Agilent Technologies 4072A Pre-Installation Manual
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Agilent Technologies 4072A Pre-Installation Manual

Agilent Technologies 4072A Pre-Installation Manual

Advanced parametric tester
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Pre-Installation Guide
Agilent 4072A Advanced Parametric Tester
Agilent 4073A Ultra Advanced Parametric Tester
Edition 3
5968-4911E
October 2000
Printed in Japan
Copyright ©1999, 2000 Agilent Technologies, Inc.

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  • Page 1 Pre-Installation Guide Agilent 4072A Advanced Parametric Tester Agilent 4073A Ultra Advanced Parametric Tester Edition 3 5968-4911E October 2000 Printed in Japan Copyright ©1999, 2000 Agilent Technologies, Inc.
  • Page 2 Warranty A copy of the specific warranty terms applicable to your Agilent Technologies product and replacement parts can be obtained from your local Sales and Service Office. Audience This manual is intended for customers who purchase the Agilent 4072A or 4073A.

  • Page 3: Table Of Contents

    Upgrading from the Agilent 4071A to the Agilent 4072A ....... .
  • Page 4 For the 4072A Testhead ........

  • Page 5: General Information

    General Information Agilent 4072A/4073A Pre-Installation Guide, Edition 3...
  • Page 6 General Information This manual contains Agilent 4072A Advanced parametric tester and Agilent 4073A Ultra Advanced parametric tester pre-installation information and is the primary reference document to assist you in installation planning and site preparation. This manual contains specifications and information to help you decide what you’ll need to do before your system arrives, where to locate your system, how to establish the required environmental and electrical conditions, what to do when you receive your system, and what you’ll need to have ready when your system arrives.

  • Page 7: Agilent 4072A/4073A Tester Configuration

    You can also test packaged devices by mounting them on a test fixture that attaches to the testhead. System Controller The 4072A/4073A tester requires an HP 9000 Model 745/132L computer to control the system instruments. Flat Panel Display The flat panel display can be mounted, with the stand, at the side of the system cabinet.

  • Page 8: Considerations

    The customer should appoint a principal operator or system manager. This person will be responsible for operating the 4072A/4073A tester, performing operator maintenance when necessary, and scheduling periodic maintenance. The principal operator’s initial responsibilities are to establish and monitor site preparation schedules, and to order system supplies.

  • Page 9: Installation Overview

    If the following steps are not completed prior to the system installation date, the Agilent customer engineer (CE) may not be able to install the tester. After ordering the 4072A/4073A tester, the customer should: 1. Appoint a principal operator or system manager to be responsible for system installation and operation.
  • Page 10 4. Move all system components to the system installation site. If it is in your clean room, move them into your clean room. At the 4072A/4073A tester installation, the following persons must be present: • Principal operator or system administrator to assist with the tester installation.

  • Page 11: Site Preparation

    Site Preparation Agilent 4072A/4073A Pre-Installation Guide, Edition 3...

  • Page 12: Space Requirements

    Space Requirements Space Requirements The amount of floor space required for your Agilent 4072A/4073A tester can be quickly and accurately determined by using the System Component Template and blank grid sheets provided in appendix B. The template and grid sheets are scaled so that each square on the grid sheet represents 20 cm ´ 20 cm = 400 cm (approx.
  • Page 13 50 cm (20 in) or less. Figure 2-1. System Cabinet Dimensions 120 degree max. 906 mm 600 mm 120 degree max. Top View Front View Side View Chapter 2 Agilent 4072A/4073A Pre-Installation Guide, Edition 3...

  • Page 14: Electrical Requirements

    The site installation location must satisfy the power requirements described in table 2-2. For example, if you install the 4072A/4073A tester with a line voltage of 208 Vac and a line frequency of 60 Hz, the electric power must satisfy the line voltage range of 187 to 228 Vac, at least 24 A, and a line frequency range of 48 to 63 Hz.

  • Page 15: Main Power Cable

    Site Preparation Electrical Requirements Table 2-4. Power Consumption of the 4072A/4073A System Instruments Component Line Voltage 200 Vac 208 Vac 220 Vac 240 Vac System Cabinet 1.0 A 1.0 A 0.9 A 0.9 A Testhead 2.5 A 2.4 A 2.3 A 2.1 A...

  • Page 16: Additional Power Outlets

    Additional power outlets must be supplied with grounding circuits intact and must be used when connecting additional equipment. Chapter 2 Agilent 4072A/4073A Pre-Installation Guide, Edition 3...

