Sierra Smart-Trak IM-100 Series Instruction Manual

Sierra Smart-Trak IM-100 Series Instruction Manual

Mass flow meters & controllers
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Series 100 Instruction Manual
Table of Contents
Smart-Trak
100 Series
®
Mass Flow Meters & Controllers
Instruction Manual
IM-100 Series
Rev. C.9, June 2010
IM-100-C
0-1

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Summary of Contents for Sierra Smart-Trak IM-100 Series

  • Page 1 Series 100 Instruction Manual Table of Contents Smart-Trak 100 Series ® Mass Flow Meters & Controllers Instruction Manual IM-100 Series Rev. C.9, June 2010 IM-100-C...
  • Page 2 Phone: + 8621 5879 8521 Fax: +8621 5879 8586 IMPORTANT CUSTOMER NOTICE: OXYGEN SERVICE Sierra Instruments, Inc. is not liable for any damage or personal injury, whatsoever, resulting from the use of Sierra Instruments standard mass flow meters or controllers for oxygen gas. You are responsible for deter- mining if this mass flow meter or controller is appropriate for your oxygen application.
  • Page 3: Table Of Contents

    Series 100 Instruction Manual Table of Contents TABLE OF CONTENTS Chapter 1 Introduction Introduction ..................... 1-1 Using this Manual ................... 1-1 Safety Information .................. 1-2 Receipt of System Components .............. 1-2 Definitions Used in This Manual ............1-3 The Smart-Trak Flow Sensing Principle ..........1-4 Chapter 2 Installation Before You Begin Installation ..............
  • Page 4 Table of Contents Series 100 Instruction Manual Map of the User Interface ............... 4-7 Upper Screens (Display) ............. 4-8 Mass Flow Screen ..............4-8 Setpoint Screen ..............4-8 Valve Position Screen ............4-8 Full Scale Screen ..............4-9 Lower Level Screens (Changing Parameters) ......4-10 Getting to the Lower Level Screens ........
  • Page 5 Series 100 Instruction Manual Table of Contents Read Controller Parameters ..........5-17 Chapter 6 Technical Support and Service Technical Support...………………………………….…………..……6-1 Sierra Website ................ …6-2 Returning Equipment to the Factory………………….………..6-3 Appendix A Gas Tables Pre-programmed gas list-Dial-A-Gas……………………………...…..A-1 K-Factor Calculations ……………………………………………...….A-1 Gas Tables with K-factors………………………………………..……A-2 Appendix B Product Specifications Performance Specifications………………..…………………...
  • Page 7: Chapter 1 Introduction

    CHAPTER 1: INTRODUCTION Welcome to the future of gas flow measurement! The Sierra Instruments’ Smart-Trak Series 100 is an innovation from Sierra, a company that has designed and manufactured gas mass flow measurement in- struments since the early 1970’s. This manual is your guide to Smart-Trak. Vis- it the Sierra Instruments website www.sierrainstruments.com any time for...
  • Page 8: Safety Information

    • Appendix F: Special Instructions for Installation and Operation of the Mi- cro-Trak ultra-low flow instruments. Throughout this manual, we use the word instrument as a generic term to represent all models of Sierra Instruments’ Smart-Trak Series 100 mass flow meters and controllers. SAFETY INFORMATION Caution and warning statements are used throughout this book to draw your at- tention to important information.
  • Page 9: Definitions Used In This Manual

    PHONE: 831-373-0200 FAX: 831-373-4402 EMAIL: service@sierrainstruments.com European Customer Service: PHONE: +31 72 5071400 FAX: +31 72 5071401 EMAIL: service@sierra-instruments.nl Asia Customer Service: PHONE: + 8621 5879 8521 FAX: +8621 5879 8586 EMAIL: www.sierra-asia.com DEFINITIONS USED IN THIS MANUAL The following terms are used frequently in this manual. They are presented here with their definitions for your information.
  • Page 10: The Smart-Trak Flow Sensing Principle

