Summary of Contents for Nagano Keiki ZT11
- Page 1 Doc. No: TY-ZT11-004A Ver. 3 User's Manual for ZT11 Pressure Sensor for Semiconductor Industry...
-
Page 2: For Proper And Safe Use
FOR PROPER AND SAFE USE Thank you for purchasing the ZT11 Pressure Sensor for the Semiconductor Industry. To use this product properly and safely, read this User's Manual carefully. This pressure sensor is for a gas supply system and equipment for semiconductor manufacturing. Incorrect use of the product may cause malfunction, resulting in failures or accidents. -
Page 3: Precautions For Handling Product
"1 out of 2", "2 x (1 out of 2)", "2 out of 3", etc. When measuring fluid is oxygen, use a degreased product. ● Oil may be left in general products, reacting with oxygen, and causing fire or explosion. TY-ZT11-004A Ver. 3... - Page 4 Disassembly or modification of the product on your own may cause failures. * These precautions are selected from our common safety precautions for all products that correspond to this product. ZT11-specific precautions are further described in detail in the following sections. TY-ZT11-004A Ver. 3...
-
Page 5: Table Of Contents
8. OPERATION (ENERGIZATION) ............16 9. MEASURES AGAINST NOISE ............17 ■ 9.1 Effects of Noise ......................17 10. STORAGE ..................17 11. MAINTENANCE ................18 ■ 11.1 Maintenance ........................ 18 ■ 11.2 Zero Adjustment ......................19 TY-ZT11-004A Ver. 3... - Page 6 12. PRODUCT WARRANTY/ EXPORT ADMINISTRATION REGULATIONS ..22 ■ 12.1 Product Warranty ....................... 22 ■ 12.2 Export Administration Regulations ................22 13. OTHER ................... 22 TY-ZT11-004A Ver. 3...
-
Page 7: Introduction
The bridge circuit gives an electric signal proportional to the strain, which is then amplified to a constant value in the electric circuit and transmitted as direct current. Amplifier Circuit Detector < Fig. 2-1 > TY-ZT11-004A Ver. 3... -
Page 8: Specifications
Protection class IP67 (IEC 60529) *M12-connector cable in a mated state Zeroing mechanism Side access (at case side surface) Mass Approx. 70 g (will vary for single end depending on the fitting type) < Table 3-1 > TY-ZT11-004A Ver. 3... -
Page 9: Specifications For Each Grade
< Table 3-2 > WARNING Using a device not specified in the User's Manual for electrical ● connection requires confirmation with the manufacturer or expert of such device to ensure its safety when used with other electrical devices. TY-ZT11-004A Ver. 3... -
Page 10: Dimensions
* Type of pressure (gauge or absolute) can be easily identified by the color of the product label. ・Gauge pressure: Green ・Absolute pressure: Yellow-green * QR code on the product label stores model and serial number information. < Fig. 4-1 > TY-ZT11-004A Ver. 3... -
Page 11: Transportation And Unpacking
(6) If any abnormality is found, contact your purchasing agent or our sales office. 6. INSTALLATION AND REMOVAL ■ 6.1 Installation (1) ZT11 pressure sensor, to be connected with union fittings such as a UJR™/VCR integrated fitting, ® needs to be connected in a specified manner using a designated gasket. When connecting the sensor to the pressure line, do not tighten the main case body with a pipe wrench or similar tool. -
Page 12: Wiring And Connection
Instrument. Tighten the nut by hand until it does not move (tightening torque: 0.4 to 0.5 N·m). Connector Terminal Terminal No. Cabling Color 2-wire System Arrangement Power (+) Brown White Power (-) Blue Black < Table 7-1 > TY-ZT11-004A Ver. 3... - Page 13 When soldering, be careful that the soldering iron does not ● touch the case or the cable sheath. Use a stabilized power supply with a small ripple (noise) ● fluctuation. TY-ZT11-004A Ver. 3...
-
Page 14: Load Resistance
10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 Supply Voltage (V DC) R max (Ω) = 50 E − 500 (E: supply voltage) < Fig. 7-2 > TY-ZT11-004A Ver. 3... -
Page 15: Specifications Of M12-Connector Cable (Option)
Please note that the white and black wires are not in use, which are included in our optional 4-wire cable in addition to brown and blue one. Also, the end of these unused wires needs to be processed to avoid short-circuit. TY-ZT11-004A Ver. 3... -
Page 16: Operation (Energization)
Observe the following precautions during operation. CAUTION Do not apply pressure exceeding the rated pressure indicated ● on the ZT11 body label. Do not perform wiring or insert connectors while the power is ● on. Otherwise damage to the product and electric shock may result. -
Page 17: Measures Against Noise
Locations exposed to direct sunlight or in high-temperature cars ● Note that storing the product in a sealed bag under a high- ● temperature or humid environment may deform or discolor the resin parts of the product. TY-ZT11-004A Ver. 3... -
Page 18: Maintenance
• Output check with a reference pressure gauge and a measuring instrument CAUTION Avoid electrostatic charge. When cleaning the exterior, use a soft, damp cloth. Do not use thinner or benzene. Otherwise, deterioration or malfunction may result. TY-ZT11-004A Ver. 3... -
Page 19: Zero Adjustment
* Damage to the fall-prevention function will not affect the function of the product itself as long as the plastic cap and gasket seal are intact. In this case, cut the fall-prevention portion of the product before use. TY-ZT11-004A Ver. 3... - Page 20 In the vacuum state, adjust the sensor output to the "output conversion value based on the degree of vacuum" ≒ 4 mA DC. CAUTION Do not perform zero adjustment for products with the absolute ● pressure range when pressure is released to the atmosphere (no-pressure state). TY-ZT11-004A Ver. 3...
- Page 21 The degree of protection may be impaired if the gasket seal is not in close contact with the case. Turning the resin cap more than 90° may cause damage. Do not apply excessive force (should be 50 mN·m or less). TY-ZT11-004A Ver. 3...
- Page 22 If the delivered product within the warranty period (one (1) year from the delivered date) is judged as a nonconforming product according to "Defect due to the design or manufacturing by Nagano Keiki Co., Ltd.", they are repaired or replaced with a conforming one free of charge.
- Page 23 This is an English translation of the Japanese original (TY-ZT11-004 Ver.4). All information and specifications in this User's Manual are subject to change without notice. We have the copyright on all the information described in this User's Manual. Copying or reprinting without permission is strictly prohibited.