Agilent Technologies VHS-4 Instruction Manual
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Agilent Technologies VHS-4 Instruction Manual

Diffusion pumps
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Vacuum Products Division
VHS-4, VHS-6 and
INSTRUCTION MANUAL
VHS-250
Diffusion Pumps
Part No. 699901024
Revision F
February 2018

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Summary of Contents for Agilent Technologies VHS-4

  • Page 1 Vacuum Products Division VHS-4, VHS-6 and INSTRUCTION MANUAL VHS-250 Diffusion Pumps Part No. 699901024 Revision F February 2018...
  • Page 2 VHS-4, VHS-6 and VHS-250 Diffusion Pumps Copyright 2018 Agilent, Inc.
  • Page 3 VHS-4, VHS-6 and VHS-250 Diffusion Pumps Warranty Products manufactured by Seller are warranted against defects in materials and workmanship for twelve (12) months from date of shipment thereof to Customer, and Seller’s liability under valid warranty claims is limited, at the option of Seller, to repair, replacement, or refund an equitable portion of the purchase price of the Product.
  • Page 4 VHS-4, VHS-6 and VHS-250 Diffusion Pumps This page intentionally left blank.

  • Page 5: Table Of Contents

    Maintenance and Service ....................... 35 General Maintenance ......................... 35 Inspection Requirements ......................35 Cleaning ............................. 36 VHS-4 and VHS-6 Cold Cap Removal/Installation ............... 37 VHS-250 Cold Cap Removal/Installation ..................38 Jet Assembly Removal/Installation ....................39 Heater Replacement ........................42 Pump Fluid Charge ........................47 Troubleshooting..........................
  • Page 6 VHS-4, VHS-6 and VHS-250 Diffusion Pumps This page intentionally left blank.
  • Page 7 VHS-4, VHS-6 and VHS-250 with Platen Heater - Orientation of Heater (VHS-4 Shown) ........................45 3-10 VHS-4, VHS-6 and VHS-250 with Tubular Heater Insulation and Wire Placement....46 3-11 VHS-4, VHS-6 and VHS-250 with Platen Heater Insulation and Wire Placement ....46...
  • Page 8 VHS-4, VHS-6 and VHS-250 Diffusion Pumps This page intentionally left blank.
  • Page 9 VHS-4, VHS-6 and VHS-250 Diffusion Pumps Tables Pump Operational Specifications ..................19 VHS-4 Dimensions ......................23 VHS-6 Dimensions ......................25 VHS-250 Dimensions ......................27 Troubleshooting........................50 VHS-4 Models ........................53 VHS-4 Replacement Parts ....................53 VHS-6 Models ........................54 VHS-6 Replacement Parts ....................55 VHS-250 Models .........................
  • Page 10 VHS-4, VHS-6 and VHS-250 Diffusion Pumps This page intentionally left blank.
  • Page 11 VHS-4, VHS-6 and VHS-250 Diffusion Pumps Preface Instructions for Use This equipment is designed for use by professionals. Read this instruction manual and any other additional information supplied by Agilent before operating the equipment. Agilent will not be held responsible for any events that occur due to non-compliance with these instructions, improper use by untrained persons, non-authorized interference with the equipment, or any action contrary to that provided for by specific national standards.
  • Page 12 VHS-4, VHS-6 and VHS-250 Diffusion Pumps Safety Diffusion Pump Hazards Designers of systems utilizing diffusion pumps must design out hazards wherever possible. For hazards that cannot be designed out, warnings, procedures, and instructions on proper use and servicing are provided. Please use guards, safety features, and interlocks as recommended.
  • Page 13 VHS-4, VHS-6 and VHS-250 Diffusion Pumps General Hazards Hazard Suggested Corrective Action Loss of utility: water and/or electricity Provide sufficient backup water and power supply as necessary to effect a safe shutdown under worst case conditions. Overpressure in foreline Provide an interlock to ensure that the power...
  • Page 14 VHS-4, VHS-6 and VHS-250 Diffusion Pumps Explosion Operation of the diffusion pump without continuous evacuation below 0.5 Torr (0.67 mbar) or without coolant, and then introducing a strong oxidizer (such as air), explosive vapors, powders, or materials which may react with pumping fluids in a hot pump (above 300 °F or 150 °C) can cause an explosion.
  • Page 15 VHS-4, VHS-6 and VHS-250 Diffusion Pumps Explosive Conditions Prohibited Action Explosion-Causing Condition Do not run pump without cooling water. Overtemperature Do not run pump with low level of pump fluid. Overtemperature Do not run pump without proper backing or holding pump.
  • Page 16 VHS-4, VHS-6 and VHS-250 Diffusion Pumps Pressurization Hazards Large vacuum pumps and their components are designed for vacuum service. They are not designed to be pressurized, which can cause them to burst and possibly expel shrapnel at lethal velocities. Serious accidents have been caused by intentional pressurization of vacuum systems and their components.
  • Page 17 VHS-4, VHS-6 and VHS-250 Diffusion Pumps Dangerous Substances Chemical Dangers of Acetone and Alcohol Diffusion pumps are typically cleaned with acetone or alcohol. Acetone, alcohol, and most other solvents are irritants, narcotics, and depressants, and/or carcinogenic. Their inhalation and ingestion may produce serious effects. Even absorption through the skin can result in moderate toxicity.
  • Page 18 VHS-4, VHS-6 and VHS-250 Diffusion Pumps High Temperatures Hot Surfaces Boiler temperatures reach 530 °F (275 °C) which can cause serious burns. Always ensure that surfaces have cooled to near room temperature before touching them. Hot Cooling Water and Steam The water used to cool the pump can reach scalding temperatures.