    Chapter 1: Introduction Series 100 Instruction Manual THE SMART-TRAK FLOW SENSING PRINCIPLE The operating principle of the Smart-Trak instruments is based on heat transfer and the first law of thermodynamics. During operation process gas enters the in- strument’s flow body and divides into two flow paths, one through the sensor tube, the other through the laminar flow bypass.
  • Page 11 Series 100 Instruction Manual Chapter 1: Introduction Figure 1-3. Sensor Temperature Distribution Figures 1-2 and 1-3 show the mass flow through the sensor tube as inversely pro- portional to the temperature difference of the coils. The coils are legs of a bridge circuit with an output voltage in direct proportion to the difference in the coils’...
  • Page 13: Chapter 2 Installation

    122°F (50°C). The minimum operating temperature is 32°F (0°C) and ambient temperature is 0-50°C. If your application exceeds any of these parameters, contact your Sierra Sales Agent before installa- tion. You may also contact one of Sierra’s Technical Support Centers.
  • Page 14: Pre-Installation Checklist

    2. Sierra strongly recommends you install an in-line filter up- stream of the instrument. Recommended filter size: 10 micron. A 10 micron filter is available from Sierra as an accessory. See Appendix B or contact your local Sierra distributor. 3. Do not locate the instrument in areas subject to sudden tem- perature changes, excessive moisture or near equipment ra- diating significant amounts of heat.
  • Page 15: Installing The Instrument-Plumbing

    Series 100 Instruction Manual Chapter 2: Installation Installing the Instrument—Plumbing ® ® Smart-Trak instruments are supplied with compression, VCO , VCR , or female NPT process connections. To ensure a successful installation, inlet and outlet tubing should be in a clean state prior to plumbing the instru- ment into the system.
  • Page 16: Vco Fittings

    Chapter 2: Installation Series 100 Instruction Manual VCO Fittings Position the instrument with the flow direction arrow pointing in the direction of flow. Tighten the nut finger-tight, and then 1/8 turn tighter with a wrench. Do not over-tighten! Check the system’s entire flow path thoroughly for leaks. Do not use liquid leak detectors.
  • Page 17 Series 100 Instruction Manual Chapter 2: Installation Installing your Instrument—Mechanical Mounting Mounting your Instrument The base plate or bottom of the instrument has 4 mounting holes. Two are SAE thread and two are metric thread. For location and dimensions, please see Appendix E.
  • Page 18 (speci- fied when ordering). See Appendix B to purchase pre-assembled commu- nications cables from Sierra. Power must be supplied to the HD DB-15 connector. Other features may be accessed there as well. The pin num- bers and assignments for the HD DB-15 connector are shown in Figure 2- 3: HD DB-15 Connector Pin Configuration (on the instrument).
  • Page 19 (5 VDC External Setpoint & Valve Purge) Black Valve Override Close Brown/white RS-232 Receive (in) Red/white 4-20 mA Output Red/Black Chassis (Earth) Ground Note: Pins 1, 3, 5, and 10 are connected together inside the instrument. Sierra recommends individual wires. IM-100-C...
  • Page 20 For Basic Analog Installation of the Instrument: • Instrument Power: The Smart-Trak requires a 15-24 VDC power supply. If you are using the power supply supplied by Sierra, connect it to the 15-pin HD DB-15 connector on the side of the instrument. If you are supplying your own power source, it must be a regulated 15-24 VDC with ripple not to exceed 100 mV peak-to-peak.
  • Page 21 For your convenience, the RS-232 communication may also be accessed using the mini-RCA jack located on the side of the instrument below the D-connector. Use Sierra Instruments’ cable number “CRS.” This cable is included with your instru- ment. Additional cables may be purchased separately from Sierra or its agents.
  • Page 23: Chapter 3 Analog Operation

    Series 100 Instruction Manual Chapter 3 Analog Operation CHAPTER 3: ANALOG OPERATION Your Smart-Trak instrument may be operated in three different ways: THREE CONTROL OPTIONS A. Analog Input/Output Operation (This Chapter): Using analog in- put/output signals at the 15-pin mini-D connector. B.
  • Page 24: Analog Operation, Mass Flow Meters

    Power Up Your Instrument: See Chapter 2, Figure 2-5: Power Supply Requirements. Apply power using Sierra’s power supply or your own power source. The green LED at the top of the left side will light to con- firm power. If your instrument has a Pilot Module, it will begin its start- up cycle.
  • Page 25: Smart-Trak Features

