Related Manuals for BUSCH COBRA DS 8163 B
Summary of Contents for BUSCH COBRA DS 8163 B
- Page 1 COBRA Dry Screw Vacuum Pumps DS 8163 B Instruction Manual 0870772605 | A0011_en-US | Original instructions 5/3/2024...
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Page 2: Table Of Contents
Table of Contents Table of Contents Preface ................................... Congratulations on your purchase ........................Product Description ............................. Use ..................................Operating Principle ............................. 2.2.1 COMBI ..............................2.2.2 Gas Flow Checks ........................... Structure................................Oil Circuit................................Cooling.................................. Nitrogen System..............................Optional Functions/ Use of Available Accessories ..................On/ Off Switch.............................. - Page 3 Table of Contents 6.1.5 Inlet Connection ........................... 6.1.6 Discharge Connection.......................... 6.1.7 Cooling Water Connection ........................6.1.8 Nitrogen Connection..........................6.1.9 Electrical Connection/ Checks ......................Installation ................................6.2.1 Mounting ............................... 6.2.2 Electrical Connection..........................6.2.3 Equipment Connections (with Options)..................... 6.2.4 Connection of Lines/ Pipes ........................6.2.5 Oil Filling ..............................
- Page 4 Table of Contents Technical Data ..............................EU Declaration of Conformity ..........................UK Declaration of Conformity..........................4 | 80 Instruction Manual COBRA DS 8163 B_EN_en...
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Page 5: Preface
Preface | 1 Preface Congratulations on your purchase Congratulations on your purchase of the Busch vacuum pump. With watchful observation of the field’s requirements, innovation and steady development Busch delivers modern vacuum and pres- sure solutions worldwide. These operating instructions contain information for ●... -
Page 6: Product Description
2 | Product Description Product Description COBRA DS 8163 B Description Suction connection Discharge connection Remote control Vacuum booster WY 075 Silencer Pump terminal box Variable speed drive Backing vacuum pump DP 0600 C Backing vacuum pump DP 0600 C... - Page 7 Product Description | 2 COBRA DS 8163 B Description Suction connection Discharge connection Electrical power supply Emergency stop switch Main switch Pump terminal box Silencer Instruction Manual COBRA DS 8163 B_EN_en 7 | 80...
- Page 8 2 | Product Description COBRA DP 0600 C CLV 2 OSG 1 TS 1 TS 5 CLV 1 TS 3 DGR 1 DGR 2 CWR 1 TS 2 FS 1 FS 2 TS 4 Description Suction connection Discharge connection Cooling liquid filler plug Glycol circulating pump CLV 1 Cooling liquid purge plug...
- Page 9 Product Description | 2 Booster WY 075 CWR 2 FS 3 Description Suction connection Discharge connection Base frame >Cooling water connections CWR 2 Cooling water regulating valve Electrical connection FS 3 Flow switch, cooling water Motor terminal box Oil drain plug Oil fill plug Oil sight glass Rotation sight glass...
- Page 10 2 | Product Description Accessories MSH, EOCR Description Suction connection Discharge connection Cooling water outlet Cooling water inlet MSH, Main switch No Fuse breaker Pump terminal box Remote control Silencer Magnetic contactor EOCR Electronic Over Current Relay 10 | 80 Instruction Manual COBRA DS 8163 B_EN_en...
- Page 11 Product Description | 2 Process Gas Diagram Description Process gas inlet (PGI) Process gas outlet (PGO) Cooling water regulating valve (CWR 2) Flowswitch, cooling water (FS 2) Cooling liquid pump (CLP) Heat exchanger (HE) Nitrogen flow meter, dilution gas (FME) Nitrogen pressure reducer (PRV) Magnetic valve (MV), regulating valve with Regulating valve, dilution gas DP (middle...
- Page 12 2 | Product Description Description Flow switch, cooling liquid (FS 1) Flow switch, cooling water (FS 3) Cooling water regulating valve (CWR 1) Flow switch, cooling liquid (FS 1) Temperature switch 155°C (TS 6) Temperature switch, oil temperature 120°C (TS 1) Silencer with cooling circuit (SI) (option) Temperature switch (TS 7) COBRA NS 0600 C...
