Bruker DektakXT User Manual
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Bruker DektakXT User Manual

Bruker DektakXT User Manual

Stylus profiler
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  • Page 2 EKTAK TYLUS ROFILER ANUAL P/N 980-365...
  • Page 3 Offenders will be liable for damages. All rights reserved. All configurations and specifications are subject to change without notice. TRADEMARK NOTICE Vision64 is a registered trademark of Bruker Corporation. All other brand or product names are trademarks or registered trademarks of their respective holders. Bruker Nano Surfaces Business...
  • Page 4 ARRANTY Bruker Corporation Statement of Limited Warranty This product is covered by the terms of the Bruker Corporation standard warranty as in effect on the date of shipment and as reflected on the Bruker Order Acknowledgement and Quote. While a summary of the warranty statement is provided below, please refer to the Order Acknowledgement and/or Quote for a complete statement of the applicable warranty provisions.
  • Page 5 Seller assumes no liability under the above warranties for equipment or system failures resulting from (1) abuse, misuse, modification or mishandling; (2) damage due to forces external to the machine including, but not limited to, acts of God, flooding, power surges, power failures, defective electrical work, transportation, foreign equipment/attachments or Buyer-supplied replacement parts or utilities or services such as gas;...

  • Page 6: Table Of Contents

    ABLE OF ONTENTS Chapter 1. Safety ............1-1 Safety Features .
  • Page 7 Loading the Sample ............3-4 Unloading the Sample.
  • Page 8 Applying Filters ..............5-11 Performing Analyses .

  • Page 10: Chapter 1. Safety

    AFETY The DektakXT™ system may be set up and operated only in accordance with the instructions outlined in this manual. In the chapters that follow, the messages below indicate that special vigilance is required. CAUTION Whenever you see a Caution note, there is a possibility that data will be lost, or there is some specific action that you must perform for the system to work properly.

  • Page 11: White Power On Button And Black Power Off Button

    The 24 VDC control circuit in the EMO Box also remains energized. SAFETY PRECAUTIONS The DektakXT system is designed to minimize potential health and safety hazards during normal operation and routine maintenance activities. As with any mechanical system that uses electrical energy and compressed air, it contains some physical and electrical hazards.
  • Page 12 injury or damage to the system. The following table illustrates each label, describes its meaning, and indicates where it appears on the system. Table 1-1: Warning, Safety, and Compliancy Labels Safety...

  • Page 13: Safety And Health Hazards

    Mechanical hazards exist in the systems wherever moving parts are located, such as slides. Protection against most of the mechanical hazards in the DektakXT system is provided in the form of a hood and system base. Wherever possible, physical guards have been placed around moving parts to prevent personnel from contacting them.

  • Page 14: General Lockout/Tagout Procedures

    Turn off the computer following the normal shutdown procedure. Unplug the first cord on the power supply adapter from its receptacle on the signal processor on the back of the DektakXT stylus profiler. Unplug the second cord on the power supply adapter from its wall outlet.
  • Page 15 NOTE – No routine tasks for the DektakXT system are classified as Type 4. During any troubleshooting or maintenance activities that are performed while the DektakXT system is operating, the technician should always be able to easily reach the button on the...

  • Page 16: Chapter 2. System Overview

    The DektakXT stylus surface profiler is an advanced thin and thick film step height measurement tool. In addition to profiling surface topography and waviness, the DektakXT system measures roughness in the nanometer range. Available with a standard manual sample-positioning stage (see...

  • Page 17: How The System Works

    HOW THE SYSTEM WORKS The DektakXT system takes measurements electromechanically by moving a diamond-tipped stylus over the sample surface according to a user-programmed scan length, speed, and stylus force. The stylus is linked to a Linear Variable Differential Transformer (LDVT), which produces and processes electrical signals that correspond to surface variations of the sample.

