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TriScroll
Dry Scroll
Vacuum Pump
Manual No. 699904343
Revision E
April 2007
620 Series
TM
NOTICE: This document contains references to Varian.
Please note that Varian, Inc. is now part of Agilent
Technologies. For more information, go to
www.agilent.com/chem.
vacuum technologies
INSTALLATION AND
OPERATION MANUAL
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Related Manuals for Agilent Technologies Varian TriScroll 620 Series
Summary of Contents for Agilent Technologies Varian TriScroll 620 Series
- Page 1 NOTICE: This document contains references to Varian. Please note that Varian, Inc. is now part of Agilent Technologies. For more information, go to www.agilent.com/chem. vacuum technologies TriScroll 620 Series INSTALLATION AND OPERATION MANUAL Dry Scroll Vacuum Pump Manual No. 699904343 Revision E April 2007...
- Page 2 TriScroll 620 Series Vacuum Pump ™ TriScroll Dry Scroll Vacuum Pump TriScroll is a trademark of Varian, Inc. Copyright 2007 Varian, Inc.
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Page 3: Table Of Contents
TriScroll 620 Series Vacuum Pump Contents List of Figures Declaration of Conformity Warranty ........vi Figure Caption Page Warranty Replacement and Adjustment . - Page 4 TriScroll 620 Series Vacuum Pump This page intentionally left blank.
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Page 5: Declaration Of Conformity
Declaration of Conformity Declaration of Conformity Konformitätserklärung Déclaration de Conformité Declaración de Conformidad Verklaring de Overeenstemming Dichiarazione di Conformità Varian, Inc. Nous 121 Hartwell Avenue Nosotros Lexington, MA, 02421-3133 USA declare under our sole responsibility that the product, erklären, in alleniniger Verantwortung, daß dieses Produkt, déclarons sous notre seule responsabilité... -
Page 6: Warranty
TriScroll 620 Series Vacuum Pump Warranty Products manufactured by Seller are warranted against defects in materials and workmanship for twelve (12) months from date of shipment thereof to Customer, and Seller’s liability under valid warranty claims is limited, at the option of Seller, to repair, to replace, or refund of an equitable portion of the purchase price of the Product. -
Page 7: Instructions For Use
TriScroll 620 Series Vacuum Pump Instructions for Use General Information Storage When transporting and storing the pump, the following This equipment is designed for use by professionals. The environmental requirements should not be exceeded: user should read this instruction manual and any other additional information supplied by Varian before operating Temperature: –20 °C to 60 °C (–4 °F to 140 °F) -
Page 8: Installation Requirements
TriScroll 620 Series Vacuum Pump Installation Requirements Shutdown Procedure 1. Close the vacuum system isolation valve. This Do not install or use the pump in an environment prevents debris in pump from being transported into exposed to atmospheric agents (rain, snow, ice), dust, the vacuum system. -
Page 9: Technical Information
TriScroll 620 Series Vacuum Pump Technical Information Table 1 Specifications Model TriScroll™ 620 Dry Scroll Vacuum Pump Interface dimensions See Figure 1 Peak pumping speed 50 Hz: 420 l/m, 25.2 m /hr (14.8 cfm) 60 Hz: 500 l/m, 30 m /hr (17.7 cfm) Media Clean air. -
Page 10: Interface Drawing With Dimensions
TriScroll 620 Series Vacuum Pump 472 (18.57) Single Phase (1.48) Intake (NW25) ø300 (ø11.80) (13.98) (7.25) (.85) (.50) (3.22) (4.13) Exhaust ( NPT) port swivels 360 NW25 Exhaust extension included but not installed (6.94) (4.02) 145 (5.69) 4 x ø11(ø.43) Thru Figure 1 Interface Drawing with Dimensions Figure 2 Pumping Speed Curves... -
Page 11: Unpacking And Inspection
TriScroll 620 Series Vacuum Pump Cowling Screws; M5 (3) Cowling Inlet (NW25) Inlet Screen NW25 Exhaust Adapter Bearing Purge Port (1/4" National Pipe Thread) Pump Frame Frame Screws; M6 (4) Gas Ballast Port (1/4" National Pipe Thread) 10. Mounting Holes; 11 mm diameter thru (8) 11. -
Page 12: Installation
TriScroll 620 Series Vacuum Pump Installation Startup 1. Check that the inlet screen is installed before Safety beginning operation. Do not remove or modify any safety or insulating WARNING Do not insert a finger or any foreign equipment from the pump. To do so may create a serious object in the path of the fan;... -
Page 13: Electrical Connections
TriScroll 620 Series Vacuum Pump Electrical Connections Wire the motor and electrical interlocks (if applicable) in accordance with local electrical codes and the relevant electrical component manufacturer’s instructions. Table 2 lists the full load motor currents at various voltages. Table 2 Full Load Motor Currents, Amps 1 phase motor 100 V 115 V... -
Page 14: Rotation Of The Pump Inlet With Respect To The Motor Frame
TriScroll 620 Series Vacuum Pump Optional Isolation Valve Rotation of the Pump Inlet with Respect to the Motor Frame Scroll pumps return to atmospheric pressure quickly The standard pump configuration is with the inlet fitting when shut off, thus the installation of a fast acting, positioned at the top of the pump as shown in Figure 1 on automatic, normally closed isolation valve is strongly page 4. -
Page 15: Gas Ballast
TriScroll 620 Series Vacuum Pump Wiring 2. Connect the VPI Valve solenoid wire leads to the pump motor as shown in Figure 4. Using the data in Table 3, verify that the VPI Valve chosen is compatible with the TriScroll supply voltage and 3. -
Page 16: Troubleshooting
TriScroll 620 Series Vacuum Pump Troubleshooting Table 4 contains a list of possible problems, their probable causes, and corrective actions. Table 4 Troubleshooting Chart Problem Probable Cause Corrective Action Pump won’t start Circuit breaker open Close breaker. Identify cause of overload. Motor thermal protector open Allow motor to cool. -
Page 17: Maintenance
TriScroll 620 Series Vacuum Pump Maintenance General Information Varian TriScroll 600 series pumps are designed to provide years of trouble-free service if maintenance procedures and intervals are observed. Bearing grease replenishment and tip seal replacement is recommended when pump base pressure has risen to an unacceptably high level for your application. -
Page 18: Factory Service Options
TriScroll 620 Series Vacuum Pump Factory Service Options Table 7 lists the factory-rebuild service and advance exchange of complete TriScroll 600 series pumps, as well as factory service options that Varian offers. Table 7 Factory Service Options Factory Service Options Part Number Advance Exchange TriScroll 620 Single Phase EXPTS06201ULD... -
Page 19: Request For Return Health And Safety Certification
Request for Return Health and Safety Certification 9001 Request for Return R E G I S T E R E D Health and Safety Certification 1. Return authorization numbers (RA#) will not be issued for any product until this Certificate is completed and returned to a Varian, Inc. - Page 20 9001 Request for Return R E G I S T E R E D Health and Safety Certification FAILURE REPORT (Please describe in detail the nature of the malfunction to assist us in performing failure analysis): URBO UMPS AND URBOCONTROLLERS Claimed Defect Position Parameters...
- Page 22 Sales and Service Offices Sales and Service Offices Canada Japan Other Countries Central coordination through: Varian, Inc. Varian, Inc. Varian, Inc. Sumitomo Shibaura Building, 8th Floor Via F.lli Varian 54 121 Hartwell Avenue 4-16-36 Shibaura 10040 Leini, (Torino) Lexington, MA 02421 Minato-ku, Tokyo 108 Italy Japan...