BIRD THRULINE 4027F series Instruction Book
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BIRD THRULINE 4027F series Instruction Book

Rf power meter; directional rf power sensors
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THRULINE
®
THRULINE
4020 SERIES, 4027A SERIES,
4027F SERIES, AND 4028 SERIES
INSTRUCTION BOOK
®
RF POWER METER MODEL 4421
AND
DIRECTIONAL RF POWER SENSORS
Bird® Electronic Corporation
30303 Aurora Road
Cleveland (Solon), Ohio 44139
Sales & Technical Support:
Sales email:
Technical Support email:
440-248-1200
866-695-4569 toll free
sales@bird-technologies.com
atechapp@bird-technologies.com
©Copyright 2005 by Bird Electronic Corporation
Instruction Book Part Number 920-4421 Rev Q
®
Thruline
of Bird Electronic Corporation
is a Registered Trademark

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  • Page 1 Cleveland (Solon), Ohio 44139 Sales & Technical Support: 440-248-1200 866-695-4569 toll free Sales email: sales@bird-technologies.com Technical Support email: atechapp@bird-technologies.com ©Copyright 2005 by Bird Electronic Corporation Instruction Book Part Number 920-4421 Rev Q ® Thruline is a Registered Trademark of Bird Electronic Corporation...
  • Page 2 This page intentionally left blank...
  • Page 3 Safety Precautions Th e followin g a r e gen er a l sa fet y pr eca u t ion s t h a t a r e n ot n ecessa r ily r ela t ed t o a n y specific pa r t or pr ocedu r e a n d do n ot n ecessa r ily a ppea r elsewh er e in t h is pu blica t ion .
  • Page 4 Bird 4421 RF Power Meter Safety Symbols WARNING Wa r n in g n ot es ca ll a t t en t ion t o a pr ocedu r e wh ich , if n ot cor r ect ly per for m ed, cou ld r esu lt in per son a l in ju r y.
  • Page 5 WARNING To avoid personal injury, disconnect the power cord from the ac line before performing any maintenance, including fuse replacement or changing the line voltage setting. CAUTION During remote operation, periodically monitor the bus service request line. Failure to detect a service request could result in equipment damage.
  • Page 6 Bird 4421 RF Power Meter CAUTION Du e t o t h e com plexit y of t h e Bir d P ower Sen sor , field r epa ir s beyon d gen er a l m a in t en a n ce sh ou ld n ot be a t t em pt ed.
  • Page 7 BENUTZUNG WIRD DAS GE RÄT AUF ANDE RE WE ISE VE RWE NDE T ALS VOM H E RSTE LLE R BE SCH RIE BE N, KANN DIE GE RÄTE SICH E RH E IT BE E INTRÄCH TIGT WE RDE N. UTILISATION TOUTE UTILISATION DE CE T E XP LICITE ME NT P RÉ...
  • Page 8 Bird 4421 RF Power Meter UNITS ARE EQUIPPED WITH RECHAREABLE BATTERIES. THESE ARE TO BE REPLACED BY AUTHORIZED SERVICE P E RSONNE L ONLY!!! LAS UNIDADE S VIE NE N E QUIP ADAS CON BATE RIAS RE CARGABLE S. ¡¡¡Y SOLAME NTE E L P E RSONAL DE SE RVICIO AUTORIZADO P UE DE RE E MP LAZARLAS!!! GE RÄTE SIND MIT WIE DE R AUF LADBARE N BATTE RIE N...
  • Page 9 About This Manual Th is m a n u a l cover s t h e Bir d 4421 RF P ower Met er a n d t h e sen sor s it wor ks wit h . Specific m odels in clu de: Power Meter 4421 4020 Series...
  • Page 10 Bird 4421 RF Power Meter Changes To This Manual We h a ve m a de ever y effor t t o en su r e t h is m a n u a l is a ccu r a t e. If you sh ou ld discover a n y er r or s, or if you h a ve su ggest ion s for im pr ovin g t h is m a n u a l, plea se sen d you r com m en t s t o ou r fa ct or y.

  • Page 11: Table Of Contents

    Table of Contents In t r odu ct ion ............1 P ower Met er .
  • Page 12 Device Depen den t Com m a n ds ..........34 Ma in t en a n ce .