  • Page 18: Profiler Components

    Figure 2-3: X-Y Auto Stage with Wafer Vacuum Sample Fixture (Chuck) PROFILER COMPONENTS As shown in Figure 2-1, the DektakXT stylus surface profiler system contains all of the mechanical, electrical, and optical components for sample positioning, sample viewing, and scanning/measurement. As described in Stage Configurations on page 2-2, the system can be configured with a manual or X-Y auto stage.

  • Page 19: Sensor Head And Stylus Assembly

    3D maps or long scans for measuring stress. Electronics The DektakXT system includes a power supply adapter with an input voltage 100 - 240 VAC (see ). This unit sends power to the various system components.

  • Page 20: Base Feet

    A signal processor provides monitoring and control of the LVDT signal, stylus force coil, stage motor, and LED illumination (see ). An integrated cable connector panel Figure 2-6 handles system input, output, and power signals. Power demand is 110 VA maximum with a standard outlet power connection. Figure 2-5: Power Supply Adapter Figure 2-6: Signal Processor Base Feet...

  • Page 21: Environmental Enclosure

    MERGENCY MERGENCY DektakXT system but leaves power on to the computer and monitor. After the E MERGENCY button has been depressed, the power cannot be returned to the system until it has been released. This is accomplished by turning it clockwise by one-eighth turn.

  • Page 22: Computer And Software

    Power Off button Figure 2-10: EMO Box COMPUTER AND SOFTWARE The DektakXT system can include the optional Dell™ computer, keyboard, mouse, and DVD drive. If you prefer to used your own preferred computer it must fill the following requirements: •...

  • Page 23: Options And Accessories

    Figure 2-12: Output Display for a Single-Scan Measurement OPTIONS AND ACCESSORIES A number of options and accessories are available for the DektakXT system, including: • A video monitor that provides a 23-inch, high-resolution, flat-panel color display (see Figure 2- 13). It shows programs and graphics in full color, along with a color video image of the sample surface from the USB camera in the tower assembly.
  • Page 24 Figure 2-14: Step Height Standard • A variety of styli for measuring fine surface features and softer samples. • Stress Measurement for calculating tensile or comprehensive stress on processed wafers. • The 3D Mapping Option that enables true 3D-mapping (see Figure 2-15), calculates the bearing ratio, and performs many other analyses.

  • Page 26: Chapter 3. Basic Operations And Maintenance

    PERATIONS AND AINTENANCE This chapter describes the basic use of your DektakXT stylus surface profiler, including the software procedures that involve profiler control. For instructions regarding other software procedures, see Chapter 5 of this manual and the Vision64 online Help.
  • Page 27 The scan stage initializes. You can now safely position the sample beneath the stylus. • The Vision64 Welcome screen appears, followed by the Vision64 Instrument tab, which includes the DektakXT Live Video Display (see Figure 3-4). Allow the system to warm up for approximately 15 minutes before taking a scan measurement.

  • Page 28: Powering Down The System

    Figure 3-4: Vision64 Instrument Tab, Including the Live Video Display POWERING DOWN THE SYSTEM IMPORTANT SAFETY INFORMATION! The DektakXT system is equipped with a red E button located on the EMO Box connected to the back of the profiler (see...

  • Page 29: Loading And Unloading The Sample

    To power down the DektakXT system: Close the Vison64 software as described in Closing Vision64 on page 5-1. Press the black O button on the EMO Box (see Figure 3-5). This shuts off power to all system devices but the computer, monitor, power supply adapter, and 24 VDC control circuit in the EMO Box.

  • Page 30: Unloading The Sample

    To bring the tower all the way up to its home position, click the Tower Home button NOTE – The DektakXT profiler automatically towers down to bring the stylus into contact with the sample whenever you start a single-scan measurement, 3D map scan, or automation program.

  • Page 31: Using The Manual Stage-Positioning Controls

    (To re-null the tower, tower up and then tower down.) Leveling the Stage All stage configurations of the DektakXT system allow you to manually level the sample-positioning stage by turning the leveling knob below it (see Figure 3-9).

