Test Methodology - Parker 406LXR Series Product Manual

406LXR Series Product Manual

Test Methodology

Published accuracy and repeatability specifications are subject to the testing methodology. Parker's
methodology provides specifications over the entire table travel regardless of start or finish position.
The accuracy and repeatability specifications are based on the peak to peak error measured by a
laser interferometer and prism located at 50mm above the center of the table. This type of
measurement sums the X, Y, Z, roll, pitch, and yaw errors. Temperature deviations from test condition
may cause deviations in straightness, flatness, accuracy, and repeatability from catalog specifications.
Tests are performed with the table mounted to a granite table, unloaded at 20
Example:
The accuracy ranges from -3.68 microns to 2.64 microns. This table would have its accuracy
specified as 6.32 micron since the worst case would be starting at one extreme and traveling to the
other.
2.64
-3.68
Chapter 2 - Table Specifications
6.32
11
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C.
Parker Hannifin Corporation
EMN Automation - Parker
Irwin, Pennsylvania