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Pfeiffer HiPace 300 Operating Instructions Manual

Turbopump
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HiPace 300
Turbopump
Operating Instructions
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Summary of Contents for Pfeiffer HiPace 300

  • Page 1 HiPace 300 Turbopump Operating Instructions...

  • Page 2: Table Of Contents

    12.1 HiPace 300, 24 V DC......... 32 12.2 Differences at HiPace 300, 48 V DC ......33 Technical data and dimensions .

  • Page 3: About This Manual

    1 About this manual 1.1 Validity This operating manual is for customers of Pfeiffer Vacuum. It describes the func- tioning of the designated product and provides the most important information for safe use of the unit. The description follows applicable EU guidelines. All informa- tion provided in this operating manual refer to the current state of the product's de- velopment.
  • Page 4 About this manual Pictograph Prohibition of an action or activity in connection with a definitions source of danger, the disregarding of which may result in serious accidents. Warning of a displayed source of danger in connection with operation of the unit or equipment. Command to perform an action or task associated with a source of danger, the disregarding of which may result in serious accidents.

  • Page 5: Safety

    NOTE Installation and operation of accessories Pfeiffer Vacuum pumps can be equipped with a series of adapted accessories. The in- stallation, operation and maintenance of connected devices are described in detail in the operating instructions of the individual components.

  • Page 6: Protective Equipment

    Safety • Keep leads and cables well away from hot surfaces (> 70 °C). • Never fill or operate turbopump with cleaning agent. • Do not operate the turbopump with open high vacuum flange. • Do not carry out any unauthorized modifications or conversions to the pump. •...

  • Page 7: Improper Use

    The product is sealed at the factory. Damaging or removal of a closure seal leads to the loss of liability and warranty entitlements.  Do not open the product within its warranty period!  For process-related shorter maintenance intervals please contact the Pfeiffer Vacu- um Service.

  • Page 8: Transport And Storage

    Transport and storage 3 Transport and storage 3.1 Transport  Reuse the transport container. Vacuum pumps should be transported or shipped in the original packing only.  Only remove the protective covers from the high vacuum and the fore-vacuum side immediately before connection. ...

  • Page 9: Product Description

    • Protective cover for the high vacuum and the fore-vacuum flange • Operating instructions 4.2 Function The turbopump HiPace 300 forms a complete unit together with the electronic drive unit TC 400. For the voltage supply only Pfeiffer Vacuum power supplies may be used (e.g.TPS or DCU).

  • Page 10: Range Of Application

    • High vacuum side: maintenance-free permanent magnetic bearing. • Fore-vacuum side: ceramic ball bearing. Drive Electronic drive unit TC 400 4.3 Range of application The pump HiPace 300 must be installed and operated under the following ambient conditions: Installation location weather protected (indoors) Protection category...

  • Page 11: Installation

    • When using a casing heating and a water cooling unit the temperature of the connected flange of the vacuum chamber must not exceed 120 °C. • The pump may be fastened to the floor only after consultation with Pfeiffer Vac- uum.
  • Page 12 Example: How to secure against shifting and tipping by external tremors Use of a splinter The installation of a Pfeiffer Vacuum centering ring with splinter shield or protec- tion screen in the high vacuum flange protects the turbopump against foreign bod- shield or protection ies coming from the chamber.
  • Page 13  The combination of different flange types is impermissible in any case.  Pfeiffer Vacuum will not accept any liability for all damages resulting from impermis- sible fastening. NOTE...
  • Page 14 "hex screw and through hole". The following elements are re- quired: • The valid mounting kit of the Pfeiffer Vacuum accessories programme. • A copper seal • A protection screen or splinter shield can optionally be used.

  • Page 15: Connections To The Turbopump

    For voltage supply of the electronic drive unit TC 400, only use original power sup- plies (e.g. TPS 310 or DCU 310). Use of other power supplies only after consultation power supply with Pfeiffer Vacuum. Connecting cables are available from the Pfeiffer Vacuum ac- cessory programme. WARNING Danger of electric shock In case of defect, the parts connected to the power supply are under voltage.
  • Page 16 PM 061 352 -T Fig. 5: Conneting the TC 400 to a power supply pack using a Pfeiffer Vacuum cable  Switch off switch S1 on the mains pack (position "0").  Insert the connection cable with the socket in the connection "DC in" on the elec- tronic drive unit and close the bayonet lock.
  • Page 17 Installation Connecting the fore- Recommendation: As backing pump, use a dry-compressing vacuum pump or a rotary vane pump from the Pfeiffer Vacuum programme. The backing pump must vacuum side generate a vacuum pressure of ≤ 5 mbar. WARNING Damage to health due to poisonous gases Process gases can damage health and contaminate the environment.
  • Page 18 Allen head screw Air cooling unit Counter sunk screw  Fix the Pfeiffer Vacuum air cooling unit to the holes of the turbopump using two screws.  Plug in and fix the accessory’s control lead to the corresponding accessory con- nection port on the TC 400.
  • Page 19 Installation Heating jacket The turbopump and vacuum chamber can be heated to reach the final pressure more quickly. Use of a heating jacket is only permissible for pumps with the high vacuum flange in stainless steel design. The heating duration depends on the de- gree of contamination as well as the final pressure to be reached and should be at least 4 hours.
  • Page 20 • When operating the pump with more than 50 % of the maximum gas through- put, sealing gas must be used to ensure rotor cooling. • The sealing gas flow rate amounts 12-15 sccm for the HiPace 300. Sealing gas supply without control valve Fig.
  • Page 21  Install the sealing gas supply (e.g. inert gas) via a connection adapter or on the inlet side (G 1/8") of the control valve. Water cooling The turbopumps HiPace 300 with TC 400 have water cooling as standard equip- ment. • In case of increased backing pressure (> 0.1 mbar) and/or operation with gas throughputs, either air or water cooling may be used.