  • Page 17: Precautions

    £ 1 kV (earth, line and neutral modes) Burst Noise: £ 1 kV (common and normal modes) Surge Noise: Agilent Technologies recommends that if the conditions above cannot be met, the tester should use the noise cut trans. This line voltage environment conforms to EN61326-1. Grounding The system cabinet, the system controller, and all computer peripherals are tied to earth ground through the three-wire power cable grounding wire.

  • Page 18: Power Line Transients

    Upgrading from the Agilent 4071A to the Agilent 4072A The Agilent E3196A upgrade kit is used to upgrade from the 4071A to the 4072A tester. In particular, the 4072A requires 200 or 208 Vac instead of 100 or 120 Vac. If you are using the 4071A with 100 or 120 Vac, you must prepare the 200, 208, 220, or 240 Vac.

  • Page 19: Upgrading From The Agilent 4071A To The Agilent 4073A

    Upgrading from the Agilent 4072A to the Agilent 4073A The Agilent E3198A upgrade kit is used to upgrade from the 4072A to the 4073A tester. The E3198A upgrade kit upgrades the testhead only, with the 4072A cabinet being used as the 4073A cabinet.

  • Page 20: Environmental Considerations

    Site Preparation Environmental Considerations Environmental Considerations To ensure optimum 4072A/4073A tester accuracy and performance, be sure to comply with the following environmental conditions. Temperature and Humidity The measurement accuracy is specified at the following temperature and humidity: Temperature: 23 °C ± 5 °C (73 °F ± 9 °F) Humidity: 5% to 70% RH (Especially, the 4073A must keep no-condesing.)

  • Page 21: Floor Vibration

    Frequency: Air Cleanliness Your 4072A/4073A tester must be located in an area where the air purity meets or exceeds class 100,000 standards. Also, to ensure trouble-free disk and disk drive operation, system controller peripherals should be located in an environment of similar air purity.

  • Page 22: Lighting

    Software media such as CD-ROMs, flexible disks, or digital audio tapes should be stored in an environment similar to that of the 4072A/4073A tester. Extreme temperature or humidity changes, which may alter the size of a disk/tape, must be avoided. Do not place the software media in or near magnetic fields.

  • Page 23: Safety Precautions

    Site Preparation Safety Precautions Safety Precautions To maintain safe operating conditions for the 4072A/4073A tester, observe the following earthquake, fire, electrical, and chemical safety precautions. Earthquake To prevent the system cabinet from tipping over in an earthquake, fix the system cabinet to the floor as shown in figure 2-5.
  • Page 24 1. Check the system visually for damage or disconnected parts. 2. Turn on the system and confirm that the tester starts correctly. 3. Execute the diagnostic program (diag4070) and check the measurement capability of the tester. Chapter 2 Agilent 4072A/4073A Pre-Installation Guide, Edition 3...

  • Page 25: Fire

    Rubber mats with anti-static connections should be used when working on equipment. Clearly label and install the main circuit breaker or switch for the 4072A/4073A tester in a readily accessible place to allow all system power to be shut off quickly in the event of an emergency.
  • Page 26 Site Preparation Safety Precautions Chapter 2 Agilent 4072A/4073A Pre-Installation Guide, Edition 3...

  • Page 27: Wafer Probers

    Wafer Probers Agilent 4072A/4073A Pre-Installation Guide, Edition 3...
  • Page 28 Wafer Probers The Agilent 4072A/4073A tester is typically used with a wafer prober as most of the devices under test (DUTs) are on a wafer. You can use automatic and semi-automatic wafer probers and manual wafer probers with the 4072A/4073A tester.

  • Page 29: Mounting The Testhead On The Wafer Prober

    There are two guide pins on the testhead, as shown in figure 3-2.. These pins are used to position the testhead on the wafer prober correctly. For details on how to mount a testhead, contact the wafer prober manufacturer. Figure 3-2. Guide Pins on the Testhead Guide Pins Testhead Chapter 3 Agilent 4072A/4073A Pre-Installation Guide, Edition 3...

  • Page 30: Probe Card For Direct Docking

    The 4073A may not fully perform if a personality board or extension cable fixture is used. NOTE Agilent Technologies recommends that you do not change the pin boards from the slots in which they are installed at the factory. When the 4072A/4073A tester diagnostic program (diag4070) is executed, at least 12 pin boards must be installed in designated slots in the testhead.