  • Page 32: Using The Auto Stage-Positioning Controls

    Stage-leveling knob Figure 3-9: Stage-Leveling Knob As you perform manual stage leveling, follow these guidelines: • To view the effect of leveling on the profile trace in real time, perform stage leveling while a scan measurement is in progress. • To verify that the maximum possible level has been obtained, position the cursors so that they intersect the same horizontal plane.
  • Page 33 Figure 3-10: X-Y Stage Control Panel To set the X-Y position of the motorized sample-positioning stage: In the X-Y Control Panel in the Live Video Display (see Figure 3-10), click the blue Gear icon in the upper right corner to enter the select the units as well as the speeds for Fast, Medium, and Slow (see Figure 3-11).

  • Page 34: Theta Control Panel

    at the lower left. Click and drag to move the stage to another area of interest and display it in the Live Video Pane. When you have obtained the correct stage position, release the mouse button. • Either type your locations in the X and Y fields or click the Click the Edit Mode button Move button to move the stage to those locations.

  • Page 35: Removing An Installed Stylus

    When a stylus becomes worn or you want to measure another type of sample, you must remove the currently installed stylus from the sensor head (see Figure 3-18) before replacing it with a different one. Figure 3-14: Sensor Head and Stylus on the DektakXT Profiler 3-10 Basic Operations and Maintenance...
  • Page 36 To remove a stylus from the sensor head on the DektakXT profiler: Locate the protective case in which the stylus was shipped and place it near the DektakXT stylus profiler (see Figure 3-15). Figure 3-15: Protective Stylus Case Locate the black plastic stylus exchange tool (see Figure 3-18) and place it near the stylus case.
  • Page 37 Rotate the thumbscrew on the stylus exchange tool so that a gray circle (NOT a green one) is visible and the magnet is NOT engaged (see Figure 3-18). Magnetic disk pad Alignment pin (one of five) Gray circle indicating that the magnet is disengaged Channel for holding the...

  • Page 38: Installing A Different Stylus

    NOTE – The following instructions assume that you have already removed the magnetic shield from the sensor head on the DektakXT profiler. If this is not the case, follow steps 4 - 6 in the previous section. Tower up to the Home position to allow room for maneuvering.
  • Page 39 Magnetic disk pad Alignment pin (one of five) Gray circle that indicates that the magnet is disengaged Channel for holding the Thumbscrew stylus Figure 3-21: Stylus Exchange Tool with Its Magnet Disengaged Locate the case that holds the stylus that you want to install. After opening the case, use tweezers to gently lift the stylus holding ONLY THE SILVER MAGNETIC DISK PAD AT ITS BACK END (see Figure 3-22).
  • Page 40 Figure 3-23: Stylus Exchange Tool with a Stylus Seated in the Channel and the Magnet Engaged Place the stylus exchange tool underneath the sensor head on the DektakXT profiler. Holding the stylus exchange tool by the sides, align the alignment pins on its top with the outside of the front of the sensor...

  • Page 41: Cleaning The Stylus Tip

    Turn the brass thumb screw clockwise to attach the magnetic shield as shown in Figure 3-25. Do not tighten the screw—just “snug” it. Brass thumb screw on sensor head Magnetic shield Figure 3-25: Sensor Head with Magnetic Shield Attached CLEANING THE STYLUS TIP Tower up to the Home position If there is a sample on the chuck or stage, remove it.

  • Page 42: Electronically Configuring And Calibrating The Profiler

    (which controls the gradual increase of the stylus force to a specified value) and Tower LVDT Phase and Force (which controls the production and processing of the electrical signals that correspond to surface variations of the sample). Call Bruker Customer Service for help in making your settings. When you are done, click OK.
  • Page 43 • Keep the environmental enclosure door closed both when the DektakXT system is in use and when it is not. • Never connect or disconnect any cables when the power is on. • Do not lower the tower without the stage assembly in place.

  • Page 44: Chapter 4. Taking Measurements And Analyzing Data

    AKING EASUREMENTS AND NALYZING This chapter tells you how to take manual and automated scan measurements. It also explains the manipulation and analysis of scan data. Figure 4-1: DektakXT System with an Open Enclosure Door Taking Measurements and Analyzing Data...