    Series 100 Instruction Manual Chapter 3 Analog Operation begin its start-up cycle. See Chapter 4 for details on Pilot Module operation. 3. Adjust the controller setpoint to the desired flow rate by sup- plying an appropriate signal (mA or VDC). The effective control range of the unit is 2% to 100% of the calibrated full scale flow range.
  • Page 26: Over-Range Condition

    Manual Valve Override—Valve Close Manual valve override is provided for all Sierra mass flow controllers. This feature includes both a valve close command and a valve maximum open command (called purge). When the valve is directed to close or to purge, it will no longer respond to a setpoint command.
  • Page 27 Material Safety Data Sheet (MSDS) must be enclosed & attached to the outside of the box to alert Sierra personnel of the potential hazard. Also, make sure the inlet & outlet are securely sealed.
  • Page 29 Series 100 Instruction Manual Chapter 4 Operation with Pilot Module CHAPTER 4: Digital Operation with Pilot Module Your Smart-Trak instrument may be operated in three different ways: THREE CONTROL OPTIONS A. Analog Input/Output Operation (Chapter 3): Using analog input/output signals at the HD DB-15 connector. B.
  • Page 30: Chapter 4 Pilot Module Operation

    Next, place the other end into one of the two matching jacks on the Pilot Module. For your convenience, Sierra has provided two jacks—one on the back and one on the bottom of the Remote Pilot Module. You may use whichever jack is most convenient for your application as they both have identical functions.
  • Page 31 Series 100 Instruction Manual Chapter 4 Operation with Pilot Module Down arrow Enter button Escape button These are shown in the photo below: Pilot Module Operation, Mass Flow Meter After your instrument is installed and the system has undergone a com- plete leak check as discussed in detail in Chapter 2, follow these steps: Caution! 1.
  • Page 32: Mass Flow Meters

    Chapter 4 Operation with Pilot Module Series 100 Instruction Manual Sierra Instruments The Mass Flow Company Rev. XX After 5 seconds, the LCD display will indicate that communication between the Pilot Module and the Smart-Trak microprocessor has been established by...
  • Page 33: Mass Flow Controllers

    Take necessary precautions. 2. Power Up Your Instrument: Apply power to your instrument using Sierra’s power supply or your own input power source. See Chapter 2, Figure 2-5: Power Supply Requirements. When power is first applied, the...
  • Page 34 Chapter 4 Operation with Pilot Module Series 100 Instruction Manual CAUTION: DO NOT LEAVE A SETPOINT APPLIED FOR AN EXTENDED PERIOD OF TIME TO A CONTROLLER WHEN THE GAS SUPPLY IS SHUT OFF OR BLOCKED. Damage may re- sult and the instrument will become hot to the touch. Instead, see below for use of the “Valve Close”...
  • Page 35 Series 100 Instruction Manual Chapter 4 Operation with Pilot Module Map of the Pilot Module Interface The Pilot Module user interface is presented below in a graphical format. Once you have some familiarity with the user interface, you may find you want to make a copy of this and keep it with the instrument for reference.
  • Page 36: Mass Flow Screen

    Chapter 4 Operation with Pilot Module Series 100 Instruction Manual Upper Level Screens (Display Information Only) The four Upper Level Screens display a variety of information. You are able to move between the screens by pressing the left or right arrows. No password is required for the Upper Level Screens.
  • Page 37: Valve Position Screen

    Series 100 Instruction Manual Chapter 4 Operation with Pilot Module Valve Position Screen (Mass Flow Controllers only) Pushing the right arrow again takes you to the Valve Position Screen, if you have a Mass Flow Controller. This screen will display the current state of the Smart-Trak valve.
  • Page 38: Lower Level Screens (Changing Parameters)

    Chapter 4 Operation with Pilot Module Series 100 Instruction Manual Lower Level Screens (Changing Parameters) Getting to the Lower Level Screens: Your instrument is password protected so that unauthorized personnel will be unable to change the operating parameters of Smart-Trak. To enter the Lower Level Screens at any time you must first supply the correct pass- word.
  • Page 39 When you press any button, you will return to the Mass Flow Screen in the Upper Level. Press the “enter” key to try again. LOST PASSWORDS & GENERAL CUSTOMER SERVICE: If you lose your password, it will be necessary to contact one of Sierra’s Tech- nical Support Centers. Email Customer Service: service@sierrainstruments.com...
  • Page 40: Change Setpoint Value Screen

