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Pfeiffer COBRA DS 0600 E Instruction Manual

Dry screw vacuum pumps
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COBRA
Dry Screw Vacuum Pumps
DS 0600 E
Instruction Manual
2000255227 | -0001_en-US | Original instructions
2025/03/31

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Summary of Contents for Pfeiffer COBRA DS 0600 E

  • Page 1 COBRA Dry Screw Vacuum Pumps DS 0600 E Instruction Manual 2000255227 | -0001_en-US | Original instructions 2025/03/31...

  • Page 2: Table Of Contents

    Table of Contents​ Table of Contents Preface ................................... Congratulations on your purchase ........................Product Description ............................. Use ..................................Operating Principle ............................. 2.2.1 Gas Flow Checks ........................... Oil Circuit................................Cooling.................................. Nitrogen System..............................Optional Functions/ Use of Available Accessories ..................On/ Off Switch..............................Versions ................................
  • Page 3 Table of Contents 6.2.1 Mounting ............................... 6.2.2 Electrical Connection..........................6.2.3 Equipment Connections (with Options)..................... 6.2.4 Connection of Lines/ Pipes ........................6.2.5 Oil Filling ..............................6.2.6 Cooling Liquid Filling..........................6.2.7 Direct Cooling Checking ........................6.2.8 Nitrogen Supply Checking........................6.2.9 Operating Parameters Saving ......................Recommendations on Operation........................

  • Page 4: Preface

    1 | Preface​ Preface Congratulations on your purchase Congratulations on your purchase of COBRA DS 0600 E vacuum pump. With watchful observation of the field’s requirements, innovation and steady development, we deliver modern vacuum and pres- sure solutions worldwide. These operating instructions contain information for ●...

  • Page 5: Product Description

    Product Description​ | 2 Product Description COBRA DS 0600 E TS 6 TS 5 OSG 2 DGR1 DGR2 FS 1 TS 4 OSG 1 TS 3 TS 2 TS 1 Description Inlet connection Discharge connection Cooling liquid fill plug Cooling liquid pump...
  • Page 6 2 | Product Description​ Description Temperature regulator 55°C TS 1 Temperature switch, oil temperature 120°C TS 2 Temperature sswitch, cooling liquid tem- TS 3 Temperature sensor PT100 perature 100°C TS 4 Temperature switch, oil temperature TS 5 Overpressure sensor 140°C TS 6 Temperature switch, motor 155°C Process Gas Diagram...

  • Page 7: Use

    Product Description​ | 2 Description Temperature switch 140°C (TS 4) Temperature switch 155°C (TS 6) Temperature sensor PT100 (TS 3) COBRA NS 0600 C Description Inlet Outlet Barrier gas Cooling liquid Cooling water Dilution gas (dil 1) Dilution gas (dil 2) Motor klixon Screw rotors The COBRA DS vacuum pumps are designed for use in the field of microelectronics and similar in-...

  • Page 8: Operating Principle

    2 | Product Description​ The following indicative values for air can be considered: ● Pa > 50 mbar, TGas < 80°C ● Pa < 50 mbar, TGas < 200°C The vacuum pump is intended for use in a potentially non-explosive environment. ●...

  • Page 9: Nitrogen System

    Product Description​ | 2 Nitrogen System The nitrogen system can be used in a number of different ways: ● Nitrogen is used as dilution gas. It is injected inside the cylinder on two different places. Ni- trogen flow injected in the middle hole is preset at 10 Nl/min and can be adjusted with valve DGR 1, depending on the application.

  • Page 10: Versions

    2 | Product Description​ Versions Further vacuum pump descriptions state the nominal displacement and the design level. Example: DS 0600 E DS = standard version 0600 = 600 m E = Design 10 | 64 Instruction Manual COBRA DS 0600 E_EN_en...

  • Page 11: Safety

    Safety​ | 3 Safety Intended Use DEFINITION: To rule out any misunderstanding, the term “handling” of the vacuum pump covers transport, storage, installation, and operation of the pump as well as effects on operating states and troubleshooting on the vacuum pump. The vacuum pump is intended for industrial use.

  • Page 12: Safety Stickers

    The COBRA DS system includes provision for the secondary containment of liquids leaks such as water and oil. Safety Stickers COBRA NS 0600 C Description Warning! Hot surface! Do not touch! Warning! Hot surface! Do not touch! COBRA DS 0600 E 12 | 64 Instruction Manual COBRA DS 0600 E_EN_en...

