Related Manuals for BUSCH COBRA DS 3181 C
Summary of Contents for BUSCH COBRA DS 3181 C
- Page 1 COBRA Dry Screw Vacuum Pumps DS 3181 C Instruction Manual 0870739194 | B0004_en-US | Original instructions 10/24/2023...
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Page 2: Table Of Contents
Table of Contents Table of Contents Preface ................................... Congratulations on your purchase ........................Product Description ............................. COBRA DS 3181 C ..............................Use ..................................Operating Principle ............................. 2.3.1 COMBI ..............................2.3.2 Gas Flow Checks ........................... Oil Circuit................................Cooling.................................. Nitrogen System..............................Optional Functions/ Use of Available Accessories .................. - Page 3 Table of Contents 6.1.7 Electrical Connection/ Checks ......................Installation ................................6.2.1 Mounting ............................... 6.2.2 Electrical Connection..........................6.2.3 Equipment Connections (with Options)..................... 6.2.4 Connection of Lines/ Pipes ........................6.2.5 Oil Filling ..............................6.2.6 Cooling Liquid Filling..........................6.2.7 Direct Cooling Checking ........................6.2.8 Nitrogen Supply Checking........................
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Page 4: Preface
1 | Preface Preface Congratulations on your purchase Congratulations on your purchase of the Busch vacuum pump. With watchful observation of the field’s requirements, innovation and steady development Busch delivers modern vacuum and pres- sure solutions worldwide. These operating instructions contain information for ●... -
Page 5: Product Description
Product Description | 2 Product Description COBRA DS 3181 C OSG 3 OSG 1 Description Suction connection Discharge connection Cooling water connections Nitrogen connections Backing vacuum pump DP 0800 A Lifting eyebolt for DP 0800 A Emergency stop button Electrical connections... - Page 6 2 | Product Description COBRA DP 0800 A TS 1 OSG 1 DGR 1 DGR 2 TS 2 TS 5 OSG 2 TS 3 TS 4 FS 2 Description Glycol circulating pump Cooling water inlet connection Cooling water outlet connection Regulating valve, cooling water Nitrogen connection DGR 1...
- Page 7 Product Description | 2 Process Gas Diagram Description Process gas inlet (PGI) Process gas outlet (PGO) Cooling water regulating valve (CWR) Cooling liquid pump (CLP) Heat exchanger (HE) Nitrogen flow meter, dilution gas (FME) Nitrogen pressure reducer (PRV) Magnetic valve (MV), regulating valve with soleneoid valve, dilution gas Regulating valve, dilution gas DP Regulating valve, dilution gas at ex-...
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Page 8: Use
2 | Product Description COBRA NS 0800 A Description Inlet Outlet Cooling liquid Cooling water Barrier gas Screw rotors Dilution gas (dil 2) Dilution gas (dil 1) Motor klixon PUMA WY 3600 A Description Inlet Outlet Booster lobe Cooling water The COBRA DS vacuum pumps are designed for use in the field of microelectronics and similar in- dustries. -
Page 9: Operating Principle
2.3.1 COMBI The COBRA DS 3181 C vacuum pumps are a combination of a screw vacuum pump NS 0800 A (DP) and a Booster vacuum pump WY 3600 A (MB). The COMBI vacuum pumps are streamlined. The COBRA DS vacuum pumps are COBRA NS screw vacuum pumps with cooling water and nitrogen circuits. -
Page 10: Gas Flow Checks
2 | Product Description 2.3.2 Gas Flow Checks A pressure sensor TS5 at the discharge monitors the discharge pressure. If the pressure reaches more than the limit value (alarm, preset at the factory: 0.2 bar), the purge cycle starts. Oil Circuit Since the complete operating principle works without contact, no oil circuit is needed in the work ar- Cooling The vacuum pump is cooled by:... -
Page 11: Optional Functions/ Use Of Available Accessories
● FME: nitrogen flow rate, dilution ● CWM: cooling water flow rate in motors/ transmission / variable speed drives See "Installation and Maintenance Instructions, Busch PLC and Busch LCD (No. 0870758077)". On/ Off Switch The vacuum pump is delivered with a circuit breaker. The function start/ stop can be done in Local by using the LCD controller or in Remote by the production machine. -
Page 12: Safety
The maintenance instructions must be followed and observed. These installation and maintenance instructions must be read and understood before the vacuum pump is used. If you have any doubts, contact your Busch representative. Safety Information The vacuum pump is designed and manufactured in compliance with the latest technical standards and safety regulations. -
Page 13: Safety Stickers
