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10
General Maintenance
To Install a Micro-Ion Vacuum Gauge
WA R N I N G
C A U T I O N
130
The Micro-Ion vacuum gauge is optional for EI operation.
Materials needed
• KF16 O-ring 0905-1463
• Micro-Ion vacuum gauge (G3397A)
• Power cord
• Micro-Ion vacuum gauge cable (G3170-60805)
• Screwdriver, Torx T-15 (8710-1622)
Procedure
1
Vent the instrument.
Loosen the six captive screws on the back of the rear MSD
2
cover.
Pull the cover forward and off the MSD. See
3
Do not remove any other covers. Dangerous voltages are present
under other covers.
Do not use excessive force or the plastic tabs that hold the cover to
the mainframe will break off.
4
Detach the provided KF-16 clamp from the analyzer
chamber flange.
Place the KF16 O-ring in the groove on the analyzer chamber
5
flange. Replace it if it is worn or damaged.
Hold the gauge flange against the chamber flange with the
6
O-ring. Push the KF-16 clamp over both flanges.
Insert the long screw, add the thumbnut, and tighten.
7
Attach the cable to the back of the gauge.
8
Replace the MSD back cover.
9
Pump down the MSD.
10
Figure
Troubleshooting and Maintenance Guide
8.
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Troubleshooting
