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No.49901-2-01-6
INSTRUCTION MANUAL
MULTI-STAGE ROOTS VACUUM PUMP
RDA-281H/RDA-501H
Request
Please read this Instruction Manual before starting the pump in order to use
the pump effectively and safely.
Please keep this Instruction Manual carefully.
We reserve our right to change dimensions or specifications of the motors
described in this Instruction Manual for improvement of the performance
without prior notice.
ULVAC KIKO,Inc.
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Related Manuals for Ulvac RDA-281H
Summary of Contents for Ulvac RDA-281H
- Page 1 No.49901-2-01-6 INSTRUCTION MANUAL MULTI-STAGE ROOTS VACUUM PUMP RDA-281H/RDA-501H Request Please read this Instruction Manual before starting the pump in order to use the pump effectively and safely. Please keep this Instruction Manual carefully. We reserve our right to change dimensions or specifications of the motors described in this Instruction Manual for improvement of the performance without prior notice.
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Page 2: Before Using This Product
Please do not hesitate to contact our sales office or agency for unclear on the use. Author's copyright of this instruction manual belongs to ULVAC CAUTION KIKO,Inc. It is prohibited to copy a part and/or this entire manual... -
Page 3: Safety Symbol Marks
No.49901-2-01-6 0.1 Safety Symbol Marks We display symbol marks regarding the safety in this manual and on the product to make clear items to observe. Descriptions attached to the symbol are classified as illustrated below; 0.2 Meanings of Safety Symbol Marks If the user makes a mistake in handling, it indicates an imminent DANGER possibility that the user is subject to death or heavy injury. -
Page 4: Safety Precautions
No.49901-2-01-6 0.3 Safety Precautions Descriptions are given as the method to keep away from danger and actions that must be restricted on the use of the product. Use of this product and this instruction manual. Please read this Instruction Manual before starting installation, operation check or maintenance of this product to use it in long term. -
Page 5: Installation And Storage
(1) Although this pump is provided with casters, do not move it a long distance using these casters. (2) Weight of this product is as follows. RDA-281H,RDA-501H : 38 kg WARNING You have a risk of giving damage to your back as the load larger than safety standard shall be required to transfer the product. -
Page 6: Inlet Piping
No.49901-2-01-6 Inlet piping <Mounting> Check and ensure that any of hazardous energy is blocked before WARNING starting the operation. Power Supply wiring <Mounting> (1) Check and ensure that any of hazardous energy is blocked before starting the operation. (2) Entitled staff should conduct the wiring operation. Erroneous wiring work might cause a fire. -
Page 7: Check And Repair
(1) Although this pump is provided with casters, do not move it a long distance using these casters. (2) Weight of this product is as follows. RDA-281H.RDA-501H : 38 kg WARNING You have a risk of giving damage to your back as the load larger than safety standard shall be required to transfer the product. - Page 8 No.49901-2-01-6 0.4 Types and Descriptions of Warning Labels Displayed on this Pump and Displayed Positions Warning labels are attached on the warning locations in this pump. Be sure to check them before starting operation of the pump. There is a risk of getting electrical shock around the section that this warning label is put.