Safety | 3 NOTE ... indicates helpful tips and recommendations, as well as information for efficient and trou- ble-free operation. CAUTION The COBRA DS system includes provision for the secondary containment of liquids leaks such as water and oil. Safety Stickers COBRA NS 0800 A Description Warning! Hot surface! Do not touch! -
Page 14: Noise Emission
3 | Safety COBRA DS 3181 C Noise Emission Refer to the table “Technical data” for the permissible noise levelling free field conditions according to EN ISO 2151. CAUTION The sound level of the vacuum pump within a certain perimeter of the vacuum pump is high. -
Page 15: Lock Out/ Tag Out Procedure (Type 1 Of Electrical Work)
Safety | 3 Type 3 Equipment is energized. Energized circuits are exposed and inadvertent contact with uninsulated energized parts is possible. Potential exposures are no greater than 30 volts rms, 42.4 volts peak, 60 volts dc or 240 volt-amp in dry locations. Type 4 Equipment is energized. -
Page 16: Seismic Zone Installation
3 | Safety Seismic Zone Installation Upon receipt, the vacuum pump is fixed on the transport pallet with two brackets. ● Convey the vacuum pump to its final location with a pallet truck before removing it from its sup- port. ●... -
Page 17: Information Over The Lubricants
NS 0800 A WY 3600 A Oil quantity (Liter) Oil type Busch YLC 250 B, Art. No. 0831 131 400 (0,5 l ≈ 1 kg) ● Replacement: After 5000 h (see “Maintenance Schedule [➔ 46]”). 3.8.2 Cooling Liquid Cooling liquid filling... -
Page 18: Transport
4 | Transport Transport The COBRA DS vacuum pumps are tested and checked in our factory before careful packing. Check the packaging for transport damage when the goods arrive. The vacuum pump can withstand tem- peratures between -25°C and +55°C during transport. Transport in Packed State Packed on a pallet, the vacuum pump can be moved with a hand forklift truck. - Page 19 Transport | 4 In case the vacuum pump was bolted to a pallet with fixing bolts: ● Unscrew the fixing bolts in the base frame. CAUTION In case of a vacuum pump filled with oil, make sure that by lifting the inclination angle of the vacuum pump do not exceed 5°...
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Page 20: Storage
5 | Storage Storage Temporary Storage ● Make sure that the intake and exhaust flanges are closed (put on the protective caps included in the delivery package of the vacuum pump) ● Store the vacuum pump: ● if possible, the vacuum pump should be stored in its original packaging, ●... -
Page 21: Installation And Commissioning
Installation and Commissioning | 6 Installation and Commissioning Installation Prerequisites CAUTION In case of non-compliance with the installation prerequisites, particularly in case of insuffi- cient cooling: Risk of damage or destruction of the vacuum pump and its components! Risk of personal injury! The installation prerequisites must be complied with. - Page 22 6 | Installation and Commissioning NOTE 1° (german degree = 1° dGH) = 1,78° (french degree) = 1,25 e (english degree) = 17,9 mg/kg Ca- CO3 (american hardness). ● Make sure that the cooling water is neutral and clean. ● Make sure that the cooling water outlet is unpressurised. ●...
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Page 23: Dimensional Drawing
Inlet DN 160 ISO-K Outlet DN 63 ISO-KF Ventilating duct, diameter 50.8 Emergency stop Busch PLC Remote Control (Moveable) Main switch DP power connector ● Make sure that the vacuum pump is at least 1 meter away from any wall to ensure good cooling. -
Page 24: Discharge Connection
– DN 160 ISO-K In the case of long intake lines, the line cross-section should be larger than the intake flange to pre- vent a drop in the performance of the vacuum pump. If you have any doubts, contact your Busch representative. -
Page 25: Cooling Water Connection
● Make sure that an overload cut-out according to EN 60204-1 is provided for the motor. ● Make sure that the drive of the vacuum pump is not disturbed by any electric or electromagnetic interferences. If you have any doubts, contact your Busch representative. Installation 6.2.1... -
Page 26: Electrical Connection
6 | Installation and Commissioning 6.2.2 Electrical Connection WARNING Risk of electrocution, risk of damage. Electrical installation must be performed by a suitably qualified electrician who knows and fol- lows the following regulations: ● IEC 364 or CENELEC HD 384 or DIN VDE 0100, ●... - Page 27 Installation and Commissioning | 6 Double star connection (low voltage): Star connection (high voltage): MB Motor Connection Motor connectors: Connection of motor temperature switches (recommended): Control voltage: ≤ 250 V Max current: 1.6 A MTS = Motor temperature switch (in motor coil) Double star connection (low voltage): Instruction Manual COBRA DS 3181 C_EN_en 27 | 68...
