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Related Manuals for BUSCH COBRA DS 9161 B
Summary of Contents for BUSCH COBRA DS 9161 B
- Page 1 COBRA Dry Screw Vacuum Pumps DS 9161 B Instruction Manual 0870772604 | A0009_en-US | Original instructions 5/22/2024...
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Page 2: Table Of Contents
Table of Contents Table of Contents Preface ................................... Congratulations on your purchase ........................Product Description ............................. Use ..................................Operating Principle ............................. 2.2.1 COMBI ..............................2.2.2 Gas Flow Checks ........................... Structure................................Oil Circuit................................Cooling.................................. Nitrogen System..............................Optional Functions/ Use of Available Accessories ..................On/ Off Switch.............................. - Page 3 Table of Contents 6.1.5 Inlet Connection ........................... 6.1.6 Discharge Connection.......................... 6.1.7 Cooling Water Connection ........................6.1.8 Nitrogen Connection..........................6.1.9 Electrical Connection/ Checks ......................Installation ................................6.2.1 Mounting ............................... 6.2.2 Electrical Connection..........................6.2.3 Equipment Connections (with Options)..................... 6.2.4 Connection of Lines/ Pipes ........................6.2.5 Oil Filling ..............................
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Page 4: Preface
1 | Preface Preface Congratulations on your purchase Congratulations on your purchase of the Busch vacuum pump. With watchful observation of the field’s requirements, innovation and steady development Busch delivers modern vacuum and pres- sure solutions worldwide. These operating instructions contain information for ●... -
Page 5: Product Description
Product Description | 2 Product Description COBRA DS 9161 B Description Suction connection Discharge connection Remote control Backing vacuum pump DP 0600 C Vacuum booster WY 075 Pump terminal box Variable speed drive Emergency stop switch Main switch Instruction Manual COBRA DS 9161 B_EN_en... - Page 6 2 | Product Description COBRA DP 0600 C CLV 2 OSG 1 TS 1 TS 5 CLV 1 TS 3 DGR 1 DGR 2 CWR 1 TS 2 FS 1 FS 2 TS 4 Description Suction connection Discharge connection Cooling liquid filler plug Glycol circulating pump CLV 1 Cooling liquid purge plug...
- Page 7 Product Description | 2 Booster WY 075 CWR 2 FS 3 Description Suction connection Discharge connection Base frame Cooling water connections CWR 2 Cooling water regulating valve Electrical connection FS 3 Flow switch, cooling water Motor terminal box Oil drain plug Oil fill plug Oil sight glass Rotation sight glass...
- Page 8 2 | Product Description Process Gas Diagram Description Process gas inlet (PGI) Process gas outlet (PGO) Cooling water regulating valve (CWR 2) Cooling liquid pump (CLP) Nitrogen flow meter, dilution gas (FME) Nitrogen pressure reducer (PRV) Magnetic valve (MV), regulating valve with Regulating valve, dilution gas DP (middle soleneoid valve, dilution gas of cylinder) (DGR 1)
- Page 9 Product Description | 2 Description Flow switch, cooling water (FS 3) Cooling water regulating valve (CWR 1) Temperature switch 155°C (TS 6) Temperature switch, oil temperature 120°C (TS 1) Temperature switch (TS 7) Flowswitch, cooling water (FS 2) Oil sight glass MB (motor) (OSG 5) Heat exchanger (HE) Flow switch, cooling liquid (FS 1) COBRA NS 0600 C...
