Deinstallation - Agilent Technologies FRG700KF25 Operating Instructions Manual

5 Deinstallation

Procedure
Inverted Magnetron Pirani Gauge FRG-700 FRG-702
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DANGER
DANGER: contaminated parts
Contaminated parts can be detrimental to health and environment.
Before beginning to work, find out whether any parts are contami-
nated. Adhere to the relevant regulations and take the necessary
precautions when handling contaminated parts.
Caution
Caution: vacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to
ensure cleanliness and prevent damages.
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with bare hands increases the
desorption rate.
Always wear clean, lint-free gloves and use clean tools when working
in this area.
Vent the vacuum system.
Put the gauge out off operation and unplug the sensor cable.
Remove the gauge from the vacuum system and install the protective lid.
When deinstalling the CF flange connection, it may be
advantageous to temporarily remove the magnet unit (  13).
17
Protective lid