Pfeiffer Vacuum IKR 360 Operating Instructions Manual
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Pfeiffer Vacuum IKR 360 Operating Instructions Manual

Compact cold cathode gauges, compact fullrange gauges
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A P A S S I O N F O R P E R F E C T I O N
IKR 360, IKR 360 C, IKR 361, IKR 361 C
Compact Cold Cathode Gauges
PKR 360. PKR 360 C, PKR 361, PKR 361 C
®
Compact FullRange
Gauges
Operating Instructions

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Summary of Contents for Pfeiffer Vacuum IKR 360

  • Page 1 A P A S S I O N F O R P E R F E C T I O N IKR 360, IKR 360 C, IKR 361, IKR 361 C Compact Cold Cathode Gauges PKR 360. PKR 360 C, PKR 361, PKR 361 C ®...

  • Page 2: Product Identification

    Product Identification In all communications with Pfeiffer Vacuum, please specify the information given on the product nameplate. For convenient reference copy that information into the space provided below. Validity This document applies to products with part numbers: IKR 360 (low current)
  • Page 3 IKR 361 (high current) PT T01 140 010 (DN 25 ISO-KF) PT T01 140 011 (DN 25 ISO-KF, ceramic, IKR 361 C) PT T01 150 010 (DN 40 ISO-KF) PT T01 150 011 (DN 25 ISO-KF, ceramic, IKR 361 C) PT T01 350 010 (DN 40 CF-F) PT T01 350 011...

  • Page 4: Intended Use

    Intended Use IKR 360, IKR 361 The Compact Cold Cathode Gauges IKR 360 and IKR 361 have been designed for vacuum measurement of gases in the pres- sure range of 1×10 … 1×10 mbar. They are intended for operation in connection with a Pfeiffer Vacuum measurement unit for Compact Gauges or with another suitable controller.

  • Page 5: Scope Of Delivery

    Scope of Delivery 1× gauge 1× pin for adjusting settings via buttons (PKR gauges only) 1× Operating Instructions German 1× Operating Instructions English 1× Operating Instructions French Trademark ® FullRange Pfeiffer Vacuum GmbH BG 5164 BEN / A (2016-01)

  • Page 6: Table Of Contents

    Contents Product Identification Validity Intended Use Functional Principle Scope of Delivery Trademark Safety 1.1 Symbols Used 1.2 Personnel Qualifications 1.3 General Safety Instructions 1.4 Liability and Warranty Technical Data 2.1 Output Signal vs. Pressure 2.2 Gas Type Dependence IKR 36x 2.3 Gas Type Dependence PKR 36x Installation 3.1 Vacuum Connection...
  • Page 7 6.3 Troubleshooting Returning the Product Disposal Accessories Spare Parts 10.1 Ignition Aid for IKR 36x and PKR36x 10.2 Ionization chamber for IKR 36x and PKR36x 10.3 Measuring Chamber Cpl. (Spare Sensor) 10.3.1 Measuring Chamber cpl. for IKR 36x 10.3.2 Measuring Chamber cpl. for PKR 36x Conversion Table ETL Certification EC Declaration of Conformity...

  • Page 8: Safety

    Safety Symbols Used DANGER Information on preventing any kind of physical injury. WARNING Information on preventing extensive equipment and environ- mental damage. Caution Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage. Consultation of operating manual required (symbol printed on the product nameplate) Notice <…>...

  • Page 9: General Safety Instructions

    Communicate the safety instructions to all other users. Liability and Warranty Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if the end-user or third parties • disregard the information in this document • use the product in a non-conforming manner •...

  • Page 10: Technical Data

    Technical Data Display range (air, N IKR 36x 1×10 … 1×10 mbar PKR 36x 1×10 … 1000 mbar Measurement range (air, N IKR 36x 1×10 … 1×10 PKR 36x 1×10 … 1000 hPa Accuracy IKR (N 1×10 … 1×10 30% of reading Accuracy PKR (N 1×10 …...
  • Page 11 (PELV) and limited power source (LPS), Class 2. The connection to the gauge has to be fused Pfeiffer Vacuum measurement and control units for Compact Gauges fulfill this requirement. BG 5164 BEN / A (2016-01)
  • Page 12 Supply voltage Class 2 / LPS at the gauge +14.5 … +30 V (dc) Ripple ≤1 V Power consumption ≤2 W Fuse to be connected ≤1 AT High voltage in the measuring chamber Ignition voltage ≤4.5 kV Operating voltage ≤3.3 kV Current in the measuring chamber IKR / PKR 361, High current ≤500 µA...
  • Page 13 Materials exposed to vacuum Vacuum connection stainless steel (1.4435) Measuring chamber stainless steel (1.4435) Pirani filament (PKR 36x) Feedthrough, IKR/PKR 36x Isolation glass, ceramic (Al Ring stainless steel (1.4435) Anode molybdenum Ni alloy Feedthrough, ceramic coated IKR/PKR 36x C Ionization chamber stainless steel Ignition aid stainless steel (1.4310)
  • Page 14 Dimensions [mm] Weight DN 25 ISO-KF <280 g DN 40 ISO-KF <320 g DN 40 CF-F <570 g BG 5164 BEN / A (2016-01)