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Page 13: Use
Product Description | 2 Description Booster lobe Cooling water The COBRA DS vacuum pumps are designed for use in the field of microelectronics and similar in- dustries. They can be used to suck gases and gas mixtures. WARNING When using toxic, inflammable and/or explosive gases, make sure that the system corre- sponds in design to applicable local and national safety regulations and that all applicable safety measures are followed. -
Page 14: Gas Flow Checks
2 | Product Description 2.2.1.2 Principle of MB Vacuum Pumps The Booster vacuum pumps operate according to the approved principle of the Booster type ma- chine. Operation is both simple and effective. Two lobes with identical profiles rotate in opposition directions within a casing. -
Page 15: Oil Circuit
Product Description | 2 All parts of the installation are mounted on a stable frame and are completely equipped with their pipes. The electrical components are wired with a connection box. COMBI DS 8163 B: one Booster WY 075 with three COBRA DP 600 C vacuum pumps (Separate electri- cal box and vertical silencer (option)): Oil Circuit Since the complete operating principle works without contact, no oil circuit is needed in the work ar-... -
Page 16: Nitrogen System
2 | Product Description ● A direct cooling water circuit in the motors of WY rotary lobes vacuum pump. The cooling wa- ter flow is preset at 29 l/min at the factory and can be adjusted with valve CWR 2. The flow is controlled by flow switch FS 3. -
Page 17: On/ Off Switch
● FS 1: cooling liquid flow control ● TS 2: cooling liquid temperature See "Installation and Maintenance Instructions, Busch PLC and Busch LCD (No. 0870758077)". On/ Off Switch The vacuum system is delivered with a circuit breaker. The function start/ stop can be done in Local by using the LCD controller or in Remote by the production machine. -
Page 18: Safety
The maintenance instructions must be followed and observed. These installation and maintenance instructions must be read and understood before the vacuum pump is used. If you have any doubts, contact your Busch representative. Safety Information The vacuum pump is designed and manufactured in compliance with the latest technical standards and safety regulations. -
Page 19: Safety Stickers
Safety | 3 NOTE ... indicates helpful tips and recommendations, as well as information for efficient and trou- ble-free operation. CAUTION The COBRA DS system includes provision for the secondary containment of liquids leaks such as water and oil. Safety Stickers COBRA NS 0600 C Description Warning! Hot surface! Do not touch! -
Page 20: Sound Pressure Emission
3 | Safety COBRA DS 8163 B Sound Pressure Emission Refer to the table “Technical data” for the permissible sound levelling free field conditions according to EN ISO 2151. CAUTION The sound level of the vacuum system within a certain perimeter of the vacuum system is high. -
Page 21: Lock Out/ Tag Out Procedure (Type 1 Of Electrical Work)
“maintenance processing”. Call the BUSCH Semicon service team in charge of the maintenance of the pumps. ● If the external thermal protection B11 is engaged, check that the water flow shows min. 29 l/min on the flowmeter. -
Page 22: Lock Out/ Tag Out For Hydraulics And Pneumatics
3 | Safety ● Switch on the water (outlet first, then inlet) and nitrogen quick connections. ● Start the pump with the remote control (press on START button). 3.6.5 Lock Out/ Tag Out for Hydraulics and Pneumatics ● Hydraulics: cooling water. ●... -
Page 23: Seismic Zone Installation
Safety | 3 Interlock event Sensor Response Cooling water flow too Water flow switch Depends on alarm function set in the FS 2 & 3 PLC for water flow. Set at factory: Gener- al Stop ie. the contactors open and re- move power to motors. -
Page 24: Information Over The Lubricants
Oil quantity (Liter) 1.6 (for each NS 0600 C) 12.5 Oil type Busch YLC 250 B, Art. No. 0831 131 400 (0,5 l ≈ 1 kg) ● Replacement: After 5000 h (see “Maintenance Schedule [➔ 55]”). 3.9.2 Cooling Liquid Cooling liquid filling... -
Page 25: Transport
Transport | 4 Transport The COBRA DS vacuum pumps are tested and checked in our factory before careful packing. Check the packaging for transport damage when the goods arrive. The vacuum pump can withstand tem- peratures between -25°C and +55°C during transport. Handling For handling of individual components look up the relevant Operating Instructions in the Appendix. - Page 26 4 | Transport Lifting for DP 0600 C In case the vacuum pump was bolted to a pallet with fixing bolts: ● Unscrew the fixing bolts in the base frame. CAUTION In case of a vacuum pump filled with oil, make sure that by lifting the inclination angle of the vacuum pump do not exceed 5°...