  • Page 19: Introduction And Installation

    Section 1. Introduction and Installation 1.1 Introduction Before unpacking and installing a VHS-4, VHS-6 or VHS-250 diffusion pump, thoroughly familiarize yourself with this instruction manual and the diffusion pump operational specifications (Table 1-1). Examine all other technical material supplied in order to gain a better understanding of the operating principles, limitations, correct application, and hazards involved with the operation of this equipment.
  • Page 20 VHS-6 and VHS-250: 0.25 gpm Pressure drop across coils VHS-4: 4 psi VHS-6 and VHS-250: 15 psi Backing Pump Size VHS-4: ≥ 10 cfm for maximum throughput VHS-6 and VHS-250: 17 cfm for maximum throughput Recommended Jet Assembly 4-stage, self-aligning, stainless steel Foreline Baffle...
  • Page 21 VHS-4, VHS-6 and VHS-250 Diffusion Pumps Table 1-1 Pump Operational Specifications (Continued) Heater circuit resistance (ohms) VHS-4: 1450 watts 120 V – 9.4 208 V – 28.3 240 V – 37.7 VHS-6 and VHS-250: 2200 watts 120 V – 6.2 208 V –...

  • Page 22: Vhs-4 Speed And Throughput Curves

    VHS-4, VHS-6 and VHS-250 Diffusion Pumps Figure 1-1 shows the VHS-4 speed and throughput curves. Speed with standard cold cap Speed with extended cold cap 1800 1200 −10 −9 −4 −7 −10 −5 −4 −3 −2 −1 INLET PRESSURE — TORR *Note: Speed curves were generated according to AVS Standards 4.1...

  • Page 23: Vhs-4 Dimensions

    VHS-4, VHS-6 and VHS-250 Diffusion Pumps Table 1-2 lists the VHS-4 dimensions. Table 1-2 VHS-4 Dimensions Conflat Height 18.05 18.05 18.05 Centerline to Centerline 10.62 10.62 10.62 Flange Face to Flange Face 5.03 5.03 5.03 EIectrlc8I Box Height 8.63 8.63 8.63...

  • Page 24: Vhs-6 Speed And Throughput Curves

    VHS-4, VHS-6 and VHS-250 Diffusion Pumps Figure 1-3 shows the VHS-6 speed and throughput curves. Figure 1-3 VHS-6 Speed and Throughput Curves Figure 1-4 gives the VHS-6 schematic and wiring information. Figure 1-4 VHS-6 Wiring Information...

  • Page 25: Vhs-6 Dimensions

    VHS-4, VHS-6 and VHS-250 Diffusion Pumps Table 1-3 lists the VHS-6 dimensions. Table 1-3 VHS-6 Dimensions Conflat Height 21.92 21.92 21.92 Centerline to Centerline 13.38 13.38 13.38 Flange Face to Flange Face 8.62 8.62 8.62 EIectrlc8I Box Height 9.12 9.12 9.12...