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Page 10: Use
2 | Product Description Booster WY 075 Description Inlet Outlet Booster lobe Cooling water The COBRA DS vacuum pumps are designed for use in the field of microelectronics and similar in- dustries. They can be used to suck gases and gas mixtures. WARNING When using toxic, inflammable and/or explosive gases, make sure that the system corre- sponds in design to applicable local and national safety regulations and that all applicable... -
Page 11: Operating Principle
2.2.1 COMBI The COBRA DS 9161 B vacuum pumps are a combination of a screw vacuum pump NS 0600 C (DP) and a Booster vacuum pump WY 075 (MB). The COMBI vacuum pumps are streamlined. The vacuum systems COBRA DS standard version is a combination of one or more COBRA NS (DP 600) vacuum pumps with cooling water and nitrogen circuits and one or more WY (MB) rotary lobes boosters with a variable speed drive. -
Page 12: Structure
2 | Product Description Structure The vacuum system COBRA DS is made of the following elements: ● Horizontal silencer mounted on each vacuum pump (standard). ● Vertical silencer installed behind each vacuum pump to collect condensates in an external tank. This silencer is water cooled (min.13 l/min ). ●... -
Page 13: Nitrogen System
Product Description | 2 ● The circuit of cooling liquid (mix of water and glycol) inside the water chambers (6) of cylinder and endplate of cylinder B-side. An indirect circuit is made with a water pump mounted at the endplate of cylinder B-side. The flow of the cooling water is controlled by a flow switch FS 1. If the flow is under 1 l/min during a minimum time of 30 seconds, then the pump stops. -
Page 14: Optional Functions/ Use Of Available Accessories
● FS 1: cooling liquid flow control ● TS 2: cooling liquid temperature See "Installation and Maintenance Instructions, Busch PLC and Busch LCD (No. 0870758077)". On/ Off Switch The vacuum system is delivered with a circuit breaker. The function start/ stop can be done in Local by using the LCD controller or in Remote by the production machine. -
Page 15: Safety
The maintenance instructions must be followed and observed. These installation and maintenance instructions must be read and understood before the vacuum pump is used. If you have any doubts, contact your Busch representative. Safety Information The vacuum pump is designed and manufactured in compliance with the latest technical standards and safety regulations. -
Page 16: Safety Stickers
3 | Safety NOTE ... indicates helpful tips and recommendations, as well as information for efficient and trou- ble-free operation. CAUTION The COBRA DS system includes provision for the secondary containment of liquids leaks such as water and oil. Safety Stickers COBRA NS 0600 C Description Warning! Hot surface! Do not touch! -
Page 17: Safety Area
Safety | 3 CAUTION The sound level of the vacuum system within a certain perimeter of the vacuum system is high. Risk of hearing damage. Users who are spending a longer period in the vicinity of a non-insulated vacuum system must wear suitable ear protection. -
Page 18: Safety Lockout Procedure
“maintenance processing”. Call the BUSCH Semicon service team in charge of the maintenance of the pumps. ● If the external thermal protection B11 is engaged, check that the water flow shows min.13 l/min on the flowmeter. -
Page 19: Safety Interlock Table
Safety | 3 Safety Interlock Table Interlock event Sensor Response Cooling liquid over- Temperature switch TS Contactors open and remove power to temperature motors. DP, MB motors over- Thermal overload re- Contactors open and remove power to current lays EOCR (MB) motors. -
Page 20: Seismic Zone Installation
3 | Safety Seismic Zone Installation Upon receipt, the vacuum system is fixed on the transport pallet with two brackets. ● Convey the vacuum system to its final location with a pallet truck before removing it from its sup- port. ●... -
Page 21: Information Over The Lubricants
NS 0600 C WY 075 Oil quantity (Liter) 12.5 Oil type Busch YLC 250 B, Art. No. 0831 131 400 (0,5 l ≈ 1 kg) ● Replacement: After 5000 h (see “Maintenance Schedule [➔ 47]”). 3.9.2 Cooling Liquid Cooling liquid filling... -
Page 22: Transport
4 | Transport Transport The COBRA DS vacuum pumps are tested and checked in our factory before careful packing. Check the packaging for transport damage when the goods arrive. The vacuum pump can withstand tem- peratures between -25°C and +55°C during transport. Handling For handling of individual components look up the relevant Operating Instructions in the Appendix. - Page 23 Transport | 4 Lifting for DP 0600 C In case the vacuum pump was bolted to a pallet with fixing bolts: ● Unscrew the fixing bolts in the base frame. CAUTION In case of a vacuum pump filled with oil, make sure that by lifting the inclination angle of the vacuum pump do not exceed 5°...