  • Page 13: Sound Pressure Emission

    Safety​ | 3 Sound Pressure Emission Refer to the table “Technical data” for the permissible sound levelling free field conditions according to EN ISO 2151. CAUTION The sound level of the vacuum pump within a certain perimeter of the vacuum pump is high. Risk of hearing damage.

  • Page 14: Safety Lockout Procedure

    3 | Safety​ ● If the emergency stop button was pressed, check the startup of the pump then release this but- ton to restart the pump. ● Press on Start button on the LCD controller, the pump will restart. 3.6.4 Safety Lockout Procedure ●...

  • Page 15: Information Over Lubricants

    Safety​ | 3 Description Adjusting nut Wheel Lifting eyebolt ● The vacuum pump must not lay only on the brackets. Unscrew the four adjusting nuts until the machine legs touch the ground. ● Check that the wheels no longer touch the ground. CAUTION The vacuum pump is fixed to the ground with four M10 screws, two screws per bracket.
  • Page 16 3 | Safety​ ● Proceed to disassembly of the vacuum pump. Please make sure to wear a personal protective equipment (PPE) prior to any intervention on the vacuum pump. Some residues may remain in- side. ● Proceed to decommissioning of the different parts according to the current local and national laws.

  • Page 17: Transport

    Transport​ | 4 Transport The COBRA DS vacuum pumps are tested and checked in our factory before careful packing. Check the packaging for transport damage when the goods arrive. The vacuum pump can withstand tem- peratures between -25°C and +55°C during transport. Transport in Packed State Packed on a pallet, the vacuum pump can be moved with a hand forklift truck.
  • Page 18 4 | Transport​ ● Attach lifting gear securely to the eyebolt or eyebolts. ● Use lifting gear with a crane hook equipped with safety latch. ● Lift the vacuum pump. Lifting for DS 0600 E In case the vacuum pump was bolted to a pallet with fixing bolts: ●...

  • Page 19: Storage

    Storage​ | 5 Storage Temporary Storage ● Make sure that the intake and exhaust flanges are closed (put on the protective caps included in the delivery package of the vacuum pump) ● Store the vacuum pump: ● if possible, the vacuum pump should be stored in its original packaging, ●...

  • Page 20: Installation And Commissioning

    6 | Installation and Commissioning​ Installation and Commissioning Installation Prerequisites CAUTION In case of non-compliance with the installation prerequisites, particularly in case of insuffi- cient cooling: Risk of damage or destruction of the vacuum pump vacuum pump and its components! Risk of personal injury! The installation prerequisites must be complied with.
  • Page 21 Installation and Commissioning​ | 6 Free chloride mg/l < 0.3 NOTE 1° (german degree = 1° dGH) = 1,78° (french degree) = 1,25 e (english degree) = 17,9 mg/kg Ca- CO3 (american hardness). ● Make sure that the cooling water is neutral and clean. ●...

  • Page 22: Dimensional Drawing

    6 | Installation and Commissioning​ ● Make sure that no-one can touch the vacuum pump accidentally. If necessary, attach safeguard. ● Make sure that the oil sight glasses (OSG) are easily accessible. If oil changes are to be made on site: ●...

  • Page 23: Discharge Connection

    Installation and Commissioning​ | 6 CAUTION The intake of liquids or solid particles can lead to the destruction of the vacuum pump. If the drawn gas contains dusts or solid foreign bodies: ● Make sure that a filter or protective grating is installed at the extraction point. ●...

  • Page 24: Cooling Water Connection

    6 | Installation and Commissioning​ CAUTION When the discharge lines have been connected, make sure that the system does not leak. Leakages of dangerous substances must be prevented! ● Make sure that the discharge line is mounted in such a way that condensate cannot penetrate in- to the vacuum pump (siphon trap, gradient).
  • Page 25 Installation and Commissioning​ | 6 CAUTION There are two pump versions with different mechanical gears depending on the operating / present electrical frequency (50 or 60 Hz). The pump speed (rpm) depends on the frequency. Take care to choose the right pump version (regarding voltage and frequency). It depends usually on operating site (example: Europe = 400V/50Hz).
  • Page 26 6 | Installation and Commissioning​ Usual worldwide Voltages and Frequencies in SEMICON INDUSTRIES: Country Voltages and Frequencies Europe 400 V @ 50 Hz China 400 V @ 50 Hz Taiwan 208 V @ 60 Hz Korea 208 V @ 60 Hz 208 V or 460 V @ 60 Hz 26 | 64 Instruction Manual COBRA DS 0600 E_EN_en...