    Chapter 4 Operation with Pilot Module Series 100 Instruction Manual Making Changes Using the Lower Level Screens: The eight Lower Level Screens are at the heart of Dial-A-Gas, allowing you complete control of your Smart-Trak instrument. It is possible to make several changes on different Lower Level Screens before exiting.
  • Page 41 Series 100 Instruction Manual Chapter 4 Operation with Pilot Module Change Setpoint Value 10.00 sl/m Next, press the “right” arrow so that the second digit blinks. Push the up arrow twice. You will now see: Change Setpoint Value 12.00 sl/m Press the right arrow again.
  • Page 42: Change Units Screen

    Chapter 4 Operation with Pilot Module Series 100 Instruction Manual Now, the “Yes” will blink. Press the enter key to accept your changes and to immediately adjust the setpoint to the Mass Flow Controller. If you are finished or wish to observe the changes you have made on the LCD panel, press the escape key to return to the Upper Level Mass Flow Screen.
  • Page 43: Change Gas (Dial-A-Gas Tm ) Screen

    Series 100 Instruction Manual Chapter 4 Operation with Pilot Module When you are satisfied, push the left or right arrow. You will now see the “time unit” blink. Use the up or down arrows to select your choice of time units.
  • Page 44: Change Valve Operation (Close, Purge) Screen

    Chapter 4 Operation with Pilot Module Series 100 Instruction Manual If you wish to change the gas used in the instrument, press enter. The name of the gas will blink. Use the up and down arrows to make your se- lection.
  • Page 45 Series 100 Instruction Manual Chapter 4 Operation with Pilot Module Closed”) or set the valve to control flow when it receives a setpoint from some source (“Automatic”). To make a change to the valve operation, press the enter key. Use the up and down arrows to make your selection. When you are satisfied, press the enter key again.
  • Page 46: Change Setpoint Source Screen

    Chapter 4 Operation with Pilot Module Series 100 Instruction Manual Change Setpoint Source Screen (mass flow controllers only) If you are already in the Lower Level Screens, push the right or left arrow until you reach the Change Setpoint Source screen. To get to this screen at any time: Press Escape—Press Enter—enter password and Press Enter.
  • Page 47: Change Output Signals Screen

    Series 100 Instruction Manual Chapter 4 Operation with Pilot Module and right arrow keys to move to other Lower Level Screens. You may al- so choose to press the escape key to return to the Upper Level Screens. Caution: If you change the source of the setpoint to an analog value, you will not be able to control your Smart-Trak mass flow controller via the Pilot Module or the RS-232 link.
  • Page 48: Change Full Scale Screen

    Chapter 4 Operation with Pilot Module Series 100 Instruction Manual Output Change to XXXXX Now, the “Yes” will blink. You must now press the enter key to imple- ment your changes. You can make additional changes by using the left and right arrow keys to move to other Lower Level Screens.
  • Page 49: Change Password Screen

    Series 100 Instruction Manual Chapter 4 Operation with Pilot Module Full Scale Change to XX.XX The “No” will blink. If you do not want to make the displayed change, press enter. You will return to the Change Full-Scale screen. If you want to make the displayed change, press any arrow.
  • Page 50 Chapter 4 Operation with Pilot Module Series 100 Instruction Manual Password Change to XXXX The “No” will blink. If you do not want to make the displayed change, press enter. You will return to the Change Password screen. If you want to make the displayed change, press any arrow.
  • Page 51: Lost Password

    Series 100 Instruction Manual Chapter 4 Operation with Pilot Module Lost Passwords and General Customer Service If you lose your password, it will be necessary to contact one of Sierra’s Technic- al Support Centers. Email Customer Service: service@sierrainstruments.com FACTORY USA Customer Service:...
  • Page 53 Pilot Module. If you prefer to write your own software to communicate with the Smart- Trak over the RS-232 link, this is certainly possible. Sierra Instruments makes the Source Code including the Command Set available on the CD ROM supplied with your instrument.
  • Page 54: Summary Of Smart-Trak Features