  • Page 13: Introduction

    Introduction Power Meter The Bird 4421 RF Power Meter is one component of a complete RF power mea- surement system. An RF power sensor such as a Bird 4021 is also required. The system can be controlled with the front panel buttons, or remotely through an RS-232 connection or a GPIB-488 connection.

  • Page 14: Power Sensors

    CAUTION reduce the maximum power rating of the unit. 4020 Series Bird 4020 Series Power Sensors are designed for lab or field use and are accu- r a t e t o wit h in ±3%(1 ) of reading.

  • Page 15: 4027A Series

    Introduction 4027A Series Bird 4027A Series Power Sensors are designed for use in semiconductor pro- cessing and calibration applications. Stringent calibration provides long-term unit-to-unit repeatability, allowing consistent amounts of RF energy to be applied to the etch process over many etch cycles. 4027A Sensors are accurate t o ±1%(1 ) at specified calibration frequencies and power levels.
  • Page 16 Bird 4421 RF Power Meter Figure 4 Power Sensor Outline Drawing 4028C Series only...

  • Page 17: Frequency And Power Ranges

    Introduction Frequency and Power Ranges 4020 Series Model Frequency Range RF Power Range 4027A Series 4027F Series...

  • Page 18: 4028 Series

    Bird 4421 RF Power Meter 4028 Series...

  • Page 19: Installation

    CAUTION The Bird 4421 must be powered off when connecting or disconnecting the power sensor from the power meter. 1. Tu r n OF F t h e ON/OF F r ocker panel.

  • Page 20: Panel Mounting The 4421 Power Meter

    Bird 4421 RF Power Meter Panel Mounting the 4421 Power Meter You can install the 4421 Power Meter in an equipment rack if you have the optional panel mount kit (refer to Optional Accessories, page 1). The panel mount kit includes complete installation instruction s. F igu r e 5 sh ows t h e overall dimensions and mounting points for a 4421 Power Meter installed in a panel mount kit.

  • Page 21: Handle Operation

    Handle Operation The handle on the Bird 4421 can be set to four different positions (see F igu r e 6). To a dju st t h e h a n dle, pr ess the center buttons on both sides.
  • Page 22 Bird 4421 RF Power Meter...

  • Page 23: Operating Instructions

    Chapter 3 Operating Instructions This chapter describes operator controls and indicators on the Bird 4421 RF Power Meter. For remote operation using a GPIB or RS-232 controller, refer to t h e in st r u ct ion s in Ch a pt er 4 or Ch a pt er 5 r espect ively.

  • Page 24: Error Codes

    Bird 4421 RF Power Meter Error Codes The Bird 4421 displays error codes when the RF power is either below the selected range (underrange) or above the selected range (over r a n ge). F igu r e 8 displays the error codes and Figur e 9 list s t h e fu n ct ion lim it s.

  • Page 25: Ieee-488 Gpib Interface

    IEEE-488 GPIB Interface This chapter discusses setup of the IEEE-488 interface feature and describes the IEEE commands that apply to the Bird 4421. Operators should under- stand IEEE standard 488-1978 and have basic computer programming skills before attempting to write any programs.

  • Page 26: Interface Capabilities

    Indicators splay shows indicators describing the status of the Bird 4421 when used with the IEEE interface. These are: REMOTE: When REMOTE is displayed, the power meter is being controlled through the interface. Measurements, units of measure, and certain other parameters may be changed from a remote location.

  • Page 27: Setup

    Talker-Only Mode The Bird 4421 can be set up for manual operation while automatically sending data to an output device (Talker-Only Mode). To do so, turn DIP switch 1 OFF and cycle the power.

  • Page 28: General Bus Commands

    Bird 4421 RF Power Meter If an invalid command is sent to the unit, an error condition is placed in the serial poll byte and the offending command is not executed. A group of device-dependent commands can be sent as a single string as long...
  • Page 29 IEEE-488 GPIB Interface Remote ENable (REN) Function Enables remote operation. Remarks The unit must be addressed to listen after setting REN true. The REMOTE indicator turns on when this command is received. Go To Local (GTL) Function Returns device to local operation. Remarks Issuing a GTL command while the device is in Local Lockout mode does not clear the lockout condition.
  • Page 30 Bird 4421 RF Power Meter Device CLear (DCL) Function Resets the status of all devices to an initialized state. Remarks Does not change the current interface mode. Th e 4421 r et u r n s t o t h e fa ct or y defa u lt con dit ion list ed in F igu r e 14.
  • Page 31 IEEE-488 GPIB Interface Serial Polling Enable/Disable (SPE/SPD) Function Enables or disables the serial polling sequence. CAUTION During remote operation, periodically monitor the bus service request line. Failure to detect a service request could result in equipment damage. Remarks The SPE command puts all devices in serial poll mode waiting to be addressed.

