Cleanroom Preparation - Parker 406LXR Series Product Manual

406LXR Series Product Manual

Cleanroom Preparation

There is no cleanroom 'rating' for motion control products, just individual compatibility with class of
cleanrooms. The compatibility is also dependent on measurement location. A point directly below a
component may have a different particle count than at a side location. In an effort to clarify the class of
cleanroom that our products can be used in with out affecting the overall rating of the cleanroom,
Parker provides a Cleanroom Class Compatibility chart for product intended for use in such
environments. Due to the linear motor design of the 406LXR, minimal particle generation occurs
during operation. 406LXR tables with cleanroom preparation were tested in Parker's vertical laminar
flow work station which utilizes ULPA filters to produce an environment having a cleanliness of class
10 prior to testing. Tables were tested in a variety of orientations with sampling both below the table
and at the carriage mounting surface with a particle counter capable of measuring 0.3 m diameter
and larger particles. Based on results from testing following the 209E Federal Standard, the following
chart shows the expected cleanroom compatibility of the 406LXR with Class 10 cleanroom prep.
Consult factory for details on test methodology and
Velocity
[mm/sec]
250
500
750
1000
Standard Cleanroom Preparation
Stringent cleaning and handling measures
Cleanroom rated lubricant
1) Compatibility is defined as not affecting the cleanroom class rating with the addition of this product for classes shown. The
Class 1 rating in the table refers to class 1 levels of 0.3m and larger particles detected in Parker's Class 10 chamber. For
complete class 1 compatibility, the particle count for the 0.1 and 0.2m particles would also need to be taken into consideration.
406LXR Cleanroom Class Compatibility
Standard Mount
4.5" below At stage top
25
25
25
50
Chapter 2 - Table Specifications
results.
Side Mount
4.5" below
1 25
1 25
5 50
5 100
20
1
At stage top
1
1
5
5
Parker Hannifin Corporation
EMN Automation - Parker
Irwin, Pennsylvania