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MAN-MAXPRO
REV. B.0.
PHOSPHINE
GAS
Arsine
Silane
Diborane
Germane
Sulphur Dioxide
Hydrogen
Ethylene
AMMONIA
GAS
Hydrogen Sulfide
Sulfur Dioxide
Hydrochloric Acid
Phosphine
Carbon Monoxide
Carbon Dioxide
Nitrogen
Chlorine
Hydrogen
Hydrocarbons
Hydrogen Cyanide
Hydrogen Selenide
Diborane
Arsine
Germane
Hydrogen Fluoride
Alcohols
NOTE 1. Short term in minute range
APPENDIX A - SPECIFICATIONS
CONCENTRATION TYPICAL RESPONSE
150ppb
1000ppb
300ppb
600ppb
5ppm
100ppm
100ppm
CONCENTRTION
(PPM)
10
2
5
300
1000
5000
1,000,000
1
10,000
10,000
10
0.1
0.1
1
1
4
1000
77
120ppb
900ppb
100ppb
510ppb
1ppm
<0.1ppm
1.8ppm
TYPICAL RESPONSE
(PPM)
0 (NOTE 1)
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
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