Table Of Contents - Nagano Keiki ZT11 User Manual

Pressure sensor for semiconductor industry
Table of Contents

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TABLE OF CONTENTS

FOR PROPER AND SAFE USE ............................................................. 2
■ Definition of Safety Terms ................................................................................................... 2
■ Description of Graphic Symbols ........................................................................................ 2
■ Precautions for Handling Product ...................................................................................... 3
TABLE OF CONTENTS .......................................................................... 5
1. INTRODUCTION ................................................................................ 7
2. PRODUCT OVERVIEW ...................................................................... 7
■ 2.1 Overview .......................................................................................................................... 7
■ 2.2 Features ........................................................................................................................... 7
■ 2.3 Operating Principle ........................................................................................................ 7
3. SPECIFICATIONS .............................................................................. 8
■ 3.1 Common Specifications ................................................................................................ 8
■ 3.2 Specifications for Each Grade ...................................................................................... 9
4. DIMENSIONS ................................................................................... 10
■ 4.1 Typical Dimensions ...................................................................................................... 10
5. TRANSPORTATION AND UNPACKING .......................................... 11
■ 5.1 Precautions for Transportation ................................................................................... 11
■ 5.2 Precautions for Unpacking.......................................................................................... 11
6. INSTALLATION AND REMOVAL ..................................................... 11
■ 6.1 Installation ..................................................................................................................... 11
7. WIRING AND CONNECTION ........................................................... 12
■ 7.1 Example of Wiring and External Connection ............................................................ 12
■ 7.2 Load Resistance ........................................................................................................... 14
■ 7.3 Specifications of M12-connector Cable (option) ...................................................... 15
8. OPERATION (ENERGIZATION) ....................................................... 16
9. MEASURES AGAINST NOISE ......................................................... 17
■ 9.1 Effects of Noise ............................................................................................................ 17
10. STORAGE ...................................................................................... 17
11. MAINTENANCE .............................................................................. 18
■ 11.1 Maintenance ................................................................................................................ 18
■ 11.2 Zero Adjustment ......................................................................................................... 19
5
TY-ZT11-004A Ver. 3

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