Factory Service Options; Accessories; Contacting Varian - Agilent Technologies Varian TriScroll 620 Series Installation And Operation Manual

Factory Service Options

Table 7 lists the factory-rebuild service and advance exchange of complete TriScroll 600 series pumps, as well as factory
service options that Varian offers.
Advance Exchange TriScroll 620 Single Phase
Advance Exchange TriScroll 620 Pump Module Only
Service/Rebuild TriScroll 620 Pump

Accessories

The accessories listed in Table 8 are available for use with the TriScroll 600 series pump. Contact your local Varian office
to place an order. A list of offices is included on the rear cover of this manual.
Purge Kit
Exhaust Extension
Exhaust Filter Kit
Contacting Varian Varian
In the United States, you can contact Varian Customer Service at 1-800-8VARIAN. See the back cover of this manual for a
listing of our sales and service offices.
Internet users:
❑
Send email to Customer Service & Technical Support at vpl.customer.support@varianinc.com
❑
Visit our web site at www.varianinc.com/vacuum
❑
Order on line at www.evarian.com
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TriScroll 620 Series Vacuum Pump
Table 7 Factory Service Options
Factory Service Options
Table 8 Accessories
Part Number
EXPTS06201ULD
EXPTS0620SC
PTS0620KMA
PTSPURGEKIT
S4807001
PTS600EXFIL