- Page 28 6 | Installation and Commissioning Star connection (high voltage): 6.2.2.1 Power Wiring Connection Power wiring 4 poles Phase L1 Phase L2 Phase L3 Ground 6.2.2.2 Power Connector on Rear Side Power Connector (208V) Description Pump side Phase L1 (Pump side) Phase L2 (Pump side) Phase L3 (Pump side) Ground (Pump side)
- Page 29 Installation and Commissioning | 6 Mating connectors Supplier Part description Part number HARTING Housing 6B, Top entry, M32, 1 Lever 0680800049 HARTING Frame 6B, Marking A…F 0680800041 HARTING Insert 200A, 25~40SQ, Female 0676800016 HARTING PE Extension 16SQ 0680800098 Power Connector (400V) Description Pump side Phase L1 (Pump side)
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Page 30: Equipment Connections (With Options)
6.2.3 Equipment Connections (with Options) Description LCD serial wiring (RJ12), LCD Micro SD slot PC serial wiring (only for Busch engi- Customer Network, Communication neers) modbus RTU RS 232/ RS 485 30 | 68 Instruction Manual COBRA DS 3181 C_EN_en... -
Page 31: Connection Of Lines/ Pipes
Interface connection (50 poles) / PID In- Monitoring System - Option) terface The information concerning the use of the Busch PLC and the Busch LCD can be found in the Opera- tion and Maintenance manual (Art. No. 0870758077). 6.2.4 Connection of Lines/ Pipes ●... - Page 32 6 | Installation and Commissioning Description Oil fill plug (OFP) Oil sight glass (OSG) Oil drain plug (ODP) Oil drain plug, magnetic plug (ODP, MP) Oil drain plug, magnetic plug (ODP, Oil fill plug (OFP) Oil sight glass (OSG) Oil drain plug (ODP) ●...
- Page 33 Installation and Commissioning | 6 If the intake line is equipped with a shut-off device: ● Close the shut-off device. If the intake line is not equipped with a shut-off device: ● Place a rubber plate on the intake flange. ●...
- Page 34 6 | Installation and Commissioning 6.2.5.2 PUMA WY 3600 A Oil Filling Description Oil fill plug (OFP) Oil fill plug (OFP) Oil sight glass (OSG) Oil drain plug (ODP) Oil sight glass (OSG) Oil drain plug (ODP) NOTE The quantity of oil specified in the installation handbook is of informative nature only. Check the oil level with the help of the various oil sight glasses (OSG1,2,3,4) on the vacuum pump.
- Page 35 Installation and Commissioning | 6 NOTE It is easier to switch on the vacuum pump with cold oil when the intake line is not closed or when the intake flange is not covered by a rubber plate. DS vacuum pump: ●...
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Page 36: Cooling Liquid Filling
6 | Installation and Commissioning 6.2.6 Cooling Liquid Filling NOTE The COBRA DS vacuum pumps are generally dispatched with cooling liquid already in the vac- uum pump. Before vacuum pump first startup, control the cooling liquid level. In the event of absence of one or the other of these lubricants, please carry out the filling (see “Cooling Liquid Type/ Quantity [➔ 63]”... - Page 37 Installation and Commissioning | 6 ● Make sure that the vacuum pump has been switched off and that it cannot be switched on again accidentally. Description Cooling liquid vent plug (CLV) Cooling liquid fill plug (CLF) Cooling liquid drain plug (CLD) ●...
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Page 38: Direct Cooling Checking
6 | Installation and Commissioning ● Unscrew purge cap on cylinder upper plate. ● Control that cooling liquid level is just under cylinder upper plate. ● In case cooling liquid level is below required level: ● Fill in more cooling liquid. ●... - Page 39 Installation and Commissioning | 6 Solid particles must not get into the vacuum pump. Procedural errors can result in the pump suck- ing in a certain quantity of liquid. If the pump has sucked in liquid, a short drying time is necessary at the end of the procedure.