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Page 27: Storage
Storage | 5 Storage Temporary Storage ● Make sure that the intake and exhaust flanges are closed (put on the protective caps included in the delivery package of the vacuum pump) ● Store the vacuum pump: ● if possible, the vacuum pump should be stored in its original packaging, ●... -
Page 28: Start-Up Of The Vacuum Pump After Storage
5 | Storage 5.3.1 Start-up of the Vacuum Pump after Storage ● Make sure that all protective elements, stoppers, or adhesive tapes attached before preservation have been removed. ● Switch on the vacuum pump in the sequence described in “Installation and Commissioning [➔ 29]”. -
Page 29: Installation And Commissioning
Installation and Commissioning | 6 Installation and Commissioning Installation Prerequisites It is important for operating safety to observe the instructions when installing the vacuum system. Installation must be carried out by qualified technicians. CAUTION In case of non-compliance with the installation prerequisites, particularly in case of insuffi- cient cooling: Risk of damage or destruction of the vacuum pump vacuum system and its components! Risk of personal injury! -
Page 30: Unpacking
6 | Installation and Commissioning Properties Clean & clear Particle size µm < 200 Chloride mg/l < 100 Electrical conductivity µS/cm ≤ 100 Free chloride mg/l < 0.3 NOTE 1° (german degree = 1° dGH) = 1,78° (french degree) = 1,25 e (english degree) = 17,9 mg/kg Ca- CO3 (american hardness). -
Page 31: Mounting
Installation and Commissioning | 6 The ring bolts on the components are not designed to take the full weight of the vacuum system. Depending on the dead weight and size of the vacuum system, use a forklift to move it on several pallets. -
Page 32: Dimensional Drawing
● Fit traps to inlet and discharge sided pipes to prevent condensate getting into vacuum pumps! In the case of long suction lines, the line cross-section should be larger than the intake flange to pre- vent a drop in the performance of the vacuum system. If you have any doubts, contact your Busch representative. -
Page 33: Inlet Connection
– DN 100 ISO-K for the COBRA DP 600 C inlet (inlet backing vacuum pump) In the case of long intake lines, the line cross-section should be larger than the intake flange to pre- vent a drop in the performance of the vacuum pump. If you have any doubts, contact your Busch representative. -
Page 34: Discharge Connection
In the case of long discharge lines, the line cross-section should be larger than the discharge flange to prevent a drop in the performance of the vacuum pump. If you have any doubts, contact your Busch representative. 6.1.7 Cooling Water Connection The cooling water is generally connected with a hose (leakproof against oxygen). -
Page 35: Nitrogen Connection
● Make sure that an overload cut-out according to EN 60204-1 is provided for the motor. ● Make sure that the drive of the vacuum pump is not disturbed by any electric or electromagnetic interferences. If you have any doubts, contact your Busch representative. CAUTION Overvoltage damages the vacuum system! ●... - Page 36 6 | Installation and Commissioning WARNING Risk of electrocution, risk of damage. Electrical installation must be performed by a suitably qualified electrician who knows and fol- lows the following regulations: ● IEC 364 or CENELEC HD 384 or DIN VDE 0100, ●...
- Page 37 Installation and Commissioning | 6 Description Ground phase Phases ● Place the first phase wire and screw it completely, tight at 15 Nm. ● Repeat for the other two phases. CAUTION If the vacuum system is operated with a motor that turns in the wrong direction, it can be de- stroyed, even if this is the case for only a short moment.
