Introduction; Product Overview; Overview; Features - Nagano Keiki ZT11 User Manual

1. INTRODUCTION

Check the specifications of the delivered model. Incorrect pressure range, power supply or output may
cause an accident. Make sure to use a model of the designated specifications in a location that meets
your use conditions and that it is properly wired and installed.

2. PRODUCT OVERVIEW

■ 2.1 Overview
This pressure sensor for the semiconductor industry converts pressure into an electrical signal for
transmission by means of a detector with an evaporated semiconductor strain gauge and a built-in
electronic circuit.
It has better temperature characteristics compared to those of the conventional one, and improves the
ease of use through a zeroing mechanism installed on the case side.
■ 2.2 Features
It is excellent in durability and stability due to use of a widely-proven vapor deposited (SS) sensor

element as well as an integrated structure design from the semiconductor strain gauge, pressure
sensor to pressure connection.
Design to greatly reduce the external leakage with a small dead zone where gas resides.

Absolute pressure range is available in addition to the gauge pressure range for a wide range of

applications.
■ 2.3 Operating Principle
The pressure receiving part of this instrument converts pressure into strain as a diaphragm and the
amount of strain is detected by the semiconductor strain gauge. The detection circuit is a full-bridge
type in which all four sides of the bridge consist of semiconductor strain gauges. The bridge circuit
gives an electric signal proportional to the strain, which is then amplified to a constant value in the
electric circuit and transmitted as direct current.
Amplifier
Circuit
Detector
< Fig. 2-1 >
7 TY-ZT11-004A Ver. 3