  • Page 45: Setting The Measurement Options

    SETTING THE MEASUREMENT OPTIONS Before taking a manual measurement or an automated series of measurements, you must make selections in the Measurement Setup window (see Figure 4-2). If you save these selections as a Vision recipe that you designate as the default, the system will automatically apply them to every future measurement.
  • Page 46 Use Soft Touchdown: If your system includes the 3D Mapping Option, select this check box to make the DektakXT stylus profiler increment the stylus force up to the specified value. This causes the stylus to descend more slowly, thus minimizing the possibility of scratching the sample.

  • Page 47: Taking A Standard Manual 2D Measurement

    Z versus Y plot. The length of the trace that you can define depends upon the DektakXT stage that is installed. For a DektakXT system with the manual 150mm X-Y stage, the standard scan length can range from 50um minimum to 55mm maximum.
  • Page 48 Click Tower Down in the Live Video Display. The tower lowers to the measurement position with the stylus down, and the stylus makes brief contact with the sample. The stylus then moves to its Up position. If necessary, adjust the Intensity slider in the Live Video Display so that the sample is clearly illuminated. Figure 4-3: Illumination Bar Adjust the position of the X-Y or theta stage until you find the location of interest on your sample.
  • Page 49 Figure 4-4: Measurement Options Window Click the Advanced Options tab and make sure that the Number of Measurements is set to 1. Click the Measurement button on the Ribbon (see Figure 4-5) and then select Measurement. The events that now occur are described in What Happens During a Scan Measurement on page 4-6.

  • Page 50: What Happens During A Scan Measurement

    Stage-leveling knob Figure 4-6: Stage-Leveling Knob At the end of the measurement, the Data Analysis window appears (see Figure 4-6). If desired, click Save > Dataset. Figure 4-7: Data Analysis Window What Happens During a Scan Measurement When a measurement begins, the tower assembly lowers and the stylus descends. You can see the stylus and its shadow in the Live Video Display (see Figure 4-7).
  • Page 51 Figure 4-8: Live Video Display Showing the Descending Stylus and Its Shadow After the stylus tip contacts the sample surface, it begins to scan over the surface features. The Live Video Display shows a real-time image of the stylus along with a measurement trace of the surface in the Data Aquisition window to the right (see Figure 4-8).
  • Page 52 Figure 4-9: Live Video of the Stylus with the Real-Time Measurement Trace on the Right Figure 4-10: Real-Time Picture of the Sample During a Measurement Taken with the 3D Mapping Package Taking Measurements and Analyzing Data...

  • Page 53: Creating An Automation Recipe That Includes Deskew Points

    Figure 4-11: Data Analysis Display CREATING AN AUTOMATION RECIPE THAT INCLUDES DESKEW POINTS When you are developing an Automation recipe for a production reference sample, all programmed X and Y coordinates relate to the position of that particular sample as it rests on the stage. It is unlikely that you can load subsequent samples at the exact physical location of the reference point that was used to define the Automation recipe.
  • Page 54 Figure 4-12: Setting the Deskew Reference Point To set the Deskew alignment point: Drive the stage to the area on the image that you want to use as the Deskew alignment point. Tower down In the Automation Editor, click the Add Alignment Site button. A solid red circle now appears at that location (see Figure 4-13).
  • Page 55 To program the measurement points: Drive the stage to the area on the image that you want to use as the first measurement point. Tower down In the Automation Editor, click the Measurement Site button. A number outlined by a green circle now appears at that location (see Figure 4-14).

  • Page 56: Appending Analytical Functions

    At any time, you can click to cancel the automated sequence. At the end of an automation run, a message informs you that the system has “Completed script named [Script Name].” Click OK. APPENDING ANALYTICAL FUNCTIONS After you take a scan measurement, Vision64 can calculate a number of analytical functions for analysis of roughness, waviness, step height, and geometrical measurements.

