Panasonic SP22P Maintenance Manual page 128

Vacuum Pump Consumable Parts Replacement (Option)
Vacuum pump
See the resolution view of DOP-80SKMA on the next page.
The vacuum pump consists of two of the same components. This part describes how to
replace on the right side, and use the same procedure for the other side.
Tools
A. Changing gaskets
1. Remove four hexagon socket head cap screws (M5) attatched to the pump head cover
(
2
2. Change black gaskets (
B. Changing O-rings (S-67, P-10)
1. Remove the pump head plate (
2. Change S-67 O-ring (
3. Change four P-10 O-rings (
C. Changing cup packings
There is a cup packing (
intake valve interference prevention rubber (
1. Take off the cylinder (
2. Remove the cup packing retainer (
(
14
3. Set the cylinder (
then push the cup packing retainer into the cylinder.
4. Clean off dirt on the cup packing retainer (
rubber (
5. Place the cup packing retainer (
the screws removed at step 1.
6. Wipe the intake valve interference prevention rubber(
ing retainer (
minute after wiping).
7. After about a minute, wipe them again with a rag, and attach the rubber to the hole with
LOCTITE 407, ensuring proper contact and adhesion.
D. Changing intake and exhaust valves
The pump head plate (
1. Unscrew M3 screw to take off the exhaust valve holding plate (
(
13
2. Remove and replace the intake valve (
the exhaust valve.
3. Reassemble them in the reverse order of disassembling.
Page 6
Hexagonal wrench (4 mm of side)
Silicone primer
).
) inside the cover.
11
) located in the upper part of cylinder (
10
) among connecting rod (
7
), and unscrew three flat countersunk head screws.
4
).
) to the casing (
4
).
14
) into which the rubber goes, with the silicone primer (leave them for a
6
) has an exhaust valve on its front and intake valve on its back.
3
), and change the valves.
) in the same way as that for gasket replacement.
3
) inside connector tubes (
16
5
).
14
) and intake valve interference prevention rubber
6
), and put the cup packing (
1
) and intake valve interference prevention
6
) on the cup packing (
6
) at the back side in the same way as that for
8
Phillip screwdriver
LOCTITE 407
).
4
). (two rings per tube)
9
) cup packing retainer (
) at the center of it,
7
), and fit them together with
7
) and the hole on the cup pack-
14
) and exhaust valve
12
), and
6
193C-E-MMA0B-A00-00