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Page 38: Equipment Connections (With Options)
Monitoring System - Option) Interface connection (50 poles) (option) PID Interface (option) The information concerning the use of the Busch PLC and the Busch LCD can be found in the Opera- tion and Maintenance manual (Art. No. 0870758077). 6.2.4 Connection of Lines/ Pipes ●... - Page 39 1.6 (for each NS 0600 C) 12.5 Oil type Busch YLC 250 B, Art. No. 0831 131 400 (0,5 l ≈ 1 kg) 6.2.5.1 COBRA NS 0600 C Oil Filling ● Prepare the quantity of oil specified in the table “Oil Quantity”.
- Page 40 6 | Installation and Commissioning ● Unscrew the oil filler plugs (OFP). ● Fill up to the upper level of the target circle of the oil sight glasses (OSG). Make sure that the fill- ing level is in the target circle of the oil sight glasses (OSG). Oil level, pump not operating ●...
- Page 41 Installation and Commissioning | 6 6.2.5.2 PUMA WY 075 Oil Filling ● Prepare the quantity of oil specified in the table “Oil quantity”. NOTE The quantity of oil specified in the installation handbook is of informative nature only. Check the oil level with the help of the various oil sight glasses (OSG 1,2,3,4) on the vacuum pump. CAUTION Before you change the type of oil, make sure that the new type is compatible with the old type.
- Page 42 6 | Installation and Commissioning DS vacuum system : ● Start the vacuum pump. If the intake line is equipped with a shut-off device: ● Close the shut-off device. If the intake line is not equipped with a shut-off device: ●...
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Page 43: Cooling Liquid Filling
Installation and Commissioning | 6 6.2.6 Cooling Liquid Filling CAUTION Do not run the vacuum system without cooling liquid! NOTE The COBRA DS vacuum pumps are generally dispatched with cooling liquid already in the vac- uum pump. Before vacuum pump first startup, control the cooling liquid level. In the event of absence of one or the other of these lubricants, please carry out the filling (see “Cooling Liquid Type/ Quantity [➔ 73]”... - Page 44 6 | Installation and Commissioning ● Make sure that the vacuum pump has been switched off and that it cannot be switched on again accidentally. Description Cooling liquid vent plug (CLV 1) Cooling liquid vent plug (CLV 2) Cooling liquid fill plug (CLF) Cooling liquid drain plug (CLD) ●...
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Page 45: Direct Cooling Checking
Installation and Commissioning | 6 ● Control that cooling liquid level is just under cylinder upper plate. ● In case cooling liquid level is below required level: ● Fill in more cooling liquid. ● If the intake line is equipped with a shut-off device: ●... - Page 46 6 | Installation and Commissioning The allowed maximum inlet gas temperature depends on the inlet pressure and the type of gas: the lower the inlet pressure (Pa), the higher the drawn gas temperature (TGas) can be. The following indicative values for air can be considered: Pa >...
- Page 47 Installation and Commissioning | 6 CAUTION The cooling water flow, which is checked by the flow switch FS 1, 2 & 3, must be at least min. 29 l/min. ● Make sure that all caps, safeguards, and similar covers are mounted. ●...
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Page 48: Vacuum System Start-Up
6 | Installation and Commissioning 6.3.2 Vacuum System Start-up WARNING The vacuum system may be destroyed if low on operating material! Check the gear oil level on the vacuum pumps (oil sight glass), see also relevant operating instruc- tions! ● Fill or top up with gear oil as necessary. ●... -
Page 49: Load Lock Operation Mode
Installation and Commissioning | 6 ● Nitrogen is used as dilution gas. It is injected inside the cylinder on two different places. Nitrogen flow FME injected in the middle hole is preset at 20 Nl/min and can be adjusted with valve DGR1, depending on the application. - Page 50 6 | Installation and Commissioning lay which is adjustable in its duration using the parameter « Time Before », will start. As soon as the time delay's duration has elapsed, the modules DP and MB slow down to their minimum speed of rotation.
