Monitoring Of The Operation Conditions; Switching Off And Venting - Pfeiffer HiPace 300 Operating Instructions Manual

Operation

6.4 Monitoring of the operation conditions

Operating mode dis-
play via LED
Temperature monitor-
ing

6.5 Switching off and venting

Switching off
Venting
24
LEDs in the front panel of the electronic drive unit show basic operating conditions
of the turbopump. A differentiated malfunction and warning display is possible
only for operation with DCU or HPU.
LED Symbol Steady OFF
Green insufficient
power supply
Yellow no warning
Red no malfunc-
tion
The drive power is reduced in case of impermissible motor temperature or imper-
missibly high housing temperature. This can cause falling below the rotation
speed switchpoint and so result in turning off the turbopump.
After the turbopump is switched off, it must be vented to avoid contamination due
to particles streaming back from the fore-vacuum area.
 Close the fore-vacuum line: Switch off the backing pump or close a fore-vacuum
valve.
 Switch off the turbopump on the control unit or via remote control.
 Venting (possibilities, see below)
 For water cooling: Shut off the water supply.
Manually Venting
 Open the venting screw (included) in the venting connection of the turbopump
about one turn.
Venting with Pfeiffer Vacuum Venting Valve
 Enable venting via the functions of the electronic drive unit.
 Settings are possible via the RS485 by using DCU, HPU or PC.
Venting rotation speed
50% of the nominal rotation
speed
1)
When mains power is restored the venting procedure is aborted.
Basic information for the rapid venting
Venting of the vacuum chamber in two steps. Ask for details on individual solutions
from Pfeiffer Vacuum.
 Vent for 20 seconds at a rate of pressure rise of max. 15 mbar/s.
– The valve cross section for the venting rate of 15 mbar/s must be adapted to
the size of the vacuum chamber.
– For small vacuum chambers, use the Pfeiffer Vacuum venting valve.
 Then vent with an additional venting valve of any desired size.
Flashing Blinking
(1/12 s active) (1/2 s active)
Pumping station Pumping station "OFF"
"OFF"
Rotation speed > 1 Hz
Rotation speed ≤ 1Hz
Switch off the pumping station
Venting valve opens for 3600 s (1 h,
works setting)
Steady ON
Pumping sta-
tion "ON"
Warning
Malfunction
1)
Mains power failure
Venting valve opens for
3600 s (1 h, works setting)