  • Page 31: Personality Board

    Wafer Prober Sense Switch Using the wafer prober sense switch located on the bottom panel of the testhead, the 4072A/4073A tester ensures that the testhead sets on the wafer prober properly.

  • Page 32: Wiring For The Personality Board

    Agilent Technologies recommends that you do not change the pin boards from the slots in which they are installed at the factory. When the 4072A tester diagnostic program (diag4070) is executed, at least 12 pin boards must be installed in designated slots in the testhead. The designated slots are shown in the pin board configuration table.

  • Page 33: Placing The Testhead Beside A Manual Wafer Prober

    An extension cable fixture and connector plate are used to interface between the testhead measurement pins and the probe needles. Agilent Technologies provides the Agilent E3146A extension cable fixture for the 4072A tester. The E3146A is designed so that all the measurement pins of the testhead contact the pads of this fixture, and can be wired to the connector plate or to the probing needles easily.
  • Page 34 Wafer Probers Placing the Testhead beside a Manual Wafer Prober Chapter 3 Agilent 4072A/4073A Pre-Installation Guide, Edition 3...

  • Page 35: Receiving

    Receiving Agilent 4072A/4073A Pre-Installation Guide, Edition 3...

  • Page 36: Shipping Damage

    If you suspect damage, note on the bill of lading that there is “Apparent damage -- subject to inspection,” and arrange for both the carrier’s representative and a local Agilent customer engineer (CE) to be present when that item is unpacked. Chapter 4 Agilent 4072A/4073A Pre-Installation Guide, Edition 3...

  • Page 37: Checking The Contents

    First, unpack the box labeled “Open Me First”, take out the contents list, and check the delivered items against it. If something is missing or damaged, contact your local Agilent sales representative. Chapter 4 Agilent 4072A/4073A Pre-Installation Guide, Edition 3...

  • Page 38: Unpacking The System Cabinet

    Unpacking the System Cabinet Unpacking the System Cabinet The customer is responsible for unpacking the Agilent 4072A/4073A tester system cabinet and moving it to the final location in the clean room. This section covers how to unpack the system cabinet. The system cabinet is stored in the carton, and is removed from the carton and put down on the floor using the following procedure.
  • Page 39 5. Remove the other cover, which covers the right, 6. Remove the ramp support cardboard from the right rear, and left sides. side of the cabinet. 7. Use the cardboard to make a ramp support. Chapter 4 Agilent 4072A/4073A Pre-Installation Guide, Edition 3...
  • Page 40 10. Position the ramp support. 11. Place the ramp guide (front cover) on the ramp support. 12. Fix the ramp guide with the plug joint. 13. Place the ramp board on the ramp guide. Chapter 4 Agilent 4072A/4073A Pre-Installation Guide, Edition 3...
  • Page 41 Receiving Unpacking the System Cabinet 14. Slide the cabinet down the ramp to the floor. Chapter 4 Agilent 4072A/4073A Pre-Installation Guide, Edition 3...

  • Page 42: Unpacking The Testhead

    The 4073A testhead must adapt to the atmospheric temperature before removing the carton. Also, measure the atmospheric temperature at the location the testhead will reside. 5. Take the testhead to the clean room. Chapter 4 Agilent 4072A/4073A Pre-Installation Guide, Edition 3...

  • Page 43: Unpacking Accessories

    Do not remove the protective vinyl covers outside of the clean room. When the system is shipped from the factory, items that are used in the clean room are wrapped with a protective vinyl cover in a clean room meeting class 10,000 air cleanliness standards. Chapter 4 Agilent 4072A/4073A Pre-Installation Guide, Edition 3...

  • Page 44: Moving The Cabinet, Testhead And Accessories To Your Clean Room

    Table 4-1. The corresponding with the waiting time for no-condensation is the following Table 4-1. Chapter 4 Agilent 4072A/4073A Pre-Installation Guide, Edition 3...
  • Page 45 -20 °C to 0 °C 10 hours 6 hours 0 °C to 10 °C 8 hours 4 hours 10 °C to 20 °C 5 hours 1 hour Greater than 20 °C 1 hour 0 hour Chapter 4 Agilent 4072A/4073A Pre-Installation Guide, Edition 3...
  • Page 46 Remove the protective vinyl. f. Do not remove the tape holding the air duct. (This tape indicates the final installation location.) 4. Move the 4073A testhead to its final installation location. Chapter 4 Agilent 4072A/4073A Pre-Installation Guide, Edition 3...