  • Page 27: Installation

    Installation and Commissioning​ | 6 Installation 6.2.1 Mounting ● Make sure that the “Necessary installation instructions” are followed. ● Fasten or install the vacuum pump at its final installation site. 6.2.2 Electrical Connection WARNING Risk of electrocution, risk of damage. Electrical installation must be performed by a suitably qualified electrician who knows and fol- lows the following regulations: ●...

  • Page 28: Power Wiring Connection

    6 | Installation and Commissioning​ Double star connection (low voltage): Star connection (high voltage): 6.2.2.1 Power Wiring Connection Power wiring 4 poles Phase L1 Phase L2 Phase L3 Ground 6.2.2.2 Power Connector on Rear Side Description Pump side Phase L1 (Pump side) Phase L2 (Pump side) Phase L3 (Pump side) Ground (Pump side)
  • Page 29 Installation and Commissioning​ | 6 ● Protect the vacuum pump with the electrical device according to the rated current of the vacuum pump. CAUTION If the vacuum pump is operated with a motor that turns in the wrong direction, it can be de- stroyed, even if this is the case for only a short moment.
  • Page 30 6 | Installation and Commissioning​ CAUTION If the vacuum pump is operated with a motor that turns in the wrong direction, it can be de- stroyed, even if this is the case for only a short moment. ● Make sure that the vacuum pump is connected correctly before switching it on. ●...

  • Page 31: Equipment Connections (With Options)

    Installation and Commissioning​ | 6 6.2.3 Equipment Connections (with Options) Description LCD serial wiring (RJ12), LCD Micro SD slot PC serial wiring (only for Manufacturer Customer Network, Communication engineers) modbus RTU RS 232/ RS 485 Ethernet network connection (Manufac- Interface connection (50 poles) / PID In- turer Monitoring System - Option) terface The information concerning the use of the manufacturer PLC and LCD (RC) can be found in the Oper-...
  • Page 32 6 | Installation and Commissioning​ Oil filling NS 0600 C Oil quantity (Liter) Oil type YLC 250 B, Art. No. 0831 131 400 (0,5 l ≈ 1 kg) 6.2.5.1 COBRA NS 0600 C Oil Filling ● Prepare the quantity of oil specified in the table “Oil Quantity”. NOTE The quantity of oil specified in the installation handbook is of informative nature only.
  • Page 33 Installation and Commissioning​ | 6 ● Unscrew the oil filler plugs (OFP). ● Fill up to the upper level of the target circle of the oil sight glasses (OSG). Make sure that the fill- ing level is in the target circle of the oil sight glasses (OSG). Oil level, pump not operating ●...

  • Page 34: Cooling Liquid Filling

    6 | Installation and Commissioning​ 6.2.6 Cooling Liquid Filling CAUTION Do not run the vacuum pump without cooling liquid! NOTE The COBRA DS vacuum pumps are generally dispatched with cooling liquid already in the vac- uum pump. Before vacuum pump first startup, control the cooling liquid level. In the event of absence of one or the other of these lubricants, please carry out the filling (see “Cooling Liquid Type/ Quantity [➔ 58]”...
  • Page 35 Installation and Commissioning​ | 6 ● Make sure that the vacuum pump has been switched off and that it cannot be switched on again accidentally. Description Cooling liquid vent plug (CLV 1) Cooling liquid vent plug (CLV 2) Cooling liquid fill plug (CLF) Cooling liquid drain plug (CLD) ●...

  • Page 36: Direct Cooling Checking

    6 | Installation and Commissioning​ ● Unscrew purge cap on cylinder upper plate. ● Control that cooling liquid level is just under cylinder upper plate. ● In case cooling liquid level is below required level: ● Fill in more cooling liquid. ●...
  • Page 37 Installation and Commissioning​ | 6 Solid particles must not get into the vacuum pump. Procedural errors can result in the pump draw- ing in a certain quantity of liquid. If the vacuum pump has drawn in liquid, a short drying time is nec- essary at the end of the procedure.
  • Page 38 6 | Installation and Commissioning​ CAUTION The cooling water flow, which is checked by the flow meter CWM, must be at least 8 l/min . ● Make sure that all caps, safeguards, and similar covers are mounted. ● Make sure that the safeguards are switched on. ●...