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Page 24: Storage
5 | Storage Storage Temporary Storage ● Make sure that the intake and exhaust flanges are closed (put on the protective caps included in the delivery package of the vacuum pump) ● Store the vacuum pump: ● if possible, the vacuum pump should be stored in its original packaging, ●... -
Page 25: Installation And Commissioning
Installation and Commissioning | 6 Installation and Commissioning Installation Prerequisites It is important for operating safety to observe the instructions when installing the vacuum system. Installation must be carried out by qualified technicians. CAUTION In case of non-compliance with the installation prerequisites, particularly in case of insuffi- cient cooling: Risk of damage or destruction of the vacuum pump vacuum system and its components! Risk of personal injury! -
Page 26: Unpacking
6 | Installation and Commissioning Electrical conductivity µS/cm ≤ 100 Free chloride mg/l < 0.3 NOTE 1° (german degree = 1° dGH) = 1,78° (french degree) = 1,25 e (english degree) = 17,9 mg/kg Ca- CO3 (american hardness). ● Make sure that the cooling water is neutral and clean. ●... -
Page 27: Mounting
Installation and Commissioning | 6 Depending on the dead weight and size of the vacuum system, use a forklift to move it on several pallets. Or lift the vacuum system usings slings and the appropriate lifting gear to move the vacuum system or remove the pallets. -
Page 28: Dimensional Drawing
In the case of long suction lines, the line cross-section should be larger than the intake flange to pre- vent a drop in the performance of the vacuum system. If you have any doubts, contact your Busch representative. 6.1.4... -
Page 29: Inlet Connection
DN 100 ISO-K for the COBRA DP 600 C inlet (inlet backing vacuum pump) In the case of long intake lines, the line cross-section should be larger than the intake flange to pre- vent a drop in the performance of the vacuum pump. If you have any doubts, contact your Busch representative. -
Page 30: Discharge Connection
In the case of long discharge lines, the line cross-section should be larger than the discharge flange to prevent a drop in the performance of the vacuum pump. If you have any doubts, contact your Busch representative. 6.1.7 Cooling Water Connection The cooling water is generally connected with a hose (leakproof against oxygen). -
Page 31: Nitrogen Connection
● Make sure that an overload cut-out according to EN 60204-1 is provided for the motor. ● Make sure that the drive of the vacuum pump is not disturbed by any electric or electromagnetic interferences. If you have any doubts, contact your Busch representative. CAUTION Overvoltage damages the vacuum system! ●... -
Page 32: Electrical Connection
6 | Installation and Commissioning 6.2.2 Electrical Connection WARNING Risk of electrocution, risk of damage. Electrical installation must be performed by a suitably qualified electrician who knows and fol- lows the following regulations: ● IEC 364 or CENELEC HD 384 or DIN VDE 0100, ●... -
Page 33: Equipment Connections (With Options)
LCD serial wiring (RJ45), LCD 1 LCD serial wiring (RJ45), LCD 2 PC serial wiring (9 poles) (option) USB connection Customer Network, Communication Ethernet network connection (Busch modbus RTU RS 232 Monitoring System - Option) Interface connection (50 poles) (option) PID Interface (option) -
Page 34: Connection Of Lines/ Pipes
6 | Installation and Commissioning The information concerning the use of the Busch PLC and the Busch LCD can be found in the Opera- tion and Maintenance manual (Art. No. 0870758077). 6.2.4 Connection of Lines/ Pipes ● Connect the intake lines. - Page 35 Installation and Commissioning | 6 Description Oil fill plug (OFP) Oil drain plug (ODP) Oil sight glass (OSG) Oil drain plug (ODP) Oil sight glass (OSG) Oil drain plug (ODP) Oil fill plug (OFP) ● Unscrew the oil filler plugs (OFP). ●...
- Page 36 6 | Installation and Commissioning If the intake line is equipped with a shut-off device: ● Close the shut-off device. If the intake line is not equipped with a shut-off device: ● Place a rubber plate on the intake flange. ●...
- Page 37 Installation and Commissioning | 6 Description Oil fill plug (OFP) Oil fill plug (OFP) Oil sight glass (OSG) Oil sight glass (OSG) Oil sight glass (OSG) Oil sight glass (OSG) Oil drain plug (ODP) Oil drain plug (ODP) Oil drain plug (ODP) ●...
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Page 38: Cooling Liquid Filling
6 | Installation and Commissioning If the intake line is not equipped with a shut-off device: ● Place a rubber plate on the intake flange. ● Let the vacuum pump run for a few minutes. Booster (MB): ● Make sure that the oil level still lies in the target circle of the oil sight glasses. If the oil level is below the target circle: ●... - Page 39 Installation and Commissioning | 6 6.2.6.1 COBRA NS 0600 C Cooling Liquid Filling NOTE The quantity of cooling liquid specified is of informative nature only. Respect the procedure of filling the cooling liquid. NOTE Cooling liquid does not normally have to be refilled outside the recommended change inter- vals.
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Page 40: Direct Cooling Checking
6 | Installation and Commissioning ● Close the purge cap of cylinder upper plate. ● Stop fill in. ● Screw on the cooling liquid filler cap again. ● If liquid has run on to the outside surfaces of the vacuum pump, wipe it off. ●... - Page 41 Installation and Commissioning | 6 The COBRA DS vacuum pumps are designed for use in the field of microelectronics and similar in- dustries. They can be used to draw in gases and gas mixtures. WARNING When using toxic, inflammable and/or explosive gases, make sure that the system corre- sponds in design to applicable local and national safety regulations and that all applicable safety measures are followed.