  • Page 47: For The 4072A Testhead

    1. Move the 4072A to the outside entrance of the clean room. 2. Remove the outer vinyl covers. 3. Move the 4072A into the buffer room, then remove the vinyl covers using the following procedure. a. Remove the inner vinyl covers.

  • Page 48: For The Cabinet And Accessories

    2. Remove the outer protective vinyl cover. 3. Move the items into the buffer room. 4. Remove the inner vinyl cover. 5. Move the items to the final installation location. Chapter 4 Agilent 4072A/4073A Pre-Installation Guide, Edition 3...

  • Page 49: Site Preparation Checklist

    Site Preparation Checklist Agilent 4072A/4073A Pre-Installation Guide, Edition 3...
  • Page 50 Did you conduct tests to determine daily voltage fluctuations? If your tests revealed excessive fluctuation, did you make provisions for voltage or frequency regulation? Did you prepare power outlets (15.0 A) for service (test/maintenance)? Appendix A Agilent 4072A/4073A Pre-Installation Guide, Edition 3...
  • Page 51 20% to 70%? Did you check the installation area to ensure class 10,000 or better air cleanliness? If the some of the following apply to your site, Agilent Technologies recommend you to check the air cleanliness using particle counter.
  • Page 52 Site Preparation Checklist Appendix A Agilent 4072A/4073A Pre-Installation Guide, Edition 3...

  • Page 53: Layout Planning Sheet

    Layout Planning Sheet Agilent 4072A/4073A Pre-Installation Guide, Edition 3...
  • Page 54 Simply cut out, from the template sheet, the system components furnished with your Agilent 4072A/4073A tester, and arrange them on the blank grid sheet provided in figure B-4. Figure B-2. shows an example of a 4072A/4073A tester layout Figure B-4.
  • Page 55 Layout Planning Sheet Figure B-2. Example of a 4072A/4073A Tester Layout Wafer Prober Table Testhead 640 mm 600 mm 906 mm 513 mm Keyboard Table Appendix B Agilent 4072A/4073A Pre-Installation Guide, Edition 3...
  • Page 56 Outlet System Cabinet 17" Color Display 642 mm 4GCT XKGY 4GCT XKGY 4GCT XKGY 4GCT XKGY  %QNQT &KURNC[ &76 5[UVGO %CDKPGV 6GUVJGCF OO OO 6JG JGKIJV KU HTQO HNQQT VQ &76 Appendix B Agilent 4072A/4073A Pre-Installation Guide, Edition 3...
  • Page 57 Layout Planning Sheet Figure B-4. Grid Sheet Appendix B Agilent 4072A/4073A Pre-Installation Guide, Edition 3...
  • Page 58 Note:This figure shows the layout example in case of no pulse generator. Grid: 200 mm 3600 mm Test Leads (DVM) Test Leads (PG) TH PS Cables Air Duct Wafer Prober Testhead Tokyo Electron P8 Flat Panel Display Grid: 200 mm Appendix B Agilent 4072A/4073A Pre-Installation Guide, Edition 3...
  • Page 59 Note: This figure shows the layout example in case of no pulse generator. Grid: 200 mm 3600mm Test Leads Test Leads Test Leads (C Meter) (DVM) (PG) TH PS Cables Air Duct Wafer Prober Tokyo Seimitsu Flat Panel Display A-PM-90 Testhead Grid: 200 mm Appendix B Agilent 4072A/4073A Pre-Installation Guide, Edition 3...
  • Page 60 Note:This figure shows the layout example in case of no pulse generator. Grid: 200 mm 3600 mm Test Leads (DVM) Test Leads (PG) TH PS Cables Air Duct Wafer Prober Testhead Flat Panel Display Tokyo Electron P12 Grid: 200 mm Appendix B Agilent 4072A/4073A Pre-Installation Guide, Edition 3...
  • Page 61 Note:This figure shows the layout example in case of no pulse generator. Grid: 200 mm 3600 mm Test Leads (DVM) TH PS Cables Test Leads (PG) Air Duct Testhead Wafer Prober Flat Panel Display Tokyo Seimitsu UF 300 Grid: 200 mm Appendix B Agilent 4072A/4073A Pre-Installation Guide, Edition 3...
  • Page 62 Layout Planning Sheet Appendix B Agilent 4072A/4073A Pre-Installation Guide, Edition 3...

  • Page 63: Pin Board Configuration Tables

    Pin Board Configuration Tables Agilent 4072A/4073A Pre-Installation Guide, Edition 3...
  • Page 64 3. Table C-2. is an example of where pin boards are installed when additional pin boards are ordered. Table C-1. Pin Board Configurations for the Agilent 4072A/4073A Tester Slot Pin Board...

