Specifications For Each Grade - Nagano Keiki ZT11 User Manual

■ 3.2 Specifications for Each Grade
Grade
Surface roughness of
gas contact area
Pressure
Gas
sensor
contact
material
Fitting
Max. allowable pressure
Air-tightness (helium-
vacuum system)
Particle
Cleaning
Recommended gas
*1 Before use, connect the product to an indoor power distribution network that is not affected by lightning surge
voltages and power system switching transients.
*2 The maximum allowable pressure is the upper limit of pressure value which may safely be applied to the product
and remain in specification once pressure is returned to the rated range with a couple of times over-pressurization
for about 10 minutes. Effects of continuous over-pressure are not guaranteed.
*3 Make sure that the gas-contact material is suitable for the fluid to be measured.
Using a device not specified in the User's Manual for electrical
●
connection requires confirmation with the manufacturer or expert of
such device to ensure its safety when used with other electrical devices.
0.18 μm Ra Avg.
*2
Zero-count particles: 0.1 μm or more
(based on our inspection standards)
Ultra-clean (cleaning)
High-purity gas, gas for
*3
semiconductor materials, etc.
WARNING
EP
SUS316L
SUS316L
150% of pressure range
5 × 10 Pa•m
- 12
< Table 3-2 >
9
GP
0.5 μm Ra Avg.
/s or less
3
None
Degreasing cleaning
Purge gas, exhaust gas, etc.
TY-ZT11-004A Ver. 3