  • Page 32: Device Dependent Commands

    Bird 4421 RF Power Meter Device Dependent Commands The device-dependent commands used by the 4421 Power Meter are listed in F igu r e 16, or ga n ized by ca t egor y. Note: The programming card also has a complete command list.
  • Page 33 IEEE-488 GPIB Interface Forward Carrier Wave (FC) Forward dBm (FD) Reflected Carrier Wave (RC) Reflected dBm (RD) Function Selects forward or reflected RF power measurement mode. Remarks Measurement results are returned in Watts or dBm. Standing Wave Ratio (SW) Return Loss (RL) Function Selects SWR or return loss match measurement mode.
  • Page 34 Bird 4421 RF Power Meter Range (Rxx) Function Selects a measurement range list ed in F igu r e 17. Remarks If the selected range is outside the range of the connected power sensor, the command is ignored. Figure 17...
  • Page 35 (see F igu r e 18 for exa m ples): type. e value sent is a normal on-scale reading. Bird model number. Figure 18 Data String...
  • Page 36 Bird 4421 RF Power Meter Triggers (Tx) Function Select s t h e con dit ion wh ich will t r igger a r ea din g (see F igu r e 19). Remarks Failure to trigger device before requesting a reading will lock the bus.
  • Page 37 IEEE-488 GPIB Interface Status (Ux) Function Reads a status word and returns the information as a string. Set x to: Remarks After sending the status command, a status word is sent the next time the unit is addressed to talk. To ensure the correct status is transmitted, the sta- tus word should be requested as soon as possible after the command is sent.
  • Page 38 Bird 4421 RF Power Meter Self-Test Pass Set wh en a self-t est h a s been in it ia t ed by t h e J 0 com m a n d a n d t h e t est r esu lt is a ccept a ble.
  • Page 39 IEEE-488 GPIB Interface Writable Store (Wxxxxxx) Function Storage for six bytes of ASCII data. Remarks Data stored is lost when the 4421 is turned off. Data is sent back as part of the U2 status word.
  • Page 40 Bird 4421 RF Power Meter...

  • Page 41: Rs-232 In T Er Fa Ce

    Description The Bird 4421 RS-232 interface feature is an integral part of the I/O hub cir- cuit board inside of the mm21. An eight-position DIP switch is used to set operational conditions such as baud rate, parity, and stop bits. The bottom line of the display indicates the current bus status.

  • Page 42: Setup

    Bird 4421 RF Power Meter Setup DIP Switch Set the DIP switches according to application needs and the requirements of the controller. Available settings and factor y defa u lt s a r e list ed in F igu r e 25.

  • Page 43: Auto Baud

    Talker-Only Mode The Bird 4421 can be set up for manual operation while automatically sending data to an output device (Talker-Only Mode). To do so, turn DIP switch 2 OFF and cycle the power.

  • Page 44: General Bus Commands

    E n a bles/disa bles soft wa r e h a n dsh a ke INiTialize (INT) Function Resets the Bird 4421 and returns it to the factory defaults. Remarks If INT is linked with any other command within a string, it must be separated from that command by a space.
  • Page 45 RS-232 Interface Baud Select (Bx) Function Selects a baud rate list ed in F igu r e 27. Remarks When the meter recognizes a valid Bx command, its baud rate is immediately changed. (The controller is assumed to be transmitting at the new rate; other- wise sending commands would not be possible.) This command overrides the DIP switch setting.

