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Bruker DektakXT Manual
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Bruker DektakXT Manual

Bruker DektakXT Manual

Mechanical profilometer
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The DektakXT stylus surface profiler is an advanced thin and thick film step height
measurement tool with the following characteristics:
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equipment compatible with 2", 4", 6" and 8'' wafers
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Selectable magnification, 1 to 4mm FOV
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Scan Length Range 55 mm with stitching option
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Vertical range 1 mm
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step-height repeatability of 5A
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N-Lite+ Low Force with 0.03 to 15mg
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3D stress and 3D mapping
 
DEKTAK XT 
MECHANICAL PROFILOMETER 
 
 
 
 
1 

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Summary of Contents for Bruker DektakXT

  • Page 1 MECHANICAL PROFILOMETER        The DektakXT stylus surface profiler is an advanced thin and thick film step height measurement tool with the following characteristics: equipment compatible with 2”, 4”, 6” and 8’’ wafers Selectable magnification, 1 to 4mm FOV Scan Length Range 55 mm with stitching option...

  • Page 2: Performing A Measurement

      Performing a measurement 1. Open the software Vision64, then click “OK” for the XY initialization and then “OK” for the Theta initialization and wait for the general window (see figure I). X‐Y control  Measurement options  Live Video Display  Theta control Figure I : DEKTAK home page 2.
  • Page 3   6. Adjust the focus level of the video image by moving the slider on the focus Bar at the bottom of the left pane of the Live Video Display. 7. Before starting the measurement, you must place the area of interest on the sample under the stylus by adjusting the position of the motorized XY sample-positioning stage by keeping clicking on the X-Y control panel and moving the mouse.
  • Page 4   Then place the two cursors (R and M), click right, and click Level Two Point Linear. When you proceed to a height measurement, place the cursors (R & M) on the two points you want to measure: 12. To quit the equipment, click on the icon "Measurement setup", click Tower Home button, then unload sample button.
  • Page 5   Settings on the Measurement Options Tab Scan Type: Select from the following: • Standard Scan: A normal scan type in which the scan is performed across the surface of a sample. Because the tower is nulled before each scan, each successive scan has its own reference point.
  • Page 6 Use Soft Touchdown: If your system includes the 3D Mapping Option, select this check box to make the DektakXT stylus profiler increment the stylus force up to the specified value. This causes the stylus to descend more slowly, thus minimizing the possibility of scratching the sample.
  • Page 7   To resume: performing a measurement • Load your sample • Move the stylus down in contact with the sample, the move it to its Up position. • Adjust the Intensity and Focus if necessary • Adjust the position of the X-Y and Theta stage until you find the location of interest on your sample •...