Cup Packing Holder Plate Details Parts, Cleaning; Connection Pipe Cleaning; Replacing And Assembling Consumables - Ulvac DOP-400SB Instruction Manual

6) Cup Packing Holder Plate Details Parts, Cleaning

(1) Holder plate and cup packing components list
a；Hexagon hole bolt b；Cup packing holder plate
b
(2) Take the washings to a waste and remove fat neatly Cup packing holder plate
particularly Contact department Cup packing.

7) Connection Pipe Cleaning

(1) Take the washings to a waste and remove fat neatly in the whole connection pipe
particularly a groove.

8) Replacing and Assembling Consumables

(1) Replace the cup packing. Place the cup packing on the connecting rod to ensure that
the canopy is downwards.
(2) Fitting holder plate.
(3) Roctite 242 is applied to M8×L16 Hexagon hole bolt screw part 3-4 piles.
The holder plate is installed in a bolt by 12 N･m.
(1) Replacing cup packing.
a
13
c；Cup packing
c
(2) Fitting holder plate.