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Page 9: Acceptance And Storage Of The Pump
No.49901-2-01-6 0.5 Acceptance and Storage of the Pump 0.5.1 Unpacking/Acceptance of the Pump (1) Do not push the Pump over sideways because it is shipped with lubrication oil filled up. (2) Give the instruction them further to use the unloading machinery such as crane to take out the product of the cardboard, lift it up with its top eyebolt and transfer it on lifting. -
Page 10: Transfer
(1) Although this pump is provided with casters, do not move it a long distance using these casters. (2) Weight of this product is as follows. RDA-281H,RDA-501H : 38 kg WARNING You have a risk of giving damage to your back as the load larger than safety standard shall be required to transfer the product. -
Page 11: Operating In Cold Environments
No.49901-2-01-6 0.5.4 Operating in cold environments The ambient temperature range of the pump is 5ºC to 40ºC. If the pump is operated in an ambient temperature lower than 5ºC, the pump internal parts may seize and cause the pump to stop operating. Also, even if the pump is operated within the ambient temperature range, if the pump is operated immediately after being moved from an environment with an ambient temperature lower than 5ºC, seizing may occur. -
Page 12: Table Of Contents
No.49901-2-01-6 CONTENTS 0. Before Using This Product ⅱ 0.1 Safety Symbol Marks ⅱ 0.2 Meanings of Safety Symbol Marks ⅲ 0.3 Safety Precautions ⅶ 0.4 Types and Descriptions of Warning Labels Displayed on this Pump and Displayed Positions ⅷ 0.5 Acceptance and Storage of the Pump ⅷ... -
Page 13: List Of Figures And Tables
No.49901-2-01-6 List of Figures and Tables Fig. 1 Basic Construction View Fig. 6 N2 Purge Arrangement Fig. 2 Outline Drawing Fig. 7 Electrical Wiring Diagram Fig. 3 Pump Lifting Method Fig. 4 Typical Pump Layout Fig. 5 Needle Valve ⅷ Table 1 Standard accessories Table 4... -
Page 14: For Your Safety Use
No.49901-2-01-6 1. For Your Safety Use 1.1 This Product Intrinsic Hazardous Nature and Safety Measures 1.1.1 Danger Leakage of dangerous gas and dangerous materials Factors Avoidance methods and measures Exhaust gas such has toxic and combustible, burn ability, corrosion, explosiveness is very danger. Do not exhaust gas with these properties. -
Page 15: Safety Data Sheet
No.49901-2-01-6 1.2 Safety Data Sheet（SDS） Chemical material used for this Pump; Pump oil: BARRIERTA J100 FLUIDE E (NOK KLUBER) The Safety Data Sheet introduces the chemical material potential to use or touch on operating this machine. Please contact our Sales or vendor division IMPORTANT if you are in need. -
Page 16: Introduction
2. Introduction 2.1 General Features RDA-281H,RDA-501H are dry vacuum pump unite which consists of a main vacuum pump and an auxiliary pump. The main vacuum pump is the multiple dry vacuum pump which composed of roots rotors connected in series. The roots type vacuum pump composed of each stage pump portion transfer gas from inlet side to exhaust side by rotating two rotors in the casing keeping slight clearance between inner wall of casing and rotors and rotor and rotor. -
Page 17: Basic Construction
No.49901-2-01-6 2.2 Basic Construction RDA-H series dry vacuum pump, comprises a rotary type multi stage vacuum pump and are provided with a built-in discharge silencer in the compact package. 【 Fig.1 】 Basic Construction View Inlet : Suction KF25 Flange ... -
Page 18: Outline Drawing
No.49901-2-01-6 2.3 Outline Drawing (unit: mm) 【 Fig. 2 】 Outline Drawing Weight : 38Kg ５... -
Page 19: Specifications
No.49901-2-01-6 3. Specifications 3.1 Performance Specifications 【Table 2】 Specifications Unit RDA-281H RDA-501H Pumping speed L / min Ultimate press. ≦0.08 ≦0.08 (W/O. Flash-air .) Ultimate press. ≦6 ≦6 (W. Flash-air. ) ―― Max. Suction press. the pressure of the atmosphere ――... -
Page 20: Transportation
(1) Although this pump is provided with casters, do not move it a long distance using these casters. (2) Weight of this product is as follows. RDA-281H,RDA-501H : 38 kg WARNING You have a risk of giving damage to your back as the load larger than safety standard shall be required to transfer the product. -
Page 21: Installation
No.49901-2-01-6 4.2 Installation 1) The pump shall be installed in the place of firm floor in horizontal level. The desk top or floor surface should be sufficiently strong to bear the pump weight. 2) The pump contents its lube oil when dispatched from the factory, therefore Do not tilt the pump more than 10 degrees in each direction while transportation and installation to avoid oil leakage into the casing/rotor side. - Page 22 No.49901-2-01-6 (1) Should the Pump sucked the water or substance such as dust, powder and so on, it would impair the ultimate pressure and further cause a trouble. (2) Metal mesh on the Suction inlet is put to keep large foreign substances such as bolt away from the Pump unit.