  • Page 26: Vhs-250 Speed And Throughput Curves

    VHS-4, VHS-6 and VHS-250 Diffusion Pumps Figure 1-5 shows the VHS-250 speed and throughput curves. Figure 1-5 VHS-250 Speed and Throughput Curves Figure 1-6 gives the VHS-250 schematic and wiring information. Figure 1-6 VHS-250 Wiring Information...

  • Page 27: Vhs-250 Dimensions

    VHS-4, VHS-6 and VHS-250 Diffusion Pumps Table 1-4 lists the VHS-250 dimensions. Table 1-4 VHS-250 Dimensions Height 22.79 Centerline to Centerline 13.38 Flange Face to Flange Face 9.56 Electrical Box Height 9.12 Sight Glass, 90° clockwise Degrees from Foreline Electrical Box, 30°...

  • Page 28: Installation

    VHS-4, VHS-6 and VHS-250 Diffusion Pumps 1.2 Installation Installation consists of: Section 1.2.2 “Unpacking” Section 1.2.3 “Pump Oil Installation” Section 1.2.4 “Vacuum System Connections” on page 29 Section 1.2.5 “Cooling Water Connections” on page 29 Section 1.2.6 “Electrical Connections” on page 30 Section 1.2.7 “Thermal Switch”...

  • Page 29: Vacuum System Connections

    1. Connect the inlet water fitting (near the inlet flange at the top of the pump) to a continuously running water supply at 0.15 gpm (VHS-4) or .25 gpm (VHS-6 and 250) and at a temperature of 60 to 80 °F.

  • Page 30: Electrical Connections

    VHS-4, VHS-6 and VHS-250 Diffusion Pumps The minimum rating of this system should be 85% of the maximum power rating of the diffusion pump. The Quick Cool Coil feed line, located at the boiler plate, should be controlled by a separate three-way valve (open, closed, and vent to atmosphere).

  • Page 31: Thermal Switch

    VHS-4, VHS-6 and VHS-250 Diffusion Pumps 1.2.7 Thermal Switch The pump has been fitted with a manually-resettable thermal switch that is preset at the factory. This switch is located in a box near the bottom of the pump and provides protection to the pump in the event of excessive fluid loss, the loss of cooling water, or high inlet pressure.
  • Page 32 VHS-4, VHS-6 and VHS-250 Diffusion Pumps This page intentionally left blank.

  • Page 33: Operation

    VHS-4, VHS-6 and VHS-250 Diffusion Pumps Section 2. Operation Before turning on the heater, ensure there is fluid in the pump. CAUTION Running the heater without fluid can ruin the heater and damage the pump. Do not air-release the pump while the boiler is hot. Most diffusion pump fluids are heat sensitive and breaks down under these conditions.

  • Page 34: Humid Environments

    VHS-4, VHS-6 and VHS-250 Diffusion Pumps 5. Monitor inlet and foreline pressures. During operation of the diffusion pump: The gas load at the inlet should not exceed the maximum throughput capability of the pump. The forepressure should not exceed the specified tolerable forepressure.

  • Page 35: Maintenance And Service

    VHS-4, VHS-6 and VHS-250 Diffusion Pumps Section 3. Maintenance and Service 3.1 General Maintenance Diffusion pumps generally require little attention when operated correctly. It is advisable to perform some periodic inspections to ensure trouble-free operation. By performing simple preventive maintenance, costly downtime can be avoided. A day-to-day log of pump and system performance helps indicate the condition of the pump and the need for corrective action.

  • Page 36: Cleaning

    VHS-4, VHS-6 and VHS-250 Diffusion Pumps Ensure that the cooling water flow is adequate and unobstructed. In areas where the mineral content of the water is high or where there is considerable sediment, it may be advisable to install water filters.

  • Page 37: Vhs-4 And Vhs-6 Cold Cap Removal/Installation

    VHS-4, VHS-6 and VHS-250 Diffusion Pumps 3.4 VHS-4 and VHS-6 Cold Cap Removal/Installation To remove the cold cap: 1. Remove the spring (1) (Figure 3-1) attached by round head screw (2), a flat washer (3) and a lock washer (4). The screw types are: VHS-4: no.

  • Page 38: Vhs-250 Cold Cap Removal/Installation

    VHS-4, VHS-6 and VHS-250 Diffusion Pumps 3.5 VHS-250 Cold Cap Removal/Installation To remove the cold cap: 1. Remove the spring (J) attached by the 6-32x round head screw (H), a flat washer and 3/16 a lock washer (Figure 3-2). 2. Loosen the nuts (L) holding the cold cap bracket (E) to the copper bar (C) and remove the cold cap (B) from the top of the jet cap (A).

