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Summary of Contents for Matsusada Precision EJC Series
- Page 1 Instruction Manual EJC SERIES MODEL *036.9.010* Rev. 1.2 B/N 036.9.010...
- Page 2 SAFETY This power supply unit generates high voltage and energy. Electric shock may lead to death or serious injury. Be sure to follow the instructions below and handle the unit with caution. 1. BE SURE TO GROUND!! Be sure to ground the power supply unit before use. 2.
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Page 3: Meanings Of The Symbols
Symbols Various symbols are used in this instruction manual and on the product for ensuring safety. What will be caused by ignoring the instructions given with the symbols or by improper handling are classified as shown below. Read carefully and understand the descriptions before proceeding to the main body of this manual. - Page 4 Caution ！ Do not install the unit upside down or Do not use the unit in a place subject to on a wrong side. high temperature or in an enclosed, Insufficient heat release may cause limited area. deterioration of parts, which may It not only hampers the unit from generate smoke or set fire.
- Page 5 First-aid procedures to be implemented in case of electrical shock RESCUE 1. Free victim from contact with live conductor quickly. Avoid contact with neither live conductor nor victim’s body. 2. Shut off high voltage at once and ground the circuit. If high voltage cannot be turned off quickly, ground the circuit to discharge, or cut high voltage line by an ax with dry wooden handle.
- Page 6 Artificial respiration PLACE VICTIM 2.Clear throat Place victim in face-upward position horizontally. CLEAR THROAT Turn head to one side quickly wipe out any fluid, mucus, or foreign body from mouth and throat with fingers. 3.Open air passage OPEN AIR PASSAGE Tilt head back and extend neck to open air passage.
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Page 7: Warranty Policy
WARRANTY 1. WARRANTY POLICY Matsusada Precision Inc. ("Matsusada") warrants that the products supplied by it will be free from defects in materials and workmanship for a period of twelve (12) months from the date of original shipment to buyer. This warranty shall not apply to any product which has been repaired, modified... - Page 8 １ Introduction 1 Introduction １－１ Introduction Thank you very much for your purchase of our product HIGH VOLTAGE POWER SUPPLY. We have done our best for the quality control of the unit. Please handle this unit properly according to this instruction manual so that you can use the full performance of this unit safely for long.
- Page 9 １ Introduction 1-4 Caution for handling connect the GROUND terminal of the case to earth ・ For your safety, make sure to ・ The earth of case or load shall be grounded at one point on the ground with thick and short wire.(more than 5SQ) ・...
- Page 10 2 Exterior view diagram 2 Exterior view diagram Voltage, Output voltage meter, Current display Current meter change switch REMOTE Local / Remote change switch LOCAL NORMAL Adj. POWER POWER ON/OFF switch REVERSE HV ON/OFF switch Output setting dial Output polarity change switch (-LPo option) Output connector GROUND terminal...
- Page 11 3.Operation Manual 3.Operation manual 3－1 Outline This unit is a handy type high voltage power supply for electrostatic chuck application. 3－2 Operation method 1. Upon confirming the connection made with this unit as specified (Refer to 1-4[HOW TO GROUND]), operate it. Be sure to connect the earth with the ground terminal of the body. 2.
- Page 12 3.Operation Manual Control connector ・・・ D-sub 25S type PIN 7 Output Relay PIN 6 Forced grounding Polarity change PIN 8 PIN 5 Monitor Common Common PIN 9 PIN 4 Output current monitor output HV ON/OFF PIN10 PIN 3 Output voltage monitor output Over current status PIN11 PIN 2 External control voltage common...
- Page 13 3.Operation Manual d. Interlock High voltage output can be cut off with external switch off. For safety reason, once the output is cut off, the unit shall not resume the output even turning the external switch back on. To reset this status, turn the Power switch on after shorting the interlock terminal. Interlock action Interlock action by switch SHORT...
- Page 14 3.Operation Manual g. Output voltage monitor ±10V output for the maximum rated output voltage. Output impedance is 1k ohm. The polarity of monitor output is identical to that of high voltage output. ⑤ ③ Vmoni h. POWER ON status signal Connection of internal relay is on when Power switch is on.
- Page 15 3.Operation Manual k. Forced discharge High voltage output can be compulsory grounded with the function of forced grounding terminal. HV output ＨＶ ⑨ ⑥ Forced ground action Forced ground action by SHORT …… Output Ground switch switch O P E N ……...
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Page 16: Option Function
４ Explanation of optional function ４ Explanation of optional function ４ Option function This product is equipped with features of checked in the table below. Name of option □ Output relay (-LRy) □ ＲＦ filter 13.56MHz (-LRf(13.56M)) □ ＲＦ filter 500kHz (-LRf(500k)) □... - Page 17 ４－２ RF Filter 13.56MHz (LRf (13.56M)) RF filter for 13.56MHz is incorporated at output terminal. ４－３ RF Filter 500kHz (LRf (500k)) RF filter for 500MHz is incorporated at output terminal. ４－５ Polarity change（LPo） When local mode the polarity can be reversed( against polarity of Vcon)with toggle switch on the front panel.
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