  • Page 39: Switching The Vacuum Pump On/ Off

    Installation and Commissioning​ | 6 6.3.2 Switching the Vacuum Pump On/ Off 6.3.2.1 First Start-up of the System ● Make sure that the “Necessary installation instructions” are followed. If the vacuum pump is equipped with a solenoid gate valve in the cooling water circuit: ●...

  • Page 40: Maintenance

    7 | Maintenance​ Maintenance DANGER Live wires. Risk of electrical shock! ● Electrical installation work must only be executed by qualified personnel. DANGER In case the vacuum pump has conveyed gases that have been contaminated with foreign ma- terials that are dangerous to health, the oil and condensates will also be contaminated. These foreign materials can infiltrate the pores, recesses, and other internal spaces of the vac- uum pump .
  • Page 41 Maintenance​ | 7 ● Stop the pump with the Remote control (RC) (press on STOP button during 10s). ● Press on emergency stop button. ● Switch off the main circuit breaker. ● Open the power box and switch off the circuit breakers. ●...

  • Page 42: Maintenance Schedule

    7 | Maintenance​ Maintenance Schedule The maintenance intervals depend very much on the individual operating conditions. The intervals given below are considered as starting values which should be individually shortened or extended as appropriate. Particularly harsh applications or heavy duty operation, such as high dust loads in the environment or in the process gas, other contamination or ingress of process material, can make it necessary to shorten the maintenance intervals significantly.

  • Page 43: Lock Out/ Tag Out Procedure

    Maintenance​ | 7 Interval Maintenance work Yearly ● If the intake is equipped with a sieve: If one or more of these accesso- ● Check the sieve at the intake and clean if necessary. ries are installed. ● Check the measuring and safety equipment for working or- der.

  • Page 44: Oil Checking

    7 | Maintenance​ Oil Checking 7.2.1 Oil Level Checking ● Make sure that the vacuum pump has been switched off and that it cannot be switched on again accidentally. Indication of the oil level on the various oil sight glasses (OSG 1,2,3,4): Oil level, pump not operating COBRA NS (DP) vacuum pump: If the oil level lies below the target circle:...

  • Page 45: Oil Color Inspection

    Maintenance​ | 7 NOTE The quantity of oil specified in the Instruction Manual is of informative nature only. Check the oil level with the help of the various oil sight glasses on the vacuum pump. CAUTION Danger of burns when the oil filler cap is open. Danger of injuries when the oil filler cap is not screwed on properly.

  • Page 46: Oil Change

    7 | Maintenance​ 7.2.4 Oil Change DANGER If the vacuum pump has pumped gases that were contaminated with foreign bodies that are hazardous to health, the oil is also contaminated with these foreign bodies. There is a health hazard when changing contaminated oil. There is also a danger to the envi- ronment.

  • Page 47: Cooling Liquid Checking

    Maintenance​ | 7 7.2.4.2 New Oil Filling COBRA NS (DP) vacuum pump: ● Prepare the quantity of oil needed (see “Oil Type/ Quantity [➔ 57]”). CAUTION The use of chemically contaminated or polluted oil can lead to hazardous pump conditions which could cause personal injury. NOTE The quantity of oil specified in the Instruction Manual is of informative nature only.

  • Page 48: Cooling Liquid Refilling

    7 | Maintenance​ ● Unscrew, but do not remove completely the purge cap (CLV 2). ● The level is OK only if the cooling liquid try to flow out. If the level is below: ● Top up with cooling liquid (see “Cooling Liquid Refilling”). 7.3.2 Cooling Liquid Refilling NOTE...

  • Page 49: New Cooling Liquid Filling

    Maintenance​ | 7 ● Unscrew drain plug of cooling liquid. ● Drain the cooling liquid. When cooling liquid stops running out: ● Close the drain plug for the cooling liquid. ● Screw purge caps (CLV1 & 2). ● Screw filling plug of cooling liquid (CLF). ●...

  • Page 50: Additional Checking

    7 | Maintenance​ In case the cooling liquid level is below the required level: ● Fill in more cooling liquid. If the inlet line is equipped with a shut-off device: ● Open the shut-off device. If the inlet line is not equipped with a shut-off device: ●...

  • Page 51: Overhaul

    Overhaul​ | 8 Overhaul CAUTION Inappropriate maintenance work on the vacuum pump can damage the vacuum pump. Danger of explosion! ● If requirements are not met, the vacuum pump may not be switched on! ● Should work exceed the dismantling work described in this handbook, it may only be carried out by authorized persons.

