Table of Contents
Advertisement
Quick Links
Installation and
Operating Instructions
Combi Screw and Roots
Vacuum Pumps
COBRA DS 8163 A
Standard version
Busch Manufacturing Korea, Ltd.
189-51, Soicheon-ro, Majang-myun
Icheon-si, Gyunggi-do, 467-813
Republic of Korea
0870772605 /
181024 / Original instructions / Subject to change without notice
Advertisement
Table of Contents
Related Manuals for BUSCH COBRA DS 8163 A
Summary of Contents for BUSCH COBRA DS 8163 A
- Page 1 Installation and Operating Instructions Combi Screw and Roots Vacuum Pumps COBRA DS 8163 A Standard version Busch Manufacturing Korea, Ltd. 189-51, Soicheon-ro, Majang-myun Icheon-si, Gyunggi-do, 467-813 Republic of Korea 0870772605 / 181024 / Original instructions / Subject to change without notice...
-
Page 2: Table Of Contents
Maintenance ......26 COBRA DS 8163 A ..... . 3 Maintenance program. -
Page 3: Cobra Ds 8163 A
COBRA DS 8163 A Inlet Roots WY A075 Roots WY A075 DP 1 Backing vacuum pump DP 600 C PTB Pump terminal box DP 2 Backing vacuum pump DP 600 C VFD Roots frequency inverter DP 3 Backing vacuum pump DP 600 C... -
Page 4: Cobra Ds 8163 A
COBRA DS 8163 A ECO Eletrical power supply Emergency stop switch MSH Main switch OUT Discharge Pump terminal box COBRA DS 8163 A Page 4 0870772605... -
Page 5: Cobra Dp 600 C
DGR 2 Regulating valve, dilution gas (end of 140°C OSG 1 Oil sight glass cylinder) TS 5 Overpressure sensor OSG 2 Oil sight glass ECO Combined power and sensor connection TS 6 Temperature switch, motor 155°C OUT Discharge (to silencer) COBRA DS 8163 A Page 5 0870772605... -
Page 6: Roots Wy A075
Inlet MTB Motor terminal box ODP Oil drain plug OFP Oil fill plug OSG Oil sight glass OUT Discharge/ Distribution for DP pump RSG Rotation sight glass Sensor connection Roots Variable frequency drive COBRA DS 8163 A Page 6 0870772605... -
Page 7: Ds 8163 A With Equipment
EOCR Electronic Over Current Relay Extension board PLCM PLC module Remote control Magnetic contactor Motor Circuit protector Main stop switch No Fuse Breaker Outlet PLCM PLC module DC Power supply Rotation sensor Vertical silencer with water cooling COBRA DS 8163 A Page 7 0870772605... - Page 8 OSG 4 Oil sight glass (MB) OSG 5 Oil sight glass (MB) OUT Discharge (to silencer) PGi, Process gas inlet PGo, Process gas outlet PRV Regulating valve, nitrogen SV Safety valve TR Temperature regulator, 55°C COBRA DS 8163 A Page 8 0870772605...
-
Page 9: Product Description
1s). 2) Start MB: The WY Roots pump will starts after the DP1 when – the delay of the timer “MB ON DELAY” is done (timer settable in COBRA DS 8163 A Product description Page 9 0870772605... -
Page 10: Structure
(8) is preset at 40 l/ min and can be adjusted with valve DGR 2, depending on the application. When flow is too low a warning then an alarm signal is generated by flow Product description COBRA DS 8163 A Page 10 0870772605... -
Page 11: Optional Functions/ Use Of Available Accessories
The operator of the vacuum system must observe the safety regula- tions and must train and instruct his personnel accordingly. Safety COBRA DS 8163 A Page 11 0870772605... -
Page 12: Noise Emission
Type 3 Equipment is energized. Energized circuits are exposed and inadvertent contact with uninsulated energized parts is possible. Potential expo- Safety COBRA DS 8163 A Page 12 0870772605... -
Page 13: Type 4
(t° > settings indicated in the electrical schematics. 150°C) l If ok, check the wiring system from the terminal box motor to the KDP1 contactor. If ok, call the BUSCH Semicon service team in Exhaust Overpressure Depends on alarm function charge of the maintenance of the pumps. - Page 14 The contactors open and cut temperature switch TS 1 the engine supply after 120 (t°>105°C) seconds (changeable dura- tion) H= Hardware, S= Software “X” is the number of the DP or MB vacuum pump Safety COBRA DS 8163 A Page 14 0870772605...