  • Page 39: Jet Assembly Removal/Installation

    VHS-4, VHS-6 and VHS-250 Diffusion Pumps 3.6 Jet Assembly Removal/Installation To remove the jet assembly: 1. Remove the cold cap from the pump (Figure 3-3). 2. Unscrew the top cap from the jet assembly. 3. Lift out each section of the jet assembly, being careful not to dent or otherwise damage the jet assembly during disassembly or cleaning.

  • Page 40: Vhs-4 Diffusion Pump Jet Assembly

    VHS-4, VHS-6 and VHS-250 Diffusion Pumps Jet Cap Jet Plug Inner Rod 2nd Stage Drip Shield 3rd Stage Jet 3rd Stage Drip Shield Jet Tube Assembly Jet Base Ejector 4.00 Flat Splash Baffle Boiler Plate Jam Nut Figure 3-3 VHS-4 Diffusion Pump Jet Assembly...

  • Page 41: Vhs-6 And 250 Diffusion Pump Jet Assembly

    VHS-4, VHS-6 and VHS-250 Diffusion Pumps Figure 3-4 VHS-6 and 250 Diffusion Pump Jet Assembly...

  • Page 42: Heater Replacement

    VHS-4, VHS-6 and VHS-250 Diffusion Pumps 3.7 Heater Replacement Refer to Figure 3-5 through Figure 3-11 for this procedure: 1. Turn off the power to the diffusion pump and disconnect the power supply. 2. Remove the heater cover from the bottom of the diffusion pump.

  • Page 43: Vhs-4 Heater Assembly (Optional)

    VHS-4, VHS-6 and VHS-250 Diffusion Pumps Heater Element Tubular 647304275 1450W, 208V Figure 3-6 VHS-4 Heater Assembly (Optional) Figure 3-7 VHS-4, VHS-6 and VHS-250 Heater Mounting (VHS-6 Shown)

  • Page 44: Vhs-4 Heater Mounting

    VHS-4, VHS-6 and VHS-250 Diffusion Pumps VHS-4 Heater Element Tubular 647304205 1450 W, 120 V 647304210 1450 W, 208 V 647304250 1450 W, 240 V Figure 3-8 VHS-4 Heater Mounting...

  • Page 45: Vhs-4, Vhs-6 And Vhs-250 With Platen Heater - Orientation Of Heater (Vhs-4 Shown)

    647306501 2200 W, 440 V 647306502 2200 W, 400 V 647306503 1800 W, 380 V 647306504 1800 W, 400 V 647306505 1800 W, 480 V Figure 3-9 VHS-4, VHS-6 and VHS-250 with Platen Heater - Orientation of Heater (VHS-4 Shown)

  • Page 46: Vhs-4, Vhs-6 And Vhs-250 With Tubular Heater Insulation And Wire Placement

    VHS-4, VHS-6 and VHS-250 Diffusion Pumps Figure 3-10 VHS-4, VHS-6 and VHS-250 with Tubular Heater Insulation and Wire Placement Figure 3-11 VHS-4, VHS-6 and VHS-250 with Platen Heater Insulation and Wire Placement...

  • Page 47: Pump Fluid Charge

    VHS-4, VHS-6 and VHS-250 Diffusion Pumps 3.8 Pump Fluid Charge The recommended fluid charge is: 300 cc for the VHS-4 500 cc for VHS-6 and VHS-250 The fluid charge will gradually be depleted through use, but the pump will continue to operate normally.
  • Page 48 VHS-4, VHS-6 and VHS-250 Diffusion Pumps This page intentionally left blank.

  • Page 49: Troubleshooting

    VHS-4, VHS-6 and VHS-250 Diffusion Pumps Section 4. Troubleshooting 4.1 Leakage Analysis of general operational experience with diffusion pumps indicates that certain locations are more prone to vacuum leaks. The following locations should be checked first if leakage is the suspected cause of poor system performance:...

