4-3
4-4
4-5
OPTION
Page 8
4-2-9
Power Box Fan Motor ....................................................................................... 4-12
Under Axis Brake off .........................................................................................4-13
Feedback Error ................................................................................................. 4-15
4-2-14 Driver Error ........................................................................................................ 4-16
Lord Arrangement ..................................................................................... 4-19
4-3-1
Load List ................................................................................................... 4-22
4-5-1
Input Check after Error ...................................................................................... 4-27
4-5-2
INDEX
EXCHANGING THE CONSUMABLE
PARTS FOR THE VACUUM PUMP
193C-E-MMA00-A02-02