Maintenance - Nagano Keiki ZT11 User Manual

Pressure sensor for semiconductor industry
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11. MAINTENANCE

■ 11.1 Maintenance
A periodical maintenance once a half year will be needed due to possible aging under different
operating conditions. Also, perform calibration or zero adjustment as needed. Calibration should be
performed in a specified manner or at a designated calibration laboratory.
Refer to the following checklist for periodic inspections.
<Periodic Inspection Checklist>
Appearance (scratches, cracks, deformation, corrosion, etc.)
• Corrosion condition of the pressure inlet
• Clogging at the air inlet
• Leakage check and thread re-tightening
• Double check and re-tighten the screws throughout the main body
• Insulation resistance between the case and all terminals tied (at 100 MΩ or more/50V DC or less)
• Output check with a reference pressure gauge and a measuring instrument
 Avoid electrostatic charge.
When cleaning the exterior, use a soft, damp cloth.
 Do not use thinner or benzene.
Otherwise, deterioration or malfunction may result.
CAUTION
18
TY-ZT11-004A Ver. 3

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