Cleaning Frg-702, Replacing Parts - Agilent Technologies FRG700KF25 Operating Instructions Manual

6.3 Cleaning FRG-702,
Replacing Parts
Tools / material required
Inverted Magnetron Pirani Gauge FRG-700 FRG-702

If possible perform a leak test (leak rate <10

Mount the magnet unit (4) and lock it with the screw (3).
Carefully mount the electronics unit (2). (Make sure the pin of the Pirani ele-
ment is properly plugged into the corresponding hole of the electronics unit.)
Push the electronics unit up to the mechanical stop and lock it with the
hexagon socket set screw (1).
Adjust the gauge (  18).

Allen wrench AF 1.5

Allen wrench AF 3

Open-end wrench AF 6

Open-end wrench AF 7

Pliers for circlip

Polishing cloth (400 grain) or Scotch-Brite

Tweezers

Cleaning alcohol

Mounting tool for ignition aid

Ignition aid

Metal seal (11) for anode feedthrough

Pirani element (13) incl. set of seals (13a, 13b)
WARNING
WARNING: electric arcing
Helium may cause electric arcing with detrimental effects on the
electronics of the product.
Before performing any tightness tests put the product out of
operation and remove the electronics unit.
DANGER
DANGER: cleaning agents
Cleaning agents can be detrimental to health and environment.
Adhere to the relevant regulations and take the necessary precautions
when handling cleaning agents and disposing of them. Consider
possible reactions with the product materials (  9).
For cleaning the measuring chamber, the Pirani element must be
removed and replaced.
23
-9
mbar l/s).