Related Manuals for Agilent Technologies VHS-10
Summary of Contents for Agilent Technologies VHS-10
- Page 1 Vacuum Products Division VHS-10 & VHS-400 Diffusion Pumps Part No. 699901023 Rev. L June 2013...
- Page 2 VHS-10 & VHS-400 Diffusion Pumps ® Santovac 5 Diffusion Pump Fluid of SANTOVAC FLUIDS, INC. ® Viton is a registered trademark of E. I du Pont de Nemours and Company. Copyright 2013 Agilent, Inc.
- Page 3 VHS-10 & VHS-400 Diffusion Pumps Warranty Products manufactured by Seller are warranted against defects in materials and workmanship for twelve (12) months from date of shipment thereof to Customer, and Seller’s liability under valid warranty claims is limited, at the option of Seller, to repair, replacement, or refund an equitable portion of the purchase price of the Product.
- Page 4 VHS-10 & VHS-400 Diffusion Pumps Warranty Replacement and Adjustment All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto, and must be received within the applicable warranty period by Seller or its authorized representative. Such claims should include the Product serial number, the date of shipment, and a full description of the circumstances giving rise to the claim.
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Page 5: Table Of Contents
VHS-10 & VHS-400 Diffusion Pumps Contents Documentation Conventions ...................... 11 Diffusion Pump Hazards ......................11 Introduction ............................ 19 Operating Characteristics ......................19 Pump Air Speed and Throughput ....................23 Physical Specifications......................... 24 Wiring Diagram ........................... 26 Installation ............................27 Unpacking ........................... 27 Pump Oil Installation ........................ - Page 6 VHS-10 & VHS-400 Diffusion Pumps This page intentionally left blank.
- Page 7 List of Figures VHS-10 Speed and Throughput Curves ................. 23 VHS-400 Speed and Throughput Curves ................23 VHS-10 and VHS-400 Outline with ASA Flanges ..............24 Operating Characteristics...................... 26 VHS-10 and VHS-400 Jet Assembly ..................42 VHS-10 and VHS-400 Heater Connections ................43 Solid Steel and Slotted Stainless Clamp Plate ................
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- Page 9 VHS-10 & VHS-400 Diffusion Pumps List of Tables General Hazards........................12 Explosive Conditions......................14 Pressurization Hazards......................15 VHS-10 Operating Specifications..................19 VHS-400 Operating Specifications..................21 VHS-10 and VHS-400 Dimensions ..................24 Troubleshooting Guide ......................36 Replacement Parts ....................... 47...
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Page 11: Documentation Conventions
VHS-10 & VHS-400 Diffusion Pumps Preface Documentation Conventions This manual uses the following documentation conventions: Warnings indicate a particular procedure or practice, which WARNING if not followed correctly, could lead to serious injury. Cautions indicate a particular procedure or practice, which if CAUTION not followed, could cause damage to the equipment. -
Page 12: General Hazards
VHS-10 & VHS-400 Diffusion Pumps The installation, operation, and servicing of diffusion pumps involves one or more of the hazards in 1, any one of which in the absence of safe operating practices and precautions, could potentially result in death or serious harm to personnel. - Page 13 VHS-10 & VHS-400 Diffusion Pumps Explosion Operation of the diffusion pump without continuous evacuation below 0.5 Torr (0.67 mbar; 66.5 Pa), or without coolant and introducing a strong oxidizer (such as air) or explosive vapors or powders or materials which may react with pumping fluids in a hot pump (above 300 °F or 150 °C) can cause an explosion.