  • Page 22: Operation

    Pumping of gases with a higher molecular mass in the wrong gas mode can lead to de- struction of the pump.  Ensure the gas mode is correctly set.  Contact Pfeiffer Vacuum before using gases with a greater molecular mass (> 80). Switch ON/OFF AC in Mains connection...

  • Page 23: Function Description

    "remote" connection  Consider the following manuals for the operation via remote control: • Operating instructions "Electronic drive unit TC 400"  Consider the following manuals for the operation via Pfeiffer Vacuum display Operation with DCU and control units: or HPU •...

  • Page 24: Monitoring Of The Operation Conditions

    – The valve cross section for the venting rate of 15 mbar/s must be adapted to the size of the vacuum chamber. – For small vacuum chambers, use the Pfeiffer Vacuum venting valve.  Then vent with an additional venting valve of any desired size.

  • Page 25: Maintenance / Replacement

     Decontaminate affected parts before carrying out maintenance work. NOTE Disclaimer of liability Pfeiffer Vacuum accepts no liability for personal injury or material damage, losses or op- erating malfunctions due to improperly performed maintenance. The liability and war- ranty entitlement expires.
  • Page 26 Maintenance / replacement End cover Operating fluid reservoir Allen head screw  Screw out the allen head screws (3 pieces) from the end cover at the bottom of the turbopump.  Remove the end cover. Pay attention to O-ring. Operating fluid reservoir Porex rod Splash nut ...

  • Page 27: Replacing The Electronic Drive Unit

    Maintenance / replacement 7.3 Replacing the electronic drive unit CAUTION Damages to the pump and drive Even after the mains power is switched off, the subsequently running pump delivers electric power to the electronic drive unit. There is a danger of electric body contact by premature separating the pump from the electronic drive unit.

  • Page 28: Decommissioning

     Check turbopump for contamination and moisture.  Clean the turbopump externally with a lint-free cloth and little industrial alcohol.  If necessary, have Pfeiffer Vacuum Service clean the turbopump completely.  If necessary, have the bearings replaced. Take into account the total running time.

  • Page 29: Malfunctions

     Reset via pin 13 on the "REMOTE" connec- tion  Differentiated malfunction display is possi- ble via DCU or HPU  Contact the Pfeiffer Vacuum Service If no Pfeiffer Vacuum display and control unit is available, please contact the Pfeiffer Vacuum Ser- vice.

  • Page 30: Service

    Service 10 Service Pfeiffer Vacuum offers first-class service! • Operating fluid and bearing change on the spot by Pfeiffer Vacuum FieldService • Maintenance / repair in the nearby ServiceCenter or ServicePoint • Fast replacement with exchange products in mint condition •...

  • Page 31: Spare Parts Hipace 300

    Spare parts HiPace 300 11 Spare parts HiPace 300 Item Designation Size Order number Notes Pieces Order qty. Operating fluid reservoir PM 143 451 -T incl. Porex rods Electronic drive unit TC 400 according to the rating plate depends on the connection panel 1...

  • Page 32: Accessories

    PM 016 336 Splinter shield for Turbopumps, DN 100 CF-F flange PM 016 315 Vibration damper for HiPace 300 and HiPace 400, DN 100 ISO-K PM 006 459-X Vibration damper for HiPace 300 and HiPace 400, DN 100 CF-F PM 006 488-X...

  • Page 33: Differences At Hipace 300, 48 V Dc

    PM 016 690-T Set of stud screws, 16 count, M8, DN 100 CF PM 016 692-T Mounting kit for HiPace 300 and HiPace 400, DN 100 ISO-F, in- PM 016 450-T cluding coated centering ring, hexagon screws Mounting kit for HiPace 300 und HiPace 400, DN 100 ISO-F, in-...

  • Page 34: Technical Data And Dimensions

    Technical data and dimensions 13 Technical data and dimensions 13.1 General Basic principles for the Technical Data of Pfeiffer Vacuum Turbopumps: • Recommendations of PNEUROP committee PN5 • ISO 21360; 2007: "Vacuum technology - Standard methods for measuring vacu- um-pump performance - General description"...

  • Page 35: Differences At Hipace 300, 48 V Dc

    Permissible magnetic field max. 5.5 mT 5.5 mT 5.5 mT Interfaces RS-485, Remote RS-485, Remote RS-485, Remote 13.3 Differences at HiPace 300, 48 V DC Parameter HiPace HiPace HiPace Flange (in) DN 100 ISO-K DN 100 CF-F DN 100 ISO-F Run-up time 1.2 min...

  • Page 36: Dimensions

    Technical data and dimensions 13.4 Dimensions 18.6 DN 100 ISO-K DN 16 ISO-KF / G1/4" Ø 8 Fig. 15: HiPace 300, DN 100 ISO-K DN 100 CF-F 18.6 DN 16 ISO-KF / G1/4" Ø 8 Fig. 16: HiPace 300, DN 100 CF-F DN 100 ISO-F 18.6...

  • Page 37: Declaration Of Conformity

    In addition, the product cited below satisfies all relevant provisions of EC directive "Electromagnetic Compatibility" 2004/108/EC . The agent responsible for compiling the technical documentation is Mr. Jörg Stan- zel, Pfeiffer Vacuum GmbH, Berliner Straße 43, 35614 Aßlar. HiPace 300 Guidelines, harmonised standards and national standards and specifications...
  • Page 38 Leading. Dependable. Pfeiffer Vacuum stands for innovative and custom Customer Friendly vacuum solutions worldwide. For German engineering art, competent advice and reliable services. Ever since the invention of the turbopump, we´ve been setting standards in our industry. And this claim to leadership will continue to drive us in the future.

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