Removing The Cylinder - Ulvac DOP-400SB Instruction Manual

(1) Loosen the screws
(3) Remove a connection pipe and a head cover.
(4) Remove an O-ring attached to a connection pipe.

3) Removing the Cylinder

(1) Mark the casing and cylinder with a permanent marker before removing the cylinder.
(2) While wearing the gloves, turn the fan slowly upwards. Always ensure that gloves are
worn.
(3) Remove the cylinder upwards.
(1) Mark the casing and cylinder.
(3) Remove upwards.
(2) Remove a connection pipe and
a head cover.
(2) Turn the fan upwards.
Caution:
When the attachment direction of a
cylinder is mistaken, a pump
breaks down.
Please mark and enable it to
certainly attach in the appointed
direction, before removing.
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