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Page 51: Standard Operational Time Chart
Standard Operational Time Chart | 7 Standard Operational Time Chart Signal Control Mode (Select LL Mode = EXTERN) Description LCD start or Remote start (tool to 1) Cold start pump) Delay (5 sec) Pump speed Dry pump Booster 2/ MB on delay Pump ready (pump to tool) Process on (tool to pump) Pump start-up... -
Page 52: Current Control Mode (Select Ll Mode = Auto)
7 | Standard Operational Time Chart Current Control Mode (Select LL Mode = AUTO) Description LCD start or Remote start (tool to 1) Cold start pump) Delay (5 sec) Pump speed Dry pump Booster 2/ MB on delay Pump ready (pump to tool) Chamber open/ close (gate valve on/ Pump start-up off) -
Page 53: Maintenance
Maintenance | 8 Maintenance DANGER Live wires. Risk of electrical shock! ● Electrical installation work must only be executed by qualified personnel. DANGER In case the vacuum system has conveyed gases that have been contaminated with foreign materials that are dangerous to health, the oil and condensates will also be contaminated. These foreign materials can infiltrate the pores, recesses, and other internal spaces of the vac- uum system . - Page 54 8 | Maintenance ● In REMOTE mode, the start/ stop drive of the vacuum system passes through the main machine interface of the vacuum system (the one connected to TOOL) and the COMBI COBRA DS starts si- multaneously. ● In LOCAL mode, the start/ stop drive of the COMBI COBRA DS is done independently. For safety reasons, execute the start of the COMBI COBRA DS simultaneously.
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Page 55: Maintenance Schedule
(contact Busch). ● Check the vacuum pump for cooling liquid leaks - in case of leaks have the vacuum pump repaired (contact Busch). ● Check the vacuum pump for cooling water leaks - in case of leaks have the vacuum pump repaired (contact Busch). -
Page 56: Lock Out/ Tag Out Procedure
8 | Maintenance Interval Maintenance work Yearly ● If the intake is equipped with a sieve: If one or more of these accesso- ● Check the sieve at the intake and clean if necessary. ries are installed. ● Check the measuring and safety equipment for working or- der. -
Page 57: Oil Checking
NOTE Oil does not normally have to be refilled outside the recommended oil change intervals. A drop in the oil level indicates a fault (see "Alarms and warnings -> Busch PLC and Busch LCD"). CAUTION Only fill in oil through the oil filler opening. -
Page 58: Oil Color Inspection
Oil “YLC 250 B” contaminated chemically or by foreign bodies. Risk of explosion! If the oil becomes dark: ● Contact your Busch representative without delay. ● Make sure that the oil is either light or transparent. 58 | 80 Instruction Manual COBRA DS 8163 B_EN_en... -
Page 59: Oil Change
Maintenance | 8 If the oil becomes dark or looks different from the initial color: ● Change the oil immediately, see Oil Change. ● Contact your Busch representative to find out why the oil color has changed. 8.2.4 Oil Change... - Page 60 8 | Maintenance CAUTION Because the ends of the drain plugs are magnetic, metal swarf can stick to them. Always clean away this swarf when removing the drain plugs. Because of wear and tear of the seals, it is recommended to replace the drain plugs whenever the oil is changed.
- Page 61 Maintenance | 8 Oil level, pump not operating ● Fill up to the upper level of the target circle of the oil sight glasses (OSG). ● Make sure that the oil level still lies in the target circle of the oil sight glasses. ●...
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Page 62: Cooling Liquid Checking
8 | Maintenance ● Fill up to the upper level of the target circle of the oil sight glasses (OSG) or middle of the oil sight glass (Booster). ● Make sure that the oil level still lies in the target circle or between the MIN and MAX markings (Booster) on the oil sight glasses. -
Page 63: Cooling Liquid Draining
Maintenance | 8 ● Close the purge cap (CLV 1) of cylinder upper plate. ● Make sure that the seals of the filler cap are not damaged and that they sit properly. Replace if necessary. ● Stop fill in. ● Screw on the cooling liquid filler cap (CLF) again. ●... - Page 64 8 | Maintenance ● Fill in by filler hole until cooling liquid flows by purge cap (CLV 2) of cylinder endplate B-side. ● Stop fill in. ● Close the purge cap (CLV 2) on cylinder endplate B-side. ● Fill in again by filler hole until cooling liquid flows by purge cap (CLV 1) of cylinder upper plate. ●...
