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Dimensions; Dis-251; Dis-501 - Ulvac DIS-251 Instruction Manual

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8.2 Dimensions

8.2.1 DIS-251

8.2.2 DIS-501

※Figures in parentheses
are dimensions in case that
Inlet and outlet are placed
vertically
Three-phase
Three-phase
-30-
Single-phase
Single-phase

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This manual is also suitable for:

Dis-501

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