Interface Drawing With Dimensions; Pumping Speed Curves - Agilent Technologies Varian TriScroll 620 Series Installation And Operation Manual

Dry scroll vacuum pump
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TriScroll 620 Series Vacuum Pump
472 (18.57) Single Phase
38
(1.48)
Intake (NW25)
ø300
(ø11.80)
355
(13.98)
184
(7.25)
22
13
(.85)
(.50)
82
105
(3.22)
(4.13)
3
Exhaust (
/
NPT)
8
port swivels 360
NW25 Exhaust extension
included but
not installed
176
(6.94)
102
(4.02)
145 (5.69)
4 x ø11(ø.43) Thru
Figure 1 Interface Drawing with Dimensions
Figure 2 Pumping Speed Curves
4

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Varian triscroll pts620

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