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Page 14: Explosive Conditions
VHS-10 & VHS-400 Diffusion Pumps Never operate a large diffusion pump under the conditions listed in Table 2. Any of these situations increases the probability of an explosion. Table 2 Explosive Conditions Explosion-Causing Prohibited Action Condition Do not run pump without cooling water... -
Page 15: Pressurization Hazards
VHS-10 & VHS-400 Diffusion Pumps Pressurization Hazards Large vacuum pumps and their components are designed for vacuum service. They are not designed for pressurization, which could cause them to burst possibly expelling shrapnel at lethal velocities. Serious accidents have been caused by intentional pressurization of vacuum systems and their components. - Page 16 VHS-10 & VHS-400 Diffusion Pumps Pump Fluids: Overheating the pump fluid, exposing it to air or reactive materials, or −3 over-pressurizing it above the normal operating range, approximately 1x10 Torr −3 (1.3x10 mbar) decomposes the fluid and possibly makes it toxic. This is especially true of backstreamed mechanical pump fluids which are more volatile (unstable).
- Page 17 VHS-10 & VHS-400 Diffusion Pumps Cold Coolant Liquid nitrogen. a cryogenic liquid, is used in traps. If it is splashed on body tissues or eyes, it can cause severe frostbite or blindness. The extremely low temperature of liquefied nitrogen can cause skin damage similar to high temperature burns. Contact with the cold gas evolving from the liquid can produce the same effect.
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Page 19: Introduction
“Wiring Diagram” on page 26 Operating Characteristics The operating characteristics and physical specifications of the VHS-10 and VHS-400 diffusion pumps are given in Table 1-1 and Table 1-2 on page 21. The graphs in Figure 1-1 through Figure 1-2 on page 23 show air speed and throughput as a function of inlet pressure. - Page 20 VHS-10 & VHS-400 Diffusion Pumps Table 1-1 VHS-10 Operating Specifications (Continued) Specification Units 4400 W 5100 W Forepressure, Max. 0.65 No Load Torr 0.87 mbar Full Load Torr 0.55 mbar 0.73 Backstreaming Rate mg/cm /min −4 at Pump Inlet 5.0x10 (with std cold cap) −4...
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Page 21: Vhs-400 Operating Specifications
VHS-10 & VHS-400 Diffusion Pumps Table 1-1 VHS-10 Operating Specifications (Continued) Specification Units 4400 W 5100 W Thermal switches Manual reset at 300 °F (148.9 °C) Clearance 6" minimum (for heater removal) Materials Body, flanges, foreline baffle - stainless steel... - Page 22 VHS-10 & VHS-400 Diffusion Pumps Table 1-2 VHS-400 Operating Specifications (Continued) Specification Units 4400 W Warmup Time minutes Cooldown Time minutes Without Quick Cool With Quick Cool Fluid Charge 1000 Recommended backing pump capacity* *Recommended sizes when operating at maximum throughput.
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Page 23: Pump Air Speed And Throughput
This relationship is shown for the large vacuum pumps in the set of graphs shown in Figure 1-1 and Figure 1-2. Speed curves were generated according to AVS Standard 4.1. NOTE Figure 1-1 VHS-10 Speed and Throughput Curves Figure 1-2 VHS-400 Speed and Throughput Curves... -
Page 24: Physical Specifications
VHS-10 & VHS-400 Diffusion Pumps Physical Specifications Figure 1-3 shows the VHS-10 and VHS-400 outline drawings with ASA flanges. Table 1-3 lists unit dimensions. Figure 1-3 VHS-10 and VHS-400 Outline with ASA Flanges Table 1-3 VHS-10 and VHS-400 Dimensions VHS-10... - Page 25 VHS-10 & VHS-400 Diffusion Pumps Table 1-3 VHS-10 and VHS-400 Dimensions (Continued) VHS-10 VHS-400 Inlet Flange, Nominal 10" ASA ISO-320-K 14" CFF Special ISO-400-K Size Inlet Flange, OD 16.00 406 14.57 370 14.00 356 18.00 17.72 450 Inlet Flange, ID 12.19 310...