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Page 40: Switching The Vacuum Pump On/ Off
6 | Installation and Commissioning CAUTION The cooling water flow, which is checked by the flow switch FS2, must be at least 10 l/min. ● Make sure that all caps, safeguards, and similar covers are mounted. ● Make sure that the safeguards are switched on. ●... -
Page 41: Load Lock Operation Mode
Installation and Commissioning | 6 ● The cooling water flow is factory set on 10 l/min and can be adjusted at the regulating valve CWR. This water circuit is used to cool the motor of the NS pump. It cools also the cylinder and cylinder endplate B-side when temperature of cooling liquid is above 50°C. - Page 42 6 | Installation and Commissioning time delay which is adjustable in its duration using the parameter « Time Before », will start. As soon as the time delay's duration has elapsed, the modules DP and MB slow down to their min- imum frequency of rotation.
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Page 43: Standard Operational Time Chart
Standard Operational Time Chart | 7 Standard Operational Time Chart Signal Control Mode (Select LL Mode = EXTERN) Description LCD start or Remote start (tool to 1) Cold start pump) Delay (5 sec) Pump speed Dry pump Booster 2/ MB on delay Pump ready (pump to tool) Process on (tool to pump) Pump start-up... -
Page 44: Current Control Mode (Select Ll Mode = Auto)
7 | Standard Operational Time Chart Current Control Mode (Select LL Mode = AUTO) Description LCD start or Remote start (tool to 1) Cold start pump) Delay (5 sec) Pump speed Dry pump Booster 2/ MB on delay Pump ready (pump to tool) Chamber open/ close (gate valve on/ Pump start-up off) -
Page 45: Maintenance
Maintenance | 8 Maintenance DANGER Live wires. Risk of electrical shock. ● Electrical installation work must only be executed by qualified personnel. DANGER In case the vacuum pump has conveyed gases that have been contaminated with foreign ma- terials that are dangerous to health, the oil and condensates will also be contaminated. These foreign materials can infiltrate the pores, recesses, and other internal spaces of the vac- uum pump. -
Page 46: Maintenance Schedule
8 | Maintenance ● Stop the pump with the LCD control (press on STOP button during 10s). ● Press on emergency stop button. ● Switch off the main circuit breaker. ● Switch off the customer’s power supply. ● Switch off the water and nitrogen quick connections (inlet first, then outlet). ●... - Page 47 (contact Busch). ● Check the vacuum pump for cooling liquid leaks - in case of leaks have the vacuum pump repaired (contact Busch). ● Check the vacuum pump for cooling water leaks - in case of leaks have the vacuum pump repaired (contact Busch).
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Page 48: Lock Out/ Tag Out Procedure
8 | Maintenance Interval Maintenance work Every 16000 hours or after 4 ● Change the oil of the gear and bearing housings (both years sides), see “Oil Change [➔ 50]”. ● Have a major overhaul on the vacuum pump (contact Bus- ch). -
Page 49: Oil Refilling
NOTE Oil does not normally have to be refilled outside the recommended oil change intervals. A drop in the oil level indicates a fault (see "Alarms and warnings -> Busch PLC and Busch LCD"). CAUTION Only fill in oil through the oil filler opening. -
Page 50: Oil Color Inspection
If the oil becomes dark or looks different from the initial color: ● Change the oil immediately, see Oil Change. You can consult your Busch representative in order to find out why this color change has occurred. 8.2.4 Oil Change... - Page 51 Maintenance | 8 COBRA NS (DP) vacuum pump: ● Put a drain tray underneath the oil drain plugs (ODP). ● Remove the oil drain plugs (ODP). ● Carefully remove the drain plugs. ● Drain the oil. ● Because of wear and tear on the seals replace the current drain plugs with new ones. When the oil flow has stopped: ●...
- Page 52 8 | Maintenance NOTE The quantity of oil specified in the Instruction Manual is of informative nature only. Check the oil level with the help of the various oil sight glasses on the vacuum pump. ● Make sure that the drain plugs have been fitted properly and that they do not leak. CAUTION Only fill in oil through the oil filler opening.
