Table of Contents Table of Contents Preface ................................... Congratulations on your purchase ........................Product Description ............................. COBRA BC 1200 A ..............................Use ..................................Operating Principle ............................. 2.3.1 COMBI ..............................2.3.2 Gas Flow Checks ........................... Oil Circuit................................Cooling.................................. Nitrogen System..............................Optional Functions/ Use of Available Accessories ..................
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Table of Contents 6.2.3 Equipment Connections (with Options)..................... 6.2.4 Connection of Lines/ Pipes ........................6.2.5 Oil Filling ..............................6.2.6 Direct Cooling Checking ........................6.2.7 Nitrogen Supply Checking........................6.2.8 Operating Parameters Saving ......................Recommendations on Operation........................6.3.1 Application............................. 6.3.2 Switching the Vacuum Pump On/ Off ....................Maintenance .................................
1 | Preface Preface Congratulations on your purchase Congratulations on your purchase of the Busch vacuum pump. With watchful observation of the field’s requirements, innovation and steady development Busch delivers modern vacuum and pres- sure solutions worldwide. These operating instructions contain information for ●...
Product Description | 2 Product Description COBRA BC 1200 A OSG 3 OSG 1 Description Suction connection Discharge connection Cooling water inlet Cooling water outlet Nitrogen connections Emergency stop button Electrical connections Extracting ventilator Lifting eye bolt Handpad Main switch...
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2 | Product Description VSD 2 TS 2 MOT 2 MOT 1 OSG 4 OSG 1 VSD 1 OSG 1 TS 1 DGR 1 DGR 2 OSG 2 Description Cooling water flow meter DGR 1 Regulating valve, dilution gas DGR 2 Regulating valve, dilution gas Nitrogen flowmeter Oil drain plug...
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Product Description | 2 Process Gas Diagram Description Process gas inlet Process gas outlet Cooling water flow meter (CWM) Cooling water regulating valve (CWR) Variable speed drive DP (VSD 1) Variable speed drive MB (VSD 2) Nitrogen flow meter, dilution gas (FME) Nitrogen pressure reducer (PRV) Magnetic valve (MV), regulating valve Regulating valve, dilution gas (DGR 1)
2 | Product Description COBRA NW 0090 A Description Inlet Outlet Cooling water Barrier gas Screw rotors Intake medium Cooling water Motor klixon PUMA WY 1251 B Description Inlet Outlet Booster lobe Cooling water Motor klixon The COBRA BC vacuum pumps are designed for use in the field of microelectronics and similar in- dustries.
2.3.1 COMBI The COBRA BC 1200 A vacuum pumps are a combination of a screw vacuum pump NW 0090 A (DP) and a Booster vacuum pump WY 1251 B (MB). The COMBI vacuum pumps are streamlined. The COBRA BC vacuum pumps are COBRA NW screw vacuum pumps with cooling water and nitro- gen circuits.
2 | Product Description Description Lobes Housing 2.3.2 Gas Flow Checks A pressure sensor PSA at the discharge monitors the discharge pressure. If the pressure reaches more than the limit value (alarm, preset at the factory: 0.2 bar), the purge cycle starts. Oil Circuit Since the complete operating principle works without contact, no oil circuit is needed in the work ar- Cooling...
● FME: nitrogen flow rate, dilution ● CWM: cooling water flow rate in motors/ transmission / variable speed drives See "Installation and Maintenance Instructions, Busch PLC and Busch LCD (No. 0870758077)". On/ Off Switch The vacuum pump is delivered with a circuit breaker. The function start/ stop can be done in Local by using the LCD controller or in Remote by the production machine.
The maintenance instructions must be followed and observed. These installation and maintenance instructions must be read and understood before the vacuum pump is used. If you have any doubts, contact your Busch representative. Safety Information The vacuum pump is designed and manufactured in compliance with the latest technical standards and safety regulations.
Safety | 3 NOTE ... indicates helpful tips and recommendations, as well as information for efficient and trou- ble-free operation. CAUTION The COBRA BC system includes provision for the secondary containment of liquids leaks such as water and oil. Safety Stickers COBRA NW 0090 A Description Warning! Hot surface! Do not touch!
3 | Safety COBRA BC 1200 A Noise Emission Refer to the table “Technical data” for the permissible noise levelling free field conditions according to EN ISO 2151. CAUTION The sound level of the vacuum pump within a certain perimeter of the vacuum pump is high.
Safety | 3 Type 3 Equipment is energized. Energized circuits are exposed and inadvertent contact with uninsulated energized parts is possible. Potential exposures are no greater than 30 volts rms, 42.4 volts peak, 60 volts dc or 240 volt-amp in dry locations. Type 4 Equipment is energized.
Safety | 3 Decommissioning Procedure When the product arrives at the end of the lifetime, it is necessary to proceed to the decontamina- tion of the vacuum pump. CAUTION Only authorized personnel may carry out any dismantling on the vacuum pump. Before work begins, the operator of the vacuum pump must fill in a form or a “Declaration Regarding Con- tamination of Vacuum Equipment and Components”...