  • Page 46: Device Dependent Commands

    Bird 4421 RF Power Meter Device Dependent Commands The device-dependent commands used by the 4421 Power Meter are listed in F igu r e 28, or ga n ized by ca t egor y. Figure 28 Category Command Description RS-232 Device...
  • Page 47 RS-232 Interface Forward Carrier Wave (FC) Forward dBm (FD) Reflected Carrier Wave (RC) Reflected dBm (RD) Function Selects forward or reflected RF power measurement mode. Remarks Measurement results are returned in Watts or dBm. Standing Wave Ratio (SW) Return Loss (RL) Function Selects SWR or return loss match measurement mode.
  • Page 48 Bird 4421 RF Power Meter Range (Rxx) Function Selects a measurement range list ed in F igu r e 29. Remarks If the selected range is outside the range of the connected power sensor, the command is ignored. Figure 29...
  • Page 49 (see F igu r e 30 for exa m ples): type. e value sent is a normal on-scale reading. Bird model number. Figure 30 Data String...
  • Page 50 Bird 4421 RF Power Meter Status (Ux) Function Reads a status word and returns the information as a string. Set x to: Remarks After sending the status command, a status word is sent the next time the unit is addressed to talk. To ensure the correct status is transmitted, the sta- tus word should be requested as soon as possible after the command is sent.
  • Page 51 RS-232 Interface Valid Command Set wh en n o IDDCO is r eceived. Option Self-test Pass Set wh en a self-t est h a s been in it ia t ed by t h e J 0 com m a n d a n d t h e t est r esu lt is a ccept a ble.
  • Page 52 Bird 4421 RF Power Meter...

  • Page 53: Maintenance

    This chapter describes routine maintenance, along with troubleshooting instructions for the power meter and power sensor. Disassembly instructions for the Bird Cal Cart are also provided. For service beyond this level, return the unit to a qualified service center. WARNING...
  • Page 54 Bird 4421 RF Power Meter CAUTION Due to the complexity of the Bird Power Sensor, field repairs beyond general maintenance should not be attempted. Removal or disturbance of the power sensor cover can result in cancellation of lifetime warranty. This manual cannot list all malfunctions that may occur, or corrective actions.

  • Page 55: Functional Test

    Maintenance IE E E -488 In t er fa ce Ar e t h e a ddr ess in t h e in t er fa ce Ch a n ge t h e pr ogr a m or DIP does n ot r espon d t o t h e pr ogr a m a n d t h e a ddr ess set t in g on swit ch set t in g so t h a t t h e...

  • Page 56: Push Button Test

    Bird 4421 RF Power Meter Push Button Test This test checks that the push buttons and display are functioning properly. If a push button is malfunctioning, return the power meter. 1. Discon n ect t h e power sen sor .

  • Page 57: Repair

    Maintenance Repair WARNING To avoid personal injury, disconnect the power cord from the ac line before performing any maintenance, including fuse replacement or changing the line voltage setting. Front Panel (Cal Cart only) If the power meter is mounted in a Cal Cart, to access the power sensor or the ac connections, it will be necessary to remove the front panel of the Cal Cart.

  • Page 58: Replacing Fuses

    Bird 4421 RF Power Meter Replacing Fuses WARNING To avoid personal injury, disconnect the power cord from the ac line before performing any maintenance, including fuse replacement. CAUTION Failure to install the properly rated fuse may result in equipment damage or nuisance failures.

  • Page 59: Replacing Batteries

    Maintenance Replacing Batteries WARNING Exposed ac line voltage (115 VAC or 230 VAC). Disconnect the power cord from the ac line before replacing the batteries. Failure to comply may result in severe electrical shock or death. 1. Discon n ect t h e a c power cor d from the ac mains supply. 2.

  • Page 60: Power Sensor (Cal Cart Only)

    RF power is being applied. Leaking RF energy is a potential health hazard. CAUTION The Bird 4421 must be powered off when connecting or disconnecting the power sensor from the power meter. CAUTION reduce the maximum power rating of the unit.

  • Page 61: Load

    Note: With the shipping plugs installed, it is not necessary to empty out the coolant. Repack in the original carton or contact Bird for a transit case.

  • Page 62: Specifications, Cal Cart

    Bird 4421 RF Power Meter Specifications, Cal Cart To determine the model numbers of the Cal Cart components, refer to the m odel n u m ber br ea kdown on pa ge viii. F or load specifications, refer to the load manual included.

  • Page 63: Specifications, 4421 Power Meter

    Maintenance Specifications, 4421 Power Meter Bird 4421 RF Power Meter Frequency Range Sen sor depen den t Power Range Sen sor depen den t VSWR Display Return Loss Display 0 t o 40 dB m a x Display Accuracy ± 1 on lea st sign ifica n t digit AC Power 115 /230 Va c @ 50 /60 H z;...