-
Page 15: Transportation
– packaging, l Use a hoist that is equipped with a hook and safety lock indoors, – l Lift the vacuum pump Transportation COBRA DS 8163 A Page 15 0870772605... -
Page 16: Start-Up Of The Vacuum System After Storage
Make sure that the nitrogen fulfills the following requirements: l Set the vacuum system on as level, horizontal surface. Overpressure: 1,5 bar – Approximate flow rate: 0 - 200 l/ min – Installation and start-up COBRA DS 8163 A Page 16 0870772605... -
Page 17: Inlet Connection
If the sucked gas contains dusts or solid foreign bodies: of the vacuum system. If you have any doubts, contact your Busch representative. u Make sure that a filter or protective grating is installed at the... -
Page 18: Nitrogen Connection
Make sure that the drive of the vacuum system is not disturbed by l Connect the ground wire to ground phase any electric or electromagnetic interferences. If you have any doubts, contact your Busch representative l Unscrew completely the first connector on the main contactor CAUTION... -
Page 19: Controls/ Function
Remove the rubber plate from the intake flange and connect the PID interface (9 poles) (option) intake line to the intake flange The information concerning the use of the Busch PLC and the Busch Checking the direct cooling LCD can be found in the Operation and Maintenance Instructions (Art-No. -
Page 20: Oil Filling
5° compared to the horizontal. In the event of too im- portant slope (> 5°), risk of oil leakage in the workspace. Installation and start-up COBRA DS 8163 A Page 20 0870772605... -
Page 21: Recommendations On Operation
Open the CWV 1 and CWV 2 valves and Danfoss to 1 u Pull off the connections for the inlet and outlet of the cooling water u Drain the cooling water completely Installation and start-up COBRA DS 8163 A Page 21 0870772605... -
Page 22: Start-Up Of The Vacuum System
(8) is preset at 40 l/min and can be adjusted with valve DGR 2. l Switch on the vacuum system l Make sure that the vacuum system does not leak Installation and start-up COBRA DS 8163 A Page 22 0870772605... -
Page 23: Description Of The Load Lock Operation Mode
MB is stopped or running idle speed before opening inlet valve. - Be careful to change input status to 0 before opening inlet valve. Installation and start-up COBRA DS 8163 A Page 23 0870772605... -
Page 24: Standard Operational Time Chart
(tool pump) 1) Cold start delay (5 sec) 50/60Hz Pump speed Dry pump 60Hz 15Hz Booster 2) MB on delay Pump ready Process on pump stop pump start-up processing Standard operational time chart COBRA DS 8163 A Page 24 0870772605... -
Page 25: Current Control Mode (Select Ll Mode = Auto)
40 sec ** it depends on the process time, chamber capacity and end vacuum level Standard setting (time) 1) Cold start 900 sec 2) MB on delay 30 sec Standard operational time chart COBRA DS 8163 A Page 25 0870772605... -
Page 26: Maintenance
For safety reasons, execute the start of the l Inspect the vacuum system for leaks of cooling liquid - if there are COMBI COBRA DS simultaneously. leaks, repair the vacuum system (Busch) stop the vacuum system with the remote control (press on STOP –... -
Page 27: Yearly
Filling in new oil l Drain the oil (see "Draining the oil") COBRA NS (DP) vacuum pump l Main inspection of the vacuum system (Busch) l Prepare the quantity of oil needed (see "Oil type/ quantity") Lock Out/ Tag out procedure... -
Page 28: Wy (Mb) Rotary Lobes Vacuum Pump
Unscrew the oil drain plugs (ODP) If dark oil similar to the example shown is observed, you have to l Drain the oil contact the Busch Customer Service without delay. When oil stops running out: u Close the oil drain plugs (ODP) again... -
Page 29: Checking The Cooling Liquid
Check the level of the cooling liquid: if the cooling liquid level is at the purge cap on cylinder upper plate, do not unscrew the purge cap on cylinder endplate B-side as the cooling liquid will flow out- side otherwise follow the procedure Checking the oil COBRA DS 8163 A Page 29 0870772605... -
Page 30: Checking The Leak-Protection Non-Return Valve (Accessory)
Busch service will only accept vacuum pumps that come with a com- begin dismantling the vacuum system pletely filled in and legally binding signed form. -
Page 31: Oil Type/ Quantity
Oil type/ quantity Oil type l Make sure that the oil type corresponds to specification: Busch YLC 250 B, Art. No. 0831 000 054 (0,5 l @ 1 kg) – WARNING The use of chemically contaminated or polluted oil can lead to hazardous pump conditions which could cause personal injury. -
Page 32: Cooling Liquid Type/ Quantity (Dp Only)
But when using pure glycol, it is imperative to prepare the mix prior to filling the pump and to respect this proportion. Cooling liquid type/ quantity (DP only) COBRA DS 8163 A Page 32 0870772605... -
Page 33: Technical Data
(motors cooling) Cooling water pressure bar/ DP 2 ... 5 Cooling water temperature °C 10 - 25°C Nitrogen requirement approx. l/ min 3 x 0 - 200 Nitrogen overpressure Weight approx. 3320 Technical data COBRA DS 8163 A Page 33 0870772605... -
Page 35: Eu-Declaration Of Conformity
EU-Declaration of Conformity This Declaration of Conformity and the CE-mark affixed to the nameplate are valid for the machine within the Busch scope of delivery. This declara- tion of Conformity is issued under the sole responsibility of the manufacturer. When this machine is integrated into a superordinate machinery the manufacturer of the superordinate machinery (this can be the operating company, too) must conduct the conformity assessment process for the superordinate machine or plant, issue the Declaration of Conformity for it and affix the CE-mark. - Page 36 Busch – All over the World in Industry www.buschvacuum.com Finland Malaysia Spain Argentina Busch Malaysia Sdn Bhd. Busch Vakuumteknik Oy Busch Argentina S.R.L. Busch Ibérica S.A. 4&6, Jalan Taboh 33/22, Seksyen 33 Sinikellontie 4 Santo Domingo 3076 Pol. Ind. Coll de la Manya...