  • Page 57: Setting The Cursor Locations And Bandwidths

    Figure 4-17: Analytical Functions window Select your analytical functions and then enter the positions and bandwidths of the cursors that define the area in which the analytical functions should be calculated. Click Calculate. SETTING THE CURSOR LOCATIONS AND BANDWIDTHS The red reference (R) cursor and green measurement (M) cursor in the Data Analysis Display define the portion of the profile trace on which to calculate analytical functions on the measurement results (see Figure...
  • Page 58 Figure 4-18: 2D Profile of the Data Analysis Display Showing the R and M Cursors To change the position of each cursor on the measurement data, click on it and then drag it with the mouse. To change the bandwidth of a cursor, click it to display small boxes that you can then drag. To reposition the cursors while maintaining the same distance between them, click on one of the cursors, and then hold down the key while dragging that cursor.

  • Page 59: Applying Software Leveling

    APPLYING SOFTWARE LEVELING Software leveling allows the system to quickly and automatically level the profile trace. You must software level the stage in order to obtain accurate step height measurements and accurate readings from analytical functions. Software leveling sets the reference and measurement cursors at zero to establish a reference for measurements.
  • Page 60 Figure 4-21: Terms Removal (F-Operator) in the Data Analyzer Tree Position the R and M cursors as far apart as possible along the baseline of the step. Right-click and select Two-Point Linear Fit rom the Data Leveling Settings pop-up menu (see Figure 4-22).

  • Page 61: Creating A Database

    CREATING A DATABASE NOTE – Every time you change the selection of analytical functions that you want to log, you must create a new database. To create a database: Select the analytical functions, cursor positions, and analyses and filters that you want to include in this database.
  • Page 62 The following buttons appear at the bottom of the Database Setup View window: Figure 4-24: Buttons at the Bottom of the Database Setup View window Click the desired button and make the appropriate entries. NOTE – Click Select All Analytical Results to populate the database with the current selections or analysis parameters in the Analytical Results table.

  • Page 63: Creating An Analyzer Recipe

    CREATING AN ANALYZER RECIPE An Analyzer recipe contains your selected analytical functions, 2D analyses, and filters. If your system includes the 3D mapping package, it also contains the default plot and 3D analysis/filter flow. IMPORTANT! The Analyzer recipe that is open when you save a Vision recipe becomes part of that Vision recipe.
  • Page 64 Below the Data Analyzer, the Analysis Toolbox contains all of the analyses and filters that can be applied to a dataset (see Figure 4-27). Figure 4-27: Analysis Toolbox To apply an analysis or filter, click it in the Analysis Toolbox. The selected operation is immediately performed on the active scan dataset.

  • Page 65: Setting The Parameters For An Analysis Or Filter

    IMPORTANT! After you click a second analysis (not a filter), the Analysis toolbox goes blank because you can perform only one analysis per branch. If you want to perform more than one analysis, click the Profile Filter branch and then add another analysis, which then becomes an additional branch of the Data Analyzer.

  • Page 66: Viewing And Analyzing Stored Data

    VIEWING AND ANALYZING STORED DATA DektakXT measurement results are stored in files with an .opdx extension. To open one, select Open > Dataset. Multiple stored datasets can be simultaneously opened and displayed in the Active Data Gallery (see Figure 4-28). Click a thumbnail image of a dataset to make it the active one in the Data Analysis window (standard DektakXT) or the Main Display Area (3D Mapping Option).

  • Page 68: Opening Vision64

    This chapter explains basic Vision64 operations and describes the user interface. For full instructions on using Vision64, see its online Help. NOTE – For instructions on Vision64 software features that control the DektakXT profiler, see Chapter 3. OPENING VISION64 Select Start»Vision64 or double-click the Vision64 application button on the desktop or task bar.

  • Page 69: Important Vision64 Directories

    IMPORTANT VISION64 DIRECTORIES The Vision64 application directory, C:\Program Files\Veeco\Vision64, holds the Vision64 executable code. The directory C:\ProgramData\Veeco\Vision64 holds data and configuration information for the Vision64 application. USING THE VISION64 ONLINE HELP IMPORTANT! Online assistance in using Vision64 is immediately available through the Vision Help menu.

