Panasonic SP22P Maintenance Manual page 126

Vacuum Pump Consumable Parts Replacement (Option)
Exchanging procedures
1. Air suction filter
Exchange it based on the pressure down 0.02 MPa.
193C-085E
193C-086E
IN
193C-087E
Page 4
OUT
OUT
IN
EJ101H-030N
Turn off the power.
1
∗ Be sure to turn off the power for exchanging.
Loosen the element fixing bolt for
2
filter.
3 Remove the element.
Set the element, not to be mistaken
4
the IN/OUT position.
Element
193C-E-MMA0B-A00-00