- Page 42 6 | Installation and Commissioning CAUTION The COBRA DS vacuum pumps could be delivered without oil, without cooling water and with- out cooling liquid. Operation without oil will result in damage to the vacuum pump! The vacuum pump must remain in a horizontal position when it has been filled with oil. CAUTION The COBRA DS vacuum pumps are always delivered without oil, without cooling water and without cooling liquid.
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Page 43: Vacuum System Start-Up
Installation and Commissioning | 6 ● Drain the cooling water completely. ● If necessary, drain the cooling water with the help of compressed air to prevent any risk of frost or corrosion. NOTE When the vacuum system has not been in operation for a few days or when a sticky substance has been sucked, it is possible that the two scroll rotors of the NS (DP) vacuum pump will stick to each other. - Page 44 6 | Installation and Commissioning If the vacuum system is equipped with a solenoid gate valve in the cooling water circuit: ● Open the solenoid gate valve. ● Make sure that the cooling water flow is set correctly: ● The cooling water flow is factory set on 13 l/min and can be adjusted at the regulating valves CWR 1 &...
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Page 45: Maintenance
Maintenance | 7 Maintenance DANGER Live wires. Risk of electrical shock! ● Electrical installation work must only be executed by qualified personnel. DANGER In case the vacuum system has conveyed gases that have been contaminated with foreign materials that are dangerous to health, the oil and condensates will also be contaminated. These foreign materials can infiltrate the pores, recesses, and other internal spaces of the vac- uum system . - Page 46 7 | Maintenance ● In REMOTE mode, the start/ stop drive of the vacuum system passes through the main machine interface of the vacuum system (the one connected to TOOL) and the COMBI COBRA DS starts si- multaneously. ● In LOCAL mode, the start/ stop drive of the COMBI COBRA DS is done independently. For safety reasons, execute the start of the COMBI COBRA DS simultaneously.
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Page 47: Maintenance Schedule
(contact Busch). ● Check the vacuum pump for cooling water leaks - in case of leaks have the vacuum pump repaired (contact Busch). Monthly ● In the case of operation in a dusty environment: ●... -
Page 48: Lock Out/ Tag Out Procedure
● Change the oil of the gear and bearing housings (both years sides), see “Oil Change [➔ 51]”. ● Have a major overhaul on the vacuum system (contact Busch). 7.1.1 Lock Out/ Tag Out Procedure ● Stop the vacuum system with the remote control (RC) (press on STOP button during 10s). -
Page 49: Oil Checking
NOTE Oil does not normally have to be refilled outside the recommended oil change intervals. A drop in the oil level indicates a fault (see "Alarms and warnings -> Busch PLC and Busch LCD"). CAUTION Only fill in oil through the oil filler opening. -
Page 50: Oil Color Inspection
Oil “YLC 250 B” contaminated chemically or by foreign bodies. Risk of explosion! If the oil becomes dark: ● Contact your Busch representative without delay. ● Make sure that the oil is either light or transparent. If the oil becomes dark or looks different from the initial color:... -
Page 51: Oil Change
Maintenance | 7 ● Change the oil immediately, see Oil Change. ● Contact your Busch representative to find out why the oil color has changed. 7.2.4 Oil Change DANGER If the vacuum system has pumped gases that were contaminated with foreign bodies that are hazardous to health, the oil is also contaminated with these foreign bodies. - Page 52 7 | Maintenance CAUTION Because the ends of the drain plugs are magnetic, metal swarf can stick to them. Always clean away this swarf when removing the drain plugs. Because of wear and tear of the seals, it is recommended to replace the drain plugs whenever the oil is changed.
- Page 53 Maintenance | 7 Oil level, pump not operating ● Fill up to the upper level of the target circle of the oil sight glasses (OSG). ● Make sure that the oil level still lies in the target circle of the oil sight glasses. ●...