  • Page 65: Example Configuration

    Example Configuration If you ordered 28 of the Add One Pin Board option, the 28 additional pin boards will be installed in the following slots. Table C-2. Example of the Pin Board Configuration for the 4072A/4073A Tester Slot Pin Board Slot...
  • Page 66 Pin Board Configuration Tables Example Configuration Appendix C Agilent 4072A/4073A Pre-Installation Guide, Edition 3...

  • Page 67: Testhead And Personality Board Dimensions

    Testhead and Personality Board Dimensions Agilent 4072A/4073A Pre-Installation Guide, Edition 3...
  • Page 68 The E3145A is designed for non-Kelvin connections, so that the force and sense terminals for each pin is shorted on the personality board. The E3145B is for Kelvin connections, so that the force and sense terminals are separated. E3145A/B Personality Board Dimensions Figure D-1. Appendix D Agilent 4072A/4073A Pre-Installation Guide, Edition 3...
  • Page 69 To assist you in mounting your testhead on a wafer prober, Figure D-2. shows the testhead dimensions for the 4072A/4073A tester. Testhead Dimensions (1 of 2) Figure D-2. 75 Kg (48 pin System) Appendix D Agilent 4072A/4073A Pre-Installation Guide, Edition 3...
  • Page 70 Testhead and Personality Board Dimensions Figure D-3. Testhead Dimensions (2 of 2) Appendix D Agilent 4072A/4073A Pre-Installation Guide, Edition 3...
  • Page 71 Emergency Off (EMO) System Agilent 4072A/4073A Pre-Installation Guide, Edition 3...
  • Page 72 4072A/4073A tester to meet the customer’s needs. The 4072A/4073A tester with a system cabinet has an emergency off (EMO) switch at the top of the cabinet, as shown in figure E-1.. The emergency off switch is a red, circular push-switch labeled “EMO.” Pushing the EMO switch stops the power to the system instruments.

  • Page 73: Emergency Off (Emo) System Block Diagram And Operation Of The Emergency Off Circuit

    EMO Detect (Green) TH PS Testhead fan protector Relay5 Relay6 Ext.cntrl Fan speed sensor Testhead fan Relay3 Relay2 System SW Cabinet protector Ext.alarm 1:[NC] Ext.alarm 2:[NO] Fan speed sensor Cabinet fan (3ea) Appendix E Agilent 4072A/4073A Pre-Installation Guide, Edition 3...
  • Page 74 EMO Detect (Green) TH PS Testhead fan protector Relay5 Relay6 Ext.cntrl Fan speed sensor Testhead fan Relay2 Relay3 System SW Cabinet protector Ext.alarm 1:[NC] Ext.alarm 2:[NO] Fan speed sensor Cabinet fan (3ea) Appendix E Agilent 4072A/4073A Pre-Installation Guide, Edition 3...

  • Page 75: Turn On The System Instrument

    Main breaker is OFF a. NC (“Normally Closed”) indicates that the terminals are closed when the tester operates properly. b. NO (“Normally Open”) indicates that the terminals are open when the tester operates properly. Appendix E Agilent 4072A/4073A Pre-Installation Guide, Edition 3...

  • Page 76: I/O Specifications

    Steady current: 56 ± 11.2 mA (50 Hz); 50 ± 10 mA (60 Hz) at 24 Vac Transient current: 2 - 3 times that of the steady current Ext alarm 1 and 2 Maximum current: 3 A at 250 Vac, 2 A at 30 Vdc Appendix E Agilent 4072A/4073A Pre-Installation Guide, Edition 3...

  • Page 77: Example Design Of An External Emergency Lamp

    Note that you must not use a power line outlet from the system cabinet because power to these outlets stops when the EMO switch is pressed. Figure E-5. Example Design of an External Emergency Lamp Emergency lamp EMO switch Outlet To Ext. alarm 2 terminal Appendix E Agilent 4072A/4073A Pre-Installation Guide, Edition 3...
  • Page 78 Emergency Off (EMO) System Example Design of an External Emergency Lamp Appendix E Agilent 4072A/4073A Pre-Installation Guide, Edition 3...
  • Page 80 Copyright Ó Agilent Technologies, Inc. 2000 Agilent Publication No. 5968-4911E Printed in Japan 10/00 '"&#%(!& ' 5968-4911E...

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