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Page 23: Flush Air Port Arrangement
Flush Air. As a CAUTION rough indication of pump vapor water venting capacity, use the next values. RDA-281H,RDA-501H:300g/hr 1) How to Introduce Room Air If the gas entering the pump contains moisture, turn the needle in the flash air port to the top, lock in place with the lock nut, and commence operation while drawing in atmospheric air. -
Page 24: N2 Purge Arrangement
No.49901-2-01-6 2) How to Introduce N Purge If nitrogen gas purge is required, remove a plug of flush air port, mount the 1/4 inch tube fitting (ISO PT1/4 screw) on the flush air port. The supply pressure of N gas shall be 50 kPaG and nitrogen gas shall be supplied 10 ～... -
Page 25: Electrical Wiring
No.49901-2-01-6 4.5 Electrical Wiring Install and operate this pump in compliance with the laws and WARNING regulations relating to the safety, e.g. Fire Defense Law, Electric wiring regulation and so on. In the country and region you use the product. (1) Turn OFF the Power Supply to do the electrical connection. -
Page 26: Electrical Wiring Diagram
No.49901-2-01-6 (1) Use supplied connectors only. If other connectors are used, first ground contact may fail, and it causes possibility of electrical shocks. WARNING (2) Use appropriate insulated wire, which can tolerate rated current value of previous page for power cord. (3) Do not perform insulation resistance tester. -
Page 27: Operation
No.49901-2-01-6 5. Operation 5.1 Check points and Preparations before Operation 1) The valve in the discharge side piping line should be fully opened. 2) The main valve should be operated smoothly. After checking the valve operation, the main valve should be fully closed. 3) Confirm the conditions once again in accordance with the pre-starting check points of table 3. -
Page 28: Starting
No.49901-2-01-6 (1) Before performing process, pump must be warm-up and degassing operation (by inlet port at atmospheric pressure) should be performed at the end before process stop. An insufficient warm-up at the initial start-up, and/or insufficient degassing of condensable CAUTION gas interior of the pump at the end of process may cause a pump life shortening. -
Page 29: Stopping
No.49901-2-01-6 5.4 Stopping To stop the pump, proceed as follows. 1) In order to prevent the back (reverse) flow of the atmospheric air or the handling gas, fully close the main (isolation) valve in the suction line. 2) If the handling gas contains condensable gas or water vapor, the pump inside has to be dried. Please open the “Vacuum release valve”... -
Page 30: Checks And Maintenance
No.49901-2-01-6 6. Check and Maintenance 6.1 Periodical Checks To maintain the vacuum pump in the good operating conditions, monitor the checking points and provide maintenance in accordance with the following table. 【Table 4】 Periodical check list Interval Item Check if any abnormal sounds Daily Check suction and discharge pressure. -
Page 31: Troubleshooting
No.49901-2-01-6 6.2 Trouble shooting In the event that a trouble occurs on the vacuum pump while it is in operation, conduct check points and remedies with references of the Table 5. Since the driver error code is displayed in the hour meter when the alarm lamp lights up 6.3 Diagnose the fault according to Table 6 of the driver error code. -
Page 32: Driver Error Code
No.49901-2-01-6 Driver error code The cause of the protection operation is indicated by four times in the hour meter. The latest error code is on the left side, The oldest error code is displayed on the right side. To cancel the error, please push the reset switch after removing the operation signal. -
Page 33: Disposal
No.49901-2-01-6 7. Disposal Make sure to keep in compliance with the laws and regulations established by the local governments to dispose the Vacuum pump. You should ask the dedicated disposal agency for the disposal particularly if the Pump has exhausted any toxic gas. Note that you are requested to bear the cost and charges relating to the disposal. -
Page 34: Warranty
No.49901-2-01-6 8. WARRANTY (1) The warranty for this pump extends for a period of one year from the date of shipment. (2) Any malfunctions or defects which occur under normal usage conditions during the warranty period will be repaired free of charge. Normal usage conditions refer to the following: a) Ambient temperature and humidity during operation: 5- 40°C, below 80% RH b) Operation in accordance with the user manual... - Page 35 Usage Status Check Sheet (for use in Instruction Manual) * For the purpose of safety control of repair personnel, fill in within the heavy line frame and attach the sheet to the item of which repair is requested. * In case this sheet were not attached or filled in, your request of repair and service may not be accepted.
- Page 36 No.62400-2-02-10 アルバック機工株式会社 https://ulvac-kiko.com 製品情報・サービス拠点・お問い合わせはこちらから https://showcase.ulvac.co.jp/ja/ 株式会社アルバック コンポーネント事業本部 営業部 〒253-8543 神奈川県茅ヶ崎市萩園２５００ TEL:0467-89-2416 ULVAC KIKO,Inc. https://ulvac-kiko.com/en Please contact us for products, Service Base or other Inquiries from here. https://showcase.ulvac.co.jp/en/ ULVAC,Inc. Components Business HQ 2500 Hagisono, Chigasaki, Kanagawa, 253-8543, Japan TEL:+81-467-89-2261...
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