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Page 54: Cooling Liquid Checking
7 | Maintenance Cooling Liquid Checking 7.3.1 Cooling Liquid Level Checking ● Make sure that the vacuum system has been switched off and that it cannot be switched on again accidentally. ● Let the vacuum pump cool down. ● Check the level of the cooling liquid. ●... -
Page 55: Cooling Liquid Draining
Maintenance | 7 7.3.3 Cooling Liquid Draining ● Make sure that the vacuum pump has been switched off and that it cannot be switched on again accidentally. ● Make sure that the vacuum pump has adjusted to atmospheric pressure. ● Place a container under the drain plug (CLD) for the cooling liquid. ●... -
Page 56: Additional Checking
7 | Maintenance ● Close the shut-off device. If the inlet line is not equipped with a shut-off device: ● Place a rubber plate on the suction flange. ● Let the vacuum pump run for maximum 5 minutes. ● Stop the vacuum pump and wait for a few minutes. ●... -
Page 57: Overhaul
● Decontaminate the machine as much as possible and state the contamination status in a ‘Declaration of Contamination’. Busch will only accept machine accompanied by a signed, fully completed and legally binding "decla- ration of contamination", downloadable from the following link: buschvacuum.com/declaration-of- contamination. -
Page 58: Removal From Service
9 | Removal from Service Removal from Service DANGER Live wires. Risk of electrical shock! ● Electrical installation work must only be executed by qualified personnel. CAUTION Hot surface. Risk of burns! ● Before doing anything that requires touching the machine, let it cool down first. Temporary Removal from Service Before disconnecting the intake and exhaust lines and switching off the cooling water and nitrogen lines, make sure that the lines have adjusted to atmospheric pressure. -
Page 59: Dismantling And Disposal
Removal from Service | 9 Dismantling and Disposal DANGER In case the vacuum system has conveyed gases that have been contaminated with harmful foreign material which are harmful to health, the oil and the condensates will also be contam- inated with harmful foreign material. These foreign materials can infiltrate the pores, recesses, and other internal spaces of the vac- uum system. -
Page 60: Spare Parts
Risk of premature failure! Loss of efficiency! ● Use only original Busch spare parts, consumables and supplies to ensure correct operation of the machine and to validate the warranty. There are no standard spare parts kits available for this product. -
Page 61: Troubleshooting
Busch). Solid foreign matter has en- ● Remove the solid foreign tered the machine. matter or repair the ma- chine (contact Busch). ● Install an inlet filter if nec- essary. A temperature sensor has ● Let the machine cool down. - Page 62 Oil Change. The machine runs too hot. ● See problem "The machine runs too hot". For resolution of problems not listed in the troubleshooting table, please contact your Busch repre- sentative. 62 | 68 Instruction Manual COBRA DS 9161 B_EN_en...
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Page 63: Oil Type/ Quantity
Oil Type/ Quantity | 12 Oil Type/ Quantity 12.1 Oil Type Make sure that the oil type corresponds to specifications: YLC 250 B ISO-VG Oil Type Synthetic Part number 0.5 L packaging 0831 131 400 Part number 1 L packaging 0831 108 878 Part number 5 L packaging 0831 108 879 Oil suitability... -
Page 64: Cooling Liquid Type/ Quantity
13 | Cooling Liquid Type/ Quantity Cooling Liquid Type/ Quantity 13.1 Cooling Liquid Type Make sure that the Cooling Liquid type corresponds to specifications: Zitrec M-25 (ready-to-use) Part number 5 L packaging 0831 563 469 Part number 25 L packaging 0831 563 468 The cooling liquid Zitrec M-25 is ready-to-use and does not require additional water. -
Page 65: Technical Data
Technical Data | 14 Technical Data DS 9161 B Nominal pumping m³/h (60 Hz) 6220 speed ACFM (60 Hz) 3625.2 Ultimate pressure TORR 0.00075 hPa (mbar) 0.001 Nominal motor rating kW (60 Hz) backing pump Nominal motor rating kW (60 Hz) vacuum booster Power consumption at kW (MB: 60 Hz) -
Page 66: Eu Declaration Of Conformity
EU Declaration of Conformity This Declaration of Conformity and the CE-markings affixed to the nameplate are valid for the machine within the Busch scope of delivery. This Decla- ration of Conformity is issued under the sole responsibility of the manufacturer. -
Page 67: Uk Declaration Of Conformity
UK Declaration of Conformity This Declaration of Conformity and the UKCA-markings affixed to the nameplate are valid for the machine within the Busch scope of delivery. This Dec- laration of Conformity is issued under the sole responsibility of the manufacturer. - Page 68 With a network of over 60 companies in more than 40 countries and agencies worldwide, Busch has a global presence. In every country, highly competent local personnel delivers custom-tailored support backed by a global network of expertise. Wherever you are.
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