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990 dCLD II
Varian 990 dCLD II Leak Detector Manuals
Manuals and User Guides for Varian 990 dCLD II Leak Detector. We have
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Varian 990 dCLD II Leak Detector manual available for free PDF download: Operation Manual
Varian 990 dCLD II Operation Manual (162 pages)
Component Leak Detector
Brand:
Varian
| Category:
Security Sensors
| Size: 5 MB
Table of Contents
Table of Contents
5
Declaration of Conformity
13
Preface
14
Hazard and Safety Information
14
Vacuum Equipment and Cleanliness
15
O-Ring Care
15
Contacting Varian
16
Section 1. Introduction to the Model 990 Dcld II
17
Unpacking the 990 Dcld II
17
Control Unit
18
Front Panel Connections
18
Rear Panel Connections and Controls
19
Turbomolecular Pump Spectrometer Tube Assembly
20
Cables
21
Mating Connectors
21
Optional Front Control Panel
21
Specifications
22
Section 2. Customer Integration
25
Physical Considerations
25
Common Configurations
26
Configuration Comparison
27
Single Mechanical Pump Configuration
28
Dual Mechanical Pump Configuration
29
Split Flow Dual Mechanical Pump Configuration
30
Size of Mechanical Pumps
31
Electronic Considerations
32
Discrete I/O J3 Inputs
32
J3 Input Circuit Sketch
33
Discrete I/O J3 Outputs
34
J3 Output Circuit Sketch
35
BCD J4 Outputs
36
J4 Output Circuit Sketch
37
Host Serial Port J6
38
Section 3. Setup and Operations Via the Rear Panel
51
Physical Setup
51
Control Unit
51
Turbo Spec Tube Assembly
51
Connecting the Control Unit to the Turbo Spec Tube Assembly
52
Customer Controlled Connections
52
System Block Diagram
53
Optional Front Control Panel Connection
54
Discrete I/O Connection
55
Host Computer Connection
55
BCD Output Connection
55
System Sensitivity and Configuration
56
Initial System Parameter Setup
57
Parameters and Operating Modes
57
Commands for Operating Modes
57
Startup
66
Start up Indications on the Optional Front Control Panel
67
Calibration
67
Tuning
68
Running
68
Quick Start Checklist
69
Operation Via Rear Panel
70
Parallel Enable
70
Analog Leak Rate Output Voltage
71
Analog Leak Rate Output Voltage Conversion Charts
72
V/Decade Logarithmic Analog Output Voltage
73
Conversion of 2 V/Dec Log to Leak Rate if
74
Function Not Available
74
Shutdown
74
Section 4. Setup and Monitor Operations Via the Optional Front Control Panel
75
Control Buttons
76
Key Switch
78
Touch Screen Menus
78
Contrast Adjustment of the Touch Panel Display
78
Changing Variables in Touch Panel Screens
79
Selecting Options in Touch Panel Screens
79
Menu Hierarchy
80
Touch Panel Home Screen
81
Bar Graph Display: 0.8 X 10 -09 Atm CC/Sec
82
Dcld II Operating States
83
Dcld II Condition States
84
System Information Screen
85
System Software Version
86
Main Menu Selection Screen
87
Calibrated Leak Set-Up
87
Selecting Internal or External Calibrated Leak for Calibration
88
Selecting Normal or Fast Calibration Routine
88
Reject and Audio Set Points
88
Units Set-Up
89
Range Stop and Manual Range Set up and Control
89
Leak Rate Range Selection through Turbo Speed Set-Up
90
Output Control Setup
90
Bar Graph Display Set-Up
91
Leak Rate Analog Output Voltage Selection
91
Zeroing
91
Service Menus
92
Manual Calibration
92
Manual Tuning
93
Gauge Calibration
94
Section 5. Maintenance
95
Scheduled Maintenance
97
Daily Maintenance
98
Sensitivity Check Using the Optional Front Control Panel
98
Sensitivity Check Using the Diagnostic Serial Port J12
98
Recalibrate the Internal Calibrated Leak
99
Spectrometer Tube Overhaul
99
Removing the Spectrometer Tube Assembly
100
KF-25 Quick Clamp
101
Slotted Screws that Attach the Magnet Assembly to Spectrometer
102
Removing the Button TC
103
Removing the Ion Source
104
Removing the Ion Source
105
Ion Source Cavity
106
Removing the Preamplifier
107
Removing the Magnetic Poles
107
Removing the O-Ring from Magnetic Pole Piece
108
Examining and Cleaning the Spectrometer Parts
109
Vacusolv Cleaning Wipe
110
Reassembly
111
Dual Air Intake Filter Replacement
112
Ion Source Replacement Outside of Spectrometer Tube Overhaul
113
Reassembly
114
Manual Tuning
114
Manual Tuning Via the Serial Port
114
Example: Setting REPELLER Parameter Value Using J12 Diagnostic Port
115
Manual Tuning Via the Optional Front Control Panel
116
Spare Parts List
117
Section 6. Troubleshooting
119
General
119
Symptoms Discussed in this Section
120
POWER LED Does Not Light
120
HIGH VAC LED Does Not Light
121
SPEC TUBE LED Does Not Light or Stay Lit
122
Check the Control Unit SPEC TUBE LED Using Diagnostic Port Interface J12
122
Check the Control Unit SPEC TUBE LED Using Optional Front Control Panel Interface
122
No Helium Response
123
Check the Helium Response Using Diagnostic Port Interface J12
123
Check the Helium Response Using the Optional Front Control Panel Interface
124
Station Fails to Pump down
126
A High Number of Rejects, Suspected of Being False Rejects
126
Appendix A. Communications Protocol
129
Protocol
129
A-1 Internal Operating Parameters
130
A-2 Non-Volatile Operating Parameters
133
A-3 Spectrometer Operating Parameters
135
A-4 Leak Detection Actions
136
Appendix B. Customer Accessible Inputs and Outputs
145
Customer Accessible Inputs
145
Appendix C. Introduction to Leak Detection
147
Leak Testing-Why Is It Needed
147
Classes of Leak Detection
147
Terminology
148
Various Methods of Testing for Leaks
149
Helium Mass Spectrometer Leak Detection (MSLD
150
Principles of Mass Spectrometry
150
Application as a Leak Detector
150
The Nature of Flow in a Vacuum
150
Facts about Leak Rates
151
Leak Detection Methods
151
Test Piece Evacuated (Figure C-1A and Figure C-1B
152
Test Piece Pressurized (Figure
152
Test Piece Already Sealed (Figure
153
Mass Spectrometer Leak Detector-Simplified Description
154
C.7 Mass Spectrometer Leak Detector—Simplified Description
154
Index
155
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