    Setpoint value Engineering units Valve operation Source of the setpoint signal Form of the output signals Full scale of the instrument Password Additional Features include: Re-boot the Smart-Trak microprocessor Change the Communication Port Links to Sierra Instruments’ Web Site Specifications IM-100-C...
  • Page 55: Power Up Your Instrument

    After your instrument is installed and the system has undergone a com- plete leak check (discussed in detail in Chapter 2), apply power using Sierra’s power supply or your own input power source. See Chapter 2, for power supply requirements. The green LED at the top of the left side will light.
  • Page 56: Loading The Smart-Trak Software

    Connecting Smart-Trak to your Computer If your computer has a serial port… We suggest you use the supplied Sierra Instruments RS-232 communica- tion cable (part number CRS). This pre-manufactured cable has the cor- rect DB9 connection to mate with most computers and a mini-RCA jack which should be connected to the connector just above the inlet fitting on your new instrument.
  • Page 57 Series 100 Instruction Manual Chapter 5 Operation with RS-232 and Smart-Trak Software CAUTION: The CAT-5 connector on the side of the Smart-Trak is NOT an Ethernet connector. It is for use with the optional Remote Pilot Module. Do not plug an Ethernet cable here as damage may result. All electrical connections for your Smart-Trak instrument are made on the left (inlet) side panel.
  • Page 58 Open a separate software window for each meter and you can monitor all of them at one time. If connecting your computer to the Smart-Trak creates any confusion, please contact Sierra Instruments or your IT person for assistance. IM-100-C...
  • Page 59: Running The Smart-Trak Software

    Series 100 Instruction Manual Chapter 5 Operation with RS-232 and Smart-Trak Software Running the Smart-Trak Software Locate the file named “Smart-Trak” and open it. You will see the follow- ing screen: The prompt will ask you to select a serial port channel (“Comm port num- ber”).
  • Page 60 Chapter 5 Operation with RS-232 and Smart-Trak Software Series 100 Instruction Manual For Mass Flow Meters, the screen will appear like this: IM-100-C...
  • Page 61 Series 100 Instruction Manual Chapter 5 Operation with RS-232 and Smart-Trak Software For Mass Flow Controllers, the following screen will appear: Establishing Communication If the Screen appears as above with all the yellow and white boxes full (with the exception of the password box), the Smart-Trak instrument has established communication with your computer.
  • Page 62: Using The Smart-Trak Software

    Chapter 5 Operation with RS-232 and Smart-Trak Software Series 100 Instruction Manual Parameters.” These words will appear in the Mass Flow box for a few seconds and then values will fill all the boxes on the screen. Communica- tion has been established. Your computer is now able to control your Smart-Trak instrument.
  • Page 63: Password Section

    Series 100 Instruction Manual Chapter 5 Operation with RS-232 and Smart-Trak Software Valve State If you have a Mass Flow Meter, this box can be bypassed. For normal op- eration of the flow controller, this box should display: Automatic If this is visible, the instrument will automatically control flow as soon as a setpoint is given to it.
  • Page 64: Lower Section Of Software Window

    Chapter 5 Operation with RS-232 and Smart-Trak Software Series 100 Instruction Manual C. Lower Section of Software Window– Changing Parameters Across the bottom half of the screen you will find a section titled “Change Meter Parameters” and you will see a number of white boxes. Each box allows you to adjust one or more meter functions.
  • Page 65: Change Valve Operation (Close, Purge)

    Series 100 Instruction Manual Chapter 5 Operation with RS-232 and Smart-Trak Software Change Valve Operation –Automatic, Close, Purge This function enables or overrides any setpoint command given to the Smart-Trak. At start-up, the box will show: Automatic In this normal operating position, the valve is ready to control flow when it receives a setpoint from some source.
  • Page 66: Change Setpoint Source