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Page 26: Wiring Diagram
VHS-10 & VHS-400 Diffusion Pumps Wiring Diagram Figure 1-4 shows the circuit operating characteristics. Refer to Table 1-1 on page 19 and Table 1-2 on page 21 for VHS-10 and VHS-400 resistance characteristics. Figure 1-4 Operating Characteristics... -
Page 27: Installation
VHS-10 & VHS-400 Diffusion Pumps Installation Installation consists of: “Unpacking” “Pump Oil Installation” on page 28 “Vacuum System Connections” on page 28 “Cooling Water Connections” on page 29 “Electrical Connections” on page 30 “Thermal Switch Connections” on page 31 Unpacking... -
Page 28: Pump Oil Installation
VHS-10 & VHS-400 Diffusion Pumps Pump Oil Installation The recommended oil charge for the VHS-1 0 and the VHS-400 diffusion pumps is 1000 cc. To fill the oil: Remove the fill plug and pour the oil into the pump inlet or the foreline by pouring it into the fill and drain assembly. -
Page 29: Cooling Water Connections
VHS-10 & VHS-400 Diffusion Pumps Cooling Water Connections To install cooling water connections: 1. Connect the inlet water fitting (near the inlet flange at the top of the pump) to a continuously running water supply at 0.5 gpm and at a temperature of between 60 to 80 °F. -
Page 30: Electrical Connections
To complete electrical connections: 1. Verify the heater rating by measuring the resistance of the heater circuit (line-to-line) and comparing it to the values in Table 1-1 on page 19 for the VHS-10 or Table 1-2 on page 21 for the VHS-400. -
Page 31: Thermal Switch Connections
VHS-10 & VHS-400 Diffusion Pumps Thermal Switch Connections The pump has been fitted with a factory preset manually-resettable thermal switch. This switch is located in a box near the bottom of the pump and provides protection to the pump in the event of excessive fluid loss, the loss of cooling water, or high inlet pressure. - Page 32 VHS-10 & VHS-400 Diffusion Pumps This page intentionally left blank.
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Page 33: Operation
VHS-10 & VHS-400 Diffusion Pumps Operation Operation consists of: “Startup Procedure” on page 34 “Shutdown Procedure” on page 34 During initial installation, the newly installed pump fluid may be subjected to degassing. This can result in foreline pressure fluctuations that are considered normal. -
Page 34: Startup Procedure
VHS-10 & VHS-400 Diffusion Pumps Startup Procedure To start the pump: 1. Visually inspect the sight glass assembly to ensure that the diffusion pump has been charged with the proper amount of diffusion pump fluid. When properly filled, the oil level (when the pump is cold) is even with the FULL/COLD mark on the oil level indicator. -
Page 35: Troubleshooting
VHS-10 & VHS-400 Diffusion Pumps Troubleshooting Troubleshooting consists of: “Leakage” “Outgassing” “Poor Pump or System Performance” on page 36 Leakage If leakage is the suspected cause of poor system performance, first check the following items: Inlet and foreline connections Drain and fill plugs... -
Page 36: Poor Pump Or System Performance
VHS-10 & VHS-400 Diffusion Pumps Poor Pump or System Performance Table 4-1 lists the faults, the probable causes and corrective actions to take if you have a problem with a large diffusion pump. Table 4-1 Troubleshooting Guide Fault Probable Cause... - Page 37 VHS-10 & VHS-400 Diffusion Pumps Table 4-1 Troubleshooting Guide (Continued) Fault Probable Cause Corrective Action High chamber Forepressure too high Check for leak in foreline, poor contamination of mechanical pump performance, the pump fluid breakdown of pump fluid, and incorrect...
