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Pfeiffer Vacuum TPH 1801 U Operating Instructions Manual
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Pfeiffer Vacuum TPH 1801 U Operating Instructions Manual

Pfeiffer Vacuum TPH 1801 U Operating Instructions Manual

Turbomolecular pumps for up-side down installation
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Betriebsanleitung • Operating Instructions
Translation of the Original Operating Instructions
Turbomolecular Pumps
For Up-side Down Installation
TPH 1801 U P
TPH 1801 U P C

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Summary of Contents for Pfeiffer Vacuum TPH 1801 U

  • Page 1 Betriebsanleitung • Operating Instructions Translation of the Original Operating Instructions Turbomolecular Pumps For Up-side Down Installation TPH 1801 U P TPH 1801 U P C...
  • Page 2 Index Page Page 1. Safety Instructions ......3 4.8. Operations With The DCU 001/DCU 600 or HPU 001 ............. 18 1.1. For Your Orientation ......... 3 4.9. Operations With The Remote Control Unit..19 1.2. Pictogram Definitions ........3 Venting Release (Optional) ......19 Understanding The Pumps ....
  • Page 3 1. Safety Instructions ☞ Read and follow all instructions in this manual. 1.1. For Your Orientation ☞ Inform yourself regarding: – Hazards which can be caused by the pump; Instruction in the text – Hazards which can be caused by your system. ➡...
  • Page 4 140 VDC ±5% Proper Use – The Turbomolecular Pumps TPH 1801 U P and TPH 1801 U P C may only be used for the purpose of gene- rating vacuum. – The Turbomolecular Pumps TPH 1801 U P C (please see the type plate) are designed to pump corrosive gases and vapours.
  • Page 5 The following is regarded, inter alia, as improper: TPH 1801 U P Standard version – The pumping of explosive gases. TPH 1801 U P C Corrosive gas processes version – Operating the pumps in areas where there is a danger of explosion.
  • Page 6 U U s s e e a a P P f f e e i i f f f f e e r r V V a a c c u u u u m m s s p p l l i i n n t t e e r r s s h h i i e e l l d d o o r r p p r r o o t t e e c c t t i i v v e e s s c c r r e e e e n n absorbed by the system and the high vacuum flange. The use of a Pfeiffer Vacuum splinter shield or protective screen in the high vacuum flange protects the turbopump against foreign bodies coming from the vacuum chamber but...
  • Page 7 Installation is done as follows: Variant 2 - Stud screw with blind hole To reliably prevent the pump from twisting if Stud screw with blind hole WARNING the rotor suddenly blocks, it is absolutely prohi- ISO-F flange bited to secure a pump with an ISO-K flange on Stud screw with nut a vacuum chamber with an ISO-F flange or vice Centering ring, coated...
  • Page 8 Recommendation: Dry backing pumps or rotary vane The maximum loading capacity of the high vacu- CAUTION vacuum pumps from the Pfeiffer Vacuum um flange is 2000 N (equivalent to 200 kg). range. Asymmetric loading on the high vacuum flange must be avoided.
  • Page 9 3.4. Connecting The Cooling Unit 31 Supply line 32 Return line The Turbopumps TPH 1801 U P / U P C have been designed to 33 Dirt trap be water cooled as standard. (cooling water connection please refer to Section 9.1.
  • Page 10 3.5. Connecting The Electronic 3.6. Installing The Power Supply Drive Unit TC 750 Voltage may only be supplied with the Pfeiffer CAUTION Vacuum power supplies (please see Section 11. The turbopump and the Electronic Drive Unit PLEASE NOTE Accessories). TC 750 are connected and together form a The use of other power supplies requires the single unit.
  • Page 11 3.7. Installing The Cover Plate For The TC Inserts and Screw fittings Screw Blank PG 16; for fitting disc The turbomolecular pump with integrated Electronic Drive cable Ø6 Unit TC 750 has an IP 30 protection class rating. Insert (scope of delivery When the turbopump is water cooled the enclosed water 1 piece E 153/8 1 piece E 153/11)
  • Page 12 3.8. Connecting The Venting Valve 3.9. Connecting The Sealing Gas Valve The venting valve (see Section 11. Accessories) provides For protection pruposes the turbopumpe should be operated automatic venting in the event of a power failure and with sealing gas, particularly where corrosive and dusty switching off.
  • Page 13 3.10. Connecting The Remote Pin occupancy remote plug Control Unit Remote control options for various functions are provided with the connection ”REMOTE” on the TC 750 via the 15 pole D-Sub connector. Shielded cable must be used. Shielding is on the plug side of the TC 750 connected to the TC 750 casing. The inputs 2 - 6 are activated by connecting them to the + 24V on pin 1 (active high) (please see Section 3.12.
  • Page 14 3.11. Connecting The Serial Connecting The RS 485 Interface RS 485 Connecting to a fixed bus system: An external operating component DCU 001/DCU 600 o o r r ➡ Connect all units with D+ (pin 5/RS 485) and HPU 001 o o r r – using a level converter – an external computer D- (pin7/RS 485) to the bus.