  • Page 70: Selecting Windows For Display

    SELECTING WINDOWS FOR DISPLAY Click the Windows button on the toolbar. From the list, select the windows that you want to display (see Figure 5-3). Figure 5-3: Vision64 Window Selection Buttons and Menu WORKING WITH VISION VIEWS The Vision64 workspace can simultaneously display one or more of the following Vision View windows, which appear in Figure 5-3 through...
  • Page 71 Figure 5-4: Measurement Setup Vision View Figure 5-5: Automation Setup Vision View Using Vision64...
  • Page 72 Figure 5-6: Data Acquisiton Vision View Figure 5-7: Data Analysis Vision View Using Vision64...

  • Page 73: Displaying Other Vision64 Windows

    The Live Video Display that gives you a live view of your sample and the stylus (see Figure 5-10). • The Instrument Control Panel that allows you to control the DektakXT profiler (see Figure 5-11). • The Active Gallery Display that simultaneously displays thumbnail views of all active datasets.
  • Page 74 NOTE – To use the Analysis toolbox: Click an icon to immediately apply it to the active dataset. Right-click an icon to open an analysis setup dialog box. The Analysis Toolbox is available only when Raw Data is selected in the Data Analyzer. Figure 5-10: Live Video Display Using Vision64...
  • Page 75 Figure 5-11: Instrument Control Panel for the X-Y Stage Data Analysis Vision View Active Gallery showing four open showing the selected dataset datasets Figure 5-12: Active Gallery with Multiple Datasets Using Vision64...

  • Page 76: More Features Of The Interface

    Figure 5-13: A DektakXT Database MORE FEATURES OF THE INTERFACE Application Menu Button Use this button to open the Application Menu, from which you can access the most common Vision64 application functions (see Figure 5-14). Using Vision64...

  • Page 77: Changing The Units And Other User Preferences

    Figure 5-14: Application Menu Ribbon This taskbar (see Figure 5-15) provides access to all of the functions available in Vision64. Note that the most commonly used buttons are permanently displayed to the left and right of each tab on the Ribbon. Ribbon Tabs Click these tabs to make the Ribbon display the Analyze Tab (see Figure 5-15), the...
  • Page 78 To change units before or after a scan measurement: On the Preferences tab of the Ribbon, click the Units and Numbers button Make your settings in the Units dialog box (see Figure 3-15), and then click OK. Figure 5-16: Units Dialog Box APPLYING FILTERS To apply a filter to the active dataset, click Profile Filter in the Data Analyzer (see Figure...
  • Page 79 Figure 5-17: Surface Profile Filter Settings Dialog Box Select the filter that you want to apply. If this is a Gaussian filter, select Apply Short Cutoff or Apply Long Cutoff to determine the frequency cutoff wavelength. In the Output section, select the type of profile in which you want to view the output.
  • Page 80 Figure 5-18: Bearing Ratio Analysis Dialog Box 3D MAPPING Option If your Vision64 software includes the 3D Mapping Option, the user interface and workflow operate somewhat differently than described in this chapter. For example, the Data Visualization Taskbar allows you to quickly change the displayed plot while the Combo Plot drop-down list lets you select 5-19).
  • Page 82 Numerics DektakXT Stylus Profiler - cont. 3D Mapping Option Options and accessories Principle of operation Scanning operation Analysis Toolbox 4-21, 5-6 Analytical functions, appending 4-13 Analyzer recipes Electrical task classification 4-20 Application Menu button Electronics Auto Stages Emergency Off button...
  • Page 83 Measurements, scan Theta stage control Automated 4-10 Tower assembly Manual 4-4 Towering up and down Mechanical hazards Turning on the system Meta data, selecting and viewing 4-22 Monitor 2-7, 2-8 Units, changing 5-10 User preferences, changing Online help 5-10 Optics, adjusting illumination Vision recipes 4-22 Vision Views...

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