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Page 39: Appendix A. Maintenance
VHS-10 & VHS-400 Diffusion Pumps Appendix A. Maintenance Pump maintenance consists of: “Periodic Inspections” “Cleaning” on page 40 “Disassembly and Reassembly Procedures” on page 41 “Cold Cap” on page 41 “Jet Assembly” on page 42 “Heater Replacement” on page 43 “Pump Fluid”... -
Page 40: Cleaning
VHS-10 & VHS-400 Diffusion Pumps Continuous operation in the overload range as given in Table 1-1 on page 19 or Table 1-2 on page 21. Failure to reinsert the foreline baffle in the pump assembly 2. When the pump is cold, check that the heaters are bolted snugly to the boiler plate and that all heater terminal connections are fastened tightly inside the junction box. -
Page 41: Disassembly And Reassembly Procedures
VHS-10 & VHS-400 Diffusion Pumps 3. Unbolt the inlet flange and foreline connections. 4. Remove the pump from the system. Drain the diffusion pump of all fluid. 5. Remove all O-rings, the cold cap assembly ( “Cold Cap” on page 41), the jet assembly ( “Jet Assembly”... -
Page 42: Vhs-10 And Vhs-400 Jet Assembly
VHS-10 & VHS-400 Diffusion Pumps Jet Assembly Figure A-1 shows the jet assembly. Figure A-1 VHS-10 and VHS-400 Jet Assembly To disassemble the jet assembly: 1. Remove the cold cap from the pump ( “Cold Cap” on page 41). 2. Unscrew the cold cap from the jet assembly. -
Page 43: Vhs-10 And Vhs-400 Heater Connections
3. Install the cold cap assembly. Heater Replacement Refer to Figure A-2 for this procedure. Figure A-2 VHS-10 and VHS-400 Heater Connections To replace a heater: 1. Turn off the power to the diffusion pump and disconnect the power supply. -
Page 44: Solid Steel And Slotted Stainless Clamp Plate
VHS-10 & VHS-400 Diffusion Pumps 9. Assemble the heater, crush plate (with dimples facing the heater element), and clamping plate as a unit. 10. Coat the boiler studs with an anti-seize compound such as Loctite C5-A or common milk of magnesia. -
Page 45: Fill And Drain Assemblies
VHS-10 & VHS-400 Diffusion Pumps Pump Fluid The recommended fluid charge for the VHS-10 and the VHS-400 diffusion pumps is 1000 cc. The fluid charge is gradually be depleted through use, but the pump continues to operate normally. When the charge is reduced to approximately 60% of the initial fill amount, the boiler plate temperature may begin to rise. - Page 46 VHS-10 & VHS-400 Diffusion Pumps This page intentionally left blank.
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Page 47: Appendix B. Parts
Appendix B. Parts Replacement Parts Table B-1 Replacement Parts Part Number Description F0429301 Standard cold cap assembly, VHS-10 only K4823301 Standard cold cap assembly, VHS-400 only L8917301 Extended cold cap assembly, VHS-10 only L8908301 Sight glass repair kit, consisting of:... - Page 48 VHS-10 & VHS-400 Diffusion Pumps Table B-1 Replacement Parts (Continued) Part Number Description K4928001 Heater clamping plate, solid steel R2667301 Heater clamping plate, slotted stainless steel L8914001 Heater insulating blanket L8903301 Heater cover plate K0377185 O-ring kit; includes (VHS-10): 1 butyl inlet flange O-ring (F0430001) 1 Buna-N foreline O-ring, Parker No.
- Page 49 Please follow these instructions whenever one of our products needs to be returned. 1) Complete the attached Request for Return form and send it to Agilent Technologies (see below), taking particular care to identify all products that have pumped or been exposed to any toxic or hazardous materials.
- Page 50 This page intentionally left blank. 4) HEALTH and SAFETY CERTIFICATION AGILENT TECHNOLOGIES CANNOT ACCEPT ANY PRODUCTS CONTAMINATED WITH BIOLOGICAL OR EXPLOSIVE HAZARDS, RADIOACTIVE MATERIAL, OR MERCURY AT ITS FACILITY. Call Agilent Technologies to discuss alternatives if this requirement presents a problem.
- Page 51 Shipping Regulations (IATA, DOT, etc.) and carrier requirements. Customers receiving an Advance Exchange product agree to return the defective, rebuildable part to Agilent Technologies within 15 business days. Failure to do so, or returning a non-rebuildable part (crashed), will result in an invoice for the non-returned/non-rebuildable part.
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