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Page 65: Additional Checking
Maintenance | 8 Additional Checking Subject Checking Cooling Water ● Check the cooling water flow. If the flow drops, check for leaks: ● Make sure that the cooling water specifications are fol- lowed. Nitrogen ● Check the nitrogen flow. If the flow drops, check for leaks: ●... -
Page 66: Overhaul
● Decontaminate the machine as much as possible and state the contamination status in a ‘Dec- laration of Contamination’. Busch will only accept machine accompanied by a signed, fully completed and legally binding "decla- ration of contamination", downloadable from the following link: buschvacuum.com/declaration-of- contamination. -
Page 67: Removal From Service
Removal from Service | 10 Removal from Service DANGER Live wires. Risk of electrical shock! ● Electrical installation work must only be executed by qualified personnel. CAUTION Hot surface. Risk of burns! ● Before doing anything that requires touching the machine, let it cool down first. 10.1 Temporary Removal from Service Before disconnecting the intake and exhaust lines and switching off the cooling water and nitrogen... -
Page 68: Dismantling And Disposal
10 | Removal from Service 10.3 Dismantling and Disposal DANGER In case the vacuum system has conveyed gases that have been contaminated with harmful foreign material which are harmful to health, the oil and the condensates will also be contam- inated with harmful foreign material. -
Page 69: Spare Parts
Risk of premature failure! Loss of efficiency! ● Use only original Busch spare parts, consumables and supplies to ensure correct operation of the machine and to validate the warranty. There are no standard spare parts kits available for this product. -
Page 70: Troubleshooting
Busch). Solid foreign matter has en- ● Remove the solid foreign tered the machine. matter or repair the ma- chine (contact Busch). ● Install an inlet filter if neces- sary. A temperature sensor has ● Let the machine cool down. - Page 71 Oil Change. The machine runs too hot. ● See problem "The machine runs too hot". For resolution of problems not listed in the troubleshooting table, please contact your Busch repre- sentative. Instruction Manual COBRA DS 8163 B_EN_en 71 | 80...
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Page 72: Oil Type/ Quantity
13 | Oil Type/ Quantity Oil Type/ Quantity 13.1 Oil Type Make sure that the oil type corresponds to specifications: YLC 250 B ISO-VG Oil Type Synthetic Part number 0.5 L packaging 0831 131 400 Part number 1 L packaging 0831 108 878 Part number 5 L packaging 0831 108 879 Oil suitability... -
Page 73: Cooling Liquid Type/ Quantity
Cooling Liquid Type/ Quantity | 14 Cooling Liquid Type/ Quantity 14.1 Cooling Liquid Type Make sure that the Cooling Liquid type corresponds to specifications: Zitrec M-25 (ready-to-use) Part number 5 L packaging 0831 563 469 Part number 25 L packaging 0831 563 468 The cooling liquid Zitrec M-25 is ready-to-use and does not require additional water. - Page 74 15 | Technical Data Technical Data DS 8163 B Nominal pumping m³/h (60 Hz) 7385 speed ACFM (60 Hz) 4346.1 Ultimate pressure TORR 0.00075 hPa (mbar) 0.001 Nominal motor rating kW (60 Hz) 3 x 15 backing pump Nominal motor rating kW (60 Hz) vacuum booster Power consumption at...
- Page 75 EU Declaration of Conformity This Declaration of Conformity and the CE-markings affixed to the nameplate are valid for the machine within the Busch scope of delivery. This Decla- ration of Conformity is issued under the sole responsibility of the manufacturer.
- Page 76 UK Declaration of Conformity This Declaration of Conformity and the UKCA-markings affixed to the nameplate are valid for the machine within the Busch scope of delivery. This Dec- laration of Conformity is issued under the sole responsibility of the manufacturer.
- Page 77 N otes Notes Instruction Manual COBRA DS 8163 B_EN_en 77 | 80...
- Page 78 Notes 78 | 80 Instruction Manual COBRA DS 8163 B_EN_en...
- Page 79 Notes Instruction Manual COBRA DS 8163 B_EN_en 79 | 80...
- Page 80 With a network of over 60 companies in more than 40 countries and agencies worldwide, Busch has a global presence. In every country, highly competent local personnel delivers custom-tailored support backed by a global network of expertise. Wherever you are.
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