Ulvac GLD-137CC Instruction Manual page 13

5. Pump Performance
5.1 Ultimate pressure
5.2 Pumping speed
5.3 Power requirement
6. Maintenance, Inspection and Repair
6.1 Maintenance
6.2 Periodic inspection
6.3 Replacement of the pump oil
6.4 Replacement of the coupling spider
6.5 Trouble check list
7. Disposal
8. Maintenance parts
8.1 Maintenance parts list
8.2 Disassembly drawing
Warranty
Safety Data Sheet (SDS)
Pump Usage Check Sheet (Use this sheet for requesting an overhaul.)
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