Table of Contents Table of Contents Preface ................................... Congratulations on your purchase ........................Product Description ............................. Use ..................................Operating Principle ............................. Oil Circuit................................Cooling.................................. Nitrogen System..............................Optional Functions/ Use of Available Accessories ..................On/ Off Switch..............................Versions ................................Safety ..................................Intended Use ...............................
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Table of Contents 6.1.5 Cooling Water Connection ........................6.1.6 Nitrogen Connection..........................6.1.7 Electrical Connection/ Checks ......................Installation ................................6.2.1 Mounting ............................... 6.2.2 Electrical Connection..........................6.2.3 Equipment Connections (with Options)..................... 6.2.4 Connection of Lines/ Pipes ........................6.2.5 Oil Filling ..............................6.2.6 Direct Cooling Checking ........................
1 | Preface Preface Congratulations on your purchase Congratulations on your purchase of the Busch vacuum pump. With watchful observation of the field’s requirements, innovation and steady development Busch delivers modern vacuum and pres- sure solutions worldwide. These operating instructions contain information for ●...
Product Description | 2 Product Description COBRA BC 0101 G Description Suction connection Discharge connection Warning / alarm led Analog control interface Cooling water inlet connection Cooling water outlet connection Dilution gas connection Lifting eyebolt Electrical connection Earthing Oil sight glass...
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2 | Product Description Description Suction connection Discharge connection Cooling lwater flowmeter Cooling water inlet connection Cooling water outlet connection Cooling water regulating valve Dilution gas connection EMC filter Fuses Magnetic valve Oil sight glass Power connector 24 VDC power supply Temperature sensor PT100 Variable speed drive Voltage transformer (only 400 VAC version)
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Product Description | 2 Process Gas Diagram Description Process gas inlet Process gas outlet Cooling water inlet (CWI) Cooling water outlet (CWO) Cooling water regulating valve (CWR) Cooling water flow meter (CWM) Oil sight glass (OSG) Motor (MOT) Motor klixon (TS) Magnetic valve (MV) with integrated sole- noid valve Nitrogen supply...
2 | Product Description COBRA BC 0101 G Description Inlet Outlet Cooling water Barrier gas Screw rotors Intake medium Cooling water Motor klixon The COBRA BC vacuum pumps are designed for use in the field of microelectronics and similar in- dustries.
Caution, the operating cycle of 150 (hPa) mbar must not exceed more than 5 min. For other applica- tions, contact your Busch representative. - Maximum inlet pressure: 1 bar (abs). - With pump running at full speed, do not expose to inlet pressure 300 (hPa) mbar.
● DGF: nitrogen flow rate, dilution ● CWM: cooling water flow rate in motor/ transmission / variable speed drive See "Installation and Maintenance Instructions, Busch PLC and Busch LCD (No. 0870758077)". On/ Off Switch The vacuum pump is delivered with a circuit breaker. The function start/ stop can be done in Local by using the LCD controller or in Remote by the production machine.
The maintenance instructions must be followed and observed. These installation and maintenance instructions must be read and understood before the vacuum pump is used. If you have any doubts, contact your Busch representative. Safety Information The vacuum pump is designed and manufactured in compliance with the latest technical standards and safety regulations.
3 | Safety NOTE ... indicates helpful tips and recommendations, as well as information for efficient and trou- ble-free operation. CAUTION The COBRA BC system includes provision for the secondary containment of liquids leaks such as water and oil. Safety Stickers COBRA NW 0090 A Description Warning! Hot surface! Do not touch!
Safety | 3 COBRA BC 0101 G Sound Pressure Emission Refer to the table “Technical data” for the permissible sound levelling free field conditions according to EN ISO 2151. CAUTION The sound level of the vacuum pump within a certain perimeter of the vacuum pump is high.
3 | Safety Type 3 Equipment is energized. Energized circuits are exposed and inadvertent contact with uninsulated energized parts is possible. Potential exposures are no greater than 30 volts rms, 42.4 volts peak, 60 volts dc or 240 volt-amp in dry locations. Type 4 Equipment is energized.
Safety | 3 Safety Interlock Table Interlock event Sensor Response Motor overcurrent Variable speed drive Variable speed drive default and remove (VSD) power to motor. Motor overtempera- Temperature switch TS Contactors open and remove power to ture (klixon) motors. (t° > 150°C) Exhaust overpressure Pressure sensor PSA Depends on alarm function set in the...
3 | Safety Pump Gravity Center Position ● The gravity center of the vacuum pump is determined according to the following drawing: Description Center of gravity (CG) Weight (W): 117 kg L1: 254 mm L2: 127 mm L3: 272.5 mm Height h: 145.2 mm Seismic Zone Installation Upon receipt, the vacuum pump is fixed on the transport pallet with two brackets.
