excessive stray capacitance at frequen- cy converter output. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 85 The load is too heavy. Check the load. Overload Too much torque at low speed. The overload capability is reduced at low speeds. Reduce the load or increase the fre- quency converter size. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 86 DC Charge The charge circuit for the DC bus is Cycle power to the frequency converter. Circuit Fault broken. Check if the fault reoccurs. Replace the frequency converter if the fault reoccurs. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 87 Drive was running at or above the Final Current Limit for the time P5-04 – P5-03 L_SPd Low Speed The output frequency is below the fre- Detected quency set in P3-01 for the time set in P3-02. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 88 This ensures that only the faults “Pt 1000 open” and “Pt 1000 fault” can be seen or traced. As soon “Wait” is occurring the fre- quency converter stops with RUN to coast. 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 89 ((H1-02 < 20h) OR (H1-02 > 2Fh)) AND (P1-05 NOT 0) Occurs if MFDI setting in H1-03 is not an external fault setting and P1-06 is unequal to 0. ((H1-03 < 20h) OR (H1-03 > 2Fh)) AND (P1-06 NOT 0) 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 90: Wearing Parts

    Waste oil from vacuum pumps must not be mixed with other substances or materials. Waste oil from vacuum pumps (Oerlikon Leybold Vacuum oils which are based on mineral oils) which are subject to normal wear and which are con- taminated due to the influence of oxygen in the air, high temperatures or mechanical wear must be disposed of through the locally available waste oil disposal system.
  • Page 91: Ec Declaration Of Conformity

    EC Declaration of Conformity 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 92: Certificates

    Amendment 1, or a later version of the same standard incorporating the same level of testing requirements. RoHS compliance This product complies with the European Community Regulation 2002/95 (RoHS Restriction of Hazardous Substances). 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 93 300314330_002_A7 - 06/2013 - © Oerlikon Leybold Vacuum...
  • Page 94 Oerlikon Leybold Vacuum America Oerlikon Leybold Vacuum France S.A.S. Japan Co., Ltd. Valence Factory Tsukuba Technical Service Center Oerlikon Leybold Vacuum GmbH 640, Rue A. Bergès 1959, Kamiyokoba Bonner Strasse 498 B.P. 107 Tsukuba, Ibaraki D-50968 Cologne Oerlikon Leybold Vacuum F-26501 Bourg-lès-Valence Cedex...

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