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Page 53: Cooling Liquid Checking
Maintenance | 8 ● Make sure that the vacuum pump has been switched off and that it cannot be switched on again accidentally. ● Unscrew the oil filler cap (OFP) Oil level, pump not operating ● Fill up to the upper level of the target circle of the oil sight glasses (OSG). ●... -
Page 54: Cooling Liquid Draining
8 | Maintenance ● Fill in again by filler hole until cooling liquid flows by purge cap of cylinder upper plate. ● Close the purge cap of cylinder upper plate. ● Stop fill in. ● Screw on the cooling liquid filler cap again. ●... -
Page 55: Additional Checking
Maintenance | 8 ● Make sure that the drain plug sits properly and does not leak. ● Unscrew purge cap on cylinder upper plate. ● Unscrew purge cap on cylinder endplate B-side. ● Unscrew the filler cap for the cooling liquid. ●... -
Page 56: Overhaul
● Decontaminate the machine as much as possible and state the contamination status in a ‘Dec- laration of Contamination’. Busch will only accept machine accompanied by a signed, fully completed and legally binding "decla- ration of contamination", downloadable from the following link: buschvacuum.com/declaration-of- contamination. -
Page 57: Removal From Service
Removal from Service | 10 Removal from Service DANGER Live wires. Risk of electrical shock. ● Electrical installation work must only be executed by qualified personnel. CAUTION Hot surface. Risk of burns! ● Before doing anything that requires touching the machine, let it cool down first. 10.1 Temporary Removal from Service Before disconnecting the intake and exhaust lines and switching off the cooling water and nitrogen... -
Page 58: Dismantling And Disposal
10 | Removal from Service 10.3 Dismantling and Disposal DANGER In case the vacuum pump has conveyed gases that have been contaminated with harmful for- eign material which are harmful to health, the oil and the condensates will also be contami- nated with harmful foreign material. -
Page 59: Spare Parts
Risk of premature failure! Loss of efficiency! ● The exclusive use of Busch genuine spare parts and consumables is recommended for the correct functioning of the machine and to validate the warranty. There are no standard spare parts kits available for this product. -
Page 60: Troubleshooting
Busch). Solid foreign matter has en- ● Remove the solid foreign tered the machine. matter or repair the ma- chine (contact Busch). ● Install an inlet filter if neces- sary. A temperature sensor has ● Let the machine cool down. - Page 61 Oil Change. The machine runs too hot. ● See problem "The machine runs too hot". For resolution of problems not listed in the troubleshooting table, please contact your Busch repre- sentative. Instruction Manual COBRA DS 3181 C_EN_en 61 | 68...
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Page 62: Oil Type/ Quantity
13 | Oil Type/ Quantity Oil Type/ Quantity 13.1 Oil Type Make sure that the oil type corresponds to specifications: YLC 250 B ISO-VG Oil Type Synthetic Part number 0.5 L packaging 0831 131 400 Part number 1 L packaging 0831 108 878 Part number 5 L packaging 0831 108 879 CAUTION... -
Page 63: Cooling Liquid Type/ Quantity
Cooling Liquid Type/ Quantity | 14 Cooling Liquid Type/ Quantity 14.1 Cooling Liquid Type Make sure that the Cooling Liquid type corresponds to specifications: Zitrec M-25 (ready-to-use) Part number 25 L packaging 0831 563 468 Part number 5 L packaging 0831 563 469 The cooling liquid Zitrec M-25 is ready-to-use and does not require additional water. -
Page 64: Technical Data
15 | Technical Data Technical Data DS 3181 C Nominal pumping speed m³/h 3500 ACFM (60 Hz) 2059.8 Ultimate pressure TORR 0.00075 hPa (mbar) 0.001 Nominal motor rating kW (60 Hz) 18.5 backing pump Nominal motor rating kW (90 Hz) 15.0 vacuum booster Power consumption at... -
Page 65: Eu Declaration Of Conformity
EU Declaration of Conformity This Declaration of Conformity and the CE-markings affixed to the nameplate are valid for the machine within the Busch scope of delivery. This Decla- ration of Conformity is issued under the sole responsibility of the manufacturer. -
Page 66: Uk Declaration Of Conformity
UK Declaration of Conformity This Declaration of Conformity and the UKCA-markings affixed to the nameplate are valid for the machine within the Busch scope of delivery. This Dec- laration of Conformity is issued under the sole responsibility of the manufacturer. - Page 67 N otes Notes Instruction Manual COBRA DS 3181 C_EN_en 67 | 68...
- Page 68 With a network of over 60 companies in more than 40 countries and agencies worldwide, Busch has a global presence. In every country, highly competent local personnel delivers custom-tailored support backed by a global network of expertise. Wherever you are.