    Chapter 5 Operation with RS-232 and Smart-Trak Software Series 100 Instruction Manual CAUTION: It is not recommended that you operate this instrument with the display showing “9999.” Change Setpoint Source (Mass flow controllers only) In this box you can re-configure the location of the setpoint for the Smart- Trak controller.
  • Page 67 Series 100 Instruction Manual Chapter 5 Operation with RS-232 and Smart-Trak Software 100% of the maximum flow rate your Smart-Trak can measure or control without factory re-calibration. It is not a percentage of the modified full- scale value. The factory full-scale value is clearly indicated below the white Password box on the right side of your screen: Max Full Scale XXXX The instrument’s maximum flow rate is also recorded on the data label (at...
  • Page 68: Change Password (Lost Passwords)

    Lower Level without it. Be certain the new password is recorded. Lost Passwords and General Customer Service If you lose your password, it will be necessary to contact one of Sierra’s Technical Support Centers. Email Customer Service: service@sierrainstruments.com FACTORY USA Customer Service:...
  • Page 69: Other Useful Features

    Series 100 Instruction Manual Chapter 5 Operation with RS-232 and Smart-Trak Software Other Useful Features There are several additional features that you may utilize via the Smart- Trak Software. Across the top of the Smart-Trak Master Screen, you can see these options: Comm Port Read Parameters To use any of these functions, simply place the mouse pointer onto the...
  • Page 71: Chapter 6 Technical Support And Service

    Verify that your settings and adjust- ments are consistent with factory recommendations. If the problem persists, Sierra is eager to help you. You may contact us at any of the following Technical Support Centers. It may also help to call your Sierra Sales Agent, who is also well trained in the operation of the product.
  • Page 72: Sierra Website

    Chapter 6 Technical Support Sierra 100 Instruction Manual Sierra Websites Sierra Instruments, Inc. (USA Headquarters): www.sierrainstruments.com Sierra Instruments b.v. (Europe): www.sierrainstruments.nl Sierra Asia Instruments (China): www.sierra-asia.com Smart-Trak Website: www.sierrasmarttrak.com Vortex Multivariable Mass Flow Meter Website: www.innovamass.com Engine Emissions Testing Systems Website: www.sierraemissions.com...
  • Page 73: Returning Equipment To The Factory

    Prices may vary depending on the flow range, type of gas and operating pressure of your unit. To request detailed pricing con- tact your local Sierra Instruments distributor or contact one of our offices directly. Our expedite fees are: three-day turnaround 25%, two-day turna- round 40%.
  • Page 74 Material Safety Data Sheet (MSDS) must be enclosed & attached to the out- side of the box to alert Sierra personnel of the potential hazard. Also, make sure the inlet & outlet are solidly plugged off.
  • Page 75: Appendix A Gas Tables

    Sierra 100 Instruction Manual Appendix A: Gas Tables Appendix A: Gas Tables Smart-Trak Pre-programmed Gases: Dial-A-Gas The following gases have been programmed into the Smart-Trak instru- ment in this order. If you are using one of these gases, you may use the Dial-A-Gas feature in either the Pilot Module or the Software Package and the instrument will adjust the outputs automatically.
  • Page 76 Appendix A: Gas Tables Sierra 100 Instruction Manual Gas Tables and K-factors Chemical K-factor Density Density Actual Gas Symbol Relative (Cal/g) (g/l) @ (g/l) @ Elastomers* to Air 70°F 0°C O-ring Valve Seat Acetylene .581 .4036 1.079 1.162 1.000 .240 1.200...
  • Page 77 Sierra 100 Instruction Manual Appendix A: Gas Tables Chemical K-factor Density Density Elastomers* Actual Gas Symbol Relative (Cal/g) (g/l) @ (g/l) @ O-ring Valve 70°F 0°C Seat Dichloromethylsilane .251 .1882 5.345 5.758 SiCl Dichlorosilane .401 .150 4.183 4.506 Dichlorotetrafluoroethane .220 .1604...
  • Page 78 Appendix A: Gas Tables Sierra 100 Instruction Manual Chemical K-factor Density Density Elastomers* Actual Gas Symbol Relative (Cal/g) (g/l) @ (g/l) @ O-ring Valve 70°F 0°C Seat Methyl Mercaptan .521 .2459 1.992 2.146 Methyl Trichlorosilane ) SiCl .251 .164 6.191 6.669...
  • Page 79: Appendix B Product Specifications