Safety | 3 CAUTION The vacuum pump is fixed to the ground with four M10 screws, two screws per bracket. The fixing screw must stand a 1200 N tensible force (per bracket). The final user must adapt the type of screws depending on the ground material. 3.10 Information over the Lubricants 3.10.1...
4 | Transport ● Switch off the water (inlet first, then outlet) and nitrogen quick connections. ● Put the label or warning board “Maintenance processing” on or next to the pump. The end user is responsible for providing energy isolation capabilities on the water and nitrogen. 3.12.3 Safety Lockout Procedure ●...
Storage | 5 ● Use lifting gear with a crane hook equipped with safety latch. ● Lift the vacuum pump. In case the vacuum pump was bolted to a pallet with fixing bolts: ● Unscrew the fixing bolts in the base frame. CAUTION In case of a vacuum pump filled with oil, make sure that by lifting the inclination angle of the vacuum pump do not exceed 5°...
5 | Storage ● Make sure that all openings are hermetically sealed; use adhesive tape to fasten loose parts (seal rings, flat seals, etc.). NOTE VCI is the abbreviation for “volatile corrosion inhibitor”. The VCI molecule is an organic corro- sion inhibitor in the vapor phase.
Installation and Commissioning | 6 Installation and Commissioning Installation Prerequisites CAUTION In case of non-compliance with the installation prerequisites, particularly in case of insuffi- cient cooling: Risk of damage or destruction of the vacuum pump vacuum pump and its components! Risk of personal injury! The installation prerequisites must be complied with.
Installation and Commissioning | 6 CAUTION The surface temperature of the vacuum pump can exceed 50°C when the vacuum pump is in operation. Danger of burns! ● Make sure that no-one can touch the vacuum pump accidentally. If necessary, attach safeguard. ●...
DN 50 ISO-KF In the case of long intake lines, the line cross-section should be larger than the intake flange to pre- vent a drop in the performance of the vacuum pump. If you have any doubts, contact your Busch representative.
● Make sure that an overload cut-out according to EN 60204-1 is provided for the motor. ● Make sure that the drive of the vacuum pump is not disturbed by any electric or electromagnetic interferences. If you have any doubts, contact your Busch representative. ● Check permissible primary voltage next to the power connection! ●...
6 | Installation and Commissioning Installation 6.2.1 Mounting ● Make sure that the “Necessary installation instructions” are followed. ● Fasten or install the vacuum pump at its final installation site. 6.2.2 Electrical Connection WARNING Risk of electrocution, risk of damage. Electrical installation must be performed by a suitably qualified electrician who knows and fol- lows the following regulations: ●...
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Installation and Commissioning | 6 6.2.2.1 Power Wiring Connection Number Supplier Part description Part number LAPP Single entry cable gland 53112030 HARTING Han-Modular compact top entry M25 1914 001 0401 HARTING Han C axial module female: 2,5 – 8 0914 003 2701 HARTING Han-Modular compact carrier hood 0914 001 0311...
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Emergency Stop Switch (ESS) Kit (N°0985800611) An Emergency Stop Switch (ESS) kit (N°0985800611) is connected to the Tool Interface of the vacuum pump COBRA BC 0101 G. ● When activated, the Emergency Stop Switch (ESS) plug stops the vacuum pump.
● Prepare the quantity of oil specified in the table “Oil Quantity [➔ 49]”. Oil filling COBRA BC 0101 G Oil quantity (Liter) 0.12 Oil type Busch YLC 250 B, Art. No. 0831 131 400 (0,5 l ≈ 1 kg) Instruction Manual COBRA BC 0101 G_EN_en 29 | 56...
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6 | Installation and Commissioning NOTE The quantity of oil specified in the installation handbook is of informative nature only. Check the oil level with the help of the oil sight glass (OSG) on the vacuum pump. ● Carefully lift up the control panel (CP) halfway. ●...
Installation and Commissioning | 6 NOTE It is easier to switch on the vacuum pump with cold oil when the intake line is not closed or when the intake flange is not covered by a rubber plate. ● Start the vacuum pump. If the intake line is equipped with a shut-off device: ●...
Caution, the operating cycle of 150 (hPa) mbar must not exceed more than 5 min. For other applica- tions, contact your Busch representative. - Maximum inlet pressure: 1 bar (abs). - With pump running at full speed, do not expose to inlet pressure 300 (hPa) mbar.
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Installation and Commissioning | 6 CAUTION The surface temperature of the vacuum pump can exceed 50 °C when the vacuum pump is in operation. Danger of burns! The vacuum pump may not be touched when it is in operation. If touching the vacuum pump is unavoidable, wait until the surface temperature has cooled down or wear protective gloves.
6 | Installation and Commissioning The following must be noted when the vacuum pump is shut down for a longer period of time: CAUTION If there is a risk of frost, all the cooling water must be drained out of the vacuum pump if the pump is shut down for a longer period of time! ●...