  • Page 15 3.12. Connections Diagram TC 600 TC 750 n.c. +24 VDC* / max. 200 mA (supply voltage, DCU) n.c. n.c. RS 485 RS 485+/ (DO/RI) GND* (mass connection, DCU) RS 485- / (DO/RI) n.c. +24 VDC*/max. 50 mA Venting release Motor TMP Contact current: Pumping station max.
  • Page 16 4. Operations 4.1. Filling In The Lubricant 4.2. Before Switching ON Turbopumps must be filled with lubricant before Sections 4.2 to 4.6. refer only to operating the pump in its CAUTION being operated. condition on delivery, without the DCU/HPU operating unit. If possible fill in the lubricant in the fitting The bridges ”venting release”, ”motor, TMP ON”...
  • Page 17 4.3. Switching ON 4.4. Gas Type Dependent Operations ➡ Switch on the turbopump with switch S1 on the power Where high level gas loads and rotation speeds are involved, supply. the resulting friction subjects the rotor to the effect of great –...
  • Page 18 The valve cross-section for a venting rate of 15 mbar/s must be compatible with the size of the vacuum chamber. Where small vacuum chambers are involved, the Pfeiffer Vacuum Venting Valve TVF 005 can be used for first stage venting. ➡ Shut off water supply.
  • Page 19 4.9. Operations With The Remote Control Standby Unit The pump can be operated optionally at 66% of its nominal rotation speed (standby ON) or at its nominal rotation speed Remote control operations can be performed via the connec- (standby OFF). tion with the designation “REMOTE”...
  • Page 20 5. Monitoring Operations 5.1. Operations Display Via LED 5.2. Turbopump Temperature Monitoring Where impermissible motor temperatures are involved or the Certain operations modes of the turbopump and the TC 750 can be ascertained via the two integrated LEDs located on temperature of the casing is too high, the motor current is the front panel of the TC 750.
  • Page 21 • Enter 525 Hz for parameter 777 speed (Parameter 777) (see operating instruction PM 0547 BN “Pumping Operations With DCU”). If there is no DCU/HPU available contact Pfeiffer Vacuum Service. 1) Without a DCU or HPU inform Pfeiffer Vacuum Service to check the cause of trouble.
  • Page 22 ➡ A copy of the completed declaration must accompany the unit; any additional copies must be sent to your local Pfeif- fer Vacuum Service Center. Please get in touch with your local Pfeiffer Vacuum represen- tatives if there are any questions regarding contamination.
  • Page 23 You can replace the lubricant, the lubricant pump and the Filling in the lubricant Electronic Drive Unit TC 750 yourself. Syringe Please contact your local Pfeiffer Vacuum Service for all 71 Lubricant filler screw other maintenance and service work. 72 Lubricant drain screw...
  • Page 24 For cleaning the lubricant pump please contact your local power supply. Pfeiffer Vacuum Service Center. Order number for the Electronic Drive Unit TC 750, see Section 10. Spare Parts. 8.3. Replacing The Lubricant Pump...
  • Page 25 9. Technical Data F F e e a a t t u u r r e e U U n n i i t t T T P P H H 1 1 8 8 0 0 1 1 U U P P T T P P H H 1 1 8 8 0 0 1 1 U U P P C C Connection nominal diameter: Inlet...
  • Page 26 9.1. Dimensions Diagram TPH 1801 U P / U P C DN 200 ISO-K 281mm von HV-Flansch/ 281mm from HV flange G1/8 DN 200 ISO-K Ø 311 DN 40 ISO-KF Ø 200...
  • Page 27 TPH 1801 U P / U P C DN 200 ISO-F 289 mm von HV-Flansch/ G1/8 289 mm from HV flange DN 200 ISO-F Ø 311 DN 40 ISO-KF Ø 200...
  • Page 28 Description Pieces Size Number Comments Ordering Quantity Spare parts TPH 1801 U P / TPH 1801 U P C Electronic Drive Unit TC 750 PM C01 713 see Section 8.4. Remote plug P 0920 668 E Seal ring for water connection...
  • Page 29 11. Accessories Description Size Number Comments/ Order Quantity Operating Instructions C C o o m m p p o o n n e e n n t t s s f f o o r r c c o o o o l l i i n n g g Dirt trap R 3/8”...
  • Page 30 Declaration of Contamination of Vacuum Equipment and Components The repair and/or service of vacuum components will only be The manufacturer could refuse to accept any equipment carried out if a correctly completed declaration has been without a declaration. submitted. Non-completion will result in delay. This declaration can only be completed and signed by authorised and qualified staff: 1.
  • Page 31 "Electromagnetic Compatibility" 2004/108/EC . The agent responsible for compiling the technical documentation is Mr. Jörg Stanzel, Pfeiffer Vacuum GmbH, Berliner Straße 43, 35614 Aßlar. TPH 1801 P / TPH 1801 P C Guidelines, harmonised standards and national standards and specifications...
  • Page 32 Roots pumps Dry compressing pumps Leak detectors Valves Components and feedthroughs Vacuum measurement Gas analysis System engineering Service Pfeiffer Vacuum Technology AG · Headquarters/Germany Tel. +49-(0) 64 41-8 02-0 · Fax +49-(0) 64 41-8 02-2 02 · info@pfeiffer-vacuum.de · www.pfeiffer-vacuum.net...

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Tph 1801 u p c