  • Page 15: Output Signal Vs. Pressure

    Output Signal vs. Pressure IKR 360, IKR 361 (display range 1.5 … 8.5 V) Pressure p 1E+00 1E–01 1E–02 torr 1E–03 1E–04 1E–05 1E–06 1E–07 1E–08 1E–09 1E–10 0.0 0.5 1.0 1.5 10.0 Output signal U [V] (U-c) p = 10 ⇔...
  • Page 16 PKR 360, PKR 361 (display range 1.397 … 8.6 V) Pressure p 1E+04 torr 1E+02 1E+00 1E–02 1E–04 1E–06 1E–08 1E–09 0.0 0.5 10.5 1.217 1.397 Output signal U [V] 1.667U-d p = 10 ⇔ U = c + 0.6 log p valid in the range 1×10 hPa <...

  • Page 17: Gas Type Dependence Ikr 36X

    Gas Type Dependence IKR 36x Indicated pressure (gauge calibrated for air) p [hPa] Xe Kr Ne He –3 –4 –5 –6 –7 –7 –6 –5 –4 –3 –2 [hPa] Indication range below 10 mbar In the range below 10 the pressure indication is linear. For gases other than air, the pressure can be determined by means of a simple conversion formula: = K ×...
  • Page 18 where: Gas type Air (N , CO) These conversion factors are average values. A mixture of gases and vapors is often involved. In this case, accurate determination is only possible with a partial pressure measurement instrument, e.g. a quadrupole mass spectrometer. BG 5164 BEN / A (2016-01)

  • Page 19: Gas Type Dependence Pkr 36X

    Gas Type Dependence PKR 36x Indication range from 10 … 10 (Pirani-only operation) Indicated pressure (gauge calibrated for air) p [hPa] Indication range above 10 Freon 12 –1 Water vapor –2 –3 –2 –1 4 6 8 4 6 8 4 6 8 4 6 8 [hPa]...
  • Page 20 Indication range from 10 … 0.1 hPa Indicated pressure (gauge calibrated for air) p (hPa) –1 Indication range ...10 –2 –3 –4 –5 –6 –6 –5 –4 –3 –2 –1 4 6 8 (hPa) Indication range below 10 mbar In the range below 10 the pressure indication is linear.
  • Page 21 where: Gas type Air (N , CO) These conversion factors are average values. A mixture of gases and vapors is often involved. In this case, accurate determination is only possible with a partial pressure measurement instrument, e.g. a quadrupole mass spectrometer. BG 5164 BEN / A (2016-01)

  • Page 22: Installation

    Installation Vacuum Connection DANGER DANGER: overpressure in the vacuum system >100 kPa Injury caused by released parts and harm caused by escaping process gases can result if clamps are opened while the vacuum system is pressurized. Do not open any clamps while the vacuum system is pressurized.
  • Page 23 DANGER DANGER: protective ground Products that are not correctly connected to ground can be extremely hazardous in the event of a fault. Electrically connect the gauge to the grounded vacuum chamber. This connection must conform to the requirements of a protective connection ac- cording to EN 61010: •...
  • Page 24 Mount the gauge so that no vibrations occur. Vibrations at the gauge cause a deviation of the measured values. The gauge may be mounted in any orientation. To keep conden- sates and particles from getting into the measuring chamber pre- ferably choose a horizontal to upright position.
  • Page 25 When making a CF flange connection, it may be ad- vantageous to temporarily remove the electronics unit. Hexagon socket AF 2 Protective lid Keep the protective lid. WARNING WARNING: electric arcing Helium may cause electric arcing with detrimental effects on the electronics of the product. Before performing any tightness tests put the pro- duct out of operation and remove the electronics unit.