Maintenance | 7 Maintenance DANGER Live wires. Risk of electrical shock! ● Electrical installation work must only be executed by qualified personnel. DANGER In case the vacuum pump has conveyed gases that have been contaminated with foreign ma- terials that are dangerous to health, the oil and condensates will also be contaminated. These foreign materials can infiltrate the pores, recesses, and other internal spaces of the vac- uum pump .
● Check the vacuum pump for oil leaks - in case of leaks have the vacuum pump repaired (contact Busch). ● Check the vacuum pump for cooling water leaks - in case of leaks have the vacuum pump repaired (contact Busch). 36 | 56 Instruction Manual COBRA BC 0101 G_EN_en...
Maintenance | 7 Interval Maintenance work Monthly ● In the case of operation in a dusty environment: ● Make sure that the operating room is clean and free of dust; clean if necessary. ● Make sure that the vacuum pump has been switched off and that it cannot be switched on again accidentally.
NOTE Oil does not normally have to be refilled outside the recommended oil change intervals. A drop in the oil level indicates a fault (see "Alarms and warnings -> Busch PLC and Busch LCD"). CAUTION Only fill in oil through the oil filler opening.
If the oil becomes dark or looks different from the initial color: ● Change the oil immediately, see Oil Change. ● Contact your Busch representative to find out why the oil color has changed. Instruction Manual COBRA BC 0101 G_EN_en...
7 | Maintenance 7.2.4 Oil Change DANGER If the vacuum pump has pumped gases that were contaminated with foreign bodies that are hazardous to health, the oil is also contaminated with these foreign bodies. There is a health hazard when changing contaminated oil. There is also a danger to the envi- ronment.
Maintenance | 7 7.2.4.2 New Oil Filling ● Prepare the quantity of oil needed (see “Oil Type/ Quantity [➔ 49]”). CAUTION The use of chemically contaminated or polluted oil can lead to hazardous pump conditions which could cause personal injury. NOTE The quantity of oil specified in the Instruction Manual is of informative nature only.
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7 | Maintenance Subject Checking Current Consumption ● Check the current intensity of the motor. An increased intensity is an indication for a fault (see “Trouble- shooting [➔ 47]”). Silencer (Accessory) ● Make sure that the condensate does not collect at the ex- haust of the vacuum pump .
● Decontaminate the machine as much as possible and state the contamination status in a ‘Declaration of Contamination’. Busch will only accept machine accompanied by a signed, fully completed and legally binding "decla- ration of contamination", downloadable from the following link: buschvacuum.com/declaration-of- contamination.
9 | Removal from Service Removal from Service DANGER Live wires. Risk of electrical shock! ● Electrical installation work must only be executed by qualified personnel. CAUTION Hot surface. Risk of burns! ● Before doing anything that requires touching the machine, let it cool down first. Temporary Removal from Service Before disconnecting the intake and exhaust lines and switching off the cooling water and nitrogen lines, make sure that the lines have adjusted to atmospheric pressure.
Removal from Service | 9 Dismantling and Disposal DANGER In case the vacuum pump has conveyed gases that have been contaminated with harmful for- eign material which are harmful to health, the oil and the condensates will also be contami- nated with harmful foreign material.
Risk of premature failure! Loss of efficiency! ● Use only original Busch spare parts, consumables and supplies to ensure correct operation of the machine and to validate the warranty. There are no standard spare parts kits available for this product.
Busch). Solid foreign matter has en- ● Remove the solid foreign tered the machine. matter or repair the ma- chine (contact Busch). ● Install an inlet filter if nec- essary. A temperature sensor has ● Let the machine cool down.
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Oil Change. The machine runs too hot. ● See problem "The machine runs too hot". For resolution of problems not listed in the troubleshooting table, please contact your Busch repre- sentative. 48 | 56 Instruction Manual COBRA BC 0101 G_EN_en...
Oil Type/ Quantity | 12 Oil Type/ Quantity 12.1 Oil Type Make sure that the oil type corresponds to specifications: YLC 250 B ISO-VG Oil Type Synthetic Part number 0.5 L packaging 0831 131 400 Part number 1 L packaging 0831 108 878 Part number 5 L packaging 0831 108 879 Oil suitability...
EU Declaration of Conformity This Declaration of Conformity and the CE-markings affixed to the nameplate are valid for the machine within the Busch scope of delivery. This Decla- ration of Conformity is issued under the sole responsibility of the manufacturer.
UK Declaration of Conformity This Declaration of Conformity and the UKCA-markings affixed to the nameplate are valid for the machine within the Busch scope of delivery. This Dec- laration of Conformity is issued under the sole responsibility of the manufacturer.
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N otes Notes Instruction Manual COBRA BC 0101 G_EN_en 53 | 56...
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