  • Page 50: Poor Pump Or System Performance

    VHS-4, VHS-6 and VHS-250 Diffusion Pumps 4.3 Poor Pump or System Performance Before proceeding with a step-by-step troubleshooting program, check the performance and accuracy of the vacuum gauges used on the system. Table 4-1 shows the most frequent faults, their probable causes, and specific repair actions required for each.
  • Page 51 VHS-4, VHS-6 and VHS-250 Diffusion Pumps Table 4-1 Troubleshooting (Continued) Symptom Probable Cause Repair Action Inlet pressure surges Incorrect heater voltage. Check and correct voltage. Fluid outgassing. Condition pump fluid by operating pump for a few hours. Leak in system ahead of Check and correct.
  • Page 52 VHS-4, VHS-6 and VHS-250 Diffusion Pumps This page intentionally left blank.

  • Page 53: Replacement Parts

    VHS-4, VHS-6 and VHS-250 Diffusion Pumps Section 5. Replacement Parts Table 5-1 lists the VHS-4 models. Table 5-2 lists the VHS-4 replacement parts available from Agilent. Table 5-1 VHS-4 Models Part Number Flange Type Pump Voltage Conflat Standard cold cap...

  • Page 54: Vhs-6 Models

    Table 5-2 VHS-4 Replacement Parts (Continued) L8975001 Heater Insulating Blanket 648056680 Lugs, Replacement, nickel X3901-68001 VHS-4 Heater wire, 24" 10AWG, 3 required 88164301 Heater Clamp (see Figure 3-8 on page 44) Commercial Heater Clamp Nut, -16, Hex, stainless steel 31/48...

  • Page 55: Vhs-6 Replacement Parts

    VHS-4, VHS-6 and VHS-250 Diffusion Pumps Table 5-4 VHS-6 Replacement Parts Part Number Description 86101301 Standard Cold Cap Assembly F6455301 Extended Cold Cap Assembly F3365301 Jet Assembly F3373301 Splash Baffle L9172301 Foreline Baffle Assembly 642906025 Thermoswitch 699006025 Standoff, ceramic insulating, Cold Cap Refer to Section 3.7 “Heater Replacement”...

  • Page 56: Vhs-250 Models

    VHS-4, VHS-6 and VHS-250 Diffusion Pumps Table 5-5 lists the VHS-250 models. Table 5-6 lists the VHS-250 replacement parts available from Agilent. Table 5-5 VHS-250 Models Part Number Flange Type Pump Voltage Standard cold cap 120 V K0543301 Standard cold cap...
  • Page 57 VHS-4, VHS-6 and VHS-250 Diffusion Pumps Table 5-6 VHS-250 Replacement Parts (Continued) K0377178 O-Ring Kit includes: 3 Butyl inlet flange O-ring, Parker No. 2-332 3-Butyl-N foreline flange O-ring, Parker No. 2-379 10 Viton fill and drain O-rings (old style), Parker No. 2-112 10 Viton fill and drain O-rings (new style, Parker No.
  • Page 58 VHS-4, VHS-6 and VHS-250 Diffusion Pumps This page intentionally left blank.
  • Page 59 Please follow these instructions whenever one of our products needs to be returned. 1) Complete the attached Request for Return form and send it to Agilent Technologies (see below), taking particular care to identify all products that have pumped or been exposed to any toxic or hazardous materials.
  • Page 60 This page intentionally left blank. 4) HEALTH and SAFETY CERTIFICATION AGILENT TECHNOLOGIES CANNOT ACCEPT ANY PRODUCTS CONTAMINATED WITH BIOLOGICAL OR EXPLOSIVE HAZARDS, RADIOACTIVE MATERIAL, OR MERCURY AT ITS FACILITY. Call Agilent Technologies to discuss alternatives if this requirement presents a problem.
  • Page 61 Shipping Regulations (IATA, DOT, etc.) and carrier requirements. Customers receiving an Advance Exchange product agree to return the defective, rebuildable part to Agilent Technologies within 15 business days. Failure to do so, or returning a non-rebuildable part (crashed), will result in an invoice for the non-returned/non-rebuildable part.
  • Page 62 VHS-4, VHS-6 and VHS-250 Diffusion Pumps This page intentionally left blank.
  • Page 64 Service & Support North America India Southeast Asia Agilent Technologies Agilent Technologies India Pvt. Ltd. Agilent Technologies Sales Sdn Bhd Vacuum Products Division Vacuum Products Division Vacuum Products Division 121 Hartwell Avenue G01. Prime corporate Park, Unit 201, Level 2 uptown 2,...

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