4 | Transport Transport The COBRA BC vacuum pumps are tested and checked in our factory before careful packing. Check the packaging for transport damage when the goods arrive. The vacuum pump can withstand tem- peratures between -25°C and +55°C during transport. Transport in Packed State Packed on a pallet, the vacuum pump can be moved with a hand forklift truck.
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Transport | 4 In case the vacuum pump was bolted to a pallet with fixing bolts: ● Unscrew the fixing bolts in the base frame. CAUTION In case of a vacuum pump filled with oil, make sure that by lifting the inclination angle of the vacuum pump do not exceed 5°...
5 | Storage Storage Temporary Storage ● Make sure that the intake and exhaust flanges are closed (put on the protective caps included in the delivery package of the vacuum pump) ● Store the vacuum pump: ● if possible, the vacuum pump should be stored in its original packaging, ●...
Installation and Commissioning | 6 Installation and Commissioning Installation Prerequisites CAUTION In case of non-compliance with the installation prerequisites, particularly in case of insuffi- cient cooling: Risk of damage or destruction of the vacuum pump and its components! Risk of personal injury! The installation prerequisites must be complied with.
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6 | Installation and Commissioning NOTE 1° (german degree = 1° dGH) = 1,78° (french degree) = 1,25 e (english degree) = 17,9 mg/kg Ca- CO3 (american hardness). ● Make sure that the cooling water is neutral and clean. ● Make sure that the cooling water outlet is unpressurised. ●...
Interrupter main Emergency stop Remote Control (moveable) Busch PLC Ventilating duct (diameter 50.8) ● Make sure that the vacuum pump is at least 1 meter away from any wall to ensure good cooling. ● Before any maintenance action, ensure a safety perimeter of at least 610 [mm] around the vacu- um pump.
– DN 100 ISO-K In the case of long intake lines, the line cross-section should be larger than the intake flange to pre- vent a drop in the performance of the vacuum pump. If you have any doubts, contact your Busch representative.
● Make sure that an overload cut-out according to EN 60204-1 is provided for the motor. ● Make sure that the drive of the vacuum pump is not disturbed by any electric or electromagnetic interferences. If you have any doubts, contact your Busch representative. Installation 6.2.1...
6 | Installation and Commissioning 6.2.2 Electrical Connection WARNING Risk of electrocution, risk of damage. Electrical installation must be performed by a suitably qualified electrician who knows and fol- lows the following regulations: ● IEC 364 or CENELEC HD 384 or DIN VDE 0100, ●...
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Installation and Commissioning | 6 6.2.2.2 Power Connector on Rear Side Description Pump side Phase L1 (Pump side) Phase L2 (Pump side) Phase L3 (Pump side) Ground (Pump side) Mating connectors Phase 1 (Mating connectors) Phase 2 (Mating connectors) Phase 3 (Mating connectors) Ground (Mating connectors) ●...
Interface connection (50 poles) / PID In- Monitoring System - Option) terface The information concerning the use of the Busch PLC and the Busch LCD can be found in the Opera- tion and Maintenance manual (Art. No. 0870758077). 6.2.4 Connection of Lines/ Pipes ●...
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Installation and Commissioning | 6 6.2.5.1 COBRA NW 0090 A Oil Filling ● Unscrew the oil filler plugs (OFP). Description Oil fill plug (OFP) Oil drain plug (ODP) Oil sight glass (OSG) ● Fill up to the upper level of the target circle of the oil sight glasses (OSG). Make sure that the fill- ing level is in the target circle of the oil sight glasses (OSG).
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6 | Installation and Commissioning 6.2.5.2 PUMA WY 1251 B Oil Filling Description Oil fill plug (OFP) Oil fill plug (OFP) Oil sight glass (OSG) Oil drain plug (ODP) Oil sight glass (OSG) Oil drain plug (ODP) NOTE The quantity of oil specified in the installation handbook is of informative nature only. Check the oil level with the help of the various oil sight glasses (OSG1,2,3,4) on the vacuum pump.
Installation and Commissioning | 6 NOTE It is easier to switch on the vacuum pump with cold oil when the intake line is not closed or when the intake flange is not covered by a rubber plate. ● Start the vacuum pump. If the intake line is equipped with a shut-off device: ●...
Caution, the operating cycle of 150 (hPa) mbar must not exceed more than 5 min. For other applica- tions, contact your Busch representative. - Maximum inlet pressure: 1 bar (abs). - With pump running at full speed, do not expose to inlet pressure 300 (hPa) mbar.
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Installation and Commissioning | 6 The vacuum pump is tight down to ultimate pressure. CAUTION The surface temperature of the vacuum pump can exceed 50 °C when the vacuum pump is in operation. Danger of burns! The vacuum pump may not be touched when it is in operation. If touching the pump is un- avoidable, wait until the surface temperature has cooled down or wear protective gloves.
Do not open gate valve if booster is running at full speed (90 Hz). Risk of primary pump damage. ● Use "Automatic Load Lock" mode or "External Signal" on tool interface to start/ stop the booster (refer to Busch PLC manual). ● Open the solenoid gate valve. 34 | 56...
