Honeywell Vertex VC 4 User Manual page 160

HF Hydrogen Fluoride
Symbol
HF-LL
Hydrogen Fluoride - Low Level
H Se
2
Hydrogen Selenide
NO
2
Nitrogen Dioxide
COCI
2
Phosgene
COCI /- HL
2
Phosgene - High Range
PH
Phosphine
3
SiH
Silane
4
SO
Sulful Dioxide
2
Tetrakis Dimethylamino
TDMAT
Titanium
TM
Vertex C System
Gas Name
161
X
Filter Type Filter Type
A B
X
X
X
X
X
X
X
X
X
X
Filter Type
C
X
X
X
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