Related Manuals for Pfeiffer TMH 065
Summary of Contents for Pfeiffer TMH 065
- Page 1 Operating Instructions TMH 064 / TMU 064 TMH 065 / TMU 065 Turbomolecular Drag Pumps PM 800 308 BE/E (0001)
-
Page 2: Table Of Contents
INDEX Page Page 1. Safety Instuctions ........3 4. Operations ..........9 1.1. For Your Orientation............3 4.1. Before Switching ON............9 1.2. Pictogram Definitions............3 4.2. Switching ON..............9 Reset ..................9 2. Understanding The Pumps 4.3. Heating (Only Pumps With Heating Sleeves))....9 TMH/TMU 064, TMH/TMU 065 .... -
Page 3: Safety Instuctions
1. Safety Instuctions Read and follow all the instructions in this manual. 1.1. For Your Orientation Inform yourself regarding: – Hazards which can be caused by the pump; Instruction in the text ➡ Working instruction: – Hazards which can arise in your system; here, you have to do something. -
Page 4: Understanding The Pumps
– The turbomolecular pump may only be operated with a PFEIFFER Electronic Drive Unit and relevant cables. – The turbopump must be connected to a backing pump in accordance with Section 3.3. -
Page 5: Installation
3. Installation Connecting via a vibration compensator 3.1. Preparations For Installation The maximum permissible temperature at the vibration compensator is 100 °C. Do not carry out any unauthorised conversions or alterations to the turbopump. Where a vibration compensator is in use, a freely suspended turbopump can be flanged onto the vacuum chamber. -
Page 6: Fitting The Splinter Shield
➡ Fit the vacuum safety valve in the fore-vacuum line (in Cooling water either PFEIFFER rotary vane vacuum pumps already integrated). – From the cooling water mains, or This prevents vacuum chamber venting via the backing – from Recycled Water Cooling Unit TZK with closed pump. -
Page 7: Air Cooling (Accessory)
Air Cooling (Accessory) Oxygen content: mg/kg Chloride content: max. 100 mg/kg See “Accessories” for air cooling parts set. Carbonate hardness: max. 10 °dH Potassium permanganate consumption: max. 10 mg/kg Air cooling permissible only if ambient tem- Carbon dioxide: Undetectable Ammonia: Undetectable perature <... -
Page 8: Connecting The Venting Valve
3.6. Connecting The Venting Valve 3.7. Connecting The Electronic Drive Unit – The venting valve provides automatic venting in the event Voltages of >100 V can be present on the open of a power failure and switching off. electrical contacts on a slowing down pump. There is danger of an electrical shock if the Venting Control Unit... -
Page 9: Operations
S1 on the electronic drive unit. instructions. ➡ Open locking screw or venting valve in the venting connection (with PFEIFFER venting valves and pertinent control units the turbopump is vented automatically). ➡ With water cooling: Shut off water supply. -
Page 10: Shutting Down For Longer Periods
Important: If the pump has been shut down for 3 years a bearing change ➡ Remove turbopump from the system. must be carried out (please get in touch with PFEIFFER ➡ Replace lubricant reservoir (see Section 6.1.). service). Please note: Lubricant TL 011 must no longer be used after 2 years of non operations. -
Page 11: Maintenance
6.1. Replacing The Lubricant Reservoir Replace the lubricant reservoir at least once every year. Where extreme operating or unclean processes are involved please get in touch with your PFEIFFER Center for advice. ➡ Remove dirt from the pump and locking cap with a clean, fluff-free cloth. -
Page 12: Service
➡ A copy of the completed declaration must accompany the unit: any additional copies must be sent to your local PFEIFFER Center. Please get in touch with your local PFEIFFER representatives if there are any questions regarding contamination. -
Page 13: Technical Data
8. Technical Data Feature Unit TMH 064 TMH 064 TMH 065 TMH 065 TMU 064 TMU 065 Connection nominal diameter Inlet DN 40 ISO-KF DN 63 ISO-KF DN 40 ISO-KF DN 63 ISO-KF DN 63 CF-F DN 63 CF-F Outlet DN 16 ISO-KF/G 1/4”... -
Page 14: Dimensions Diagram
8.1. Dimensions Diagram TMH/TMU 064 TMH/TMU 065 102.5 126.5 9. Spare Parts Pos. Description Pieces Size Number Comments Ordering Quantity Spare part TMH/U 064; TMH/U 065 Set of seals PM 063 187 -T Rubber food P 3695 700 ZD QUAD-ring VI 10,82x1,78 P 4081 630 C O-ring... - Page 15 Spare parts TMH/TMU 064, TMH/TMU 065 Spare parts, water cooling Spare parts, air cooling 36a 36...
-
Page 16: Accessories
10. Accessories Description Size Number Comments/ Order Quantity Operating Instructions Electronic Drive Unit TCP 015 PM C01 598 PM 800 230 BN TCP 121 PM C01 497 PM 800 166 BN TCP 380 PM C01 680 PM 800 188 BN Connecting cable turbo pump –... -
Page 17: Declaration Of Contamination
Declaration of Contamination of Vacuum Equipment and Components The repair and/or service of vacuum components will only be The manufacturer could refuse to accept any equipment carried out if a correctly completed declaration has been without a declaration. submitted. Non-completion will result in delay. This declaration can only be completed and signed by authorised and qualified staff: 1. -
Page 18: Manufacturer's Declaration
➪ D D Pfeiffer Vacuum GmbH Herstellererklärung im Sinne folgender EU-Richtlinien: Emmeliusstr. 33 - Maschinen 89/392/EWG D-35614 Asslar - Elektromagnetische Verträglichkeit 89/336/EWG - Niederspannung 73/23/EWG Hiermit erklären wir, daß das unten aufgeführte Produkt zum Einbau in eine Maschine bestimmt ist und daß deren Inbetriebnahme so lange untersagt ist, bis festgestellt wurde, daß... - Page 19 ➪ G G Produkt/Product/Produit/Prodotto/Producto/Produkt/Produkt/Produto/ TMH 064 / TMU 064 TMH 065 / TMU 065 Angewendete Richtlinien, harmonisierte Normen und angewendete, nationale Normen in Sprachen und Spezifikationen: Guidelines, harmonised standards, national standards in languages and specifications which have been applied: Les directives appliquées, normes harmonisées et les normes nationales appliquées en langues et spécifications:...
- Page 20 Korea Rua Bernadino de Compos, 551 Klongton, Klongtoey CEP 04620-002 São Paulo, SP - Brasil Pfeiffer Vacuum Korea Ltd., 3F Haein Building 453, Bangkok 10110 telephone +55 / 11 532 0740 Dokok-Dong, Kang Nam-Ku, Seoul, 135-270 telephone +662 / 259 4623...
Need help?
Do you have a question about the TMH 065 and is the answer not in the manual?
Questions and answers