  • Page 52: Removal From Service

    9 | Removal from Service​ Removal from Service DANGER Live wires. Risk of electrical shock! ● Electrical installation work must only be executed by qualified personnel. CAUTION Hot surface. Risk of burns! ● Before doing anything that requires touching the machine, let it cool down first. CAUTION Hot liquids.

  • Page 53: Dismantling And Disposal

    Removal from Service​ | 9 Dismantling and Disposal DANGER In case the vacuum pump has conveyed gases that have been contaminated with harmful for- eign material which are harmful to health, the oil and the condensates will also be contami- nated with harmful foreign material.

  • Page 54: Spare Parts

    10 | Spare Parts​ Spare Parts NOTICE Use of non-genuine spare parts from the manufacturer. Risk of premature failure! Loss of efficiency! ● Use only genuine spare parts, consumables and supplies from the manufacturer to ensure cor- rect operation of the machine and to validate the warranty. There are no standard spare parts kits available for this product.

  • Page 55: Troubleshooting

    Troubleshooting​ | 11 Troubleshooting DANGER Live wires. Risk of electrical shock! ● Electrical installation work must only be executed by qualified personnel. CAUTION Hot surface. Risk of burns! ● Before doing anything that requires touching the machine, let it cool down first. CAUTION Hot liquids.
  • Page 56 11 | Troubleshooting​ Problem Possible Cause Remedy The machine does not reach Suction or discharge lines too ● Use larger diameter or the usual pressure at the inlet long or section diameter too shorter lines. connection. small. ● Seek advice from your local manufacturer representa- tive.

  • Page 57: Oil Type/ Quantity

    Oil Type/ Quantity​ | 12 Oil Type/ Quantity 12.1 Oil Type Make sure that the oil type corresponds to specifications: YLC 250 B ISO-VG Oil Type Synthetic Part number 0.5 L packaging 0831 131 400 Part number 1 L packaging 0831 108 878 Part number 5 L packaging 0831 108 879 Oil suitability...

  • Page 58: Cooling Liquid Type/ Quantity

    13 | Cooling Liquid Type/ Quantity​ Cooling Liquid Type/ Quantity 13.1 Cooling Liquid Type Make sure that the Cooling Liquid type corresponds to specifications: CLA 25 (ready-to-use) Part number 5 L packaging 2000 241 757 Part number 25 L packaging 2000 241 738 CLA 25 cooling liquid is ready-to-use and requires no additional water.

  • Page 59: Technical Data

    Technical Data​ | 14 Technical Data COBRA DS 0600 E Nominal pumping m³/h (50 Hz / 60 Hz) speed ACFM (50 Hz / 60 Hz) 353.1 Ultimate pressure TORR 0.0075 hPa (mbar) 0.01 Nominal motor rating kW (50 Hz / 60 Hz)

  • Page 60: Eu Declaration Of Conformity

    CE-marking. The manufacturer Busch Manufacturing Korea, Ltd. 189-51, Soicheon-ro, Majang-myun Icheon-si, Gyunggi-do, 467-813 Republic of Korea declares that the machine: COBRA DS 0600 E fulfill(s) all the relevant provisions from EU directives: – ‘Machinery’ 2006/42/EC – ‘Electromagnetic Compatibility’ (EMC) 2014/30/EU –...

  • Page 61: Uk Declaration Of Conformity

    The manufacturer Busch Manufacturing Korea, Ltd. 189-51, Soicheon-ro, Majang-myun Icheon-si, Gyunggi-do, 467-813 Republic of Korea declares that the machine: COBRA DS 0600 E fulfill(s) all the relevant provisions from UK legislations: – Supply of Machinery (Safety) Regulations 2008 – Electromagnetic Compatibility Regulations 2016 –...
  • Page 62 Notes Notes 62 | 64 Instruction Manual COBRA DS 0600 E_EN_en...
  • Page 63 ​ N otes Instruction Manual COBRA DS 0600 E_EN_en 63 | 64...
  • Page 64 Under its umbrella, the group houses two well-known brands: Busch Vacuum Solutions and Pfeiffer Vacuum+Fab Solutions. Together, they offer solutions to a wide range of industries. A global network of highly competent local teams in 44 countries ensures that expert, tailor-made support is always available near you.

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