Pfeiffer Vacuum TPR 261 Operating Manual

Operating manual
incl. Declaration of conformity
Compact Pirani Gauge
TPR 261
BG 805 105 BE (9909)
Validity
This document applies to products with part number
PT R21 000
(Flange DN 16 ISO-KF
PT R21 001 (Flange DN 16 CF-R
PT R21 010
(Flange DN 16 ISO-KF
PT R21 011
(Flange DN 16 CF-R
The part number can be taken from the product nameplate.
We reserve the right to make technical changes without prior
notice.
Intended use
The above Compact Pirani Gauges have been designed for
vacuum measurement of gases in a pressure range of
-4
5×10 ... 1000 mbar.
The gauge can be operated in connection with a
Pfeiffer Vacuum controller for Compact Gauges or with
another evaluation unit.
Safety
• Take into account the relevant regulations and safety
measures for the process media used.
Consider possible reactions with the materials.
Consider possible reactions of the process media due to
the heat generated by the product.
The end-user assumes the responsibility in conjunction with
the process media used.
Pfeiffer Vacuum assumes no responsibility and the warranty
becomes null and void if the end-user or third parties
• disregard the information in this document
• use the product in a non-conforming manner
• make any kind of changes (modifications, alterations etc.)
to the product
• use the product with accessories not listed in the corre-
sponding product documentation.
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and envi -
ronmental damage.
Note
Information on correct handling or use. Disregard can lead
to malfunctions or minor equipment damage.
Skilled personnel
All work described in this document may only be carried out
by persons who have suitable technical training and the
necessary experience or who have been instructed by the
end-user of the product.
Installation
Vacuum connection
short)
short)
long)
long)
The gauge can be mounted in any orientation. We recom-
mend, however, installing it horizontally because it has been
aligned in this position. In other orientations, deviations of the
measurement value may occur at pressures above 100 mbar.
If adjustment must be possible after the gauge has been in-
stalled, be sure to install it so that trimmer potentiometers
<HV> and <ATM> can be accessed with a screwdriver.
Remove the protective cap.
The protective cap
will be needed for
maintenance.
Make the flange connection.
Note
Caution: vacuum component
Dirt and damages impair the function of the
vacuum component.
When handling vacuum components, take
appropriate measures to ensure cleanliness and
prevent damages.
DANGER
Caution: overpressure in the vacuum system
> 1 bar
If clamps are opened incorrectly or inadvertently,
injury can be caused by catapulted parts and
your health can be endangered by leaking pro-
cess gases.
Use the type of clamps which can only be
opened and closed by means of a tool (e.g. hose
clip clamping ring).
DANGER
Caution: overpressure in the vacuum system
> 4 bar
KF flange connections with elastomer sealing
rings (e.g. O-rings) cannot withstand such pres-
sures. Process media can thus leak and possibly
endanger your health.
Use sealing rings provided with an outer center-
ing ring.
DANGER
The gauge must be electrically connected to the
grounded vacuum chamber. This connection
must conform to the requirements of a protective
connection according to EN 61010:
• CF flanges fulfill this requirement
• For gauges with a KF flange, use a conduc-
tive metallic clamping ring.
Protective cap
Seal
Clamping ring
Power connection
Make sure the gauge is connected to the vacuum system (see
above).
Use with Pfeiffer Vacuum measurement unit
If the gauge is used
with a
Pfeiffer Vacuum
control unit for
Compact Gauges, a
corresponding con-
nection cable is
required (→ Options).
• Secure the con-
nector on the
gauge with the
screw.
Use with another evaluation unit
If no sensor cable is available, make one according to the
diagram.
Figure 1 Electrical connection
Pin 1 identification
Pin 2 signal output
(measuring signal)
Pin 3 signal common
Pin 4 supply (15 ... 30 V=)
Pin 5 supply common
Pin 6 screening
WARNING
Supply common (pin 5) and screen (pin 6) must
be grounded to the supply unit.
Incorrect connection, incorrect polarity or inad-
missible supply voltages can damage the gauge.
Connect the gauge to the supply and evaluation unit.
Secure the connector at the gauge with the screw.
Operation
When voltage is being supplied to the gauge, the measuring
signal is available between pins 2 and 3. Over the whole
measurement range, the measuring signal is output as loga-
rithm of the pressure (relationship between measuring signal
→
and pressure Technical data).
Allow for a stabilization period of approx. 10 minutes. It is
advisable to operate the gauge continuously, independent of
the pressure.
Gas type dependence
The measuring signal depends on the type of gas being
measured. The relationship between measuring signal and
→
pressure ( Technical data) is accurate for N
CO. They can be mathematically converted for other gases
→
( Technical data).
Is the gauge being operated in connection with a
Pfeiffer Vacuum controller for Compact Gauges, a calibration
factor can be applied for correction of the reading (
corresponding controller).
2
3
1
6
4
5
Connector
solder side
, O , dry air and
2 2
&
→
of the