  • Page 26: Power Connection

    • Use differential measurement input (signal common and supply common conducted separately). • Potential difference between supply common and housing ≤6 V (overvoltage protection). Pfeiffer Vacuum controllers fulfill these requirements. BG 5164 BEN / A (2016-01)
  • Page 27 If no sensor cable is available, make one according to the following diagram. Electrical connection Pin 1 Gauge identification Pin 2 Signal output (measuring signal) Pin 3 Signal common Pin 4 Supply (14.5 … 30 V (dc)) Pin 5 Supply common GND Pin 6 Shielding Female cable...

  • Page 28: Operation

    Operation Status Indication IKR Meaning <ST> <HV-ST> No supply voltage lit solid Supply voltage = ok, green no high voltage in the measuring chamber lit solid blinking Supply voltage = ok, yellow green pressure in the cold cathode range, cold cathode has not ignited lit solid lit solid...

  • Page 29: Status Indication Pkr

    Status Indication PKR Supply voltage Error High voltage cold cathode For factory Calibration setting only value Meaning <ST> <HV-ST> No supply voltage lit solid Supply voltage = ok, Pirani active, no green high voltage in the measuring chamber lit solid blinking Supply voltage = ok, yellow...

  • Page 30: Put Ikr 365X Into Operation

    Turn on the gauge only at pressures <10 mbar to prevent excessive contamination. If you are using a Pfeiffer Vacuum measurement unit for Compact Gauges with at least two gauge connections, the cold cathode gauge can be con- trolled, for example, by a Pirani gauge.

  • Page 31: Gas Type Dependence

    . For other gases, it has to be corrected: • (IKR →  17) • (PKR →  19). If the gauge is operated with a Pfeiffer Vacuum controller, a calibration factor for correction of the actual reading can be applied (→ of the corresponding controller).

  • Page 32: Ignition Delay

    Ignition Delay An ignition delay occurs when cold cathode gauges are switched on. The delay time increases at low pressures and for clean, degassed gauges it is typically: 1×10 … 1×10 hPa < 1 second 1×10 … 1×10 hPa <20 seconds 5×10 …...
  • Page 33 Gauge contamination is influenced by the process media used as well as any existing or new contaminants and their respective partial pressures. Continuous operation in the range of mbar ... 10 mbar can cause severe contamination as well as reduced up-time. Contamination of the gauge generally causes a deviation of the measured values: •...

  • Page 34: Deinstallation

    Deinstallation DANGER DANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts. Caution Caution: vacuum component Dirt and damages impair the function of the vac- uum component.
  • Page 35  Remove gauge from the vacuum system and install the protective lid. When deinstalling the CF flange connection, it may be advantageous to temporarily remove the elec- tronics unit (→  25). Seal with centering ring Protective lid Clamp BG 5164 BEN / A (2016-01)

  • Page 36: Maintenance, Repair

    (e.g. ionization chamber, ignition aid, Pirani filament (PKR 36x)), are not covered by the warranty. Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if any repair work is carried out by the end-user or third parties.
  • Page 37 For adjusting the zero, operate the gauge under the same con- stant ambient conditions and in the same mounting orientation as normally.  If you are using a seal with centering ring and filter, check that they are clean or replace them if necessary (→...

  • Page 38: Cleaning The Gauge / Replacing Parts

    Cleaning the Gauge / Replacing Parts In case of severe contamination or defective (e.g. Pirani filament rupture (PKR 36x)), replace the complete measuring chamber (Spare Parts →  50). DANGER DANGER: contaminated parts Contaminated parts can be detrimental to health and environment.

  • Page 39: Troubleshooting (Measuring Chamber)

    DANGER DANGER: cleaning agents Cleaning agents can be detrimental to health and environment. Adhere to the relevant regulations and take the necessary precautions when handling and dis- posing of cleaning agents. Consider possible reactions with the product materials (→  13). Precondition Gauge deinstalled.
  • Page 40  Unfasten the hexagon socket set screw (4) and remove the complete measuring chamber (3) from the electronics unit (5).  Remove the retaining ring (1) as well as the ionization chamber (2) from the measuring chamber (3).  Check the ionization chamber and the measuring chamber for contamination: •...