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Installation and Commissioning | 6 6.3.2.2 Switching the System Off If the system is equipped with a solenoid gate valve at the intake: ● Close the solenoid gate valve. ● Switch off the vacuum pump. ● Shut off the nitrogen supply. ●...
7 | Maintenance Maintenance DANGER Live wires. Risk of electrical shock. ● Electrical installation work must only be executed by qualified personnel. DANGER In case the vacuum pump has conveyed gases that have been contaminated with foreign ma- terials that are dangerous to health, the oil and condensates will also be contaminated. These foreign materials can infiltrate the pores, recesses, and other internal spaces of the vac- uum pump.
Maintenance | 7 ● Stop the pump with the LCD control (press on STOP button during 10s). ● Press on emergency stop button. ● Switch off the main circuit breaker. ● Switch off the customer’s power supply. ● Switch off the water and nitrogen quick connections (inlet first, then outlet). ●...
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(contact Busch). ● Check the vacuum pump for cooling liquid leaks - in case of leaks have the vacuum pump repaired (contact Busch). ● Check the vacuum pump for cooling water leaks - in case of leaks have the vacuum pump repaired (contact Busch).
Maintenance | 7 Interval Maintenance work Every 16000 hours or after 4 ● Change the oil of the gear and bearing housings (both years sides), see “Oil Change [➔ 41]”. ● Have a major overhaul on the vacuum pump (contact Bus- ch).
NOTE Oil does not normally have to be refilled outside the recommended oil change intervals. A drop in the oil level indicates a fault (see "Alarms and warnings -> Busch PLC and Busch LCD"). CAUTION Only fill in oil through the oil filler opening.
If the oil becomes dark or looks different from the initial color: ● Change the oil immediately, see Oil Change. You can consult your Busch representative in order to find out why this color change has occurred. 7.2.4 Oil Change...
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7 | Maintenance CAUTION Because the ends of the drain plugs are magnetic, metal swarf can stick to them. Always clean away this swarf when removing the drain plugs. Because of wear and tear of the seals, it is recommended to replace the drain plugs whenever the oil is changed.
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Maintenance | 7 Oil level, pump not operating ● Fill up to the upper level of the target circle of the oil sight glasses (OSG). ● Make sure that the oil level still lies in the target circle of the oil sight glasses. ●...
7 | Maintenance ● Fill up to the upper level of the target circle of the oil sight glasses (OSG) or middle of the oil sight glass (Booster). ● Make sure that the oil level still lies in the target circle or between the MIN and MAX markings (Booster) on the oil sight glasses.
● Decontaminate the machine as much as possible and state the contamination status in a ‘Dec- laration of Contamination’. Busch will only accept machine accompanied by a signed, fully completed and legally binding "decla- ration of contamination", downloadable from the following link: buschvacuum.com/declaration-of- contamination.
9 | Removal from Service Removal from Service DANGER Live wires. Risk of electrical shock. ● Electrical installation work must only be executed by qualified personnel. CAUTION Hot surface. Risk of burns! ● Before doing anything that requires touching the machine, let it cool down first. Temporary Removal from Service Before disconnecting the intake and exhaust lines and switching off the cooling water and nitrogen lines, make sure that the lines have adjusted to atmospheric pressure.
Removal from Service | 9 Dismantling and Disposal DANGER In case the vacuum pump has conveyed gases that have been contaminated with harmful for- eign material which are harmful to health, the oil and the condensates will also be contami- nated with harmful foreign material.
Risk of premature failure! Loss of efficiency! ● The exclusive use of Busch genuine spare parts and consumables is recommended for the correct functioning of the machine and to validate the warranty. There are no standard spare parts kits available for this product.
Busch). Solid foreign matter has en- ● Remove the solid foreign tered the machine. matter or repair the ma- chine (contact Busch). ● Install an inlet filter if neces- sary. A temperature sensor has ● Let the machine cool down.
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Oil Change. The machine runs too hot. ● See problem "The machine runs too hot". For resolution of problems not listed in the troubleshooting table, please contact your Busch repre- sentative. 50 | 56 Instruction Manual COBRA BC 1200 A_EN_en...
Oil Type/ Quantity | 12 Oil Type/ Quantity 12.1 Oil Type Make sure that the oil type corresponds to specifications: CAUTION The use of chemically contaminated or polluted oil can lead to hazardous pump conditions which could cause personal injury. 12.2 Oil Quantity The quantity of oil specified in the following table is of informative nature only.
EU Declaration of Conformity This Declaration of Conformity and the CE-markings affixed to the nameplate are valid for the machine within the Busch scope of delivery. This Decla- ration of Conformity is issued under the sole responsibility of the manufacturer.
UK Declaration of Conformity This Declaration of Conformity and the UKCA-markings affixed to the nameplate are valid for the machine within the Busch scope of delivery. This Dec- laration of Conformity is issued under the sole responsibility of the manufacturer.
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N otes Notes Instruction Manual COBRA BC 1200 A_EN_en 55 | 56...
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