Connections To The Turbopump - Pfeiffer HiPace 300 Operating Instructions Manual

5.4 Connections to the turbopump

Electronic drive unit
Connecting the
power supply
Stud screw and blind hole
 If used: Insert protective screen or splinter shield with the clamping lugs down-
ward into the high vacuum flange of the turbopump.
 Place the seal exactly in the hollow.
 Connect the flange using 16 stud screws (M8) with washers and nuts and tighten
circularly with a torque of 22 ± 2 Nm. After this, check the torque, since flowing
of the sealing material may make it necessary to tighten the screws.
Hexagon screw and through hole
 If used: Insert protective screen or splinter shield with the clamping lugs down-
ward into the high vacuum flange of the turbopump.
 Place the seal exactly in the hollow.
 Connect the flange using 16 hex screws (M8) with washers and nuts and tighten
circularly with a torque of 22 ± 2 Nm. After this, check the torque, since flowing
of the sealing material may make it necessary to tighten the screws.
Turbopumps with integrated electronic drive unit are designed for various applica-
tions. Therefore different connection panels are available for the TC 1200.
• TC 400 in standard version
• TC 400 PB for Profibus linking
• TC 400 E74 in dependence on specification SEMI E74
• TC 400 DN for DeviceNet linking
Detailed description for function, configuration and operation with the respective
connection panel are given in the specific operating instructions for the electronic
drive unit.
For voltage supply of the electronic drive unit TC 400, only use original power sup-
plies (e.g. TPS 310 or DCU 310). Use of other power supplies only after consultation
with Pfeiffer Vacuum. Connecting cables are available from the Pfeiffer Vacuum ac-
cessory programme.
Danger of electric shock
In case of defect, the parts connected to the power supply are under voltage.
 Always keep the mains connection freely accessible so you can disconnect it at any
time.
 Make sure that the turbopump has the correct supply voltage.
HiPace VDC Drive unit
HiPace 300 24 TC 400
HiPace 300 48 TC 400
WARNING
Power supply Power supply with DCU
TPS 310/311 DCU 310
TPS 400/401 DCU 400
Installation
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