  • Page 41: Replacing Ionization Chamber And Ignition Aid

     Using an ohmmeter, make following measurements on the contact pins. Measurement Possible cause between pins 1 + 4 39.5 … 40.5 Ω Values Pirani filament (at 20 °C) outside of rupture the range 1 + 2 1000 … 1100 Ω Values Pirani tempera- (at 20 °C)
  • Page 42  We recommend to rub the inside walls of the measuring chamber up to the groove for the retaining ring to a bright finish using a polishing cloth. • The sealing surfaces must only be worked con- centrically. • Do not bend the anode. ...

  • Page 43: Replacing Measuring Chamber

     Carefully slide the measuring chamber cpl. (3) (clean or new) into the electronics unit (5) until the mechanical stop is reached. Pins aligned straight.  Fasten the measuring chamber (3) by means of the hexagon socket set screw (4). 6.2.3 Replacing Measuring Chamber Precondition...
  • Page 44  Set the calibration value of the spare sensor with the <CAL> switch on the electronics unit (5).  Carefully slide the measuring chamber cpl. (3) into the electronics unit (5) until the mechanical stop is reached. Pins aligned straight. BG 5164 BEN / A (2016-01)

  • Page 45: Troubleshooting

     Fasten the measuring chamber (3) by means of the hexagon socket set screw (4).  PKR 36x gauge only: Perform an ATM and HV adjustment of the Pirani measuring circuit via the <ADJ> button (→  37). A recalibration of the PKR 36x gauge is not neces- sary.
  • Page 46 BG 5164 BEN / A (2016-01)
  • Page 47 BG 5164 BEN / A (2016-01)

  • Page 48: Returning The Product

    Contaminated products (e.g. radioactive, toxic, caustic or microbiological hazard) can be detrimen- tal to health and environment. Products returned to Pfeiffer Vacuum should pre- ferably be free of harmful substances. Adhere to the forwarding regulations of all involved countries and forwarding companies and enclose a duly completed declaration of contamination Form under www.pfeiffer-vacuum.com...

  • Page 49: Disposal

    Disposal DANGER DANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant re- gulations and take the necessary precautions when handling contaminated parts. WARNING WARNING: substances detrimental to the environ- ment...

  • Page 50: Accessories

    Accessories Ordering No. Connection cable for Pfeiffer Vacuum measurement unit for Compact Gauges: PT 448 250 -T PT 448 251 -T 10 m PT 448 252 -T Connection socket Hirschmann GO6 WF, B 4707 283 MA 6-pin, angled, female Spare Parts When ordering spare parts, always indicate: •...

  • Page 51: Measuring Chamber Cpl. (Spare Sensor)

    10.3 Measuring Chamber Cpl. (Spare Sensor) The measuring chamber cpl. is pre-assembled. Measuring chamber Ionization chamber Retaining ring 10.3.1 Measuring Chamber cpl. for IKR 36x Ordering No. PT T00 140 010 PT 120 300 -T DN 25 ISO-KF PT T01 140 010 PT T00 150 010 PT 120 304 -T DN 40 ISO-KF...

  • Page 52: 10.3.2 Measuring Chamber Cpl. For Pkr 36X

    10.3.2 Measuring Chamber cpl. for PKR 36x Ordering No. PT T02 140 010 PT 120 302 -T DN 25 ISO-KF PT T03 140 010 PT T02 150 010 PT 120 306 -T DN 40 ISO-KF PT T03 150 010 PT T02 350 010 PT 120 310 -T DN 40 CF-F PT T03 350 010...

  • Page 53: Etl Certification

    ETL Certification RECOGNIZED ETL LISTED COMPONENT The products IKR 360, IKR 360 C, IKR 361, IKR 361 C, PKR 360, PKR 360 C, PKR 361, PKR 361 C • conform to the UL Standard UL 61010-1 • are certified to the CAN/CSA Standard 3103457 C22.2 No.

  • Page 54: Ec Declaration Of Conformity

    2004/108/EC and the Directive on the restriction of the use of certain hazardous substances in electrical and electronic equipment 2011/65/EU. Compact Cold Cathode Gauges IKR 360, IKR 360 C, IKR 361, IKR 361 C ® Compact FullRange Gauges...
  • Page 55 Notes BG 5164 BEN / A (2016-01)
  • Page 56 A P A S S I O N F O R P E R F E C T I O N Vacuum solutions Pfeiffer Vacuum stands for innovative and custom from a single source vacuum solutions worldwide, technological perfection, competent advice and reliable service.

This manual is also suitable for:

Ikr 360 cIkr 361Ikr 361 cPkr 360Pkr 360 cPkr 361 ... Show all

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