    Series 100 Instruction Manual Appendix B Appendix B: Product Specifications Performance Specifications: Accuracy Standard Calibration: ±1.0% of full scale at operating conditions High Accuracy Calibration: ±0.7% of reading plus 0.3% of full scale at operating conditions. Dial-A-Gas: ±1.0% of full scale in all 10 gases Repeatability ±...
  • Page 80 Appendix B Series 100 Instruction Manual Mass Flow Rates 101 Micro-Trak: 0 to 4 sccm 100L low flow body: 0 to 10 sccm to 0 to 50slpm 100M medium flow body: 0-20 to 0-300 slpm 100H high flow body: 0-100 to 0-1000 slpm Flow ranges specified are for nitrogen at 760 mm Hg and 21°C (70°F) or for an equivalent;...
  • Page 81 Series 100 Instruction Manual Appendix B Differential Pressure Requirement for Controllers (lower or higher available upon request) Optimum: 30-60 psi (2-4 bar) Minimum: See chart below. Note that required pressure increases with flow rate. Minimum Differential Pressure Requirement for Air, Mass Flow Controllers Pressure Drop in PSI (mbar) Flow Rate Low Flow...
  • Page 82: Physical Specifications

    (standard). Other elastomers are available upon request. Optional Parts & Accessories: The following optional accessories are available from your Authorized Sierra In- struments Representative or directly from Sierra Instruments. They are provided to improve your experience with the Smart-Trak Series 100 Mass Flow Meters and Controllers.
  • Page 83 TOLL FREE: 800-866-0200 PHONE: 831-373-0200 FAX: 831-373-4402 EMAIL: service@sierrainstruments.com European Sales & Service Center: PHONE: +31 72 5071400 FAX: +31 72 5071401 EMAIL: service@sierra-instruments.nl Asia Sales & Service Center: PHONE: + 8221 5879 8521 FAX: +8621 5879 8586 EMAIL: www.sierra-asia.com IM-100-C...
  • Page 85: Appendix C Flow Chart For Pilot Module User Interface

    Series 100 Instruction Manual Appendix C Appendix C: Flow Chart for Pilot Module User Interface Note: If you press the escape key at any time, you will immediately return to the main Mass Flow screen in the Upper Level. IM-100-C...
  • Page 87 (5 VDC External Setpoint & Valve Purge) Black Valve Override (shut) Brown/white RS-232 Receive (in) Red/white 4-20 mA or 0-20 mA Output Red/Black Chassis (Earth) Ground Note: Pins 1, 3, 5, and 10 are connected together inside the instrument. Sierra recommends individual wires. IM-100-C...
  • Page 89 Series 100 Instruction Manual Appendix E Appendix E: Product Dimensions and Mounting All dimensions are in inches with millimeters in (brackets). Dimension “L” is listed in the Table at the end of Appendix E IM-100-C...
  • Page 90 Appendix E Series 100 Instruction Manual IM-100-C...
  • Page 91 Series 100 Instruction Manual Appendix E IM-100-C...
  • Page 93 Introduction The Micro-Trak series of flow instruments from Sierra are designed to measure and con- trol ultra low flows of clean gas. Special considerations must be taken to obtain optimum performance from your Model 101 Micro-Trak instrument.
  • Page 94 Appendix F Series 100 Instruction Manual Performance Specifications—Micro-Trak Accuracy + 1% of full scale including linearity at operating conditions Dial-A-Gas + 1% of full scale in all 10 standard gases Repeatability +0.2% of full scale Temp Coeff +0.025% of full scale per ºF (+0.05% of full scale per ºC) or better Pressure coeff +0.01% of full scale per psi (+0.15% of full scale per bar) or better Response Time...
  • Page 95 Series 100 Instruction Manual Appendix F Leak Integrity 5 X 10-9 atm cc/sec of helium maximum Power Requirements For Mass Flow Meters: 12-30 VDC, (130 mA, regulated). For Mass Flow Controllers: 24 VDC ±10% standard, (400 mA, regulated). 15-22 VDC ±10%, (800 mA) with optional regulator Control Range 2–100% of full scale flow;...

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