  • Page 64: Specifications, Power Sensors

    Bird 4421 RF Power Meter Specifications, Power Sensors CAUTION reduce the maximum power rating of the unit. Specifications Common to all Sensors Impedance, Nominal 50 oh m s Max. Allowable Terminating VSWR 2.00:1 F r equ en cy-specific ca libr a t ion fa ct or s st or ed in n on vola t ile m em or y in ea ch sen sor .
  • Page 65 Maintenance Bird 4020 Series RF Power Sensors RF Power Range 4021, 4022 4024, 4025 Frequency Range 4021 4022 4024 4025 Accuracy, Fwd, Best Case ± 3% (1 ) VSWR, Max. 4021, 4024, 4025 1.05:1 4022 Insertion Loss, Max. 4021, 4024, 4025 0.05 dB...
  • Page 66 Bird 4421 RF Power Meter Bird 4027A Series RF Power Sensors Frequency Range 4027A250K 4027A12M 4027A400K 4027A25M 4027A800K 4027A35M 4027A2M 4027A60M 4027A4M 4027A100M 4027A10M 4027A150M RF Power Range 4027A12M 4027A100M 4027A25M 4027A150M 4027A35M All ot h er m odels 4027A60M Accuracy, Fwd, Best Case ±...
  • Page 67 Maintenance Bird 4027F Series RF Power Sensors Frequency Range 4027F2M 4027F10M 4027F60M RF Power Range 4027F2M, 4027F10M 4027F60M Accuracy, Fwd, Best Case ± 1.0% (2 ) Calibration Frequencies, Typical 4027F2M 1.8, 2.0, 2.17 MH z 4027F10M 12.0, 12.5, 13.56, 14.0, 15.0 MH z 4027F60M 57.0, 58.5, 60.0, 61.5, 63.0 MH z...

  • Page 68: Specifications, Rs-232 Interface

    Bird 4421 RF Power Meter Bird 4028A and 4028B Series RF Power Sensors Frequency Range 4028A250K 4028A400K 4028A2M 4028A3M 4028A4M 4028A10M, 4028B10M, 4028C10M 4028A25M RF Power Range 4028A250K, 4028A400K 4028C10M All other models Accuracy, Fwd, Best Case ± 2.0% (2 )

  • Page 69: Specifications, Ieee-488 Gpib Interface

    Maintenance Weight 0.5 lbs (0.23 kg) n om in a l Specifications, IEEE-488 GPIB Interface IEEE-488 Interface Logic Levels Meet s a ll IE E E St a n da r d 488-1978 specifica t ion s Modes of Operation Swit ch a n d bu s select a ble Talk Only Allows the 4421 to send to the bus keyboard-initiated measurements...

  • Page 70: Replacement Parts

    Bird 4421 RF Power Meter Load Derating Above 65 MHz 1 & 2.5 kW Loads 1000 Frequency (MHz) Replacement Parts Description Part Number F u se, IE C (5 x 20 m m ) Tim e La g Type T...

  • Page 71: Customer Service

    # 10-32 Nu t Type 169-4 Customer Service If you need to return the unit for any reason, contact the Bird Service Center for a return authorization. All instruments returned must be shipped prepaid and to the attention of Bird Service Center.
  • Page 72 Bird 4421 RF Power Meter...
  • Page 73 . Th is ext en ded wa r r a n t y is a ga in st bu r n ou t . F or t h e wa r r a n t y t o a pply, t h e Sen sor H ea d must be used with the correct Bird Electronic Corporation Display Unit, the maximum power rating of t h e Sen sor m u st n ot be exceeded, t h e Sen sor RF cir cu it m u st be pr oper ly t er m in a t ed a n d t h e Sen sor n ot su bject ed t o ph ysica l a bu se.
  • Page 74 4027F 60M 4027A100M 4027A150M The undersigned hereby declares, on behalf of Bird Electronic Corporation of Cleveland, Ohio, that the above referenced products, to which this declaration relates, are in conformance with the provisions of the following standards. In accordance with EMC Directive (89/336/EEC)

This manual is also suitable for:

Thruline 4020 seriesThruline 4027a seriesThruline 4028 seriesThruline 4421

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